CN203906330U - Embedded molecular pump with pressure ratio capable of being measured - Google Patents
Embedded molecular pump with pressure ratio capable of being measured Download PDFInfo
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- CN203906330U CN203906330U CN201420295835.XU CN201420295835U CN203906330U CN 203906330 U CN203906330 U CN 203906330U CN 201420295835 U CN201420295835 U CN 201420295835U CN 203906330 U CN203906330 U CN 203906330U
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- molecular pump
- level
- pressure
- pressure measurement
- groove
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Abstract
The utility model provides an embedded molecular pump with the pressure ratio capable of being measured. The embedded molecular pump comprises a shell and a rotor. The top of the shell is provided with an end face flange. A first level molecular pump body is arranged between the shell and the rotor. The top of the first level molecular pump body is connected with a third level molecular pump body of a plate shape. A second level molecular pump body is installed in an assembling groove of the third level molecular pump body. The end face flange is connected with the third level molecular pump body. An inlet pressure measuring device is arranged on the outer side of the lower portion of the shell. The top end of the end face flange is connected with an outlet pressure measuring device of the first level molecular pump body, a second level outlet pressure measuring device and a third level outlet pressure measuring device. The embedded molecular pump is simple in structure and easy to machine and assemble, the feasibility of measuring the pressure of an outlet of the third level molecular pump body can be ensured, and the problem of continuous pressure guiding is solved; moreover, the risks of breakage, air leakage, blocking and the like are avoided in the pressure guiding process; meanwhile, the problem that a pressure guiding pipe penetrates out from the interior of a machine and can not be sealed is solved, and a safety protecting device can work normally without being influenced in the normal working process.
Description
Technical field
The utility model belongs to a kind of molecular pump, is specifically related to a kind of embedded molecular pump that can pressure measurement ratio.
Background technique
Molecular drag pump is to rely on the rotor of gas molecule and high-speed motion collide and obtain momentum, thereby gas molecule is driven and delivers to delivery side of pump.
The situation of change of towed molecular pump inlet and outlet pressure and compression ratio (ratio of inlet and outlet pressure) can reflect working state and the pumping performance of this device intuitively, and therefore real-time measurement tool in the development process of this device of molecular pump inlet and outlet pressures at different levels is of great significance.General molecular pump equipment is found time to it after only connecting with device at present, but it is found time, effect is poor, especially when certain rotatable parts need High Rotation Speed and then require under state that its ambient pressure is extremely low, cannot meet the requirement of finding time, so that power of motor cannot further reduce at all.Therefore need to design a set of molecular pump molecular pump inlet and outlet pressures at different levels in the towed molecular pump of flush mounting inside for example with specific (special) requirements of both can having measured, again the molecular pump of this body structure of breaking plant not.
Summary of the invention
The utility model is for the defect that overcomes prior art and exist proposes, and its objective is a kind of embedded molecular pump that can pressure measurement ratio is provided.
The technical solution of the utility model is: a kind of embedded molecular pump that can pressure measurement ratio, comprise housing, rotor is installed in housing, at the top of housing, be provided with end face flange, between housing and rotor, be provided with first order molecular pump, the interference of first order molecular pump top connects plate-like third level molecular pump, in the fitting recess of third level molecular pump, interference connects second level molecular pump, end face flange is connected with third level molecular pump screw, lower outside at housing is provided with entrance pressure-detecting device, on the top of end face flange, be connected with respectively first order molecular pump outlet pressure-detecting device, second level outlet pressure-detecting device and third level outlet pressure-detecting device.
On described end face flange, be circumferentially formed uniform first order pressure measurement attachment hole, second level pressure measurement attachment hole and third level pressure measurement attachment hole, in the both sides of above-mentioned attachment hole, form screw.
Described first order molecular pump is cylindrical shape, forms spiral air-conducting groove, and be dextrorotation state at circular inner wall, and spiral air-conducting slot cross-section is " U " type groove, and on the top of first order molecular pump, one side forms the poroid first order tracting pressuring hole of reducing.
Described second level molecular pump is disc, forms a plurality of cell walls that are uniformly distributed along the circumference and the groove distributing alternately of bleeding in its lower end surface, forms three uniform second level cylindrical gap, at the formation second level, the inner side of its circumference inner circle gap in the outside of its circumference.
Described third level molecular pump is thick walled cylinder shape, in its underpart, form the fitting recess of ring, form therebetween central through bore, inwall at central through bore forms spiral air-conducting groove, and be dextrorotation state, spiral air-conducting slot cross-section is " U " type groove, and its lower end surface forms a plurality of cell walls that are uniformly distributed along the circumference and the groove distributing alternately of bleeding, and is circumferentially formed three uniform through holes in fitting recess.
Cell wall on cell wall on the molecular pump of the second level and third level molecular pump is continuous radial camber line, and aligned with each other; The grooved of the groove of bleeding on groove and third level molecular pump of bleeding on the molecular pump of the second level be Trapezoidal rectangle groove, be continuous radial camber line, and aligned with each other.
It is identical that described first order molecular pump outlet pressure-detecting device, second level outlet pressure-detecting device and the third level export pressure-detecting device structure, by fastening flange, connecting tube and vacuum measuring instrument base, forms.
The utility model is simple in structure, be easy to processing and assembling, the design of cylinder table and use have guaranteed the feasibility of third level molecular pump outlet port pressure measurement, the utilization of adpting flange, solved a difficult problem for impulse continuously, and avoided the fracture in impulse process, gas leakage, stop up equivalent risk, the use of pressure measurement assembly for end face flange, solved that pressure inlet tube is passed by machine intimate and the problem that cannot seal, the rational deployment of the impulse position on end face flange and velocity coils connecting head position has guaranteed the normal assembling of centrifuge, also guaranteed that its safety protection device can normally be worked unaffected when normal work simultaneously.
Accompanying drawing explanation
Fig. 1 is plan view of the present utility model (along A-A line section in Fig. 2);
Fig. 2 is plan view of the present utility model;
Fig. 3 is worm's eye view when rotor is not installed of the present utility model;
Fig. 4 is along the figure of the section of B-B line in Fig. 2;
Fig. 5 is the plan view of end face flange of the present utility model;
Fig. 6 is the schematic diagram of first order molecular pump;
Fig. 7 is the worm's eye view of second level molecular pump;
Fig. 8 is the plan view of third level molecular pump;
Fig. 9 is the plan view (along C-C line section in Fig. 8) of third level molecular pump;
Figure 10 is the worm's eye view of third level molecular pump;
Figure 11 is along the section of D-D line in Fig. 6, Fig. 9;
Figure 12 is along the section of E-E line in Fig. 7, Figure 10;
Figure 13 is adpting flange mounting point schematic diagram;
Figure 14 is the adpting flange schematic diagram with pressure inlet tube;
Figure 15 is connecting flange structure schematic diagram;
Figure 16 is pressure measurement assembly scheme of installation;
Figure 17 is pressure measurement modular construction schematic diagram.
Wherein:
1 housing 2 rotors
3 end face flange 4 first order molecular pumps
5 second level molecular pump 6 third level molecular pumps
7 entrance pressure-detecting device 8 first order outlet pressure-detecting devices
9 second level outlet pressure-detecting device 10 third level outlet pressure-detecting devices
11 first order pressure measurement attachment hole 12 second level pressure measurement attachment holes
13 third level pressure measurement attachment hole 14 screws
15 first order tracting pressuring hole 16 cell walls
17 groove 18 second level cylindrical gap of bleeding
19 second level inner circle gap 20 second level junction surfaces
21 third level junction surface 22 third level cylindrical gap
23 fitting recess 24 central through bores
26 times ring flanges of ring flange on 25
27 through hole 28 second level tracting pressuring holes
29 second level elongated hole 30 third level tracting pressuring holes
31 third level elongated hole 32 cylinder tables
33 " U " type groove, 34 rectangle grooves
35 adpting flange 36 sealing gaskets
37 screw 38 pressure inlet tubes
39 attachment hole 40 inlet holes
41 shoulder hole 42 fastening flanges
43 seal washer 44 connecting tubes
45 vacuum measuring instrument base 46 right-angle elbow pipes.
Embodiment
Below, with reference to drawings and Examples, the utility model is elaborated:
As shown in Fig. 1～5, a kind of embedded molecular pump that can pressure measurement ratio, comprise housing 1, rotor 2 is installed in housing 1, at the top of housing 1, be provided with end face flange 3, between housing 1 and rotor 2, be provided with first order molecular pump 4, the 4 top interference of first order molecular pump connect plate-like third level molecular pump 6, in the fitting recess 23 of third level molecular pump 6, interference connects second level molecular pump 5, and end face flange 3 is connected with third level molecular pump 6 screws.Lower outside at housing 1 is provided with entrance pressure-detecting device 7, is connected with respectively first order molecular pump outlet pressure-detecting device 8, second level outlet pressure-detecting device 9 and third level outlet pressure-detecting device 10 on the top of end face flange 3.On end face flange 3, be circumferentially formed uniform first order pressure measurement attachment hole 11, second level pressure measurement attachment hole 12 and third level pressure measurement attachment hole 13, in the both sides of above-mentioned attachment hole, form screw 14.
As shown in Fig. 6～12, first order molecular pump 4 is cylindrical shape, forms spiral air-conducting groove, and be dextrorotation state at circular inner wall, and spiral air-conducting slot cross-section is " U " type groove 33, and top one side of first order molecular pump 4 forms the poroid first order tracting pressuring hole 15 of reducing.
Second level molecular pump 5 is disc, in its lower end surface, form a plurality of cell walls that are uniformly distributed along the circumference 16 and the groove 17 distributing alternately of bleeding, outside at its circumference forms three uniform second level cylindrical gap 18, at the formation second level, the inner side of its circumference inner circle gap 19.
Third level molecular pump 6 is thick walled cylinder shape, in its periphery, form respectively second level junction surface 20 and third level junction surface 21, between second level junction surface 20 and third level junction surface 21, form third level cylindrical gap 22, in the bottom of third level molecular pump 6, form the fitting recess 23 of ring, in the middle of third level molecular pump 6, form central through bore 24, inwall at central through bore 24 forms spiral air-conducting groove, and be dextrorotation state, spiral air-conducting slot cross-section is " U " type groove 33, in the upper-end surface of third level molecular pump 6, form annular flange flange 25, lower annular flange flange 26 is formed at its outer wall bottom, its lower end surface forms a plurality of cell walls that are uniformly distributed along the circumference 16 and the groove 17 of bleeding, and distribute alternately.In fitting recess 23, be circumferentially formed three uniform through holes 27.
Cell wall 16 on second level molecular pump 5 and the cell wall 16 on third level molecular pump 6 are continuous radial camber line, and aligned with each other; The grooved of the groove 17 of bleeding on groove 17 and third level molecular pump 6 of bleeding on second level molecular pump 5 be Trapezoidal rectangle groove 34, be continuous radial camber line, and aligned with each other.Cell wall 16 on the second level of the present utility model molecular pump 5 and third level molecular pump 6, the groove 17 of bleeding are eight.
A side at third level molecular pump 6 forms second level tracting pressuring hole 28, second level tracting pressuring hole 28 and the second elongated hole 29 vertical connections; Opposite side at third level molecular pump 6 forms third level tracting pressuring hole 30, third level tracting pressuring hole 30 and the 3rd elongated hole 31 vertical connections.Inner circle side Monday at third level molecular pump 6 forms a cylinder table making progress 32.
As shown in Figure 13～16, on adpting flange 35, form inlet hole 40, parallel with through hole 27 axis, adpting flange shoulder hole 41 passes through mutually with inlet hole 40 is vertical; One end of pressure inlet tube 38 is solded in shoulder hole 41.
Adpting flange 35 with pressure inlet tube 38 is connected with third level junction surface 21 with second level junction surface 20 respectively, fixing by screw 37, and seals by sealing gasket 36, and wherein inlet hole 40 is communicated with second level tracting pressuring hole 28 and third level tracting pressuring hole 30 respectively.
Fastening flange 42 is arranged on respectively in first order pressure measurement attachment hole 11, second level pressure measurement attachment hole 12 and the third level pressure measurement attachment hole 13 of end face flange 3, pressure inlet tube 38 is installed in the center hole of fastening flange 42, pressure inlet tube 38 is communicated with first order tracting pressuring hole 15, second level tracting pressuring hole 28 and third level tracting pressuring hole 30 respectively, in the bottom of fastening flange 42, is provided with seal washer 43.
As shown in figure 17, first, second and third grade of outlet pressure-detecting device 8,9,10 all adopts same structure, comprise fastening flange 42, connecting tube 44 and vacuum measuring instrument base 45, connecting tube 44 is connected with fastening flange 42, and vacuum measuring instrument base 45 is connected with vacuum measuring instrument (not shown).
Entrance pressure-detecting device 7 is comprised of vacuum measuring instrument base 45 and right-angle elbow pipe 46, and the horizontal ends of right-angle elbow pipe 46 is communicated with housing 1, and the vertical end of right-angle elbow pipe 46 is communicated with vacuum measuring instrument base 45.
Second level gap 19 apertures that molecular pump 5 inwall places in the second level form are greater than the cylindrical of cylinder table 32.
The 3rd elongated hole 31 tilts to the end face direction near third level molecular pump 6.
First order pressure measurement attachment hole 11 and first order tracting pressuring hole 15 disalignments.
The utility model is simple in structure, be easy to processing and assembling, the design of cylinder table with use the feasibility that has guaranteed the outlet port pressure measurement of third level molecular pump; The utilization of adpting flange, has solved a difficult problem for impulse continuously, and has avoided fracture, gas leakage, obstruction equivalent risk in impulse process; The use of pressure measurement assembly for end face flange, has solved that pressure inlet tube is passed by machine intimate and the problem that cannot seal has also guaranteed that its safety protection device can normally be worked unaffected when normal work simultaneously.
Claims (7)
- One kind can pressure measurement ratio embedded molecular pump, comprise housing (1), rotor (2) is installed in housing (1), at the top of housing (1), be provided with end face flange (3), it is characterized in that: between housing (1) and rotor (2), be provided with first order molecular pump (4), the interference of first order molecular pump (4) top connects plate-like third level molecular pump (6), in the fitting recess (23) of third level molecular pump (6), interference connects second level molecular pump (5), end face flange (3) is connected with third level molecular pump (6) screw, lower outside at housing (1) is provided with entrance pressure-detecting device (7), on the top of end face flange (3), be connected with respectively first order molecular pump outlet pressure-detecting device (8), second level outlet pressure-detecting device (9) and third level outlet pressure-detecting device (10).
- 2. a kind of embedded molecular pump that can pressure measurement ratio according to claim 1, it is characterized in that: on described end face flange (3), be circumferentially formed uniform first order pressure measurement attachment hole (11), second level pressure measurement attachment hole (12) and third level pressure measurement attachment hole (13), in the both sides of above-mentioned attachment hole, form screw (14).
- 3. a kind of embedded molecular pump that can pressure measurement ratio according to claim 1, it is characterized in that: described first order molecular pump (4) is cylindrical shape, at circular inner wall, form spiral air-conducting groove, and be dextrorotation state, spiral air-conducting slot cross-section is " U " type groove (33), and on the top of first order molecular pump (4), a side forms the poroid first order tracting pressuring hole (15) of reducing.
- 4. a kind of embedded molecular pump that can pressure measurement ratio according to claim 1, it is characterized in that: described second level molecular pump (5) is disc, in its lower end surface, form a plurality of cell walls that are uniformly distributed along the circumference (16) and the groove of bleeding (17) and distribute alternately, outside at its circumference forms three uniform second level cylindrical gap (18), at the formation second level, the inner side of its circumference inner circle gap (19).
- 5. a kind of embedded molecular pump that can pressure measurement ratio according to claim 1, it is characterized in that: described third level molecular pump (6) is thick walled cylinder shape, in its underpart, form the fitting recess (23) of ring, form therebetween central through bore (24), inwall at central through bore (24) forms spiral air-conducting groove, and be dextrorotation state, spiral air-conducting slot cross-section is " U " type groove (33), its lower end surface forms a plurality of cell walls that are uniformly distributed along the circumference (16) and the groove of bleeding (17), and distribute alternately, in fitting recess (23), be circumferentially formed uniform three through holes (27).
- 6. a kind of embedded molecular pump that can pressure measurement ratio according to claim 1, is characterized in that: the cell wall (16) on second level molecular pump (5) and the cell wall (16) on third level molecular pump (6) are continuous radial camber line, and aligned with each other; The groove of bleeding (17) on second level molecular pump (5) and the grooved of the groove of bleeding (17) on third level molecular pump (6) be Trapezoidal rectangle groove (34), be continuous radial camber line, and aligned with each other.
- 7. a kind of embedded molecular pump that can pressure measurement ratio according to claim 1, it is characterized in that: it is identical that described first order molecular pump outlet pressure-detecting device (8), second level outlet pressure-detecting device (9) and the third level exports pressure-detecting device (10) structure, by fastening flange (42), connecting tube (44) and vacuum measuring instrument base (45), forms.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420295835.XU CN203906330U (en) | 2014-06-05 | 2014-06-05 | Embedded molecular pump with pressure ratio capable of being measured |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420295835.XU CN203906330U (en) | 2014-06-05 | 2014-06-05 | Embedded molecular pump with pressure ratio capable of being measured |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203906330U true CN203906330U (en) | 2014-10-29 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420295835.XU Expired - Fee Related CN203906330U (en) | 2014-06-05 | 2014-06-05 | Embedded molecular pump with pressure ratio capable of being measured |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203906330U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103994085A (en) * | 2014-06-05 | 2014-08-20 | 核工业理化工程研究院 | Embedded molecular pump capable of measuring pressure ratio |
-
2014
- 2014-06-05 CN CN201420295835.XU patent/CN203906330U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103994085A (en) * | 2014-06-05 | 2014-08-20 | 核工业理化工程研究院 | Embedded molecular pump capable of measuring pressure ratio |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141029 Termination date: 20160605 |
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| CF01 | Termination of patent right due to non-payment of annual fee |