CN203785633U - Near-field electrospinning direct-writing technology based grating scale manufacturing device - Google Patents
Near-field electrospinning direct-writing technology based grating scale manufacturing device Download PDFInfo
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- CN203785633U CN203785633U CN201420121366.XU CN201420121366U CN203785633U CN 203785633 U CN203785633 U CN 203785633U CN 201420121366 U CN201420121366 U CN 201420121366U CN 203785633 U CN203785633 U CN 203785633U
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Abstract
The utility model relates to a near-field electrospinning direct-writing technology based grating scale manufacturing device. The grating scale manufacturing device comprises an XY-plane motion platform (1), a Z-axis motion guide rail (2), a spinning spray needle (3), an injector (4), an injection pump (5), a high-voltage power supply (6), a high-voltage power supply controller (7), an injection pump controller (8), a Z-axis motion controller (9), an XY motion platform controller (10), an electrospinning controller (11) and a micro-current detector (12). The grating scale manufacturing device can adjust electrospinning parameters automatically according to the pitch of gratings expected to be engraved. A method for manufacturing a grating scale comprises the steps of 16) cleaning a glass piece and plating a uniform chromium film on the glass piece; 17) electrospinning a direct-writing polymer covering line orderly through a method of spinning according to the gratings which are expected to be engraved and arranged on the chromium-plated glass piece; 18) putting the glass piece into a chemical solvent so as to be fixed in form and corroded; and 19) removing an electrospinning covering material. The grating scale manufacturing device adopts the method of electrospinning direct-writing to replace a photoetching process in traditional grating scale manufacturing, and grating scales with extremely high precision can be processed and manufactured.
Description
Technical field
The utility model is a kind of grating scale manufacturing installation and method thereof based near field electrospinning direct-writing technology, belongs to grating scale manufacturing installation based near field electrospinning direct-writing technology and the innovative technology of method thereof.
Background technology
High-voltage electrostatic spinning technology is the important method for the preparation of ultrafine fiber growing up the domestic and international more than ten years recently.Electrospinning is proposed in 1934 by Formhzls the earliest, subsequently the people such as Taylor in 1964 to electrostatic spinning process in the distortion of electropolymer this concept of taylor cone has been proposed, until eighties of last century people's nineties start extensive concern Electrospinning.The identical people in grandson road has proposed near field electrospinning direct-writing technology in 2006, near field electrospinning direct-writing technology has reliable deposition accuracy, and parameter is controlled, for electro spinning nano fiber industry has been opened up a kind of new method.
Utilize grating to carry out displacement measurement and will be traced to eighties of last century fifties, in asking when quite long, only be applied to the mensuration of spectral analysis and optical wavelength as diffraction element by astronomer and physicist, starting is most Moire fringe (Moire fringes) technology based on double grating, its pitch is in 20um left and right, precision is generally several micron, but along with the progress of manufacturing technology.O.8um present grating pitch can reach, and resolving power reaches lnm.In production, manufacturing development, play the part of key player.Nano level grating measuring is to adopt diffraction grating, and grating pitch is lum or 0.8um, and the width of grid line and light wavelength are very approaching, produce diffraction and interference and can form Moire fringe, and the principle of its measurement claims principle of interference.Add in industry at modern machine, mostly adopt grating sensor to carry out position feedback device.Because grating scale can carry out closed-loop control to system, reduce the error that the reasons such as ball-screw thermal deformation cause, improve machining precision, so current medium-to-high grade digital control system adopts grating scale as displacement of the lines feedback element more and more.
The development of China's grating digital readout technology is transformed traditional machine industry as starting point from the eighties in last century taking digital display technology, at present, be installed on the whole dependence on import of absolute grating scale that the advanced CNC closed-loop is used, this has become one of technology " bottleneck " of restriction China high-grade, digitally controlled machine tools development.It is 3m that the maximum of domestic closed glass grating scale is measured length, have ± 15 μ m of accuracy, ± 10 μ m, ± 5 μ m and ± 3 μ m, and resolving power has 5 μ m, 1 μ m and 0.1 μ m, and speed is 60m/min, is mainly used in hand digit display lathe.The displacement measurement of realizing range millimeters up to a hundred, nanometer resolution, only has part laser interference class and grating class displacement measuring instrument to be competent at.But the requirement harshness of laser interferometer to environmental baseline, causes application limited.Though and raster pattern length measuring apparatus has shaped article, mainly from offshore company, these products are not only expensive, the high-precision product of part exists many restrictions to the sale of CHINESE REGION.
Traditional grating scale processing processing is mainly manufactured by chi base, photoetching (exposure), three step compositions of chemical corrosion.Traditional grating scale manufacture, has the defects such as the groove degree of depth is limited, groove edge effect is bad.
Summary of the invention
The purpose of this utility model is to consider the problems referred to above and provides one the grating scale manufacturing installation based near field electrospinning direct-writing technology reasonable in design, simple in structure, easy to operate.
Another object of the present utility model is to provide a kind of grating scale manufacture method based near field electrospinning direct-writing technology.The utility model is for traditional grating scale manufacture, bad this defect of groove edge effect, and the method that proposes to replace by the tectal mode of electrospinning direct-writing conventional lithography is manufactured grating scale.The utility model directly writes out overlayer on chromium plating glass plate, for preventing that under overlayer, institute's chromium plating is corroded, thereby forms than the better grid line of conventional lithography edge effect; In addition, because electrospinning direct-writing polymer covering width is that micron order even can reach nanoscale, therefore the grating scale manufacture method based near field electrospinning direct-writing technology can processing and manufacturing go out the grating scale that precision is very high.
The technical solution of the utility model is: the grating scale manufacturing installation of the utility model based near field electrospinning direct-writing technology, include XY plane motion platform, Z axis motion guide rail, spinning nozzle needle, syringe, syringe pump, high-voltage power supply, high-voltage power supply controller, syringe pump controller, Z axis motion controller, XY motion platform controller, electrospinning controller, micro-current detector, wherein XY plane motion platform is used for fixing chromium plating glass sheet, and the relative motion of XY in-plane is provided; Z axis motion guide rail is for providing the distance control of Z direction; Be installed in for the spinning nozzle needle of implementing electrospinning the lower end that is used to electrospinning that the syringe of polymeric material is provided, be used to syringe to provide the syringe pump of thrust to be installed in the upper end of syringe, syringe pump is connected with syringe pump controller, and syringe pump controller is for controlling the duty of syringe pump; High-voltage power supply is used to spinning nozzle needle that voltage is provided, and high-voltage power supply is connected with high-voltage power supply controller, and high-voltage power supply controller is for controlling the duty of high-voltage power supply; The Z axis motion controller that is used for the motion state of controlling Z axis guide rail is connected with the drive unit of Z axis guide rail; The XY platform motion controller that is used for the duty of controlling XY plane motion platform is connected with the drive unit of XY plane motion platform; Be installed in the side of plane motion platform for detection of micro-current detector of electrospinning current parameters, micro-current detector feeds back to the electrospinning current parameters of detection for determining electrospinning state and regulating the electrospinning controller of electrospinning parameter, high-voltage power supply controller, syringe pump controller, Z axis motion controller, XY motion platform controller are connected with electrospinning controller, and electrospinning controller is for coordinating the state of a control of high-voltage power supply controller, syringe pump controller, Z axis motion controller, XY motion platform controller.
Compared with prior art, tool has the following advantages the utility model:
1) the grating scale manufacturing installation based near field electrospinning direct-writing technology described in the utility model, can, according to wanting to portray grating pitch, regulate electrospinning parameter automatically;
2) the grating scale manufacturing installation based near field electrospinning direct-writing technology described in the utility model, has good automation mechanized operation performance;
3) the grating scale manufacture method of the utility model based near field electrospinning direct-writing technology, portrays mode than traditional raster chi simple to operation;
4) the grating scale manufacture method of the utility model based near field electrospinning direct-writing technology, substituted the process of the photoresistance that exposes in traditional raster chi manufacture process by the method for electrospinning direct-writing coverture, avoid in traditional raster chi processing the laser sintered edge effect dentation causing in exposure process, the grating line that has better edge effect is provided, has carved grating edge effect than the traditional raster chi mode of portraying good.
5) the grating scale manufacture method based near field electrospinning direct-writing technology described in the utility model, can be for making absolute type transmission grating and increment type transmission grating.
6) the grating scale manufacture method based near field electrospinning direct-writing technology described in the utility model, can make nano level grating.
The utility model is that a kind of design is ingenious, function admirable, the convenient and practical grating scale manufacturing installation based near field electrospinning direct-writing technology.
Brief description of the drawings
Fig. 1 is the grating scale manufacturing installation schematic diagram of the utility model based near field electrospinning direct-writing technology;
Fig. 2 is the grating scale manufacture method process flow diagram based near field electrospinning direct-writing technology;
Fig. 3 is chromium plating glass sheet schematic diagram;
Fig. 4 is the chromium plating glass sheet front elevation that there is polymeric cover on surface;
Fig. 5 is the chromium plating glass sheet front elevation that there is polymeric cover on the surface after chemical corrosion;
Fig. 6 is the vertical view of final molding grating scale;
Fig. 7 is the front elevation of final molding grating scale.
Embodiment
Embodiment:
Structural representation of the present utility model as shown in Figure 1, the grating scale manufacturing installation of the utility model based near field electrospinning direct-writing technology, include XY plane motion platform, Z axis motion guide rail, spinning nozzle needle, syringe, syringe pump, high-voltage power supply, high-voltage power supply controller, syringe pump controller, Z axis motion controller, XY motion platform controller, electrospinning controller, micro-current detector, wherein XY plane motion platform 1 is for fixing chromium plating glass sheet 12, and the relative motion of XY in-plane is provided, Z axis motion guide rail 2 is for providing the distance control of Z direction, spinning nozzle needle 3 is for implementing electrospinning, syringe 4 is used to electrospinning that polymeric material is provided, syringe pump 5 is used to syringe 4 that thrust is provided, high-voltage power supply 6 is used to spinning nozzle needle that voltage is provided, high-voltage power supply controller 9 is for controlling the duty of high-voltage power supply 6, syringe pump controller 8 is for controlling the duty of syringe pump 5, Z axis motion controller 9 is for controlling the motion state of Z axis guide rail 2, XY platform motion controller 10 is for controlling the duty of XY plane motion platform 1, electrospinning controller 11 is for coordinating to control high-voltage power supply controller 7 in the manufacturing, syringe pump controller 8, Z axis motion controller 9, the state of a control of XY motion platform controller 10, micro-current detector 12 is for detection of electrospinning current parameters, and feed back to electrospinning controller 11, electrospinning controller 11 is for determining electrospinning state and regulating electrospinning parameter, high-voltage power supply controller 7, syringe pump controller 8, Z axis motion controller 9, XY motion platform controller 10 is connected with electrospinning controller 11, electrospinning controller 11 is for coordinating high-voltage power supply controller 7, syringe pump controller 8, Z axis motion controller 9, the state of a control of XY motion platform controller 10.
As shown in Figure 2, its concrete manufacturing step is as follows for grating scale manufacture method process flow diagram based near field electrospinning direct-writing technology described in the utility model:
16) make chi base: cut a face glass, cleaning face glass 13, and power on and plate thick layer and be at face glass 13
chromium film 14.According to general grating scale manufacturing processing technic, chromium layer thickness
should with grating scale grating pitch
keep the relation of 1:100 left and right.This chromium plating glass sheet (12) is added Chinese musical scale base, as shown in Figure 3.
17) electrospinning coverture: be fixed on XY plane motion platform 1 along electrospinning direction of motion by chromium glass sheet 12, start electric spinning equipment, detect electrospinning current parameters by micro-current detector 12, and feed back to electrospinning controller 11, thereby change the control parameter of high-voltage power supply controller 7, syringe pump controller 8, Z axis motion controller 9, XY motion platform controller 10, change electrospinning parameter, thereby make laminating glass surface width d and the grid chi grating pitch to be processed of institute's spinning polymer coverture 15
identical.Be arranged in and on chromium film (14), cover out regular polymeric cover 15 according to grid line.Make the chromium plating glass sheet 12 that there is polymeric cover 15 on surface, as shown in Figure 4.
18) chemical corrosion chromium film: have the chromium plating glass sheet 12 of polymeric cover 15 to put into chemical solvent sizing and corrosion by surface coverage.Obtain, the chromium plating glass sheet 12 that there is a polymeric cover 15 on the surface after chemical corrosion as shown in Figure 5.
19) remove electrospinning coverture: the glass sheet surface polymkeric substance after corrosion is cleaned out, and be cut into specified size size, complete the grating scale manufacture based near field electrospinning direct-writing technology.Obtain, the grating scale of final molding as shown in Figure 6, Figure 7.Glass sheet after making is cut into and is specified when size, can obtain simultaneously polylith based on electrospinning direct-writing fabrication techniques grating scale.
The utility model is for traditional grating scale manufacture, bad this defect of groove edge effect, and the method that proposes to replace by the tectal mode of electrospinning direct-writing conventional lithography is manufactured grating scale.The purpose of this utility model is to provide a kind of grating scale manufacture method based near field electrospinning direct-writing technology, directly write on and on chromium plating glass plate, directly write out overlayer, be used for preventing that under overlayer, institute's chromium plating is corroded, thereby form than the better grid line of conventional lithography edge effect; In addition, because electrospinning direct-writing polymer covering width is that micron order even can reach nanoscale, therefore the grating scale manufacture method based on based near field electrospinning direct-writing technology can processing and manufacturing go out the grating scale that precision is very high.
Principle of work of the present utility model is as follows:
Near field electrospinning can realize diameter preparation to nearly hundred kinds of different polymer nanofibers, all kinds polymkeric substance, inorganics composite nano fiber and inorganic nano-fibers within the scope of micron order by nanoscale.Because chromium film has electric conductivity, therefore can directly carry out electrospinning operation thereon.
In addition, micro-current detector can detect micro-current status of electrospinning, thereby can judge the size of electrospinning diameter; Can pass through electrospinning controller, regulate high-voltage power supply controller, syringe pump controller, Z axis motion controller, XY motion platform controller, thus control electrospinning fibre diameter with to want to portray grid line identical.
In addition, portraying grating spacing if want is d, and controlling electrospinning fibre laminating glass surface width is d, is 2d to the adjacent encoder electrospinning platform of wanting to portray grating scale portraying displacement in direction.
In addition, institute's electric spinning polymer should be insoluble to corrosion chromium chemical reagent used, therefore can stop covering part chromium film and can not be corroded, thereby complete portraying of grating.In addition, electric spinning polymer is easily cleaned at chromium film surface formation coverture.
Claims (1)
1. the grating scale manufacturing installation based near field electrospinning direct-writing technology, it is characterized in that including XY plane motion platform (1), Z axis motion guide rail (2), spinning nozzle needle (3), syringe (4), syringe pump (5), high-voltage power supply (6), high-voltage power supply controller (7), syringe pump controller (8), Z axis motion controller (9), XY motion platform controller (10), electrospinning controller (11), micro-current detector (12), wherein XY plane motion platform (1) is for fixing chromium plating glass sheet (12), and provide the relative motion of XY in-plane, Z axis motion guide rail (2) is for providing the distance control of Z direction, be installed in the lower end of the syringe (4) that is used to electrospinning that polymeric material is provided for implementing the spinning nozzle needle (3) of electrospinning, be used to syringe (4) to provide the syringe pump (5) of thrust to be installed in the upper end of syringe (4), syringe pump (5) is connected with syringe pump controller (8), and syringe pump controller (8) is for controlling the duty of syringe pump (5), high-voltage power supply (6) is used to spinning nozzle needle (3) that voltage is provided, and high-voltage power supply (6) is connected with high-voltage power supply controller (7), and high-voltage power supply controller (7) is for controlling the duty of high-voltage power supply (6), the Z axis motion controller (9) that is used for the motion state of controlling Z axis guide rail (2) is connected with the drive unit of Z axis guide rail (2), the XY platform motion controller (10) that is used for the duty of controlling XY plane motion platform (1) is connected with the drive unit of XY plane motion platform (1), be installed in the side of plane motion platform (1) for detection of micro-current detector (12) of electrospinning current parameters, micro-current detector (12) feeds back to the electrospinning current parameters of detection for determining electrospinning state and regulating the electrospinning controller (11) of electrospinning parameter, high-voltage power supply controller (7), syringe pump controller (8), Z axis motion controller (9), XY motion platform controller (10) is connected with electrospinning controller (11), electrospinning controller (11) is for coordinating high-voltage power supply controller (7), syringe pump controller (8), Z axis motion controller (9), the state of a control of XY motion platform controller (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420121366.XU CN203785633U (en) | 2014-03-18 | 2014-03-18 | Near-field electrospinning direct-writing technology based grating scale manufacturing device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420121366.XU CN203785633U (en) | 2014-03-18 | 2014-03-18 | Near-field electrospinning direct-writing technology based grating scale manufacturing device |
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| CN203785633U true CN203785633U (en) | 2014-08-20 |
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| CN201420121366.XU Expired - Fee Related CN203785633U (en) | 2014-03-18 | 2014-03-18 | Near-field electrospinning direct-writing technology based grating scale manufacturing device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103900480A (en) * | 2014-03-18 | 2014-07-02 | 广东工业大学 | Grating ruler manufacturing device and method based on near-field electrospinning direct-writing technology |
| CN111389472A (en) * | 2020-03-23 | 2020-07-10 | 南京工业职业技术学院 | Device and method for preparing electrospinning direct-writing multilayer microfluidic chip |
-
2014
- 2014-03-18 CN CN201420121366.XU patent/CN203785633U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103900480A (en) * | 2014-03-18 | 2014-07-02 | 广东工业大学 | Grating ruler manufacturing device and method based on near-field electrospinning direct-writing technology |
| CN111389472A (en) * | 2020-03-23 | 2020-07-10 | 南京工业职业技术学院 | Device and method for preparing electrospinning direct-writing multilayer microfluidic chip |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140820 Termination date: 20170318 |