CN203855685U - 热处理装置 - Google Patents
热处理装置 Download PDFInfo
- Publication number
- CN203855685U CN203855685U CN201420074781.4U CN201420074781U CN203855685U CN 203855685 U CN203855685 U CN 203855685U CN 201420074781 U CN201420074781 U CN 201420074781U CN 203855685 U CN203855685 U CN 203855685U
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- Prior art keywords
- interlayer
- thermal treatment
- treatment unit
- heating
- thermal
- Prior art date
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 65
- 239000011229 interlayer Substances 0.000 claims abstract description 121
- 239000010410 layer Substances 0.000 claims abstract description 30
- 238000007669 thermal treatment Methods 0.000 claims description 78
- 238000009413 insulation Methods 0.000 claims description 44
- 230000008676 import Effects 0.000 claims description 21
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 239000000284 extract Substances 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 11
- 238000005265 energy consumption Methods 0.000 abstract description 11
- 238000001816 cooling Methods 0.000 abstract description 9
- 238000000034 method Methods 0.000 abstract description 7
- 230000008569 process Effects 0.000 abstract description 7
- 239000004065 semiconductor Substances 0.000 abstract description 5
- 230000001603 reducing effect Effects 0.000 abstract description 2
- 238000004321 preservation Methods 0.000 abstract 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229920000742 Cotton Polymers 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000002826 coolant Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Abstract
Description
Claims (15)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201420074781.4U CN203855685U (zh) | 2014-02-20 | 2014-02-20 | 热处理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201420074781.4U CN203855685U (zh) | 2014-02-20 | 2014-02-20 | 热处理装置 |
Publications (1)
Publication Number | Publication Date |
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CN203855685U true CN203855685U (zh) | 2014-10-01 |
Family
ID=51605552
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201420074781.4U Expired - Lifetime CN203855685U (zh) | 2014-02-20 | 2014-02-20 | 热处理装置 |
Country Status (1)
Country | Link |
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CN (1) | CN203855685U (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107740191A (zh) * | 2017-12-01 | 2018-02-27 | 浙江海洋大学 | 一种热处理装置 |
-
2014
- 2014-02-20 CN CN201420074781.4U patent/CN203855685U/zh not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107740191A (zh) * | 2017-12-01 | 2018-02-27 | 浙江海洋大学 | 一种热处理装置 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100016 Jiuxianqiao East Road, Beijing, No. 1, No. Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20180105 Address after: 100176 Beijing economic and Technological Development Zone, Beijing, Wenchang Road, No. 8, No. Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: North China Science and technology group Limited by Share Ltd. |
|
CX01 | Expiry of patent term | ||
CX01 | Expiry of patent term |
Granted publication date: 20141001 |