CN203774754U - Furnace tube overtemperature alarm delay tripping system - Google Patents
Furnace tube overtemperature alarm delay tripping system Download PDFInfo
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- CN203774754U CN203774754U CN201420167506.7U CN201420167506U CN203774754U CN 203774754 U CN203774754 U CN 203774754U CN 201420167506 U CN201420167506 U CN 201420167506U CN 203774754 U CN203774754 U CN 203774754U
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- 238000013461 design Methods 0.000 claims description 9
- 241000973497 Siphonognathus argyrophanes Species 0.000 claims description 6
- 238000012544 monitoring process Methods 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 6
- 230000008569 process Effects 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000009191 jumping Effects 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
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Abstract
The utility model provides a furnace tube overtemperature alarm delay tripping system. The system comprises a thermocouple which is used for measuring the temperature of a furnace tube, a temperature measuring control circuit which is used for comparing the temperature with a set temperature and outputting an overtemperature signal if the temperature exceeds the set temperature, a timing circuit which is used for receiving the overtemperature signal output by the temperature measuring control circuit, starting timing, and sending a control signal after timing is ended, and a tripping control circuit which is used for controlling temperature main switch tripping protection according to the control signal. The thermocouple, the temperature measuring control circuit, the timing circuit and the tripping control circuit are electrically connected. According to the scheme of the utility model, the product scrap rate is reduced; process monitoring of equipment is improved; and the validity and the stability of monitoring circuit overtemperature control are ensured.
Description
Technical field
The utility model relates to the transformation field of semiconductor equipment, particularly a kind of boiler tube overtemperature alarm delay tripping system.
Background technology
In the manufacture of integrated circuit, the horizontal furnace tube of Bruce series is widely used in Present Domestic 6 ＂ integrated circuit production lines.Boiler tube be a kind of under hot environment to silicon wafer spread, the equipment of oxidation or low-pressure chemical vapor deposition, production process can be controlled temperature in boiler tube according to technological requirement, typical temperature scope control is at 400～1200 degrees Celsius, as temperature, control and occur extremely, temperature obviously exceeds process requirements temperature, before furnace tube temperature is raised to equipment resistance to extreme temperature, should there is independent monitoring circuit to control the timely power-off of heater switch with protection equipment and near personnel's safety; Although auto-breaking trip avoidance function can be protected device security in time, can affect greatly product in boiler tube, serious meeting causes product rejection, therefore also will get rid of the mistrip situation that board false alarm causes, board is carried out to effective overtemperature monitoring.
Utility model content
The technical problems to be solved in the utility model is to provide a kind of boiler tube overtemperature alarm delay tripping system, and product quality in boiler tube has been reduced to impact, has promoted the process monitoring function of equipment.
In order to achieve the above object, the utility model provides a kind of boiler tube overtemperature alarm delay tripping system, comprising:
For measuring the thermocouple of the temperature of boiler tube;
For by described temperature and design temperature comparison, if surpassed described design temperature, export the thermometric control circuit of overtemperature signal;
For receiving the overtemperature signal of described thermometric control circuit output and starting timing, after finishing, timing sends the timing circuit of control signal; And
For control the tripping operation control circuit of temperature main switch trip protection according to described control signal;
Wherein said thermocouple, described thermometric control circuit, described timing circuit and described tripping operation control circuit are electrically connected to.
Wherein, described boiler tube overtemperature alarm delay tripping system, also comprises:
For receiving the overtemperature signal of described thermometric control circuit output, and the warning lock-in circuit of output alarm signal;
Be used for according to described alarm signal, and send the warning circuit of warning.
Wherein, described warning lock-in circuit is electrically connected to described warning circuit.
Wherein, described warning lock-in circuit has the reset key for the output of stop alarm signal.
Wherein, described thermocouple circuit comprises: the first thermocouple circuit, the second thermocouple circuit, three thermocouple circuit;
Wherein, described the first thermocouple circuit is arranged at the described boiler tube mouth of pipe;
Described the second thermocouple circuit is arranged in described boiler tube pipe;
Described three thermocouple circuit is arranged at described boiler tube pipe tail.
Wherein, described thermometric control circuit comprises: the first thermometric control circuit, the second thermometric control circuit, the 3rd thermometric control circuit, described the first thermometric control circuit is connected with described the first thermocouple circuit, described the second thermometric control circuit is connected with described the second thermocouple circuit, and described the 3rd thermometric control circuit is connected with described three thermocouple circuit.
Wherein, described timing circuit is connected with described the first thermometric control circuit, the second thermometric control circuit, the 3rd thermometric control circuit respectively, the overtemperature signal that described timing circuit receives the first thermometric control circuit, the second thermometric control circuit, the 3rd arbitrary road of thermometric control circuit starts timing, output control signal after timing completes.
Wherein, described warning lock-in circuit is connected with described the first thermometric control circuit, the second thermometric control circuit, the 3rd thermometric control circuit respectively, when described warning lock-in circuit receives the overtemperature signal on the first thermometric control circuit, the second thermometric control circuit, the 3rd arbitrary road of thermometric control circuit, output alarm signal.
The beneficial effect of such scheme of the present utility model is as follows:
Boiler tube overtemperature alarm delay tripping system of the present utility model, can get rid of the error tripping that error signal causes, and reduces product rejection rate, the process monitoring of lifting means, and validity and the stability of the overtemperture control of assurance supervisory circuit.
Accompanying drawing explanation
Fig. 1 represents the circuit hardware structure chart of the utility model embodiment boiler tube overtemperature alarm delay tripping system;
Fig. 2 represents that the circuit signal of the utility model embodiment boiler tube overtemperature alarm delay tripping system moves towards figure.
Description of reference numerals:
1-thermocouple; 2-thermometric control circuit; 3-warning lock-in circuit; 4-warning circuit; 5-timing circuit; The 6-control circuit that trips.
Embodiment
For making the technical problems to be solved in the utility model, technical scheme and advantage clearer, be described in detail below in conjunction with the accompanying drawings and the specific embodiments.
The problem that embodiment of the present utility model faces for BRUCE boiler tube production process, provides a kind of boiler tube overtemperature alarm delay tripping system.
As shown in Figure 1, the utility model embodiment provides a kind of boiler tube overtemperature alarm delay tripping system, comprising:
For measuring the thermocouple 1 of the temperature of boiler tube;
For by temperature and design temperature comparison, if surpassed design temperature, export the thermometric control circuit 2 of overtemperature signal;
For receiving the overtemperature signal of thermometric control circuit 2 outputs and starting timing, after finishing, timing sends the timing circuit 5 of control signal;
For control the tripping operation control circuit 6 of temperature main switch trip protection according to control signal;
Wherein thermocouple 1, thermometric control circuit 2, timing circuit 5 and tripping operation control circuit 6 are electrically connected to.
For receiving the overtemperature signal of thermometric control circuit 2 outputs, and the warning lock-in circuit 3 of output alarm signal;
For receiving the alarm signal of warning lock-in circuit 3 outputs, and sending the warning circuit 4 of warning, can be specifically sound light alarming circuit.
Wherein, warning lock-in circuit 3 is electrically connected to warning circuit 4.
Wherein, warning lock-in circuit 3 has the reset key for the output of stop alarm signal.
Wherein, thermocouple 1 circuit comprises: the first thermocouple circuit, the second thermocouple circuit, three thermocouple circuit;
Wherein, the first thermocouple circuit is arranged at the boiler tube mouth of pipe, measures the temperature of the boiler tube mouth of pipe;
The second thermocouple circuit is arranged in boiler tube pipe, measures the temperature in boiler tube pipe;
Three thermocouple circuit is arranged at boiler tube pipe tail, measures the temperature of boiler tube pipe tail.
Wherein, thermometric control circuit 2 comprises: the first thermometric control circuit, the second thermometric control circuit, the 3rd thermometric control circuit, the first thermometric control circuit is connected with the first thermocouple circuit, the second thermometric control circuit is connected with the second thermocouple circuit, and the 3rd thermometric control circuit is connected with three thermocouple circuit.
Wherein, timing circuit 5 is connected with the first thermometric control circuit, the second thermometric control circuit, the 3rd thermometric control circuit respectively, the overtemperature signal that timing circuit 5 receives the first thermometric control circuit, the second thermometric control circuit, the 3rd arbitrary road of thermometric control circuit starts timing, output control signal after timing completes.
Wherein, warning lock-in circuit 3 is connected with the first thermometric control circuit, the second thermometric control circuit, the 3rd thermometric control circuit respectively, when warning lock-in circuit 3 receives the overtemperature signal on the first thermometric control circuit, the second thermometric control circuit, the 3rd arbitrary road of thermometric control circuit, output alarm signal.
In the present embodiment, this supervisory circuit is comprised of six major parts: the thermocouple 1 of using for thermometric, measure respectively boiler tube mouth, in, the trizonal temperature of tail; Thermometric control circuit 2, for receiving thermocouple 1 signal and converting corresponding temperature value to and design temperature compares, as surpassed design temperature, outputs signal to warning lock-in circuit 3 and timing circuit 5; Warning lock-in circuit 3 receive after the overtemperature signal of any channel Temperature Measuring control circuit 2 can stable output alarm signal to warning circuit 4, even if the overtemperature signal interruption of thermometric control circuit 2, also not affecting the alarm signal output of warning lock-in circuit 3, could be removed warning until the reset key of warning lock-in circuit 3 inside is pressed during this time; The overtemperature signal that timing circuit 5 receives any channel Temperature Measuring control circuit 2 just starts timing, during as overtemperature signal interruption, timing zero clearing wait for that next overtemperature signal is to just reclocking, after timing completes, output signal is to tripping operation control circuit 6; Tripping operation control circuit 6 is controlled temperature main switch jumping electric protection after receiving signal.
As shown in Figure 2, No. three thermocouples measure respectively boiler tube mouth, in, tail three portion temperature, as long as there is a wherein road temperature, over design temperature, just send overtemperature signal, supervisory circuit detects overtemperature signal and will lock this signal and send warning, even overtemperature blackout (false alarm situation) now, report to the police and also can not stop, until artificially reset; Supervisory circuit is sent warning and is started timing (timing time can be set according to board situation in zero to several minutes) simultaneously, timing time is to controlling the tripping operation of heating main switch, if overtemperature blackout during timing (false alarm situation), timer zero clearing, wait for that next overtemperature signal triggers reclocking, the error tripping action that effectively eliminating error signal causes also reminds maintenance personal to process the reason of error signal generation in time, as situations such as thermocouple loose contact or fractures, guarantee validity and the stability of supervisory circuit overtemperture control.
The boiler tube overtemperature alarm delay tripping system of above-described embodiment, can get rid of the error tripping that error signal causes, and reduces product rejection rate, the process monitoring of lifting means, and validity and the stability of the overtemperture control of assurance supervisory circuit.
The above is preferred implementation of the present utility model; should be understood that; for those skilled in the art; do not departing under the prerequisite of principle described in the utility model; can also make some improvements and modifications, these improvements and modifications also should be considered as protection range of the present utility model.
Claims (7)
1. a boiler tube overtemperature alarm delay tripping system, is characterized in that, comprising:
For measuring the thermocouple of the temperature of boiler tube;
For by described temperature and design temperature comparison, if surpassed described design temperature, export the thermometric control circuit of overtemperature signal;
For receiving the overtemperature signal of described thermometric control circuit output and starting timing, after finishing, timing sends the timing circuit of control signal; And
For control the tripping operation control circuit of temperature main switch trip protection according to described control signal;
Wherein said thermocouple, described thermometric control circuit, described timing circuit and described tripping operation control circuit are electrically connected to.
2. boiler tube overtemperature alarm delay tripping system according to claim 1, is characterized in that, also comprises:
For receiving the overtemperature signal of described thermometric control circuit output, and the warning lock-in circuit of output alarm signal;
Be used for according to described alarm signal, and send the warning circuit of warning;
Wherein, described warning lock-in circuit is electrically connected to described warning circuit.
3. boiler tube overtemperature alarm delay tripping system according to claim 2, is characterized in that, described warning lock-in circuit has the reset key for the output of stop alarm signal.
4. boiler tube overtemperature alarm delay tripping system according to claim 2, is characterized in that, described thermocouple circuit comprises: the first thermocouple circuit, the second thermocouple circuit, three thermocouple circuit;
Wherein, described the first thermocouple circuit is arranged at the described boiler tube mouth of pipe;
Described the second thermocouple circuit is arranged in described boiler tube pipe;
Described three thermocouple circuit is arranged at described boiler tube pipe tail.
5. boiler tube overtemperature alarm delay tripping system according to claim 4, it is characterized in that, described thermometric control circuit comprises: the first thermometric control circuit, the second thermometric control circuit, the 3rd thermometric control circuit, described the first thermometric control circuit is connected with described the first thermocouple circuit, described the second thermometric control circuit is connected with described the second thermocouple circuit, and described the 3rd thermometric control circuit is connected with described three thermocouple circuit.
6. boiler tube overtemperature alarm delay tripping system according to claim 5, it is characterized in that, described timing circuit is connected with described the first thermometric control circuit, the second thermometric control circuit, the 3rd thermometric control circuit respectively, the overtemperature signal that described timing circuit receives the first thermometric control circuit, the second thermometric control circuit, the 3rd arbitrary road of thermometric control circuit starts timing, output control signal after timing completes.
7. boiler tube overtemperature alarm delay tripping system according to claim 5, it is characterized in that, described warning lock-in circuit is connected with described the first thermometric control circuit, the second thermometric control circuit, the 3rd thermometric control circuit respectively, when described warning lock-in circuit receives the overtemperature signal on the first thermometric control circuit, the second thermometric control circuit, the 3rd arbitrary road of thermometric control circuit, output alarm signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420167506.7U CN203774754U (en) | 2014-04-08 | 2014-04-08 | Furnace tube overtemperature alarm delay tripping system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420167506.7U CN203774754U (en) | 2014-04-08 | 2014-04-08 | Furnace tube overtemperature alarm delay tripping system |
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| Publication Number | Publication Date |
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| CN203774754U true CN203774754U (en) | 2014-08-13 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420167506.7U Expired - Lifetime CN203774754U (en) | 2014-04-08 | 2014-04-08 | Furnace tube overtemperature alarm delay tripping system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112577619A (en) * | 2020-12-10 | 2021-03-30 | 宁波迦南智能电气股份有限公司 | Terminal block temperature real-time monitoring method of intelligent electric meter |
-
2014
- 2014-04-08 CN CN201420167506.7U patent/CN203774754U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112577619A (en) * | 2020-12-10 | 2021-03-30 | 宁波迦南智能电气股份有限公司 | Terminal block temperature real-time monitoring method of intelligent electric meter |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20220721 Address after: 518116 founder Microelectronics Industrial Park, No. 5, Baolong seventh Road, Baolong Industrial City, Longgang District, Shenzhen, Guangdong Province Patentee after: SHENZHEN FOUNDER MICROELECTRONICS Co.,Ltd. Address before: 100871 room 808, founder building, Zhongguancun, 298 Chengfu Road, Haidian District, Beijing Patentee before: PEKING UNIVERSITY FOUNDER GROUP Co.,Ltd. Patentee before: SHENZHEN FOUNDER MICROELECTRONICS Co.,Ltd. |
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| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140813 |