CN204052940U - A kind of the Aerostatic Spindle with turn error monitoring function - Google Patents

A kind of the Aerostatic Spindle with turn error monitoring function Download PDF

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Publication number
CN204052940U
CN204052940U CN201420488155.XU CN201420488155U CN204052940U CN 204052940 U CN204052940 U CN 204052940U CN 201420488155 U CN201420488155 U CN 201420488155U CN 204052940 U CN204052940 U CN 204052940U
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China
Prior art keywords
hole
aerostatic
gas collection
thrust
main shaft
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Withdrawn - After Issue
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CN201420488155.XU
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Chinese (zh)
Inventor
赵鼎成
王文
张敏
袁科杰
诸丽燕
崔学广
卢科青
范宗尉
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Hangzhou Dianzi University
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Hangzhou Dianzi University
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Publication of CN204052940U publication Critical patent/CN204052940U/en
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Abstract

The utility model discloses a kind of the Aerostatic Spindle with turn error monitoring function.If do not carry out turn error on-line monitoring to high-precision main shaft, best crudy can not be reached.In the utility model two aerostatic bearings each battery lead plate mounting groove in be provided with a slice arc-shaped electrode plate; The periphery of aerostatic bearing offers two passage groups, and inner face offers cannelure and circumferential multiple thrust hole; Passage group comprises multiple passage; Passage comprises gas collection hole, pressurized hole and pressure stable hole; All gas collection holes of two passage groups are all communicated with cannelure; Each gas collection hole of one of them passage group is communicated with the inner in a corresponding thrust hole; The outer end in all thrust holes is all equipped with flow controller.Main shaft, aerostatic bearing and cylindrical capacitive sensor are integrated in one by the utility model, can carry out turn error on-line monitoring, compensation to main shaft.

Description

A kind of the Aerostatic Spindle with turn error monitoring function
Technical field
The utility model belongs to super-precision machine tools field, relates to a kind of the Aerostatic Spindle, is specifically related to the Aerostatic Spindle with turn error monitoring function.
Background technology
Along with Modern Manufacturing Technology improving constantly requirement on machining accuracy, super-precision machine tools obtains and develops rapidly.High-precision main shaft becomes popular research contents especially as the core component of super-precision machine tools.In all kinds of main shaft, the Aerostatic Spindle has obtained by means of its feature such as high accuracy, low friction and has paid close attention to widely.But the kinematic accuracy of main shaft depends on many-sided factor, comprises the Static stiffness of main shaft, dynamic stiffness, hot rigidity etc.Want to obtain high-precision motion of main shaft precision, except adopting a series of measures, (as adopted high-precision bearing, good dynamic balancing etc.) reaches except high-precision scheme, another both economical, effective scheme is the rotating accuracy of on-line monitoring main shaft, implements online compensation to improve the kinematic accuracy of main shaft to monitoring result.If do not carry out turn error on-line monitoring to high-precision main shaft, it can not be issued to best crudy at desirable processing conditions, let alone further for machine tooling compensatory control, judge to produce the reason of mismachining tolerance and the condition monitoring and fault diagnosis etc. of main shaft.
Summary of the invention
The purpose of this utility model is for the deficiencies in the prior art, a kind of the Aerostatic Spindle with turn error monitoring function is provided, main shaft, aerostatic bearing and the cylindrical capacitive sensor with turn error monitoring function are integrated in one, define a set of the Aerostatic Spindle system with turn error on-line monitoring and compensate function, turn error on-line monitoring, compensation can be carried out to main shaft, improve precision, the rigidity of the Aerostatic Spindle.
The utility model comprises cylindrical capacitive sensor, aerostatic bearing, flow controller, sealing-plug and main shaft.The middle part of described main shaft is provided with integrated thrust button; Described aerostatic bearing offers spindle mounting hole in center; The outer end hole wall of spindle mounting hole offers the multiple battery lead plate mounting grooves be uniformly distributed along the circumference; Described cylindrical capacitive sensor comprises multi-disc arc-shaped electrode plate, and the quantity of arc-shaped electrode plate is equal with the quantity of battery lead plate mounting groove; Be provided with a slice arc-shaped electrode plate in each battery lead plate mounting groove of two aerostatic bearings, the both ends of the surface of arc-shaped electrode plate are connected with the two side of counter electrode plate mounting groove respectively; The two ends of described main shaft are nested with respectively in the spindle mounting hole of two aerostatic bearings; The both ends of the surface of described thrust button are oppositely arranged with the inner face of an aerostatic bearing respectively, and are equipped with gap; Two described aerostatic bearings are connected by screw.
The periphery of described aerostatic bearing offers two passage groups vertically, and inner face offers cannelure and circumferential multiple thrust hole; The cannelure of two aerostatic bearings is communicated with; Described passage group comprises and being uniformly distributed along the circumference and quantity multiple passages equal with thrust hole; Described passage is arranged along the radial direction of aerostatic bearing, comprises gas collection hole, pressurized hole and pressure stable hole; The outer end opening of described gas collection hole is in the periphery of aerostatic bearing; The two ends of described pressurized hole are communicated with the inner of pressure stable hole with the inner of gas collection hole respectively; The outer end opening of described pressure stable hole is in the hole wall of spindle mounting hole; A gas collection hole in two passage groups is air admission hole, and the top of all the other all gas collection holes is provided with sealing-plug; All gas collection holes of two passage groups are all communicated with cannelure; Each gas collection hole of one of them passage group is communicated with the inner in a corresponding thrust hole; The outer end in all thrust holes is all equipped with flow controller.
The opposite face of the hole wall of the periphery of described main shaft, the spindle mounting hole of aerostatic bearing, the both ends of the surface of thrust button, aerostatic bearing and thrust button is Ultra-precision Turning face.
The beneficial effects of the utility model are:
1, main shaft, aerostatic bearing and the cylindrical capacitive sensor with turn error monitoring function are integrated in one by the utility model, define a set of the Aerostatic Spindle system with turn error on-line monitoring and compensate function, its energy Real-time Obtaining spindle rotation error signal, and Real-time Feedback and compensation are carried out to the spindle motion error of lathe, improve the machining accuracy of lathe.
2, the utility model just can realize radial hydrostatic support to main shaft two ends and axial thrust function by symmetrically arranged two aerostatic bearings; Compact conformation, easy for installation, assembling is simple and error is little, accuracy of detection is high.
3, cannelure of the present utility model ensure that the atmospheric pressure of input flow controller is equal, stable.
Accompanying drawing explanation
Fig. 1 is overall structure sectional view of the present utility model;
Fig. 2 is side view of the present utility model;
Fig. 3 is the sectional view of aerostatic bearing in the utility model;
Fig. 4 is the B place partial enlarged view of Fig. 1.
Detailed description of the invention
Below in conjunction with drawings and Examples, the utility model is described in further detail.
As shown in Figure 1,2 and 3, a kind of the Aerostatic Spindle with turn error monitoring function, comprises cylindrical capacitive sensor, aerostatic bearing 2, flow controller 3, sealing-plug 4, main shaft 5 and screw 6.The middle part of main shaft 5 is provided with integrated thrust button 5-1; Aerostatic bearing 2 offers spindle mounting hole 2-1 in center; The outer end hole wall of spindle mounting hole 2-1 offers four the battery lead plate mounting groove 2-2 be uniformly distributed along the circumference; Cylindrical capacitive sensor comprises four arc-shaped electrode plate 1-1; Be provided with a slice arc-shaped electrode plate 1-1 in each battery lead plate mounting groove 2-2 of two aerostatic bearings 2, the both ends of the surface of arc-shaped electrode plate 1-1 are connected with the two side of counter electrode plate mounting groove 2-2 respectively; The two ends of main shaft 5 are nested with respectively in the spindle mounting hole 2-1 of two aerostatic bearings; The both ends of the surface of thrust button 5-1 are oppositely arranged with the inner face of an aerostatic bearing 2 respectively, and are equipped with gap; Two aerostatic bearings 2 are connected by screw 6; Two aerostatic bearings 2 rely on static air pressure to support and thrust main shaft 5, and main shaft 5 relative atmospheric hydrostatic bearing 2 is rotated.
As shown in Figures 3 and 4, the periphery of aerostatic bearing 2 offers two passage groups vertically, and inner face offers cannelure 2-3 and circumferential ten thrust hole 2-4; The cannelure 2-3 of two aerostatic bearings 2 is communicated with; Passage group comprises ten passages be uniformly distributed along the circumference; Passage is arranged along the radial direction of aerostatic bearing 2, comprises gas collection hole 2-5, pressurized hole 2-6 and pressure stable hole 2-7; The outer end opening of gas collection hole 2-5 is in the periphery of aerostatic bearing 2; The two ends of pressurized hole 2-6 are communicated with the inner of pressure stable hole 2-7 with the inner of gas collection hole 2-5 respectively; The outer end opening of pressure stable hole 2-7 is in the hole wall of spindle mounting hole 2-1; A gas collection hole 2-5 in two passage groups is air admission hole 2-8, and the top of all the other all gas collection hole 2-5 is provided with sealing-plug 4; All gas collection hole 2-5 of two passage groups are all communicated with cannelure 2-3; Each gas collection hole of one of them passage group is communicated with the inner of a corresponding thrust hole 2-4; The outer end of all thrust hole 2-4 is all equipped with flow controller 3.
The hole wall of the periphery of main shaft 5, the spindle mounting hole 2-1 of aerostatic bearing 2, the both ends of the surface of thrust button 5-1, aerostatic bearing 2 are Ultra-precision Turning face with the opposite face of thrust button 5-1.
This has the operation principle of the Aerostatic Spindle of turn error monitoring function:
Pressure-air enters in respective cannelure 2-3 respectively by the air admission hole 2-8 of two aerostatic bearings; Pressure-air in cannelure 2-3 branches in the gas collection hole 2-5 of each passage, main shaft 5 is sprayed onto with the gap of spindle mounting hole 2-1 after pressurized hole 2-6 supercharging and pressure stable hole 2-7 voltage stabilizing, form the pressure air film with bearing value, thus realize the radial support of aerostatic bearing 2 pairs of main shafts 5; The passage group at main shaft 5 two ends is symmetrical arranged, and main shaft 5 two ends force in radial balances mutually; The passage of each passage group is uniformly distributed along the circumference, and make often to locate pressure air film and be uniformly distributed along the circumference of main shaft 5, pressure air film is stablized.The gas collection hole be communicated with thrust hole 2-4 is by partial high pressure air flow push hole 2-4 to end, and spray to thrust button 5-1, thus between thrust button 5-1 and the opposite face of aerostatic bearing 2, form enclosed thrust air film, can axial load be born, realize the function of aerostatic bearing 2 axial thrust; The thrust hole 2-4 at thrust button 5-1 two ends is symmetrical arranged, and makes the axial thrust power at two aerostatic bearings, 2 pairs of thrust button 5-1 two ends equal; Ten thrust hole 2-4 of aerostatic bearing 2 are uniformly distributed along the circumference, and can avoid thrust button 5-1 circumferentially unbalance stress, cause main shaft 5 to be beated.
Power intake and the output of main shaft 5 are all equipped with cylindrical capacitive sensor, and every two pieces of relative arc-shaped electrode plate 1-1 are as an electric capacity; When main shaft 5 rotates, two cylindrical capacitive sensor can not only monitor the run-out error of main shaft 5, can also monitor the offset error of main shaft, and the timely lathe that error signal fed back to carries out processing compensation, and then improve the machining accuracy of lathe.

Claims (2)

1. there is a Aerostatic Spindle for turn error monitoring function, comprise cylindrical capacitive sensor, aerostatic bearing, flow controller, sealing-plug and main shaft, it is characterized in that:
The middle part of described main shaft is provided with integrated thrust button; Described aerostatic bearing offers spindle mounting hole in center; The outer end hole wall of spindle mounting hole offers the multiple battery lead plate mounting grooves be uniformly distributed along the circumference; Described cylindrical capacitive sensor comprises multi-disc arc-shaped electrode plate, and the quantity of arc-shaped electrode plate is equal with the quantity of battery lead plate mounting groove; Be provided with a slice arc-shaped electrode plate in each battery lead plate mounting groove of two aerostatic bearings, the both ends of the surface of arc-shaped electrode plate are connected with the two side of counter electrode plate mounting groove respectively; The two ends of described main shaft are nested with respectively in the spindle mounting hole of two aerostatic bearings; The both ends of the surface of described thrust button are oppositely arranged with the inner face of an aerostatic bearing respectively, and are equipped with gap; Two described aerostatic bearings are connected by screw;
The periphery of described aerostatic bearing offers two passage groups vertically, and inner face offers cannelure and circumferential multiple thrust hole; The cannelure of two aerostatic bearings is communicated with; Described passage group comprises and being uniformly distributed along the circumference and quantity multiple passages equal with thrust hole; Described passage is arranged along the radial direction of aerostatic bearing, comprises gas collection hole, pressurized hole and pressure stable hole; The outer end opening of described gas collection hole is in the periphery of aerostatic bearing; The two ends of described pressurized hole are communicated with the inner of pressure stable hole with the inner of gas collection hole respectively; The outer end opening of described pressure stable hole is in the hole wall of spindle mounting hole; A gas collection hole in two passage groups is air admission hole, and the top of all the other all gas collection holes is provided with sealing-plug; All gas collection holes of two passage groups are all communicated with cannelure; Each gas collection hole of one of them passage group is communicated with the inner in a corresponding thrust hole; The outer end in all thrust holes is all equipped with flow controller.
2. a kind of the Aerostatic Spindle with turn error monitoring function according to claim 1, is characterized in that: the opposite face of the hole wall of the periphery of described main shaft, the spindle mounting hole of aerostatic bearing, the both ends of the surface of thrust button, aerostatic bearing and thrust button is Ultra-precision Turning face.
CN201420488155.XU 2014-08-27 2014-08-27 A kind of the Aerostatic Spindle with turn error monitoring function Withdrawn - After Issue CN204052940U (en)

Priority Applications (1)

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CN201420488155.XU CN204052940U (en) 2014-08-27 2014-08-27 A kind of the Aerostatic Spindle with turn error monitoring function

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201420488155.XU CN204052940U (en) 2014-08-27 2014-08-27 A kind of the Aerostatic Spindle with turn error monitoring function

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CN204052940U true CN204052940U (en) 2014-12-31

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104190959A (en) * 2014-08-27 2014-12-10 杭州电子科技大学 Air static pressure spindle with rotary error monitoring function
CN111927886A (en) * 2020-07-15 2020-11-13 杭州电子科技大学 AACMM high-precision joint based on static pressure air bearing and supporting method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104190959A (en) * 2014-08-27 2014-12-10 杭州电子科技大学 Air static pressure spindle with rotary error monitoring function
CN104190959B (en) * 2014-08-27 2016-07-06 杭州电子科技大学 There is the Aerostatic Spindle of turn error monitoring function
CN111927886A (en) * 2020-07-15 2020-11-13 杭州电子科技大学 AACMM high-precision joint based on static pressure air bearing and supporting method thereof

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C14 Grant of patent or utility model
GR01 Patent grant
AV01 Patent right actively abandoned

Granted publication date: 20141231

Effective date of abandoning: 20160706

AV01 Patent right actively abandoned

Granted publication date: 20141231

Effective date of abandoning: 20160706

C25 Abandonment of patent right or utility model to avoid double patenting