CN203782230U - Support assembly and graphite boat with same - Google Patents
Support assembly and graphite boat with same Download PDFInfo
- Publication number
- CN203782230U CN203782230U CN201420109936.3U CN201420109936U CN203782230U CN 203782230 U CN203782230 U CN 203782230U CN 201420109936 U CN201420109936 U CN 201420109936U CN 203782230 U CN203782230 U CN 203782230U
- Authority
- CN
- China
- Prior art keywords
- tubular body
- supporting component
- graphite boat
- gas
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 30
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 30
- 239000010439 graphite Substances 0.000 title claims abstract description 30
- 239000007789 gas Substances 0.000 description 38
- 238000000034 method Methods 0.000 description 13
- 229910052573 porcelain Inorganic materials 0.000 description 6
- 230000004075 alteration Effects 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Abstract
The utility model provides a support assembly and a graphite boat with the same. The support assembly is used for supporting and fixing a graphite boat piece and comprises a tubular body and gas through holes, wherein axial through holes are formed in the tubular body; the gas through holes are formed in the periphery surface of the tubular body and are communicated with the axial through holes. By using the support assembly, the gas through holes which are communicated with the axial through holes are formed in the tubular body; when the support assembly is matched with the graphite boat piece, the gas inside the axial through holes can be easily extracted from the gas through holes, so that the aim that the gas inside the support assembly is easily and conveniently extracted is fulfilled.
Description
Technical field
The utility model relates to photovoltaic field, in particular to a kind of supporting component and have the graphite boat of this supporting component.
Background technology
In prior art, when pecvd process, technique boiler tube remains on after process set value its boiler tube air pressure by the mode vacuumizing, at this moment porcelain ring two ends all with graphite boat sheet butt, there is no space, make still to have portion gas in the axially extending bore of porcelain ring, when passing into process gas, the poor gas flow that causes of porcelain ring inner and outer air pressure is uneven, causes aberration, the purity of process gas in gases affect technique boiler tube in porcelain ring, causes the impact on plated film simultaneously.
Wherein, PECVD(plasma enhanced chemical vapor deposition): plasma reinforced chemical vapour deposition is the plated film mode in a kind of manufacture of solar cells processing procedure.
Graphite boat: be the carrier that filming process is used in carrying silicon chip when carrying out plated film.
Aberration: the difference of allied substances in color.
Porcelain ring: graphite boat is used for supporting and fixing a kind of parts of graphite boat sheet, and it is also vitrified pipe, ceramic jacket.
Utility model content
The utility model aims to provide a kind of supporting component and has the graphite boat of this supporting component, the object that is easy to be drawn out of to reach the gas of supporting component inside.
To achieve these goals, the utility model provides a kind of supporting component, and for supporting and fixing graphite boat sheet, supporting component comprises: tubular body, is provided with axially extending bore; Gas via-hole, is arranged on the periphery of tubular body, and is communicated with axially extending bore.
Further, gas via-hole is the groove that is arranged on a side end of tubular body, and groove is extended by the inner side, lateral of tubular body.
Further, gas via-hole is a plurality of, and interval is arranged on the periphery of tubular body.
Further, a plurality of gas via-holes along tubular body circumferentially uniformly at intervals.
Further, on the periphery of tubular body, the area of gas via-hole is S, wherein, and S>=1mm
2.
The utility model also provides a kind of graphite boat, comprises graphite boat sheet and is arranged on the above-mentioned supporting component between adjacent two graphite boat sheets.
Apply supporting component of the present utility model, by the gas via-hole that is communicated with axially extending bore is set on tubular body, when supporting component coordinates with graphite boat sheet, the gas of axially extending bore inside can be easy to extract out from gas via-hole, reaches and is convenient to the object that supporting component internal gas is easy to be drawn out of.
Accompanying drawing explanation
The Figure of description that forms the application's a part is used to provide further understanding of the present utility model, and schematic description and description of the present utility model is used for explaining the utility model, does not form improper restriction of the present utility model.In the accompanying drawings:
Fig. 1 is the main TV structure schematic diagram according to the embodiment of the utility model supporting component;
Fig. 2 is the side-looking structural representation of Fig. 1.
Reference numeral in figure: 10, tubular body; 11, axially extending bore; 20, gas via-hole.
Embodiment
It should be noted that, in the situation that not conflicting, embodiment and the feature in embodiment in the application can combine mutually.Describe below with reference to the accompanying drawings and in conjunction with the embodiments the utility model in detail.
As depicted in figs. 1 and 2, the utility model embodiment provides a kind of supporting component, and for supporting and fixing graphite boat sheet, supporting component comprises tubular body 10 and gas via-hole 20.Wherein, tubular body 10 is provided with axially extending bore 11.Gas via-hole 20 is arranged on the periphery of tubular body 10, and is communicated with axially extending bore 11.
By the gas via-hole 20 that is communicated with axially extending bore 11 is set on tubular body 10, when supporting component coordinates with graphite boat sheet, the gas of axially extending bore 11 inside can be easy to extract out from gas via-hole 20, reaches and is convenient to the object that supporting component internal gas is easy to be drawn out of.
Gas via-hole 20 in the utility model embodiment is for being arranged on the groove of a side end of tubular body 10, and groove is extended by the inner side, lateral of tubular body 10.
When cooperation position, the both ends of tubular body 10 respectively with corresponding graphite boat sheet butt, in vacuum, graphite boat sheet is pressed in the two ends of tubular body 10, now, between tubular body 10 and graphite boat sheet, gap is minimum, and internal gas can not be extracted out by this gap.But owing to being provided with groove, when vacuumizing, the gas of axially extending bore 11 inside can be extracted out from groove smoothly, makes the gas emptying in axially extending bore 11.And then can prevent that the poor gas flow that causes of this gases affect inner and outer air pressure is uneven, and cause aberration, guarantee that technique boiler tube is interior in vacuum state simultaneously, can not affect the purity of process gas in technique boiler tube, cause the impact on plated film.
In the utility model embodiment, the area of groove in the expansion plane at the outside surface place of tubular body 10 is S, wherein, and S>=1mm
2, and be less than the area of the side end annulus of tubular body 10.
It should be noted that; the area of the groove in the utility model embodiment does not produce restriction to the utility model; the area of above-mentioned groove can be adjusted according to the size of tubular body 10 and model, and every technical scheme that meets said structure feature all should be in the application's protection domain.
Preferably, the utility model also provides another kind of embodiment, and for example, above-mentioned gas through hole 20 is a plurality of, and interval is arranged on the periphery of tubular body 10.
A plurality of gas via-holes 20 are set, can more quickly the gas of axially extending bore 11 inside be extracted out, shorten the process vacuumizing, raise the efficiency.
Further, can by above-mentioned a plurality of gas via-holes 20 along tubular body 10 circumferentially uniformly at intervals.Gas via-hole 20 is circumferentially uniform, can be convenient to the making of mould, more convenient while making to quantize to produce supporting component, cost is lower.
It should be noted that, above-mentioned supporting component can be porcelain ring, and vitrified pipe or ceramic jacket can certainly be made by other materials is one-body molded.
The utility model also provides a kind of graphite boat, comprises graphite boat sheet and is arranged on the above-mentioned supporting component between adjacent two graphite boat sheets.
Further, the utility model also provides a kind of photovoltaic production machinery, comprises above-mentioned graphite boat.
From above description, can find out, the utility model the above embodiments have realized following technique effect: by the gas via-hole that is communicated with axially extending bore is set on tubular body, when supporting component coordinates with graphite boat sheet, the gas of axially extending bore inside can be easy to extract out from gas via-hole, reaches and is convenient to the object that supporting component internal gas is easy to be drawn out of.
The foregoing is only preferred embodiment of the present utility model, be not limited to the utility model, for a person skilled in the art, the utility model can have various modifications and variations.All within spirit of the present utility model and principle, any modification of doing, be equal to replacement, improvement etc., within all should being included in protection domain of the present utility model.
Claims (6)
1. a supporting component, for supporting and fixing graphite boat sheet, is characterized in that, described supporting component comprises:
Tubular body (10), is provided with axially extending bore (11);
Gas via-hole (20), is arranged on the periphery of described tubular body (10), and is communicated with described axially extending bore (11).
2. supporting component according to claim 1, is characterized in that, described gas via-hole (20) is for being arranged on the groove of a side end of described tubular body (10), and described groove is extended by the inner side, lateral of described tubular body (10).
3. supporting component according to claim 1, is characterized in that, described gas via-hole (20) is a plurality of, and interval is arranged on the periphery of described tubular body (10).
4. supporting component according to claim 3, is characterized in that, a plurality of described gas via-holes (20) along described tubular body (10) circumferentially uniformly at intervals.
5. supporting component according to claim 1, is characterized in that, on the periphery of described tubular body (10), the area of described gas via-hole (20) is S, wherein, and S>=1mm
2.
6. a graphite boat, comprises graphite boat sheet and is arranged on the supporting component between adjacent two graphite boat sheets, and it is characterized in that, described supporting component is according to the supporting component described in any one in claim 1 to 5.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420109936.3U CN203782230U (en) | 2014-03-11 | 2014-03-11 | Support assembly and graphite boat with same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420109936.3U CN203782230U (en) | 2014-03-11 | 2014-03-11 | Support assembly and graphite boat with same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203782230U true CN203782230U (en) | 2014-08-20 |
Family
ID=51318435
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420109936.3U Expired - Lifetime CN203782230U (en) | 2014-03-11 | 2014-03-11 | Support assembly and graphite boat with same |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203782230U (en) |
-
2014
- 2014-03-11 CN CN201420109936.3U patent/CN203782230U/en not_active Expired - Lifetime
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140820 |