CN203964868U

CN203964868U - The vibrationproof code-reading apparatus of absolute grating scale

Info

Publication number: CN203964868U
Application number: CN201420212775.0U
Authority: CN
Inventors: 陈新度; 王志锋; 陈新; 王晗
Original assignee: Guangdong University of Technology
Current assignee: Guangdong University of Technology
Priority date: 2014-04-28
Filing date: 2014-04-28
Publication date: 2014-11-26
Anticipated expiration: 2024-04-28

Abstract

The utility model is a kind of vibrationproof code-reading apparatus of absolute grating scale.Include CMOS/CCD sensor array for gathering absolute grating striped and correction increment striped, with the optical amplification system of microlens array, for the auxiliary absolute grating scale with absolute encoding and correction increment striped, FPGA driver element, DSP graphics processing unit, the rectification building-out unit of proofreading and correct direction of vibration and measurement.The absolute grating scale that the utility model adopts is the dicode road grating scale of the correction increment code coding of the high precision specific coding that is arranged in juxtaposition and low precision, by FPGA, drive four unit of CMOS/CCD sensor array to gather image simultaneously, and the correction increment code in contrast images obtains effective direction of vibration in an orderly manner, and carry out compensating motion by motion correction compensating unit, make binary encoding clear picture, effectively improve correct reading code rate, realized high-acruracy survey.

Description

The vibrationproof code-reading apparatus of absolute grating scale

Technical field

The utility model is a kind of vibrationproof code-reading apparatus of processing the absolute grating scale of the image that high precision grating scale gathers under vibration effect, belongs to the innovative technology of the vibrationproof code-reading apparatus of absolute grating scale.

Background technology

At modern machine, add in industry, because grating scale can be carried out closed-loop control to system, improve machining precision, grating sensor becomes the main linear feedback element of middle-grade numerically controlled lathe in this field.But traditional grating scale relies on merely Grating glass to read positional information, reliability is lower, impact, particularly vibration factor that precision is subject to the factors such as grating scale linearity, rigidity, temperature, vibration have a significant impact collecting the whether clear of coded image.

Subduing at present vibration is mainly the image processing field that concentrates on camera on the technology of the impact of image, and current main two kinds of processing modes are electronic image stabilizator and optical image stabilizer.Wherein, electronic image stabilizator is processed based on software, has shortcomings such as easily causing image degradation, processing time length.And optical image stabilizer is sensor by being arranged on camera lens or body, detect its vibration or direction of motion, can not cause deterioration of image quality, but Existence dependency hardware condition and high in cost of production shortcoming.

Summary of the invention

The purpose of this utility model is to provide a kind of vibrationproof code-reading apparatus of absolute grating scale.The utility model can detect vibration grating scale is collected to the impact effect of image, and effective compensation COMS/CCD sensor array collects image effect, reaches image stabilization collection, thereby realizes displacement measurement accurately.

The technical solution of the utility model is: the vibrationproof code-reading apparatus of absolute grating scale of the present utility model, include for gathering the CMOS/CCD sensor array of absolute grating striped and correction increment striped, optical amplification system with microlens array, for the auxiliary absolute grating scale with absolute encoding and correction increment striped of proofreading and correct direction of vibration and measurement, FPGA driver element, DSP graphics processing unit, rectification building-out unit, wherein with the optical amplification system of microlens array, be placed in the top of absolute grating scale, CMOS/CCD sensor array is 2x2 matrix and is arranged on CMOS/CCD sensor fixation plate, and be placed on the position of enlarged image information of optical amplification system, and CMOS/CCD sensor fixation plate is installed on rectification building-out unit by spherical hinge, and using several piezoelectric ceramic pieces as mechanism supports point, the absolute encoding of absolute grating scale and correction increment striped amplify by optical amplification system and are imaged on CMOS/CCD sensor array and list, FPGA driver module is connected with FPGA driver element and DSP graphics processing unit.

The utility model is because employing includes for gathering the CMOS/CCD sensor array of absolute grating striped and correction increment striped, optical amplification system with microlens array, for the auxiliary absolute grating scale with absolute encoding and correction increment striped of proofreading and correct direction of vibration and measurement, FPGA driver element, DSP graphics processing unit, the structure of rectification building-out unit, by FPGA, drive CMOS/CCD sensor array to gather image, and utilize the characteristic of corresponding piezoelectric ceramic piece energising distortion to produce contrary deformation, compensation vibration impact, thereby obtain coded image clearly.In addition, the utility model weakens the improper operational process mechanical vibration that cause of mechanical erection with mechanical damper mechanism, and the vibration effect while coming compensation CMOS/ccd sensor array to gather image by rectification building-out unit, the utility model is that a kind of design is ingenious, measuring accuracy is high, the vibrationproof code-reading apparatus of convenient and practical absolute grating scale.

Accompanying drawing explanation

Fig. 1 is the member picture group of code-reading apparatus of the present utility model;

Fig. 2 is the stereographic map of rectification building-out module of the present utility model;

Fig. 3 is the front view of rectification building-out module of the present utility model;

Fig. 4 is the absolute encoding of absolute grating scale of the present utility model and the schematic diagram of proofreading and correct striped.

Embodiment

Embodiment:

The vibrationproof code-reading apparatus that a kind of grating scale of the present utility model is new, its member picture group as shown in Figure 1, include for gathering the CMOS/CCD sensor array 1～4 of absolute grating striped and correction increment striped, optical amplification system 6 with microlens array 5, for the auxiliary absolute grating scale 9 with absolute encoding 7 and correction increment striped 8 of proofreading and correct direction of vibration and measurement, FPGA driver element 10, DSP graphics processing unit 11, rectification building-out unit 12, wherein with the optical amplification system 6 of microlens array 5, be placed in the top of absolute grating scale 9, CMOS/CCD sensor array 1～4 is 2x2 matrix and is arranged on CMOS/CCD sensor fixation plate 14, and be placed on the position of enlarged image information of optical amplification system 6, and CMOS/CCD sensor fixation plate 14 is installed on rectification building-out unit 12 by spherical hinge 15, and using 4 piezoelectric ceramic pieces 16～19 as mechanism supports point, the absolute encoding 7 of absolute grating scale 9 and correction increment striped 8 amplify by optical amplification system 6 and are imaged on CMOS/CCD sensor array 1～4, FPGA driver module 10 is connected with FPGA driver element 10 and DSP graphics processing unit 11.FPGA driver module 10 drives four unit of CMOS/CCD sensor array 1～4 to be captured in same vibration vector simultaneously to be affected Xia tetra-road light and forms four width images, four width images are delivered to DSP data processing unit 11, the four width images that 11 pairs of DSP data processing units collect are processed, obtain the oscillating component of two quadratures of vibration, and then oscillating component is passed to rectification building-out unit 12, by its driving mechanism, compensated, and when completing, compensation drive at once one of them CMOS/CCD sensor array to gather and reading code absolute grating scale, thereby obtain a positional information accurately.

In the present embodiment, the coded system of above-mentioned absolute grating scale 9 is to use bright fringe representative " 1 ", and the light and shade striped of dark fringe representative " 0 " is encoded.

In the present embodiment, the absolute encoding 7 of above-mentioned absolute grating scale 9 adopts binary pseudo-random sequence code, an absolute position of the unique sign grating scale of each basic code.

In the present embodiment, the coding of the correction increment striped 8 of above-mentioned absolute grating scale 9 is light and dark " 01 " sequence codes, and the length that can increase corresponding striped after fix N stripe is for home position, in addition, two parallel travers on the basis of above-mentioned striped, how have been carved, wherein, longitudinal stripe and travers are orthogonal.

In the present embodiment, above-mentioned CMOS/CCD sensor array 1～4 is matrix distribution, and each CMOS/CCD sensor array 1～4 is consistent to the height on absolute grating scale 9 code channels, and each CMOS/CCD sensor array 1～4 each other side by side.

The lenticular arrangement of the above-mentioned optical amplification system 6 with microlens array 5, according to the arrangement of CMOS/CCD sensor array, guarantees that each CMOS/CCD sensor array 1～4 is consistent to the focal length of lenslet unit corresponding to lens.

In addition, the high-accuracy grating scale rapid measurement device of the utility model is also provided with mechanical damper unit 13, machinery damper unit 13 is the flexible anti-vibration unit that are installed on high-accuracy grating scale rapid measurement device bottom surface, includes spring device and is filled in spring device flexible material around.In addition, above-mentioned mechanical damper unit 13 also can be installed on other places of high-accuracy grating scale rapid measurement device, or is installed on lathe or other places, and mechanical damper unit 13 is mechanical damper mechanisms of whole detection system.Vibration damping mode of the present utility model, based on grand micro-compound thought, by the correction increment striped acquisition vibration vector of starting with, and then compensates and obtains clear coded image.The mechanical damper mechanism that utilization is comprised of spring cushion or other flexible anti-vibration materials weakens macroscopical vibration, then is affected by vibration correction compensating module counteracting microscopic vibration.

Claims

1. the vibrationproof code-reading apparatus of an absolute grating scale, it is characterized in that including for gathering the CMOS/CCD sensor array (1～4) of absolute grating striped and correction increment striped, the optical amplification system (6) of band microlens array (5), for the auxiliary absolute grating scale (9) with absolute encoding (7) and correction increment striped (8) of proofreading and correct direction of vibration and measurement, FPGA driver element (10), DSP graphics processing unit (11), rectification building-out unit (12), wherein with the optical amplification system (6) of microlens array (5), be placed in the top of absolute grating scale (9), CMOS/CCD sensor array (1～4) is 2x2 matrix and is arranged on CMOS/CCD sensor fixation plate (14), and be placed on the position of enlarged image information of optical amplification system (6), and CMOS/CCD sensor fixation plate (14) is installed on rectification building-out unit (12) by spherical hinge (15), and using several piezoelectric ceramic pieces (16～19) as mechanism supports point, the absolute encoding (7) of absolute grating scale (9) and correction increment striped (8) amplify by optical amplification system (6) and are imaged on CMOS/CCD sensor array (1～4), FPGA driver module (10) is connected with FPGA driver element (10) and DSP graphics processing unit (11).

2. the vibrationproof code-reading apparatus of absolute grating scale according to claim 1, it is characterized in that above-mentioned CMOS/CCD sensor array (1～4) is matrix distribution, each CMOS/CCD sensor array (1～4) is consistent to the height on absolute grating scale (9) code channel, and each CMOS/CCD sensor array (1～4) each other side by side.

3. the vibrationproof code-reading apparatus of absolute grating scale according to claim 1, it is characterized in that the lenticular arrangement of optical amplification system (6) of above-mentioned band microlens array (5) is according to the arrangement of CMOS/CCD sensor array, guarantee that each CMOS/CCD sensor array (1～4) is consistent to the focal length of lenslet unit corresponding to lens.

4. according to the vibrationproof code-reading apparatus of the absolute grating scale described in claims 1 to 3 any one, it is characterized in that high-accuracy grating scale rapid measurement device is also provided with mechanical damper unit (13), machinery damper unit (13) is the flexible anti-vibration unit that is installed on high-accuracy grating scale rapid measurement device bottom surface, includes spring device and is filled in spring device flexible material around.