CN203759357U - Optical image capturing system and optical detection system - Google Patents
Optical image capturing system and optical detection system Download PDFInfo
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- CN203759357U CN203759357U CN201420105222.5U CN201420105222U CN203759357U CN 203759357 U CN203759357 U CN 203759357U CN 201420105222 U CN201420105222 U CN 201420105222U CN 203759357 U CN203759357 U CN 203759357U
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- differential interference
- determinand
- line sweep
- image
- light
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- 230000003287 optical effect Effects 0.000 title claims abstract description 38
- 238000001514 detection method Methods 0.000 title claims abstract description 12
- 238000007598 dipping method Methods 0.000 claims description 23
- 238000003384 imaging method Methods 0.000 claims description 21
- 239000000571 coke Substances 0.000 claims description 15
- 238000009434 installation Methods 0.000 claims description 15
- 238000007689 inspection Methods 0.000 claims description 7
- 238000000034 method Methods 0.000 abstract description 5
- 230000000007 visual effect Effects 0.000 description 7
- 239000002245 particle Substances 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 238000011179 visual inspection Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
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- Investigating Or Analysing Materials By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Microscoopes, Condenser (AREA)
Abstract
An optical image capturing system and an optical detection system, the optical image capturing system is used for capturing an image of an object to be detected, and comprises a differential interference device with a light inlet end and a light outlet end, wherein light of the object to be detected enters the differential interference device from the light inlet end, and is emitted from the light outlet end after differential interference; the optical image capturing system further comprises a line scanning image capturing device connected to the light emitting end of the differential interference device for capturing light emitted from the light emitting end to generate a line scanning image. The optical detection system comprises the optical image capturing system and a detection module. The line scanning image capturing device is matched with the differential interference device, so that the arrangement direction of the photosensitive elements is parallel to the extension direction of an area which can be clearly imaged by the differential interference device, and the view field of the whole image capturing process which is captured by the linear photosensitive unit can be clearly imaged.
Description
Technical field
The utility model relates to a kind of optical image taking system, particularly relates to a kind of optical image taking system and Systems for optical inspection of line sweep formula differential interference.
Background technology
Consult Fig. 1, existing differential interferometer is generally used in personnel and observes on fine particle, utilizes the optical principle of phase differential, and can produce and have the different image of GTG value difference at the height difference place that is observed object.In automatic visual inspection (Automated Optical Inspection, AOI) system, differential interferometer is generally collocation face type charge coupled cell (Charge-coupled Device, CCD), and uses 10 times of above object lens.
This is because 5 times of following object lens, have the larger visual field, and produce as the imaging of Fig. 1, due to the optical characteristics of differential interferometer, cause (A) in figure, (C) though particle is known imaging in district, still the particle in (B) district cannot be known the phenomenon of imaging.Therefore, how to make to use the automatic visual inspection system of differential interferometer, can have in more wide-field situation at collocation low range object lens, can also all know imaging, just becoming one is worth the theme of studying.
Summary of the invention
The purpose of this utility model is to provide one can be applicable to more wide-field optical image taking system.
The purpose of this utility model is to provide one can be applicable to more wide-field Systems for optical inspection.
The utility model optical image taking system, for to a determinand capture, comprises:
One differential interference device, has a light inputting end and a bright dipping end, and the light of this determinand enters this differential interference device by this light inputting end, after differential interference, is sent by this bright dipping end; And
One line sweep image-taking device, is connected in this bright dipping end of this differential interference device, captures the light that this bright dipping end sends and produces a line sweep image.
Preferably, this optical image taking system also comprises one and automatically chases after coke installation, is connected, for automatically adjusting this light inputting end of this differential interference device and the distance of this determinand with this line sweep image-taking device information.
Preferably, this chases after linkage unit and a platform for this determinand of placement that coke installation comprises this differential interference device of a connection automatically.
Preferably, this line sweep image-taking device comprises that one has the line style photosensitive unit of multiple photo-sensitive cells, and described photo-sensitive cell is arranged along a direction, and the direction of arrangement is the bearing of trend that parallel this differential interference device can be known the region of imaging.
Preferably, this platform that automatically chases after coke installation, with respect to this line sweep image-taking device and by this determinand along moving perpendicular to the direction of photo-sensitive cell orientation, makes this line sweep image-taking device progressively obtain the image of whole determinand.
Preferably, this platform that automatically chases after coke installation is to make this line sweep image-taking device obtain whole images of this determinand with continuous movement.
Preferably, this differential interference device comprises from this light inputting end toward this bright dipping end along sequentially microcobjective, differential interference prism, the lens barrel of spread configuration of an optic axis, and analyzer, and is connected in polariscope and the light source of one of this lens barrel side.
The utility model Systems for optical inspection comprises:
One optical image taking system, for to a determinand capture, comprising:
One differential interference device, has a light inputting end and a bright dipping end, and the light of this determinand enters this differential interference device by this light inputting end, after differential interference, sent by this bright dipping end, with
One line sweep image-taking device, is connected in this bright dipping end of this differential interference device, captures the light that this bright dipping end sends and produces a line sweep image; And
One detection module, is electrically connected on this line sweep image-taking device, and this detection module receives this line sweep image, and carries out Determination.
The beneficial effects of the utility model are: by this line sweep image-taking device this differential interference device of arranging in pairs or groups, the direction that described photo-sensitive cell is arranged is that parallel this differential interference device can be known the bearing of trend in the region of imaging, and makes capture whole process all be kept clearly imaging by the visual field of line style photosensitive unit capture.
Brief description of the drawings
Fig. 1 is a striograph, and prior art is described;
Fig. 2 is a part of decomposing schematic representation, and a preferred embodiment of the utility model optical image taking system is described;
Fig. 3 is a combination schematic diagram, and this preferred embodiment is described;
Fig. 4 is a striograph, and this preferred embodiment is described; And
Fig. 5 is a local magnified image figure, is the magnified image in square frame in Fig. 4.
Embodiment
Below in conjunction with drawings and Examples, the utility model is elaborated.
Consult Fig. 2 and Fig. 3, the utility model optical image taking system is used for determinand 4 captures, and the preferred embodiment of this optical image taking system comprises a differential interference device 1, a line sweep image-taking device 2, and one chases after coke installation 3 automatically.
This differential interference device 1 has a light inputting end 101 and a bright dipping end 102 by and large, and the light of this determinand 4 enters this differential interference device 1 by this light inputting end 101, after differential interference, is sent by this bright dipping end 102, enters this line sweep image-taking device 2.In the present embodiment, this differential interference device 1 comprises from this light inputting end 101 toward this bright dipping end 102 along sequentially microcobjective 11, differential interference prism 12, the lens barrel 13 of spread configuration of an optic axis L, and analyzer 14, and be connected in polariscope 15 and the light source 16 of one of this lens barrel 13 side.
Consult in the lump Fig. 1, in prior art, differential interferometer can be known a not continuous scope of better observation scope of imaging, but multiple discontinuous strip regions (as (A) district in Fig. 1 and (C) district), each strip region along a direction (as in Fig. 1 longitudinally) extend, and be spaced along perpendicular other direction (in Fig. 1 laterally) respectively, therefore the visual field of low range object lens is easier to exceed single and can knows the strip region of imaging and contain the region that cannot know imaging in the prior art.
And this line sweep image-taking device 2 of the present embodiment is connected in this bright dipping end 102 of this differential interference device 1, captures the light that this bright dipping end 102 sends and produce a line sweep image.Specifically, this line sweep image-taking device 2 comprises that one has the line style photosensitive unit 21 of multiple photo-sensitive cells 211 (in Fig. 2,3 only with a signal), described photo-sensitive cell 211 is arranged along a direction, and the direction of arrangement is the bearing of trend that parallel this differential interference device 1 can be known the region of imaging.
The preferred embodiment of the utility model Systems for optical inspection comprises this optical image taking system and a detection module (not shown), this detection module is electrically connected on this line sweep image-taking device 2 and receives this line sweep image, wherein detection module preferably can be a main frame or an image processing program, by main frame or image processing program, this line sweep image is carried out to image processing, preferably can in the analysis mode analysis image of image comparison detection, whether there is fine particle moulding, but it is only for example that earlier figures picture is processed, and the utility model is not as limit.
This chases after linkage unit 31 and a platform 32 for this determinand 4 of placement that coke installation 3 comprises this differential interference device 1 of a connection automatically, this automatically chases after coke installation 3 and is connected with these line sweep image-taking device 2 information, and the distance of this determinand 4 on this light inputting end 101 that the light receiving according to this line sweep image-taking device 2 is adjusted this differential interference device 1 automatically and this platform 32 makes this line sweep image be known focusing.Wherein, how this linkage unit 31 moves non-the utility model emphasis with this platform 32, as long as can control the distance of this determinand 4 on this light inputting end 101 and this platform 32.
This platform 32 also coordinates this line sweep image-taking device 2 to move this determinand 4.The image of 2 capture gained of this line sweep image-taking device, wherein only has on one side 1 picture element, the picture element quantity of another side visual sense optical element 211 quantity and determine.This platform 32 is with respect to this line sweep image-taking device 2 and by this determinand 4 along moving perpendicular to the direction of photo-sensitive cell 211 orientations, make this line sweep image-taking device 2 progressively obtain the image of whole determinand 4, whereby, during capture, as long as can be known imaging by the region of capture, can obtain all images clearly of entirety, confirm through experiment, can obtain as the image of Fig. 4,5 (partial enlarged drawing of square frame in Fig. 4), the particle in central each region all can be known imaging, and the GTG uniformity coefficient of image obtains lifting.
Wherein, with needs, this does not automatically chase after coke installation 3 and automatically adjusts the distance of this determinand 4 on this light inputting end 101 and this platform 32 and be limited, under desirable state, as long as focused at the beginning, whole process just all can be known imaging, but in actual operation, add the function that automatically chases after Jiao, can make effect better, because platform 32 is in fact likely not smooth, or fail to keep identical angle with this line sweep image-taking device 2, and determinand 4 also may have the situation of inclination.What remark additionally is, this line sweep image-taking device 2 can be known the region of imaging, its bearing of trend is (as the maintaining the above-below direction in Fig. 1,4,5) of fixing, its position can be with the different of the distance of light inputting end 101 and this determinand 4 on this platform 32 and displacement (as the left and right directions top offset in Fig. 1,4,5), for instance, when the distance of this determinand 4 on this light inputting end 101 and this platform 32 reduces, this line sweep image-taking device 2 can know that the region of imaging may be to the left displacement in the visual field.Therefore this automatically chases after coke installation 3 and can make capture whole process all be kept clearly imaging by the visual field of line style photosensitive unit 21 captures by adjusting this distance, for instance, this platform 32 this line sweep image-taking device 2 in the time of primary importance can be known imaging, now this distance of this determinand 4 on this light inputting end 101 and this platform 32 is the first length, in the time that this platform 32 moves to the second place, may be because platform 32 out-of-flatnesses, fail to keep identical angle with this line sweep image-taking device 2, or determinand 4 has the situation of inclination, making this distance of this determinand 4 on this light inputting end 101 and this platform 32 is the second length, now this automatically chases after coke installation 3 and just can adjust and make this distance of this determinand 4 on this light inputting end 101 and this platform 32 revert back to the first length.
Other direction, because the scope of 2 captures of this line sweep image-taking device is less compared to face scanning, make platform 32 be able to continuous movement to obtain whole images of determinand 4, and use face when scanning, need on the contrary the capture of stopping midway, and then move to the next position, therefore use this line sweep image-taking device 2 to complete more fast in addition effect of capture.
In sum, by these line sweep image-taking device 2 these differential interference devices 1 of collocation, the direction that described photo-sensitive cell 211 is arranged is the bearing of trend that parallel this differential interference device 1 can be known the region of imaging, automatically chase after coke installation 3 and automatically adjust again the distance of this determinand 4 on this light inputting end 101 and this platform 32 by this, and make capture whole process all can be kept clearly imaging by the visual field of line style photosensitive unit 21 captures, therefore really can reach the object of the utility model.
As described above, it is only the preferred embodiment of the utility model, when not limiting with this scope of the utility model enforcement, the simple equivalence of generally doing according to the utility model claims and description changes and modifies, and all still belongs in the scope that the utility model contains.
Claims (8)
1. an optical image taking system, for to a determinand capture, is characterized in that, comprises:
One differential interference device, has a light inputting end and a bright dipping end, and the light of this determinand enters this differential interference device by this light inputting end, after differential interference, is sent by this bright dipping end; And
One line sweep image-taking device, is connected in this bright dipping end of this differential interference device, captures the light that this bright dipping end sends and produces a line sweep image.
2. optical image taking system according to claim 1, it is characterized in that: this optical image taking system also comprises one and automatically chases after coke installation, be connected with this line sweep image-taking device information, for automatically adjusting this light inputting end of this differential interference device and the distance of this determinand.
3. optical image taking system according to claim 2, is characterized in that: this chases after linkage unit and a platform for this determinand of placement that coke installation comprises this differential interference device of a connection automatically.
4. optical image taking system according to claim 3, it is characterized in that: this line sweep image-taking device comprises that one has the line style photosensitive unit of multiple photo-sensitive cells, described photo-sensitive cell is arranged along a direction, and the direction of arrangement is the bearing of trend that parallel this differential interference device can be known the region of imaging.
5. optical image taking system according to claim 4, it is characterized in that: this platform that automatically chases after coke installation, with respect to this line sweep image-taking device and by this determinand along moving perpendicular to the direction of photo-sensitive cell orientation, makes this line sweep image-taking device progressively obtain the image of whole determinand.
6. optical image taking system according to claim 5, is characterized in that: this platform that automatically chases after coke installation is to make this line sweep image-taking device obtain whole images of this determinand with continuous movement.
7. according to the optical image taking system described in arbitrary claim in claim 1 to 6, it is characterized in that: this differential interference device comprises from this light inputting end toward this bright dipping end along sequentially microcobjective, differential interference prism, the lens barrel of spread configuration of an optic axis, and analyzer, and be connected in polariscope and the light source of one of this lens barrel side.
8. a Systems for optical inspection, is characterized in that, comprises:
One optical image taking system, for to a determinand capture, comprising:
One differential interference device, has a light inputting end and a bright dipping end, and the light of this determinand enters this differential interference device by this light inputting end, after differential interference, sent by this bright dipping end, with
One line sweep image-taking device, is connected in this bright dipping end of this differential interference device, captures the light that this bright dipping end sends and produces a line sweep image; And
One detection module, is electrically connected on this line sweep image-taking device, and this detection module receives this line sweep image, and carries out Determination.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW102223704U TWM482072U (en) | 2013-12-16 | 2013-12-16 | Optical imaging system and optical inspection system |
| TW102223704 | 2013-12-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203759357U true CN203759357U (en) | 2014-08-06 |
Family
ID=51254612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420105222.5U Expired - Lifetime CN203759357U (en) | 2013-12-16 | 2014-03-10 | Optical image capturing system and optical detection system |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN203759357U (en) |
| TW (1) | TWM482072U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105424717A (en) * | 2014-09-05 | 2016-03-23 | 由田新技股份有限公司 | Optical detection device for detecting multiple defects |
-
2013
- 2013-12-16 TW TW102223704U patent/TWM482072U/en not_active IP Right Cessation
-
2014
- 2014-03-10 CN CN201420105222.5U patent/CN203759357U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105424717A (en) * | 2014-09-05 | 2016-03-23 | 由田新技股份有限公司 | Optical detection device for detecting multiple defects |
| CN105424717B (en) * | 2014-09-05 | 2017-12-15 | 由田新技股份有限公司 | Optical detection device for detecting multiple defects |
Also Published As
| Publication number | Publication date |
|---|---|
| TWM482072U (en) | 2014-07-11 |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140806 |