CN203858353U - Calibration system of testing machine bench - Google Patents
Calibration system of testing machine bench Download PDFInfo
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- CN203858353U CN203858353U CN201420249877.XU CN201420249877U CN203858353U CN 203858353 U CN203858353 U CN 203858353U CN 201420249877 U CN201420249877 U CN 201420249877U CN 203858353 U CN203858353 U CN 203858353U
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Abstract
The utility model provides a calibration system of a testing machine bench. The calibration system at least comprises: a first switch, a second switch, a signal generation module, a signal measurement module, power supplies, input interfaces, output interfaces, a data recording module, a data processing module, and an object machine bench and a to-be-tested machine bench of a communication module, wherein the first switch is connected with the signal generation module; the second switch is connected with the signal measurement module; one terminal of the first switch and one terminal of the second switch are connected to the power supply, the input terminal and the output terminal together; one terminal of the signal generation module and one terminal of the signal measurement module are connected to the data record module together; the data recording module is connected with the data processing module; the data processing module is connected with the communication module; the power supply, the input interface, the output interface, and the communication module of the object machine bench are connected with the power supply, the input interface, the output interface, and the communication module of the to-be-tested machine bench respectively. In the calibration system, comparison measurement is carried out on the object machine bench by employing the to-be-tested machine bench, parameter compensation is finished in the measurement program construction stage, and self-calibration is carried out on the machine bench by using the compensation value, so that the object of reducing error is achieved.
Description
Technical field
The utility model relates to a kind of calibration system, particularly relates to a kind of calibration system for tester table.
Background technology
In On-Wafer Measurement process, the product of different processing procedures is also inconsistent to the accuracy requirement of test, and more advanced processing procedure is more and more higher to the requirement meeting of tester table, and between test machine, the difference of I/O capability just will cause obvious differentiation result.Therefore usually need to contrast the difference of power of test between different boards.
Between volume production and engineering test, usually due to the difference of test platform, cause the difference of test result, affect the result of failure analysis.Inconsistent due to its I/O capability between tester table, causes test result there are differences, thereby affects the correct judgement of test result.When finding the otherness between board by some common tools or universal method measurement, all can, because of itself some intrinsic limitation, affect its result.
Conventionally, tester table reduces error common method to be had: one, common multimeter, and the digital instruments such as oscillograph complete common electric current, voltage, the isoparametric measurement of sequential, thus judge whether off-design specification of tool parameters; Two, tester table self-correction: the design manufacturer of tester table can be according to the characteristic of this board, built-in corrective system, comprise specific software setting, hardware configuration, complete the detection of board self design parameter and the parameter of off-design specification is done to adequate compensation.Three, by standard model: at the concentrated environment of the tester tables such as workshop, usually by standard model, detect the otherness of test result between tester table, see and use identical product, different board tests, consequently in the no scope allowing in specification.
Yet above common method has limitation conventionally: one, common multimeter, oscillograph etc. are thick amount instrument, the deficiency of the precision of cause itself causes the out of true of measurement, in the process of using, different test pencils can be introduced different contact impedances with probe, causes the difference of measurement.In addition,, during the identical instrument of different librarian uses, because the methods that measure are, the standard of judgement is variant, also can introduce operate miss.Two, the instrument such as common multimeter, oscillograph needs regularly with third party's aligning tool, proofread and correct, and introducing correction error, causes the inaccurate of result; The instruments such as common multimeter of while, oscillograph are only applicable to the less occasion of signal number, as needs measure multiple signals simultaneously, waste time and energy, and inefficiency.Three, board self-correction can be because of aging, and failure and other reasons causes the non-directional drift of basic parameter, though can compensate by self, because of the uncertainty of its state, the result of compensation can be brought larger difference.And different boards, its self-correcting method and system configuration are also different, and its result also can be inconsistent.Four, using standard model to increase needs to increase the hardware support kits such as test head plate, Test bench, because the difference of hardware, the variation of state etc. causes proofreading and correct result, there are differences.In addition standard model is affected by environment larger, can face the risk of inefficacy, can not use for a long time.
Therefore, in order to address the above problem, to be necessary to propose a kind of new tester table calibration system and to complete the calibration of tester table, thereby reach the object that reduces measuring error.
Utility model content
The shortcoming of prior art in view of the above, the purpose of this utility model is to provide a kind of board calibration system, can directly utilize the platform of tester table self to reduce to bring test error because of the difference of I/O capability between board, improve the precision of measurement result.
For achieving the above object and other relevant objects, the utility model provides a kind of tester table calibration system, and described tester table calibration system at least comprises: target board and board to be measured; Described target board and board to be measured are respectively arranged with: first, second switch, signal generator module, signal measurement module, power supply and input, output interface, data recordin module, data processing module and communication module; Described the first switch and described signal generator module form the first branch road; Described second switch and described signal measurement module form the second branch road; In described the first branch road, be provided with the one end that is provided with described second switch in one end of described the first switch and described the second branch road and be jointly connected in described power supply and input, output interface; In described the first branch road, be provided with the one end that is provided with described signal measurement module in one end of described signal generator module and described the second branch road and be jointly connected in described data recordin module; Described data recordin module is connected with described data processing module; Described data processing module is connected with described communication module; The power supply of described target board and board to be measured and input, output interface corresponding connection mutually; The communication module of described target board and board to be measured interconnects.
As the preferred version of a kind of tester table calibration system of the present utility model, described signal generator module is provided with signal input part, the first comparer and the first selector of series connection successively; Described first selector is connected to described the first switch.
As the preferred version of a kind of tester table calibration system of the present utility model, described target board and board to be measured are also respectively equipped with signal switching apparatus; Described signal switching apparatus is connected in described first selector.
As the preferred version of a kind of tester table calibration system of the present utility model, described target board and board to be measured are also provided with current loading; Described current loading is connected with second selector and the second comparer in turn; Described second selector is connected in described the first switch; Described the second comparer is connected in described first selector.
As the preferred version of a kind of tester table calibration system of the present utility model, described target board and board to be measured are also provided with voltage comparison unit; Described voltage comparison unit is connected in described the first switch.
As the preferred version of a kind of tester table calibration system of the present utility model, between described target board and the communication module of board to be measured, by GPIB or RS232, communicate.
As the preferred version of a kind of tester table calibration system of the present utility model, the described signal generator module of described target board and board to be measured and the working method of signal measurement module are asynchronous execution.
As the preferred version of a kind of tester table calibration system of the present utility model, the connected mode of the described power supply of described target board and board to be measured is Kelvin's four line connected modes; The connected mode of described input, output interface is that the correspondence of normal signal passage connects.
As mentioned above, tester table calibration system of the present utility model, there is following beneficial effect: this method directly alternately measures correction I/O capability with two tester tables and reduces error, utilize the hardware and software platform of board own, do not need to increase extra software or hardware, between the tester table of same model, can carry out, different model tester table also can carry out.Measuring accuracy is higher, can well solve the difference of the test result of bringing because of the difference of the I/O capability between board.
Accompanying drawing explanation
Fig. 1 is the system chart of tester table calibration system merit of the present utility model.
Fig. 2 is tester table calibration system test philosophy schematic diagram of the present utility model.
Element numbers explanation
A target board
B board to be measured
10 first switches
11 second switches
12 signal generator modules
121 signal input parts
122 first comparers
123 first selectors
13 signal measurement module
14 power supplys and input, output interface
15 data recordin modules
16 data processing modules
17 communication modules
20 signal switching apparatus
21 current loadings
22 second selectors
23 second comparers
24 voltage comparison units
Embodiment
By specific instantiation, embodiment of the present utility model is described below, those skilled in the art can understand other advantages of the present utility model and effect easily by the disclosed content of this instructions.The utility model can also be implemented or be applied by other different embodiment, and the every details in this instructions also can be based on different viewpoints and application, carries out various modifications or change not deviating under spirit of the present utility model.
Refer to Fig. 1 to Fig. 2.It should be noted that, the diagram providing in the present embodiment only illustrates basic conception of the present utility model in a schematic way, satisfy and only show with assembly relevant in the utility model in graphic but not component count, shape and size drafting while implementing according to reality, during its actual enforcement, kenel, quantity and the ratio of each assembly can be a kind of random change, and its assembly layout kenel also may be more complicated.
As shown in the figure, the utility model provides a kind of tester table calibration system, and as shown in Figure 1, Fig. 1 is shown as the system chart of tester table calibration system of the present utility model, and board calibration system of the present utility model at least comprises: target board A and board B to be measured; Described target board A and board B to be measured are respectively equipped with the first switch 10 and second switch 11, signal generator module 12, signal measurement module 13, power supply and input, output interface 14, data recordin module 15, data processing module 16 and communication module 17 as shown in Figure 1; As shown in Figure 1, described the first switch 10 forms the first branch road with described signal generator module 12; Described second switch 11 forms the second branch road with described signal measurement module 13; In described the first branch road, be provided with the one end that is provided with described second switch 11 in one end of described the first switch 10 and described the second branch road and be jointly connected in described power supply and input, output interface 14; Meanwhile, in described the first branch road of described target board A and board B to be measured, be provided with the one end that is provided with described signal measurement module 13 in one end of described signal generator module 12 and described the second branch road and be jointly connected in described data recordin module 15; Described data recordin module 15 is connected with described data processing module 16; Described data processing module 16 is connected with described communication module 17.Simultaneously, the power supply of the power supply of described target board A of the present utility model and input, output interface 14 and described board B to be measured and input, the mutual corresponding connection of output interface 14, preferably, in the present embodiment, method of attachment between the power supply of described target board A and the power supply of described board B to be measured adopts Kelvin (Kelvin) four-wire chain connection, the i.e. Force of board to be measured and target board and Sense cross connection; The input of described target board A, output interface with the input of described board B to be measured, the connected mode of output interface adopts the corresponding connection of normal signal passage.The communication module 17 of described target board A interconnects with the communication module 17 of described board B to be measured, preferably, in the present embodiment, between the communication module 17 in described target board A and board B to be measured, by GPIB or RS232, communicates.The utility model also comprises other communication modes, specifically can determine according to the software and hardware configuration of board itself.
The working method of tester table calibration system of the present utility model is as follows:
One, first, take described target board A as measuring normal standard board, make the described signal generator module 12 of described board B to be measured produce a measured signal, this measured signal records and obtains the data of this measured signal through the data recordin module 15 of described board B to be measured itself; Simultaneously, the power supply of described measured signal process described first switch 10 of this board to be measured in described board B to be measured and the described power supply of this board to be measured and input, output interface 14 and the described target board A of process and input, output interface 14, simultaneously, the described second switch 11 of described target board A starts, described measured signal is received by the described signal measurement module 13 of this target board A after described second switch 11, and the signal measurement module 13 of described target board A is delivered to the measured signal receiving the data recordin module 15 of this board to be measured.Preferably, the described signal generator module of the board of target described in the present embodiment and board to be measured and the working method of signal measurement module are asynchronous execution, and simultaneously described signal generator module of the present utility model and signal measurement module also retain and synchronize the function of execution when execution board self-correcting function.
Two, the described data recordin module 15 of described board B to be measured is delivered to the data of acquisition the described data processing module 16 of this board B to be measured, and described data processing module 16 is dealt with recorded data; Simultaneously, the described data recordin module 15 of described target board A will obtain and be delivered to by the data of data recordin module 15 records of described target board A the described data processing module 16 of this target board A from described board B to be measured, described data processing module 16 is dealt with recorded data;
Three, the described data processing module 16 of described board B to be measured is delivered to treated data the described communication module 17 of this board to be measured; The described data processing module 16 of described target board A is delivered to treated data the described communication module 17 of this target board simultaneously;
Four, the described communication module of the described communication module of described board B to be measured and described target board A is passed through swap data, described data processing module is made contrast by the data of the two acquisition, owing to being provided with error-correcting program in described data processing module, therefore, the difference of the described data processing module 16 contrast same channel data of described board B to be measured, determine error compensation coefficient, thereby complete the calibration to described board to be measured.
Fig. 2 is tester table calibration system test philosophy schematic diagram of the present utility model.Preferably, the described signal generator module of described tester table calibration system of the present utility model is provided with signal input part 121, the first comparer 122 and the first selector 123 of series connection successively; Described first selector 123 is connected to described the first switch 10, the effect of described the first comparer 122 comprises: one, the input impedance of this comparer is high, make to mate with detecting device, but output impedance is low, makes to mate and play impedance transformation effect with described data processing module; Two, the input and output voltage of this comparer can be substantially constant, but to inputting the ratio amplification without distortion of micro-electric current, it only amplifies electric current, and voltage does not amplify.Described the first comparer, had both had the function that signal amplifies, and had the function of feedback concurrently simultaneously.Described first selector 123 plays switch.
Preferably, as shown in Figure 2, described target board A and board B to be measured are also respectively equipped with signal switching apparatus 20; Described signal switching apparatus 20 is connected in described first selector 123, and described signal switching apparatus is for switching different signals according to no test.
As shown in Figure 2, preferably, described target board A and board B to be measured are also provided with current loading 21; Described current loading 21 is connected with second selector 22 and the second comparer 23 in turn; Described second selector 22 is connected in described the first switch 10; Described the second comparer 23 is connected in described first selector 123, and the effect that acts on described the first comparer of described the second comparer 23 is identical, when described the first switch 10 startups or 123 startup of described first selector, and described current loading work.
As shown in Figure 2, preferably, described target board A and board B to be measured are also provided with voltage comparison unit 24; Described voltage comparison unit 24 is connected in described the first switch 10, compares output voltage and the reference voltage of device under test when described voltage comparison unit is used for functional test.In Fig. 2, dotted arrow represents the signal measurement module of the described target board of measured signal process that the described signal generator module of described board to be measured produces; In like manner, if the described signal generator module of described target board produces a measured signal, this measured signal also can be through the described signal measurement module of described board to be measured.
In sum, described tester table calibration system of the present utility model, there is following advantage: one, common multimeter and the oscillograph of the ratio of precision of its test is high, under identical environmental baseline, measuring accuracy high conformity, avoid because of the inconsistent error of bringing of measuring tool precision, the factor that affects test result of simultaneously introducing still less, can across comparison measurement result between different platform, can find out quickly and easily the difference to the input and output of same parameters, and according to actual value, correlation parameter is compensated, maximize the consistance that guarantees test result, measuring accuracy is required to high occasion, confidence level is higher, advantage is more obvious.
Two, the calibration system of described tester table of the present utility model need to not detect the error of tester table by third party's aligning tool, cost-saving; Can walk abreast and carry out measure analysis error simultaneously, efficiency be higher.
Three, avoid test machine oneself to detect, self-compensating, gets rid of the frequency of proofreading and correct because of instability and the increase of board state, and can avoid in the intermittent phase of proofreading and correct, and the test being brought by board state variation is abnormal; Simultaneously when carrying out new tester table assessment, can assess very easily the difference of measuring accuracy and power of test between new and old board, different model board, according to the characteristic of product to be measured, optimization selection board, cost-saving.
Four, in the test occasion of GO/No GO, avoid the unstable test risk of bringing because of a certain board or part board state, and can effectively eliminate the instability of standard model state or the test result difference that inefficacy brings, thereby make to produce normally, guarantee shipment quality.So the utility model has effectively overcome various shortcoming of the prior art and tool high industrial utilization.
Above-described embodiment is illustrative principle of the present utility model and effect thereof only, but not for limiting the utility model.Any person skilled in the art scholar all can, under spirit of the present utility model and category, modify or change above-described embodiment.Therefore, have in technical field under such as and conventionally know that the knowledgeable modifies or changes not departing from all equivalences that complete under spirit that the utility model discloses and technological thought, must be contained by claim of the present utility model.
Claims (8)
1. a tester table calibration system, is characterized in that, described tester table calibration system at least comprises:
Target board and board to be measured; Described target board and board to be measured are respectively arranged with:
First, second switch, signal generator module, accurate measuring unit, power supply and input, output interface, data recordin module, data processing module and communication module;
Described the first switch and described signal generator module form the first branch road;
Described second switch and described signal measurement module form the second branch road;
In described the first branch road, be provided with the one end that is provided with described second switch in one end of described the first switch and described the second branch road and be jointly connected in described power supply and input, output interface;
In described the first branch road, be provided with the one end that is provided with described signal measurement module in one end of described signal generator module and described the second branch road and be jointly connected in described data recordin module; Described data recordin module is connected with described data processing module; Described data processing module is connected with described communication module;
The power supply of described target board and board to be measured and input, output interface corresponding connection mutually; The communication module of described target board and board to be measured interconnects.
2. tester table calibration system according to claim 1, is characterized in that: described signal generator module is provided with signal input part, the first comparer and the first selector of series connection successively; Described first selector is connected to described the first switch.
3. tester table calibration system according to claim 2, is characterized in that: described target board and board to be measured are also respectively equipped with signal switching apparatus; Described signal switching apparatus is connected in described first selector.
4. tester table calibration system according to claim 3, is characterized in that: described target board and board to be measured are also provided with current loading; Described current loading is connected with second selector and the second comparer in turn; Described second selector is connected in described the first switch; Described the second comparer is connected in described first selector.
5. tester table calibration system according to claim 4, is characterized in that: described target board and board to be measured are also provided with voltage comparison unit; Described voltage comparison unit is connected in described the first switch.
6. tester table calibration system according to claim 1, is characterized in that: between described target board and the communication module of board to be measured, by GPIB or RS232, communicate.
7. tester table calibration system according to claim 1, is characterized in that: the described signal generator module of described target board and board to be measured and the working method of signal measurement module are asynchronous execution.
8. tester table calibration system according to claim 1, is characterized in that: the connected mode of the described power supply of described target board and board to be measured is Kelvin's four line connected modes; The connected mode of described input, output interface is that the correspondence of normal signal passage connects.
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| CN201420249877.XU CN203858353U (en) | 2014-05-15 | 2014-05-15 | Calibration system of testing machine bench |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109884501A (en) * | 2019-03-06 | 2019-06-14 | 惠科股份有限公司 | A kind of detection board, broken string short-circuit detecting machine and bearing calibration |
| CN110349890A (en) * | 2019-08-12 | 2019-10-18 | 盐城阿特斯阳光能源科技有限公司 | The calibration method of solar cell tester table |
| CN111044961A (en) * | 2018-10-15 | 2020-04-21 | 吴茂祥 | Test machine self-checking system and test method |
| CN111293048A (en) * | 2018-12-07 | 2020-06-16 | 紫光同芯微电子有限公司 | Wafer test system and method thereof |
| CN111693846A (en) * | 2019-03-12 | 2020-09-22 | 新唐科技股份有限公司 | Chip testing system and method |
| CN112731241A (en) * | 2020-12-23 | 2021-04-30 | 华虹半导体(无锡)有限公司 | Calibration tool and calibration method for wafer test machine |
| CN113534033A (en) * | 2020-04-21 | 2021-10-22 | 圣邦微电子（北京）股份有限公司 | Calibration method and calibration system of test machine |
| EP4354152A1 (en) * | 2022-10-14 | 2024-04-17 | Rohde & Schwarz GmbH & Co. KG | Power calibration adapter, measurement application system, method |
-
2014
- 2014-05-15 CN CN201420249877.XU patent/CN203858353U/en not_active Expired - Lifetime
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111044961A (en) * | 2018-10-15 | 2020-04-21 | 吴茂祥 | Test machine self-checking system and test method |
| CN111293048A (en) * | 2018-12-07 | 2020-06-16 | 紫光同芯微电子有限公司 | Wafer test system and method thereof |
| CN109884501A (en) * | 2019-03-06 | 2019-06-14 | 惠科股份有限公司 | A kind of detection board, broken string short-circuit detecting machine and bearing calibration |
| CN111693846A (en) * | 2019-03-12 | 2020-09-22 | 新唐科技股份有限公司 | Chip testing system and method |
| CN110349890A (en) * | 2019-08-12 | 2019-10-18 | 盐城阿特斯阳光能源科技有限公司 | The calibration method of solar cell tester table |
| CN110349890B (en) * | 2019-08-12 | 2021-08-24 | 盐城阿特斯阳光能源科技有限公司 | Calibration method of solar cell testing machine |
| CN113534033A (en) * | 2020-04-21 | 2021-10-22 | 圣邦微电子（北京）股份有限公司 | Calibration method and calibration system of test machine |
| CN112731241A (en) * | 2020-12-23 | 2021-04-30 | 华虹半导体(无锡)有限公司 | Calibration tool and calibration method for wafer test machine |
| CN112731241B (en) * | 2020-12-23 | 2024-01-19 | 华虹半导体(无锡)有限公司 | Calibration tool and calibration method for wafer test machine |
| EP4354152A1 (en) * | 2022-10-14 | 2024-04-17 | Rohde & Schwarz GmbH & Co. KG | Power calibration adapter, measurement application system, method |
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