CN203788091U - Full-automatic indoor sample hand-over-hand transmission mechanism for peeling film system under ultrahigh-vacuum condition - Google Patents
Full-automatic indoor sample hand-over-hand transmission mechanism for peeling film system under ultrahigh-vacuum condition Download PDFInfo
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- CN203788091U CN203788091U CN201420115302.9U CN201420115302U CN203788091U CN 203788091 U CN203788091 U CN 203788091U CN 201420115302 U CN201420115302 U CN 201420115302U CN 203788091 U CN203788091 U CN 203788091U
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- rotating mechanism
- hand
- guide rail
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- transmission mechanism
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Abstract
Provided is a full-automatic indoor sample hand-over-hand transmission mechanism for a peeling film system under an ultrahigh-vacuum condition. The transmission system aims at overcoming the problems that operation mistakes tend to occur, damage to equipment is caused and the test success rate is reduced due to the fact that a sample hand-over-hand transmission mechanism in the prior art only includes a rotating mechanism and an elevating mechanism and is operated manually. The full-automatic indoor sample hand-over-hand transmission mechanism is characterized in that an elevating system parallel with a rotating mechanism is mounted on a frame, a spline gear is mounted on a main shaft of the rotating mechanism, a positioning mechanism vertical to the rotating mechanism is connected to a left flange of a small vacuum chamber of the rotating mechanism, and a positioning pin whose front end is provided with a keyway for positioning is mounted in a central hole of a switching plate and matches the spline gear in use. The full-automatic indoor sample hand-over-hand transmission mechanism has the advantages that positioning and locking functions are provided, the rotation and elevation positioning precisions and the repeated positioning precision after rotation of a sample pallet are improved, guide rails and slide blocks on the guide rails are provided to transfer the bending moment born by ball screws to the guide rail and further to improve the moving stability and precision of the ball screws, and thus, the service life of the mechanism is prolonged.
Description
Technical field
The utility model belongs to vacuum technique field, particularly a kind of transmission mechanism for the full-automatic handing-over of the indoor sample of stripping film system vacuum.
Background technology
Stripping film system is the testing equipment for heavy ion cancer clinical treatment area research, under UHV condition, peel off the harmful ion in heavy ion beam with sample part, make ion beam after screening, be met the ion beam current that treatment requires, because sample carries out under ultra-high vacuum environment, need to realize with transmission mechanism, and accurate, reliable sample transmission mechanism is the necessary guarantee of testing success.In prior art, transmission mechanism for the indoor sample of stripping film system vacuum only has rotating mechanism and elevating mechanism, all adopt manual operation, when test, at least need 2 association of individuals to complete, one man operation rotating mechanism and elevating mechanism, another people observes adjustable height and rotational angle by observation window reserved on equipment, completely whether correct by visual determination adjustable height and rotational angle, because there is no positioner, tram cannot ensure to join in sample part Renewal process time, easily there is misoperation, cause the damage of equipment and reduce the success rate of testing.
Summary of the invention
Technical problem to be solved by this invention is, overcomes the defect of prior art, provides one can realize full-automatic lifting, rotate and pinpoint sample transmission mechanism.
The technical solution used in the present invention comprises frame, rotating mechanism and the elevating mechanism parallel with rotating mechanism are installed in frame, on the main shaft of described rotating mechanism, spline gear is installed, on the left flange of little vacuum chamber of rotating mechanism, connect the detent mechanism vertical with rotating mechanism with screw, described detent mechanism is included in the 3rd stepping motor of installing on installing rack, the 3rd reductor, the 3rd shaft coupling, the second ball screw, the second flange nut and alignment pin, 2 the first guide rails before and after being installed with on the installing rack of detent mechanism, first slide block that can slide on the first guide rail is installed on the first guide rail of 2 of front and back, on the first slide block, keyset is installed, keyset rear and front end is screwed and is connected with the first slide block, keyset center is processed with through hole, in this through hole, alignment pin is installed, thereby the load transfer that the second ball-screw is born is to the first guide rail, described alignment pin front end processing location keyway, be used in conjunction with described spline gear, in described frame, install magnetic induction switch and lower magnetic induction switch, left magnetic induction switch and right magnetic induction switch are installed on described installing rack.
In described frame, be installed with the second guide rail, second slide block that can slide on the second guide rail is installed on the second guide rail, on the second slide block, bent plate is installed, bent plate is screwed and is connected with connecting plate, thereby the moment of flexure that ball-screw is born is transferred on the second guide rail.
Compared with prior art, the beneficial effects of the utility model are:
(1) structure after improving, form respectively rotating mechanism, elevating mechanism and detent mechanism with three stepper motor driven transmission mechanisms, substitute rotating function and elevating function that original manual operation realizes, and increase positioning and locking function, in the positioning precision that has improved rotation, lifting, also reduce people in test and caused the probability of testing equipment damage for misoperation, lower the technical requirement to operating personnel, and reduced the quantity of testing crew.
(2) at alignment pin front end processing location keyway, be used in conjunction with the spline gear of rotating mechanism, improved the repetitive positioning accuracy after sample tray rotates, and ensured can not cause sample tray shift in position because of external force in process of the test.
(3) slide block is installed by guide rail with on guide rail, thus the moment of flexure that ball-screw is born transfer on guide rail, improved running stability and the kinematic accuracy of ball-screw, useful life that also therefore can extending mechanism.
Brief description of the drawings
Fig. 1 is front view of the present utility model,
Fig. 2 is the left view of Fig. 1,
Fig. 3 is the A-A cutaway view of Fig. 1.
In figure:
1. rotating mechanism,
1-1. the first stepping motor, 1-2. the first reductor,
1-3. the first magnetic shaft, 1-4. the first shaft coupling,
1-5. main shaft, 1-6. step,
1-7. top chock, 1-8. spline gear,
The little vacuum chamber of 1-9., 1-10. swinging mounting
2. elevating mechanism,
2-1. the second stepping motor, 2-2. the second reductor,
2-3. the second shaft coupling, 2-4. bottom end bearing,
2-5. the first ball screw, 2-6. the first flange nut,
2-7. upper end bearing,
3. detent mechanism,
3-1. the 3rd stepping motor, 3-2. the 3rd reductor,
3-3. the 3rd shaft coupling, 3-4. the second ball screw,
3-5. the second flange nut, 3-6. alignment pin,
3-7. installing rack,
4. frame,
The upper magnetic induction switch of 5-1., magnetic induction switch under 5-2.,
5-3. left magnetic induction switch, 5-4. right magnetic induction switch,
6. sample tray
7. connecting plate, 8. large vacuum chamber,
9. the second guide rail, 10. the second slide block,
11. bent plates, 12. first guide rails,
13. first slide blocks, 14. keysets,
15. bellowss.
Embodiment
As shown in drawings, the present invention includes frame 4, rotating mechanism 1 and elevating mechanism 2 are installed in frame 4, described rotating mechanism 1 comprises the first stepping motor 1-1, the first reductor 1-2, the first magnetic shaft 1-3, the first shaft coupling 1-4, main shaft 1-5 and step 1-6, little vacuum chamber 1-9 and spline gear 1-8, the number of teeth of the spline tooth of described spline gear 1-8 and position are corresponding with the sample position of the sample tray 6 in large vacuum chamber 8, described little vacuum chamber 1-9 is provided with upper flange, lower flange and left flange, be connected with the swinging mounting 1-10 of rotating mechanism 1 by lower flange, on upper flange, be processed with top chock 1-7, described elevating mechanism 2 comprises the second stepping motor 2-1, the second reductor 2-2, the second shaft coupling 2-3, bottom end bearing 2-4, the first ball screw 2-5, the first flange nut 2-6 and upper end bearing 2-7, on the first flange nut 2-6 of elevating mechanism 2, be set with connecting plate 7 and be connected and fixed with screw, the upper flange of the little vacuum chamber 1-9 of the other end of connecting plate 7 and rotating mechanism 1 is connected and fixed with screw, thereby rotating mechanism 1 and elevating mechanism 2 are linked into an integrated entity, on the left flange of the little vacuum chamber 1-9 of rotating mechanism 1, connect the detent mechanism 3 vertical with rotating mechanism 1 with screw, on the left flange of the little vacuum chamber 1-9 of rotating mechanism 1 with the bellows 15 welding together with installing rack 3-7 on screw connecting locating mechanism 3, thereby rotating mechanism 1 and detent mechanism 3 are linked into an integrated entity, described detent mechanism 3 is included in upper the 3rd stepping motor 3-1 installing of installing rack 3-7, the 3rd reductor 3-2, the 3rd shaft coupling 3-3, the second ball screw 3-4, the second flange nut 3-5 and alignment pin 3-6, for improving the motion essence of detent mechanism 3 and reducing the flexural deformation of the second ball-screw 3-4 that load causes, 2 the first guide rails 12 before and after being installed with on the installing rack 3-7 of detent mechanism 3, first slide block 13 that can slide on the first guide rail 12 is installed on the first guide rail 12 of 2 of front and back, on the first slide block 13, keyset 14 is installed, keyset 14 rear and front ends are screwed and are connected with the first slide block 13, keyset 14 centers are processed with through hole, alignment pin 3-6 is installed in this through hole, and fix with nut check, thereby the load transfer that the second ball-screw 3-4 is born is to the first guide rail 12, improve running stability and the kinematic accuracy of the second ball-screw 3-4, described alignment pin 3-6 front end processing location keyway, is used in conjunction with the spline gear 1-8 of rotating mechanism 1, improves the repetitive positioning accuracy after rotating, and ensures can not cause sample tray 6 shift in position because of external force in process of the test.
Equally, for improving the motion essence of rotating mechanism 1 and elevating mechanism 2 and the useful life of extending mechanism, in frame 4, be installed with the second guide rail 9, second slide block 10 that can slide on the second guide rail 9 is installed on the second guide rail 9, on the second slide block 10, bent plate 11 is installed, bent plate 11 is screwed and is connected with connecting plate 7, thus the moment of flexure that ball-screw 2-5 is born transfer on the second guide rail 9, improve running stability and the kinematic accuracy of ball-screw 2-5.
In frame 4, install magnetic induction switch 5-1 and lower magnetic induction switch 5-2, left magnetic induction switch 5-3 and right magnetic induction switch 5-4 are installed on installing rack 3-7, sample tray 6 is installed in main shaft 1-5 upper end.
The course of work: the initialization position of the sample tray 6 of the main shaft 1-5 upper end of rotating mechanism 1 should be in the limit inferior position of elevating mechanism 2, and ensure that detent mechanism 3 is in locking state, lower magnetic induction switch 5-2 detects sample tray 6 current locations, if not initial set up position, the second stepping motor 2-1 starts, through the second reductor 2-2, the second shaft coupling 2-3, bottom end bearing 2-4, ball screw 2-5, the first flange nut 2-6 transmission, drive rotating mechanism 1 by connecting plate 7, make sample tray 6 get back to the initial position of work, detent mechanism 3 moves to service position, after right magnetic induction switch 5-4 judgements, confirm that initialization action completes, get back to after initial position, the second stepping motor 2-1 reversion, through the second reductor 2-2, the second shaft coupling 2-3, bottom end bearing 2-4, ball screw 2-5, the first flange nut 2-6 transmission, drive rotating mechanism 1 through connecting plate 7, make sample tray 6 rise to service position, whether moving to service position detects by upper magnetic induction switch 5-1, arrive behind service position, detent mechanism 3 moves, by the 3rd stepping motor 3-1, the 3rd reductor 3-2, the 3rd shaft coupling 3-3, the second ball screw 3-4 and the second flange nut 3-5 drive the alignment pin 3-6 position of deactivating, get back to holding fix, whether action completes by right magnetic induction switch 5-4 judgements, after detent mechanism 3 has moved, rotating mechanism 1 is worked, the first stepping motor 1-1, the first reductor 1-2, the first magnetic shaft 1-3, the first shaft coupling 1-4 and main shaft 1-5 drive sample tray 6 to rotate, rotational angle is by the first step motor control 1-1, and after rotation action completes, detent mechanism 3 moves, locking main shaft 1-5, ensure sample tray 6 positional precisions, after right magnetic induction switch 5-4 judges that detent mechanism 3 has moved, other actions of waiting system.
Claims (2)
1. for the full-automatic transmission mechanism joining of ultra high vacuum stripping film system indoor sample, comprise frame (4), rotating mechanism (1) and the elevating mechanism (2) parallel with rotating mechanism (1) are installed in frame (4), it is characterized in that, on the main shaft (1-5) of described rotating mechanism (1), spline gear (1-8) is installed, on the left flange of little vacuum chamber (1-9) of rotating mechanism (1), connect the detent mechanism (3) vertical with rotating mechanism (1) with screw, described detent mechanism (3) is included in upper the 3rd stepping motor (3-1) of installing of installing rack (3-7), the 3rd reductor (3-2), the 3rd shaft coupling (3-3), the second ball screw (3-4), the second flange nut (3-5) and alignment pin (3-6), 2 the first guide rails (12) before and after being installed with on the installing rack (3-7) of detent mechanism (3), in front and back, the upper installation of 2 the first guide rails (12) can be at upper the first slide block (13) sliding of the first guide rail (12), keyset (14) is installed on the first slide block (13), keyset (14) rear and front end is screwed and is connected with the first slide block (13), keyset (14) center is processed with through hole, alignment pin (3-6) is installed in this through hole, thereby the load transfer that the second ball-screw (3-4) is born is to the first guide rail (12), described alignment pin (3-6) front end processing location keyway, be used in conjunction with described spline gear (1-8), in described frame (4), install magnetic induction switch (5-1) and lower magnetic induction switch (5-2), at upper left magnetic induction switch (5-3) and the right magnetic induction switch (5-4) installed of described installing rack (3-7).
2. according to claim 1 for the full-automatic transmission mechanism joining of ultra high vacuum stripping film system indoor sample, it is characterized in that, in described frame (4), be installed with the second guide rail (9), can be at upper the second slide block (10) sliding of the second guide rail (9) in the upper installation of the second guide rail (9), bent plate (11) is installed on the second slide block (10), bent plate (11) is screwed and is connected with connecting plate (7), thereby the moment of flexure that ball-screw (2-5) is born is transferred on the second guide rail (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420115302.9U CN203788091U (en) | 2014-03-14 | 2014-03-14 | Full-automatic indoor sample hand-over-hand transmission mechanism for peeling film system under ultrahigh-vacuum condition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420115302.9U CN203788091U (en) | 2014-03-14 | 2014-03-14 | Full-automatic indoor sample hand-over-hand transmission mechanism for peeling film system under ultrahigh-vacuum condition |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203788091U true CN203788091U (en) | 2014-08-20 |
Family
ID=51324243
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420115302.9U Withdrawn - After Issue CN203788091U (en) | 2014-03-14 | 2014-03-14 | Full-automatic indoor sample hand-over-hand transmission mechanism for peeling film system under ultrahigh-vacuum condition |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203788091U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103825399A (en) * | 2014-03-14 | 2014-05-28 | 沈阳慧宇真空技术有限公司 | Transmission mechanism for full-automatically connecting indoor samples of ultrahigh vacuum peeling membrane system |
| CN113346669A (en) * | 2021-06-09 | 2021-09-03 | 昆山悦普达自动化科技有限公司 | High-precision rotary electric cylinder |
-
2014
- 2014-03-14 CN CN201420115302.9U patent/CN203788091U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103825399A (en) * | 2014-03-14 | 2014-05-28 | 沈阳慧宇真空技术有限公司 | Transmission mechanism for full-automatically connecting indoor samples of ultrahigh vacuum peeling membrane system |
| CN103825399B (en) * | 2014-03-14 | 2016-03-02 | 沈阳慧宇真空技术有限公司 | For the transmission mechanism that ultra high vacuum stripping film system indoor sample automatically joins |
| CN113346669A (en) * | 2021-06-09 | 2021-09-03 | 昆山悦普达自动化科技有限公司 | High-precision rotary electric cylinder |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20140820 Effective date of abandoning: 20160302 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |