CN203795012U - Bottom coagulation-aiding device for polycrystalline silicon cast ingot furnace - Google Patents
Bottom coagulation-aiding device for polycrystalline silicon cast ingot furnace Download PDFInfo
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- CN203795012U CN203795012U CN201420114344.0U CN201420114344U CN203795012U CN 203795012 U CN203795012 U CN 203795012U CN 201420114344 U CN201420114344 U CN 201420114344U CN 203795012 U CN203795012 U CN 203795012U
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Abstract
The utility model discloses a bottom coagulation-aiding device for a polycrystalline silicon cast ingot furnace. The bottom coagulation-aiding device comprises a furnace frame, a heat-insulating patterned plate, a lower furnace body, a square-ring heat-insulating plate, a heat-insulating pad, a ceramic crucible, a graphite protective plate, a nucleation coating, an orientated coagulation-aiding block, a cooling island, a hoisting motor, an external heat-insulating cage, an internal heat-insulating cage, a lifting mechanism, an upper furnace body and a heater, wherein the lower furnace body is equipped with a mechanism for controlling ascending and descending of the heat-insulating patterned plate; the internal heat-insulating cage and the external heat-insulating cage are arranged in the furnace body; a plurality of layers of radiating tapered holes are uniformly formed in the lower part of the internal heat-insulating cage along the periphery at equal interval; a protective plate is arranged at the periphery of the crucible; the orientated coagulation-aiding block, the square-ring heat-insulating plate and the heat-insulating patterned plate are arranged on the bottom; the heater is arranged in the upper furnace body; and the cooling island is arranged on the center of the lower furnace body. The bottom coagulation-aiding device disclosed by the utility model adopts the heat-insulating patterned plate, is equipped with the cooling island, and solves the problems that silicon cast ingot is not uniform in cooling, and poor in cooling efficiency on a central area by virtue of adsorbing and refracting cooling silicon crystal; and the prepared polycrystalline silicon cast ingot is small in crystalline grain and high in light energy conversation rate.
Description
Technical field
The utility model relates to a kind of solar cell polysilicon ingot casting production technology apparatus field, and particularly a kind of polycrystalline silicon ingot casting furnace bottom helps solidifying device.
Background technology
Solar cell development of manufacturing steepest, to surpass 50% speed rapid growth.In various types of solar cells, crystal silicon solar energy battery is because turnover ratio is high, technology maturation and holding the lead.The complete industrial chain of crystal silicon solar photovoltaic module comprises ingot casting, section, battery and assembly four parts, and casting polycrystalline silicon ingot is first step of producing polycrystalline silicon solar photovoltaic module.
Polycrystal silicon ingot generally adopts polycrystalline silicon ingot or purifying furnace, and by polycrystalline silicon ingot or purifying furnace, casting high-quality polycrystal silicon ingot is key factor and the basic premise that improves battery conversion efficiency.The tiny polysilicon of preparation uniform crystal particles can guarantee the quality of polycrystalline silicon ingot casting.The method of the even little crystal grain of preparation mainly relies on the cooling rate of long brilliant initial stage increasing ingot furnace bottom at present, to obtain larger condensate depression, reaches the object of crystal grain thinning.Concrete operations scheme is after silicon material has melted, and promotes rapidly heat-insulation cage, and ingot furnace bottom heat radiation amount is strengthened, forming core amount increases, in crucible bottom, form after the parent phase that crystal grain is more tiny, suitably reduce the aperture of heat-insulation cage, at suitable temperature, continued the brilliant process of remaining length.
Increase long brilliant initial stage ingot furnace bottom heat radiation speed and can realize the object of the little crystal grain of growth to add the method for big supercooling degree, but there is following shortcoming in this production method: 1, increase suddenly rate of temperature change crucible and coating are exerted an influence, if crucible coating layer exists defect, be easy to occur sticky crucible and the industrial accident such as even reveal; 2, the cooling velocity of variation increasing suddenly can impact normal long brilliant process below, causes the long brilliant rate fluctuation of silicon ingot larger, causes polycrystal silicon ingot defect, dislocation to increase; 3, ingot furnace mainly relies on and promotes the object that heat-insulation cage is realized reduction bottom temp, but simple lifting heat-insulation cage, orientation helps the rate of heat release on grumeleuse four limits higher than central rate of heat release, this cooling mode can form the thermograde in horizontal direction, finally can affect the verticality of silicon ingot crystal grain.Therefore, the utility model provides a kind of polycrystalline silicon ingot casting furnace bottom to help solidifying device.
Utility model content
For solving the problems of the technologies described above, the utility model provides a kind of polycrystalline silicon ingot casting furnace bottom to help solidifying device, for the problem that in prior art, the cooling of silicon casting ingot process is inhomogeneous, temperature variation is too unexpected and ingot casting lower curtate temperature inhomogeneous cooling is even, it is poor that ingot casting core temperature lowers efficiency, adopt fancy heat insulation bottom board, and at lower furnace body inner chamber, cooling island is set, by bridge motor, control the lifting of fancy thermal baffle, thereby realize the temperature controlled homogeneity of polycrystalline silicon ingot casting production process, stability, and obtain superfine crystal particle polycrystalline silicon ingot casting product.
For achieving the above object, the technical solution of the utility model is as follows: a kind of polycrystalline silicon ingot casting furnace bottom helps solidifying device, comprise that grate, heat insulation card, lower furnace body, side's ring thermal baffle, heat insulating mattress, ceramic crucible, graphite backplate, silicon material, forming core coating, orientation help grumeleuse, pillar stiffener, cooling island, bridge motor, outer heat-insulation cage, interior heat-insulation cage, lifting mechanism, copper feed-in pipe, inert gas tube, upper furnace body and well heater, is characterized in that:
Described polycrystalline silicon ingot casting furnace structure is: by grate, support upper furnace body and lower furnace body, described upper furnace body and lower furnace body are formed and are fastened by double-deck cooling system and be integrated, described lower furnace body opens or closes by hydraulic efficiency system or the motor driving of bottom, and is provided with the mechanism that controls the heat insulation card of lifting; Described upper furnace body arranged outside has the auxiliary facilities such as inert gas tube, temperature probe, power supply feed-in copper pipe, vacuum pipe, protective layer; In described lower furnace body, be provided with pillar stiffener, for support crucible assembly; Described lower furnace body furnace wall is large flow cooling water wall, is mainly used in absorbing the heat that high-temperature crucibles radiates; Described lower furnace body center is provided with cooling island, described cooling island is a spheroidal structure, its inside is connected by water quench and with lower furnace body cooling system, in described upper furnace body, be provided with jacket layer heat-insulation cage, comprise interior heat-insulation cage and outer heat-insulation cage, can pass through respectively its lifting of lifting mechanism control or decline; Described interior heat-insulation cage bottom is along the equidistant multilayer heat radiation taper hole that is evenly provided with of surrounding, and described heat radiation taper hole is toroidal, and described hydraucone direction toward the outer side, is convenient to the more heat of scattering; Described ceramic crucible surrounding is provided with graphite backplate, graphite backplate below, described ceramic crucible bottom is provided with orientation and helps grumeleuse, described orientation helps the grumeleuse below side's of being provided with ring thermal baffle and heat insulation card, in the middle of described side ring thermal baffle, be provided with regular polygon the heat insulation card of liftable, under bottom of furnace body bridge motor is controlled, can realize the heat insulation card of lifting and open or shutoff operation; In described upper furnace body, ceramic crucible surrounding and top are provided with many group well heaters, in described ceramic crucible, be filled with the silicon material that melts fusion, described crucible bottom and orientation help grumeleuse to join, and the edge that described orientation helps grumeleuse to contact with ceramic crucible is provided with multilayer insulation pad.
Described heat insulation card is a plurality of fanning strip splicing constructions, by regular polygon framework, be fixed together, on described polygonal frame, be provided with can unidirectional rotation limit shaft, each forms regular polygon fan-shaped all can be around limit shaft unidirectional rotation upward; When heat insulation card rises, by framework and limit shaft, make the complete regular polygon base plate of each common composition of heat insulation card fan sheet; When framework declines, heat insulation card center runs into after the spheroid of cooling island, the spheroid top, island that is cooled struts, all colored shape fan sheets are opened, and expose gap, cooling island, by the gap of heat insulation card flower shape sector sheet, absorbs the directed heat that helps grumeleuse to give off, and plays the effect of cooling ceramic crucible central zone.
Described cooling island is arranged at lower furnace body bottom, it is Stainless Steel Ball interlayer body structure, internal cooling water and lower furnace body cooling system together circulate, play on the one hand the effect of cooling source, on the other hand, the effect that opens heat insulation card fanning strip is played at the top on cooling island, by support, the fanning strip of the heat insulation card unidirectional rotation declining is backed down upward, and inclined as the flowers are in blossom, between described fanning strip, will form larger gap, make the spheroplast on cooling island can directly absorb the heat that orientation helps grumeleuse to radiate, the fanning strip surface of heat insulation card is heeling condition simultaneously, just in time can reflect orientation helps the heat of grumeleuse radiation to the cooling stave of lower furnace body, therefore, by direct absorption, after refraction, indirectly absorb, finally the heat of ceramic crucible central zone effectively can be transmitted and absorbs, thereby the temperature of ceramic crucible central zone temperature and ceramic crucible peripheral regions is reduced and temperature contrast homogenizing, guarantee the growth of whole silicon wafer, obtain the polycrystalline silicon ingot casting of high-quality high conversion.
Described interior heat-insulation cage bottom is divided and is provided with multilayer heat radiation taper hole, and described heat radiation taper hole is hydraucone shape, opening toward the outer side, and described heat radiation taper hole is provided with multilayer, and every layer of louvre at least arranges more than 5, and the outer bore dia of described heat radiation taper hole is 80mm-220mm; Diameter of bore is 60mm-165mm; From bottom to up, successively aperture dwindles described heat radiation taper hole, and diameter reduction distance is 10mm-50mm; Described heat radiation taper hole interlamellar spacing is 1/2nd of lower floor aperture.
The heat radiation taper hole of described interior heat-insulation cage arranges, and coordinates outer heat radiation cage castering action together, can well realize the temperature of silicon liquid in crucible is controlled, and makes the directed temperature difference in the right direction, has avoided the defect that in system, significantly temperature variation is brought suddenly; Due to heat-insulation cage design in using, can promote respectively interior heat-insulation cage and outer heat-insulation cage body, and on interior heat-insulation cage wall, be provided with multilayer louvre, just brought into play and slowed down the shortcoming that temperature changes suddenly, temperature is slowly reduced, the heat of crucible radiation evenly spreads.
The heat insulation card of described lifting is arranged in lower furnace body, described heat insulation card can be reduced and can be risen by the outer bridge motor of stove, in long brilliant process, particularly during nascent crystalline substance, after heat insulation card is opened, cooling island is exposed, increased on the one hand the directed radiating effect that helps grumeleuse bottom, directly absorbing radiation heat; That fanning strip surface on heat insulation card is scarp on the other hand, the heat that helps grumeleuse radiation can be refracted on lower furnace body water cooling wall, realized the effect of crucible body central zone reduction temperature, the temperature that can guarantee thus bulk silicon intracrystalline portion and surrounding is effectively absorbed and is reflected, make the silicon crystal temperature in ceramic crucible even, for the oriented growth of whole silicon wafer provides sufficient radiating condition.
Described ceramic crucible inner bottom surface, through pre-treatment, is coated with quartz sand coating, and coating is used to polysilicon nucleation that the forming core region of microtexture is provided; Further, described inner surface of crucible is coated with silicon nitride coating, for isolating silicon liquid and ceramic crucible body, so that the demoulding and prevent that glutinous crucible phenomenon from occurring.
Described orientation helps at the bottom of grumeleuse and ceramic crucible between backplate, along ceramic crucible surrounding, is provided with hard carbon felt heat insulating mattress, for slowing down the heat loss of crucible surrounding, guarantees all even crystal internal and external temperature difference of avoiding of temperature.
Technical process of the present utility model is: 1, upper furnace body, lower furnace body and various support equipment inspection and preparation; 2, crucible assembly is prepared; 3, crucible inner bottom surface spraying quartz sand coating; 4, the inner surperficial spraying silicon nitride coating of crucible; 5, assembling crucible assembly; 6, filling silicon material; 7, dress crucible; 8, banking; 9, antenatal detection; 10, processing parameter setting; 11, vacuum air-changing; 12, heat temperature raising operation; 13, silicon material melting process; 14, initial stage forming core operation, reduces heat insulation card, opens fanning strip refraction heat, exposes cooling island and directly absorbs heat; 15, directional long crystal operation, opens interior heat-insulation cage and outer heat-insulation cage step by step; 16, annealing operation; 17, refrigerating work procedure; 18, come out of the stove.
By technique scheme, the beneficial effect of technical solutions of the utility model is: by adopting fancy heat insulation bottom board, and at lower furnace body inner chamber, cooling island is set, controls the lifting of fancy thermal baffle by bridge motor.Solved the problem that the cooling of silicon casting ingot process is inhomogeneous, it is poor that ingot casting core temperature lowers efficiency, the temperature controlled homogeneity of polycrystalline silicon ingot casting production process, stability have been realized, make warm journey process uniform and stable, temperature difference directional property is good, ingot casting center is close with ingot casting surrounding temperature variation, bulk temperature gradient is controlled, has shortened the casting ingot process time, and prepared polycrystalline silicon ingot casting product grains is tiny, conversion of solar energy is high.
Accompanying drawing explanation
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, to the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described below, apparently, accompanying drawing in the following describes is only embodiment more of the present utility model, for those of ordinary skills, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is that the disclosed a kind of polycrystalline silicon ingot casting furnace bottom of the utility model embodiment helps solidifying apparatus structure schematic diagram;
Fig. 2 is that the disclosed a kind of polycrystalline silicon ingot casting furnace bottom of the utility model embodiment helps the solidifying heat insulation card open mode of device schematic diagram;
Fig. 3 is that the disclosed a kind of polycrystalline silicon ingot casting furnace bottom of the utility model embodiment helps solidifying four heat insulation card vertical view schematic diagram of device;
Fig. 4 is that the disclosed a kind of polycrystalline silicon ingot casting furnace bottom of the utility model embodiment helps solidifying eight heat insulation card vertical view schematic diagram of device;
Fig. 5 is that the disclosed a kind of polycrystalline silicon ingot casting furnace bottom of the utility model embodiment helps solidifying device general assembly schematic diagram.
Numeral and the represented corresponding component title of letter in figure:
1. heat insulation card 3. lower furnace body 4. sides of grate 2. encircle thermal baffles
5. heat insulating mattress 6. ceramic crucible 7. graphite backplate 8. silicon material
9. forming core coating 10. orientations help the grumeleuse 11. cooling islands of pillar stiffener 12.
Interior heat-insulation cage 16. lifting mechanisms of the outer heat-insulation cage 15. of 13. bridge motor 14.
17. bronze medal feed-in pipe 18. inert gas tube 19. upper furnace body 20. well heaters
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is clearly and completely described, obviously, described embodiment is only the utility model part embodiment, rather than whole embodiment.Embodiment based in the utility model, those of ordinary skills are not making the every other embodiment obtaining under creative work prerequisite, all belong to the scope of the utility model protection.
According to Fig. 1, Fig. 2 and Fig. 5, the utility model provides a kind of polycrystalline silicon ingot casting furnace bottom to help solidifying device, comprise that grate 1, heat insulation card 2, lower furnace body 3, side's ring thermal baffle 4, heat insulating mattress 5, ceramic crucible 6, graphite backplate 7, silicon material 8, forming core coating 9, orientation help grumeleuse 10, pillar stiffener 11, cooling island 12, bridge motor 13, outer heat-insulation cage 14, interior heat-insulation cage 15, lifting mechanism 16, copper feed-in pipe 17, inert gas tube 18, upper furnace body 19 and well heater 20, is characterized in that:
Described polycrystalline silicon ingot casting furnace structure is: by grate 1, support upper furnace body 19 and lower furnace body 3, described upper furnace body 19 is formed and is fastened by double-deck cooling system with lower furnace body 3 and is integrated, described lower furnace body 3 opens or closes by bridge motor 13 drivings of bottom, and is provided with the mechanism that controls the heat insulation card 2 of lifting; Described upper furnace body 19 arranged outside have the auxiliary facilities such as inert gas tube 18, temperature probe, power supply copper feed-in pipe 17, vacuum pipe, protective layer; In described lower furnace body 3, be provided with pillar stiffener 11, for support crucible assembly; Described lower furnace body 3 furnace walls are large flow cooling water wall, are mainly used in absorbing the heat that high-temperature ceramic copple 6 radiates; Described lower furnace body 3 centers are provided with cooling island 12, described cooling island 12 is a spheroidal structure, its inside is connected by water quench and with lower furnace body 3 cooling systems, in described upper furnace body 19, be provided with jacket layer heat-insulation cage, comprise interior heat-insulation cage 15 and outer heat-insulation cage 14, can by lifting mechanism 16, control its lifting or decline respectively; Described interior heat-insulation cage 15 bottoms are along the equidistant multilayer heat radiation taper hole that is evenly provided with of surrounding, and described heat radiation taper hole is toroidal, and described hydraucone direction toward the outer side, is convenient to the more heat of scattering; Described ceramic crucible 6 surroundings are provided with graphite backplate 7, described ceramic crucible 6 graphite backplate 7 belows, bottom are provided with orientation and help grumeleuse 10, described orientation helps grumeleuse 10 side of being provided with, below ring thermal baffle 4 and heat insulation cards 2, in the middle of described side ring thermal baffle 4, be provided with regular polygon the heat insulation card 2 of liftable, under bottom of furnace body bridge motor is controlled, can realize the heat insulation card 2 of lifting and open or shutoff operation; Interior ceramic crucible 6 surroundings of described upper furnace body 19 and top are provided with many group well heaters 20, in described ceramic crucible 6, be filled with the silicon material 8 that melts fusion, described ceramic crucible 6 bottoms and orientation help grumeleuse 10 to join, and the edge that described orientation helps grumeleuse 10 to contact with ceramic crucible 6 is provided with multilayer insulation pad 5.
According to Fig. 3 and Fig. 4, described heat insulation card 2 is a plurality of fanning strip splicing constructions, is fixed together, by regular polygon framework on described polygonal frame, be provided with can unidirectional rotation limit shaft, each forms regular polygon fan-shaped all can be around limit shaft unidirectional rotation upward; When heat insulation card 2 rises, by framework and limit shaft, make the complete regular polygon base plate of the common composition of fan sheet of each heat insulation card 2; When framework declines, heat insulation card 2 centers run into after 12 spheroids of cooling island, the 12 spheroid tops, island that are cooled strut, all colored shape fan sheets are opened, and expose gap, described cooling island 12, by the gap of heat insulation card 2 flower shape fan sheets, absorbs the directed heat that helps grumeleuse 10 to give off, and plays the effect of cooling ceramic crucible 6 central zones.
Described cooling island 12 is arranged at lower furnace body 3 bottoms, it is Stainless Steel Ball interlayer body structure, internal cooling water and lower furnace body 3 cooling systems together circulate, play on the one hand the effect of cooling source, on the other hand, the effect that opens heat insulation card 2 fanning strips is played at the top on cooling island 12, by support, the fanning strip of heat insulation card 2 unidirectional rotation that decline is backed down upward, and inclined as the flowers are in blossom, between described fanning strip, will form larger gap, make the spheroplast on cooling island 12 can directly absorb the heat that orientation helps grumeleuse 10 to radiate, the fanning strip surface of heat insulation card 2 is heeling conditions simultaneously, just in time can reflect orientation helps the heat of grumeleuse 10 radiation to the cooling stave of lower furnace body 3, therefore, by direct absorption, after refraction, indirectly absorb, finally the heat of ceramic crucible 6 central zones effectively can be transmitted and absorbs, thereby the temperature of ceramic crucible 6 central zone temperature and ceramic crucible 6 peripheral regions is reduced and temperature contrast homogenizing, guarantee the growth of whole silicon wafer, obtain the polycrystalline silicon ingot casting of high-quality high conversion.
Described interior heat-insulation cage 5 bottoms are divided and are provided with multilayer heat radiation taper hole 11, and described heat radiation taper hole 11 is hydraucone shape, toward the outer side opening;
Preferably, described heat radiation taper hole 11 is provided with five layers, and every layer of louvre arranges 8;
Preferably, the outer bore dia of described heat radiation taper hole 11 lowest layers is 150mm; Diameter of bore is 100mm;
Preferably, from bottom to up, successively aperture dwindles described heat radiation taper hole 11, and diameter reduction distance is 15; Described heat radiation taper hole 11 interlamellar spacings be outside lower floor aperture 1/2nd.
The heat radiation taper hole of described interior heat-insulation cage 15 arranges, and coordinates outer heat radiation cage 14 castering action together, can well realize the temperature of silicon liquid in crucible is controlled, and makes the directed temperature difference in the right direction, has avoided the defect that in system, significantly temperature variation is brought suddenly; Due to 15 designs of heat-insulation cage in using, can promote respectively interior heat-insulation cage 15 and outer heat-insulation cage 14 bodies, and on interior heat-insulation cage 15 walls, be provided with multilayer heat radiation taper hole, just bring into play and slowed down the shortcoming that temperature changes suddenly, temperature is slowly reduced, and the heat of ceramic crucible 6 radiation evenly spreads.
The heat insulation card 2 of described lifting is arranged in lower furnace body 3, described heat insulation card 2 can be reduced and can be risen by the outer bridge motor 13 of stove, in long brilliant process, particularly during nascent crystalline substance, after heat insulation card 2 is opened, cooling island is exposed, increased on the one hand the directed radiating effect that helps grumeleuse 10 bottoms, directly absorbing radiation heat; That fanning strip surface on heat insulation card 2 is scarp on the other hand, the heat that helps grumeleuse 10 radiation can be refracted on lower furnace body 3 water cooling walls, realized the effect of ceramic crucible 6 central zones reduction temperature, the temperature that can guarantee thus bulk silicon intracrystalline portion and surrounding is effectively absorbed and is reflected, make the silicon crystal temperature in ceramic crucible 6 even, for the oriented growth of whole silicon wafer provides sufficient radiating condition.
Described ceramic crucible 6 inner bottom surfaces, through pre-treatment, are coated with quartz sand forming core coating 9, and described forming core coating 9 is used to polysilicon nucleation that the forming core region of microtexture is provided; Further, described ceramic crucible 6 internal surfaces are coated with silicon nitride coating, for isolating silicon liquid and ceramic crucible body 6, so that the demoulding and prevent that glutinous crucible phenomenon from occurring.
Described orientation helps between grumeleuse 10 and the graphite backplate 7 at 6 ends of ceramic crucible, along ceramic crucible 6 surroundings, is provided with hard carbon felt heat insulating mattress 5, for slowing down the heat loss of ceramic crucible 6 surroundings, guarantees all even crystal internal and external temperature difference of avoiding of temperature.
Technical process of the present utility model is: 1, upper furnace body, lower furnace body and various support equipment inspection and preparation; 2, crucible assembly is prepared; 3, crucible inner bottom surface spraying quartz sand coating; 4, the inner surperficial spraying silicon nitride coating of crucible; 5, assembling crucible assembly; 6, filling silicon material; 7, dress crucible; 8, banking; 9, antenatal detection; 10, processing parameter setting; 11, vacuum air-changing; 12, heat temperature raising operation; 13, silicon material melting process; 14, initial stage forming core operation, reduces heat insulation card, opens fanning strip refraction heat, exposes cooling island and directly absorbs heat; 15, directional long crystal operation, opens interior heat-insulation cage and outer heat-insulation cage step by step; 16, annealing operation; 17, refrigerating work procedure; 18, come out of the stove.
By above-mentioned specific embodiment, the beneficial effects of the utility model are: by adopting fancy heat insulation bottom board, and at lower furnace body inner chamber, cooling island is set, controls the lifting of fancy thermal baffle by bridge motor.Solved the problem that the cooling of silicon casting ingot process is inhomogeneous, it is poor that ingot casting core temperature lowers efficiency, the temperature controlled homogeneity of polycrystalline silicon ingot casting production process, stability have been realized, make warm journey process uniform and stable, temperature difference directional property is good, ingot casting center is close with ingot casting surrounding temperature variation, bulk temperature gradient is controlled, has shortened the casting ingot process time, and prepared polycrystalline silicon ingot casting product grains is tiny, conversion of solar energy is high.
Above-mentioned explanation to the disclosed embodiments, makes professional and technical personnel in the field can realize or use the utility model.To the multiple modification of these embodiment, will be apparent for those skilled in the art, General Principle as defined herein can, in the situation that not departing from spirit or scope of the present utility model, realize in other embodiments.Therefore, the utility model will can not be restricted to these embodiment shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.
Claims (5)
1. a polycrystalline silicon ingot casting furnace bottom helps solidifying device, it is characterized in that, comprise that grate, heat insulation card, lower furnace body, side's ring thermal baffle, heat insulating mattress, ceramic crucible, graphite backplate, silicon material, forming core coating, orientation help grumeleuse, pillar stiffener, cooling island, bridge motor, outer heat-insulation cage, interior heat-insulation cage, lifting mechanism, copper feed-in pipe, inert gas tube, upper furnace body and well heater; Described grate supports upper furnace body and lower furnace body, and described lower furnace body is fastened and opens or closes with upper furnace body by the bridge motor driving of bottom, and is provided with the mechanism that controls the heat insulation card of lifting; In described lower furnace body, be provided with pillar stiffener; In described body of heater, be provided with jacket layer heat-insulation cage, comprise interior heat-insulation cage and outer heat-insulation cage, by lifting mechanism, can control respectively and promote or decline; Described interior heat-insulation cage bottom is along the equidistant multilayer heat radiation taper hole that is evenly provided with of surrounding, described crucible surrounding is provided with graphite backplate, described crucible bottom and graphite backplate join, described graphite backplate below is provided with orientation and helps grumeleuse, described orientation helps grumeleuse below to be provided with heat insulation bottom board and lifting thermal baffle, in described upper furnace body, crucible surrounding and top are provided with many group well heaters, are filled with the silicon material that melts fusion in described crucible.
2. a kind of polycrystalline silicon ingot casting furnace bottom according to claim 1 helps solidifying device, it is characterized in that, described heat insulation card is a plurality of fanning strip splicing constructions, by regular polygon framework, be fixed together, on described polygonal frame, be provided with can unidirectional rotation limit shaft, each forms regular polygon fan-shaped all can be around limit shaft unidirectional rotation upward.
3. a kind of polycrystalline silicon ingot casting furnace bottom according to claim 1 helps solidifying device, it is characterized in that, described cooling island is arranged at lower furnace body bottom, it is Stainless Steel Ball interlayer body structure, internal cooling water and lower furnace body cooling system together circulate, back down the fanning strip of the heat insulation card unidirectional rotation declining upward by support on described cooling island, and inclined.
4. a kind of polycrystalline silicon ingot casting furnace bottom according to claim 1 helps solidifying device, it is characterized in that, described heat radiation taper hole at least arranges two layers, and every layer of louvre at least arranges more than 5, and the outer bore dia of described heat radiation taper hole is 80mm-220mm; Diameter of bore is 60mm-165mm; From bottom to up, successively aperture dwindles described heat radiation taper hole, and diameter reduction distance is 10mm-50mm; Described heat radiation taper hole interlamellar spacing is 1/2nd of lower floor aperture.
5. a kind of polycrystalline silicon ingot casting furnace bottom according to claim 1 helps solidifying device, it is characterized in that, described ceramic crucible inner bottom surface is through pre-treatment, and the spray of described crucible inner bottom surface has quartz sand nucleation coating, and described inner surface of crucible is coated with silicon nitride coating.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420114344.0U CN203795012U (en) | 2014-03-13 | 2014-03-13 | Bottom coagulation-aiding device for polycrystalline silicon cast ingot furnace |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201420114344.0U CN203795012U (en) | 2014-03-13 | 2014-03-13 | Bottom coagulation-aiding device for polycrystalline silicon cast ingot furnace |
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| CN201420114344.0U Expired - Fee Related CN203795012U (en) | 2014-03-13 | 2014-03-13 | Bottom coagulation-aiding device for polycrystalline silicon cast ingot furnace |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105803526A (en) * | 2016-05-17 | 2016-07-27 | 江西旭阳雷迪高科技股份有限公司 | Polycrystal ingot furnace thermal field |
| CN107523865A (en) * | 2017-09-28 | 2017-12-29 | 浙江晶盛机电股份有限公司 | A kind of energy-saving and high efficient polycrystalline silicon ingot or purifying furnace for orienting water-cooling |
| CN109252217A (en) * | 2018-11-26 | 2019-01-22 | 浙江晶阳机电有限公司 | A kind of silicon core ingot furnace of multi-use |
-
2014
- 2014-03-13 CN CN201420114344.0U patent/CN203795012U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105803526A (en) * | 2016-05-17 | 2016-07-27 | 江西旭阳雷迪高科技股份有限公司 | Polycrystal ingot furnace thermal field |
| CN107523865A (en) * | 2017-09-28 | 2017-12-29 | 浙江晶盛机电股份有限公司 | A kind of energy-saving and high efficient polycrystalline silicon ingot or purifying furnace for orienting water-cooling |
| CN109252217A (en) * | 2018-11-26 | 2019-01-22 | 浙江晶阳机电有限公司 | A kind of silicon core ingot furnace of multi-use |
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