CN204008531U - 一种具有绝热沟槽的mems气体传感器 - Google Patents
一种具有绝热沟槽的mems气体传感器 Download PDFInfo
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- CN204008531U CN204008531U CN201420400403.0U CN201420400403U CN204008531U CN 204008531 U CN204008531 U CN 204008531U CN 201420400403 U CN201420400403 U CN 201420400403U CN 204008531 U CN204008531 U CN 204008531U
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 15
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 12
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
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CN201420400403.0U CN204008531U (zh) | 2014-07-18 | 2014-07-18 | 一种具有绝热沟槽的mems气体传感器 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104165902A (zh) * | 2014-07-18 | 2014-11-26 | 苏州能斯达电子科技有限公司 | 一种具有绝热沟槽的mems气体传感器及其加工方法 |
CN104374886A (zh) * | 2014-12-17 | 2015-02-25 | 哈尔滨理工大学 | 一种渗b半导体加热温湿度自补偿气体集成传感器 |
CN110057869A (zh) * | 2018-01-18 | 2019-07-26 | 中国科学院过程工程研究所 | 一种半导体气敏传感器及其制备方法 |
CN111689457A (zh) * | 2020-06-05 | 2020-09-22 | 西安电子科技大学 | 基于温度补偿结构的气体传感器 |
US10823692B2 (en) | 2015-10-06 | 2020-11-03 | Carrier Corporation | MEMS die with sensing structures |
-
2014
- 2014-07-18 CN CN201420400403.0U patent/CN204008531U/zh not_active Expired - Lifetime
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104165902A (zh) * | 2014-07-18 | 2014-11-26 | 苏州能斯达电子科技有限公司 | 一种具有绝热沟槽的mems气体传感器及其加工方法 |
CN104374886A (zh) * | 2014-12-17 | 2015-02-25 | 哈尔滨理工大学 | 一种渗b半导体加热温湿度自补偿气体集成传感器 |
US10823692B2 (en) | 2015-10-06 | 2020-11-03 | Carrier Corporation | MEMS die with sensing structures |
CN110057869A (zh) * | 2018-01-18 | 2019-07-26 | 中国科学院过程工程研究所 | 一种半导体气敏传感器及其制备方法 |
CN111689457A (zh) * | 2020-06-05 | 2020-09-22 | 西安电子科技大学 | 基于温度补偿结构的气体传感器 |
CN111689457B (zh) * | 2020-06-05 | 2023-03-10 | 西安电子科技大学 | 基于温度补偿结构的气体传感器 |
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Inventor after: Shen Fangping Inventor after: Qi Mingfeng Inventor after: Liu Rui Inventor after: Ding Haiyan Inventor after: Gu Wen Inventor before: Shen Fangping Inventor before: Zhang Ting Inventor before: Qi Mingfeng Inventor before: Liu Rui Inventor before: Ding Haiyan Inventor before: Gu Wen |
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