CN203774269U - Wafer box with abnormal bumping or dropping detection function - Google Patents
Wafer box with abnormal bumping or dropping detection function Download PDFInfo
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- CN203774269U CN203774269U CN201320672796.6U CN201320672796U CN203774269U CN 203774269 U CN203774269 U CN 203774269U CN 201320672796 U CN201320672796 U CN 201320672796U CN 203774269 U CN203774269 U CN 203774269U
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- wafer cassette
- wafer box
- acceleration
- storage unit
- collision
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Abstract
The application discloses a wafer box with an abnormal bumping or dropping detection function. The wafer box comprises a wafer box body and an electronic label. The electronic label is arranged on the side face of the wafer box body. The electronic label comprises a storage unit, a gravitational acceleration detector, and a logic judgment unit. The logic judgment unit is connected with the storage unit and the gravitational acceleration detector. The gravitational acceleration detector can detect the gravitational acceleration borne by the wafer box in real time. The logic judgment unit judges whether the wafer box has been bumped or dropped according to gravitational acceleration information detected by the gravitational acceleration detector. Then, by virtue of reading information in the electronic label through a subsequent machine, whether the wafer box has been bumped or dropped can be known. If the wafer box has been bumped or dropped, the wafer box has to be scanned and detected to determine whether the wafer box is sound or not; and if the wafer box has not been bumped or dropped, the wafer box can be subjected to a subsequent technological manufacture procedure. Therefore, the generation of particle impurities can be reduced effectively and the product yield rate can be increased.
Description
Technical field
The utility model relates to field of semiconductor manufacture, relates in particular to a kind of wafer cassette with abnormal collision or the measuring ability that drops.
Background technology
In semi-conductive production technology, often need to use wafer cassette wafer to be carried out between different platform to manufacturing process or measurement.General wafer cassette, from a board to another board, is all to embrace realization by operator's hand, or wafer cassette is placed on and in go-cart, is transported to next board.At present, although there is automatization materials conveying system in clean room, wafer cassette still needs operator's hand to embrace from board to automatization materials conveying system, or transmits by go-cart.When operator is manually operated, sometimes may meet accident, cause wafer cassette to fall on the ground, or the wafer cassette collision that meets accident.If there is above-mentioned phenomenon, when serious, can cause the wafer fragmentation in wafer cassette, even if there is not fragmentation, the wearing and tearing that also can cause because of collision cause particulate matter to increase, and cause the reduction of product yield.
For go-cart, topple over, or obviously see that wafer cassette drops and cause fragmentation, general operation person can report strictly according to the facts based on professional personal integrity, to process in time, but for accident collision, because different operators is different for the cognition of the order of severity of collision, not necessarily can report in time.So, received the wafer cassette of accident collision after extended meeting cause particulate matter too much, affect product yield, but also be difficult for analyzing the reason that yield is low.
At present, although there is the shock detector of paster shape, whether it can be attached to and in wafer cassette, detect wafer cassette and occur clashing into.This changes shock detector and has following problem:
First, the shock detector of this paster shape is disposable.If stand to such an extent that shock is greater than its threshold value, inner layer glass tube can break, the look that can redden after two kinds of liquid mix, but again without measuring ability, so can make operating cost uprise.
Secondly, after the shock detector of paster shape lost efficacy, even if be ready to spend into original continuation on production line, paste new getting on, the place to go of the shock detector having lost efficacy that it is old is more difficult, because in order to make shock detector firmly be close to wafer cassette, its gum is very firm.If firmly do not wiped off, wafer cassette surface has cull, and of long duration is the source that a granule foreign produces.And if firmly removal can damage wafer cassette again.
Its three, this shock detector only can provide visual alerts, cannot trigger at once any system and remind, and therefore, must rely on operator to find in time, reports in time.
Therefore the wafer cassette that, how to provide a kind of information that wafer cassette can be collided extremely or drop to detect in time and trigger the abnormal collision of having of prompting function or the measuring ability that drops is those skilled in the art's technical problems urgently to be resolved hurrily.
Utility model content
The purpose of this utility model is to provide a kind of wafer cassette with abnormal collision or the measuring ability that drops, and the information that wafer cassette can be collided extremely or drop detects in time and can be read and triggers prompting function.
To achieve the above object, the utility model adopts following technical scheme:
A kind of wafer cassette with abnormal collision or the measuring ability that drops, comprise wafer cassette body and electronic tag, described electronic tag is arranged at the side of described wafer cassette body, described electronic tag comprises memory cell, acceleration of gravity detector and logic judgment unit, and described logic judgment unit is connected with described acceleration of gravity detector with described memory cell respectively.
Preferably, in the above-mentioned wafer cassette with abnormal collision or the measuring ability that drops, described electronic tag also comprises LCDs, and described LCDs is connected with described memory cell.
Preferably, in the above-mentioned wafer cassette with abnormal collision or the measuring ability that drops, described memory cell comprises maximum acceleration permissible value storage unit and the acceleration storage unit that whether exceeds standard, acceleration permissible value storage unit and the acceleration of the described maximum storage unit that whether exceeds standard is connected with described logic judgment unit respectively, and acceleration permissible value storage unit and the acceleration of the described maximum storage unit that whether exceeds standard is connected with described LCDs respectively.
Preferably, in the above-mentioned wafer cassette with abnormal collision or the measuring ability that drops, described memory cell also comprises basic information unit (BIU), and described basic information unit (BIU) is connected with described LCDs.
Preferably, in the above-mentioned wafer cassette with abnormal collision or the measuring ability that drops, an opposite side of described wafer cassette body is respectively equipped with handle.
The wafer cassette with abnormal collision or the measuring ability that drops that the utility model provides, by set up Gravity accelerometer in the electronic tag of wafer cassette, detects the acceleration of gravity of wafer cassette in real time.When wafer cassette meets accident in transport process, as the collision of dropping, capital produces certain acceleration of gravity, described acceleration of gravity detector can the suffered acceleration of gravity of detecting real-time wafer cassette, the acceleration of gravity information that logic judgment unit detects according to acceleration of gravity detector, judge whether wafer cassette lives through collision or fall, and then can be by the information in follow-up board reading electronic labels, know whether wafer cassette lives through collision or fall, if live through collision or fall, whether intactly need to scan detection, if do not live through collision or fall, can subsequent technique processing procedure.
Accompanying drawing explanation
The wafer cassette with abnormal collision or the measuring ability that drops of the present utility model is provided by following embodiment and accompanying drawing.
Fig. 1 is the structural representation of the wafer cassette with abnormal collision or the measuring ability that drops of the utility model one embodiment;
Fig. 2 is the structural principle schematic diagram of the electronic tag of the utility model one embodiment;
Fig. 3 is the application flow schematic diagram of the utility model one embodiment.
In figure, 1 wafer cassette body, 2-electronic tag, 21-memory cell, 22-acceleration of gravity detector, 23-logic judgment unit, 24-LCDs, 3-handle.
Embodiment
To the wafer cassette with abnormal collision or the measuring ability that drops of the present utility model be described in further detail below.
Below with reference to accompanying drawings the utility model is described in more detail, has wherein represented preferred embodiment of the present utility model, should be appreciated that those skilled in the art can revise the utility model described here and still realize the beneficial effects of the utility model.Therefore, following description is appreciated that extensively knowing for those skilled in the art, and not as to restriction of the present utility model.
For clear, whole features of practical embodiments are not described.They in the following description, are not described in detail known function and structure, because can make the utility model chaotic due to unnecessary details.Will be understood that in the exploitation of any practical embodiments, must make a large amount of implementation details to realize developer's specific objective, for example, according to the restriction of relevant system or relevant business, by an embodiment, change into another embodiment.In addition, will be understood that this development may be complicated and time-consuming, but be only routine work to those skilled in the art.
For the purpose of this utility model, feature are become apparent, below in conjunction with accompanying drawing, embodiment of the present utility model is further described.It should be noted that, accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the object of aid illustration the utility model embodiment lucidly.
Refer to Fig. 1, Fig. 2 and Fig. 3, this wafer cassette with abnormal collision or the measuring ability that drops, comprise wafer cassette body 1 and electronic tag 2, described electronic tag 2 is arranged at the side of described wafer cassette body 1, described electronic tag 2 comprises memory cell 21, acceleration of gravity detector 22 and logic judgment unit 23, and described logic judgment unit 23 is connected with described acceleration of gravity detector 22 with described memory cell 21 respectively.Wherein, described acceleration of gravity detector 22 can the suffered acceleration of gravity of detecting real-time wafer cassette, the acceleration of gravity information that logic judgment unit 23 detects according to acceleration of gravity detector 22, judge whether wafer cassette lives through collision or fall, and then can be by the information in follow-up board reading electronic labels 2, know whether wafer cassette lives through collision or fall, if live through collision or fall, whether intactly need to scan detection, if do not live through collision or fall, can subsequent technique processing procedure.
Preferably, in the above-mentioned wafer cassette with abnormal collision or the measuring ability that drops, described electronic tag 2 also comprises LCDs 23, and described LCDs 23 is connected with described memory cell 21.By being set, liquid crystal display can show intuitively the information in memory cell 21.
Preferably, in the above-mentioned wafer cassette with abnormal collision or the measuring ability that drops, described memory cell 21 comprises maximum acceleration permissible value storage unit and the acceleration storage unit that whether exceeds standard, whether the acceleration permissible value storage unit of described maximum and acceleration exceed standard storage unit (for depositing G Flag value, please refer to Fig. 3) be connected with described logic judgment unit 23 respectively, acceleration permissible value storage unit and the acceleration of the described maximum storage unit that whether exceeds standard is connected with described LCDs 23 respectively.Utilize described memory cell 21 said structures, can whether experience collision or the risk that drops so that logic judgment unit 23 judges wafer cassette.
Preferably, in the above-mentioned wafer cassette with abnormal collision or the measuring ability that drops, described memory cell 21 also comprises basic information unit (BIU), and described basic information unit (BIU) is connected with described LCDs 23.
Preferably, in the above-mentioned wafer cassette with abnormal collision or the measuring ability that drops, an opposite side of described wafer cassette body 1 is respectively equipped with handle 3.
Refer to Fig. 3, and incorporated by reference to Fig. 1 and Fig. 2, Fig. 3 is the application flow schematic diagram of the utility model one embodiment, described acceleration of gravity detector 22 can the suffered acceleration of gravity of detecting real-time wafer cassette, the acceleration of gravity information that logic judgment unit 23 detects according to acceleration of gravity detector 22, judge whether wafer cassette lives through collision or fall, and then can be by the information in follow-up board reading electronic labels 2, know whether wafer cassette lives through collision or fall, if live through collision or fall, whether intactly need to scan detection, if do not live through collision or fall, can subsequent technique processing procedure.
Obviously, those skilled in the art can carry out various changes and modification and not depart from spirit and scope of the present utility model the utility model.Like this, if within of the present utility model these are revised and modification belongs to the scope of the utility model claim and equivalent technologies thereof, the utility model is also intended to comprise these changes and modification interior.
Claims (5)
1. a wafer cassette with abnormal collision or the measuring ability that drops, it is characterized in that, comprise wafer cassette body and electronic tag, described electronic tag is arranged at the side of described wafer cassette body, described electronic tag comprises memory cell, acceleration of gravity detector and logic judgment unit, and described logic judgment unit is connected with described acceleration of gravity detector with described memory cell respectively.
2. the wafer cassette with abnormal collision or the measuring ability that drops according to claim 1, is characterized in that, described electronic tag also comprises LCDs, and described LCDs is connected with described memory cell.
3. the wafer cassette with abnormal collision or the measuring ability that drops according to claim 2, it is characterized in that, described memory cell comprises maximum acceleration permissible value storage unit and the acceleration storage unit that whether exceeds standard, acceleration permissible value storage unit and the acceleration of the described maximum storage unit that whether exceeds standard is connected with described logic judgment unit respectively, and acceleration permissible value storage unit and the acceleration of the described maximum storage unit that whether exceeds standard is connected with described LCDs respectively.
4. the wafer cassette with abnormal collision or the measuring ability that drops according to claim 3, is characterized in that, described memory cell also comprises basic information unit (BIU), and described basic information unit (BIU) is connected with described LCDs.
5. the wafer cassette with abnormal collision or the measuring ability that drops according to claim 3, is characterized in that, an opposite side of described wafer cassette body is respectively equipped with handle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320672796.6U CN203774269U (en) | 2013-10-29 | 2013-10-29 | Wafer box with abnormal bumping or dropping detection function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320672796.6U CN203774269U (en) | 2013-10-29 | 2013-10-29 | Wafer box with abnormal bumping or dropping detection function |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203774269U true CN203774269U (en) | 2014-08-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320672796.6U Expired - Fee Related CN203774269U (en) | 2013-10-29 | 2013-10-29 | Wafer box with abnormal bumping or dropping detection function |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203774269U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020172861A1 (en) * | 2019-02-28 | 2020-09-03 | 深圳晶泰科技有限公司 | Quick collision detection method for crystal structure |
| CN113035733A (en) * | 2021-02-25 | 2021-06-25 | 长鑫存储技术有限公司 | Automatic wafer processing method and automatic wafer processing device |
-
2013
- 2013-10-29 CN CN201320672796.6U patent/CN203774269U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020172861A1 (en) * | 2019-02-28 | 2020-09-03 | 深圳晶泰科技有限公司 | Quick collision detection method for crystal structure |
| CN113035733A (en) * | 2021-02-25 | 2021-06-25 | 长鑫存储技术有限公司 | Automatic wafer processing method and automatic wafer processing device |
| US11961772B2 (en) | 2021-02-25 | 2024-04-16 | Changxin Memory Technologies, Inc. | Method and apparatus for automatically processing wafers |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140813 Termination date: 20191029 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |