CN203759246U - Distance measuring device of point-source hologram - Google Patents
Distance measuring device of point-source hologram Download PDFInfo
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- CN203759246U CN203759246U CN201420034754.4U CN201420034754U CN203759246U CN 203759246 U CN203759246 U CN 203759246U CN 201420034754 U CN201420034754 U CN 201420034754U CN 203759246 U CN203759246 U CN 203759246U
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- 238000005259 measurement Methods 0.000 claims abstract description 46
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- 239000013078 crystal Substances 0.000 claims abstract description 29
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- 238000000034 method Methods 0.000 claims abstract description 15
- 239000004065 semiconductor Substances 0.000 claims abstract description 14
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- 230000010287 polarization Effects 0.000 claims description 12
- 239000004973 liquid crystal related substance Substances 0.000 claims description 7
- 230000008859 change Effects 0.000 claims description 5
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- 238000010168 coupling process Methods 0.000 claims description 5
- 238000005859 coupling reaction Methods 0.000 claims description 5
- 229910003327 LiNbO3 Inorganic materials 0.000 claims description 3
- 238000004804 winding Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 3
- 101150030337 CCD7 gene Proteins 0.000 description 15
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The utility model discloses a distance measuring device of a point-source hologram. The device is sequentially provided with a semiconductor laser device (10), a plane reflector (9), a measurement point (1), a lens (2), a linear polarizing film (3), a 1/4 wave plate (4), birefringent crystal (5), a linear polarizing film (6), an electronic charge apparatus (7) and a computer processing system (8) along the advance direction of a light path; the device collects a first hologram when the optical axis of the linear polarizing film (3) is vertical to the optical axis of the linear polarizing film (6), collects a second hologram when the optical axes are parallel, and processes according to the difference value between the first hologram and the second hologram to obtain the actual distance of the measurement point (1). A coaxial light path measurement system is adopted, so that the anti-interference performance of the system can be greatly enhanced, the device has the characteristics of being stable, high in efficiency and free of effect caused by tested surface characteristics, can achieve 1nm of measurement accuracy, and has a wide application prospect in the fields of industries.
Description
Technical field
The utility model relates to a kind of laser ranging system, is specifically related to a kind of point-source hologram distance measuring equipment.
Background technology
Since laser emerges, laser ranging technique has important application at aspects such as geographic survey, Industry Control and three-dimensional profile profile obtain, and constantly obtains development at full speed.
Time-of-flight method is a kind of typical laser ranging technique.In this technology, by the pulse of cooperative target Emission Lasers, measure the time that laser pulse returns from cooperative target to obtain testing distance.This technology has utilized laser pulse duration short, and energy is relatively concentrated in time, the feature that instantaneous power is large, and in the situation that having cooperative target, pulsed laser ranging can reach ranging extremely far away.In the time of the short range range finding of carrying out several kilometers, if accuracy requirement is not high, even if do not use cooperative target, only utilize the diffuse reflection of measured target paired pulses laser also can find range.Time-of-flight method is generally carried out the measurement of middle long-range distance, and measuring accuracy is generally 1 meter of left and right.
Phase method is another typical laser ranging technique.This technology is utilized the high frequency sinusoidal signal of fixed frequency, and continuous laser is carried out amplitude modulation(PAM) and measures the phase delay that light modulated round trip produces, then according to the frequency of modulation signal, the distance of this phase delay representative that converts.Laser Range Finding Based on Phase is generally used for the measurement of medium or short range distance, and measuring accuracy is the highest can reach a millimeter magnitude.
Trigonometry is to be irradiated on testee and to produce hot spot by beam of laser, through lens, hot spot is imaged on focal plane to placement location Sensitive Apparatus on focal plane by the light of body surface scattering or reflection.When object moves or during with light beam scanning object appearance profile, facula position is moved, near its corresponding occurrence positions of picture being positioned at focal plane changes, and can measure displacement or its appearance profile of object by position sensitive detector.When triangle measurement method, easily measured the restriction on inclined-plane.
There are some defects in above-mentioned existing ranging technology, for example, in the time being applied to the tri-dimensional facial type of industrial circle and measuring, the distance accuracy of these technology does not reach requirement, and is easily subject to measuring the impact of surface structure and causes measurement result unstable.Therefore, need to develop a kind of novel laser ranging technique, to overcome the above-mentioned defect of prior art.
Utility model content
The utility model relates to a kind of point-source hologram distance measuring equipment, it utilizes pointolite to take the common light path measuring system of hologram, can reach the measuring accuracy of 1 micron, and it is good to have anti-interference, stable, high-level efficiency and be not subject to the feature of measured surface properties influence, is with a wide range of applications at industrial circle.
According to first aspect of the present utility model, a kind of point-source hologram distance measuring equipment is provided, be disposed with semiconductor laser 10, plane mirror 9, measurement point 1, lens 2, linear polarizer 3, quarter wave plate 4, birefringece crystal 5, linear polarizer 6, beam coupling device (CCD) 7 and computer processing system 8 along light path working direction, wherein: semiconductor laser 10 is for sending laser; Catoptron 9 is arranged on the front of semiconductor laser 10, for the light path of laser is changed to measurement point 1; Measurement point 1 goes out laser diffuse reflection; Lens 2 are put 1 irreflexive light for convergence measurement, and after measurement point is imaged on to quarter wave plate 4; Linear polarizer 3 is arranged to polarization direction and can be rotated by system for winding main shaft, for changing the polarization direction of incident ray; Quarter wave plate 4 is arranged to its optical axis vertically; Birefringece crystal 5 is arranged to Z axis along system spindle direction, and vertically, x-y face is vertical with system spindle for y axle; The angle that linear polarizer 6 is arranged to optical axis and vertical direction is 45 ° of right avertence, for changing the polarization direction of incident ray; CCD7 is used for gathering hologram image signal and sends to computer processing system 8; Computer processing system 8 processes to obtain the actual range of measurement point 1 to lens for the hologram image signal to received; Wherein said CCD7 gathers the first hologram in the time that the optical axis of linear polarizer 3 and linear polarizer 6 is mutually vertical, in the time that the optical axis of the two is parallel to each other, gather the second hologram, described computer processing system 8 obtains the actual range of measurement point 1 according to the difference processing of this first hologram and the second hologram.
Wherein, be arranged to make 45 ° of the relative vertical direction left avertences of its optical axis direction mutually vertical with the optical axis of linear polarizer 6 to realize linear polarizer 3, be arranged to make 45 ° of the relative vertical direction right avertence of its optical axis direction to be parallel to each other to realize with the optical axis of linear polarizer 6 linear polarizer 3.
Optionally, described lens 2 are arranged to make measurement point 1 to be imaged between quarter wave plate 4 and birefringece crystal 5.
Optionally, described linear polarizer 3 is liquid crystal light valves, realizes the change of its polarization direction by the voltage of controlling liquid crystal light valve.
Optionally, described birefringece crystal 5 is LiNbO3 or kalzit.
Point-source hologram distance measuring equipment of the present utility model, owing to having adopted coaxial light path measuring system, can strengthen the anti-interference of system greatly, has stable, high-level efficiency and is not subject to the feature of measured surface properties influence, can reach the measuring accuracy of 1 micron.In addition, be also conducive to light path part to be integrated in a less volumetric spaces, be convenient to, by itself and other system, realize Integration Design as industrial control system, mapping system etc., be with a wide range of applications at industrial circle.
Brief description of the drawings
Fig. 1 has shown the structural representation of point-source hologram distance measuring equipment of the present utility model;
Fig. 2 has shown the work schematic diagram of birefringece crystal in the utility model point-source hologram distance measuring equipment;
Fig. 3 has shown the hologram image schematic diagram that in the utility model point-source hologram distance measuring equipment, CCD collects, Fig. 3 a hologram image that to be linear polarizer 3 take when vertical with 6 optical axises, Fig. 3 b hologram image that to be linear polarizer 3 take when parallel with 6 optical axises;
Fig. 4 has shown the binary image and the skeletonizing image that obtain after treatment, and wherein Fig. 4 a is binary image, and Fig. 4 b is skeletonizing image.
Embodiment
For making the purpose of this utility model, technical scheme and advantage more cheer and bright, below in conjunction with embodiment and with reference to accompanying drawing, the utility model is further described.Should be appreciated that, these descriptions are exemplary, and do not really want to limit scope of the present utility model.In addition, in the following description, omitted the description to known features and technology, to avoid unnecessarily obscuring concept of the present utility model.
Fig. 1 has shown the structural representation of point-source hologram distance measuring equipment of the present utility model.
As shown in Figure 1, point-source hologram distance measuring equipment of the present utility model mainly comprises light path part and computer processing system 8, wherein, light path part comprises successively along light path working direction: semiconductor laser 10, plane mirror 9, measurement point 1, lens 2, linear polarizer 3, quarter wave plate 4, birefringece crystal 5, linear polarizer 6 and beam coupling device (CCD) 7.
Semiconductor laser 10 is for sending laser.In a preferred embodiment, it is 0.5mm that semiconductor laser 10 sends diameter, the laser that wavelength is 650nm.But the utility model is not restricted to this, also can adopt as the case may be the laser instrument of other type or wave band.
Catoptron 9 is arranged on the front of semiconductor laser 10, changes to measurement point 1 for the light path of laser that semiconductor laser 10 is sent.The laser that semiconductor laser 10 sends is irradiated to measurement point 1 after catoptron 9 reflections, and measurement point 1 goes out laser diffuse reflection.
Lens 2 are put 1 irreflexive light for convergence measurement, and after measurement point is imaged on to quarter wave plate 4.In a preferred embodiment, measurement point 1 is imaged between quarter wave plate 4 and birefringece crystal 5, but the utility model is not restricted to this, also measurement point can be imaged on to the surperficial or inner of birefringece crystal 5, and does not affect the enforcement of the present embodiment.
Wherein, measurement point 1 meets lens imaging formula with the distance of lens 2 and the distance of picture point and lens 2:
Wherein f is the focal length of lens, and u is the distance of measurement point 1 apart from lens 2, and v is the distance of picture point apart from lens 2.
Linear polarizer 3 is for changing the polarization direction of incident ray.In preferred embodiment of the present utility model, linear polarizer 3 is arranged to polarization direction can the rotation of system for winding main shaft.Optionally, linear polarizer 3 can adopt liquid crystal light valve, realizes the variation of polarization direction by the voltage of controlling liquid crystal light valve.For example, be equivalent to linear polarizer 3 and rotated the effect of 90 ° by changing on liquid crystal light valve institute's making alive to designated value, can producing.
Quarter wave plate 4 has identical wavelength with the laser producing.In preferred embodiment of the present utility model, can select wavelength is the quarter wave plate of 650nm, and the optical axis of quarter wave plate is arranged to vertically.
Birefringece crystal 5 is for being decomposed into incident light perpendicular to the o light of optical axis (o vibration) and being parallel to these two components of optical axis (e vibration) e light.In preferred embodiment of the present utility model, birefringece crystal 5 can adopt LiNbO3, the birefringece crystals such as kalzit, this birefringece crystal is preferably arranged to main shaft (Z axis) along system spindle direction, y axle vertically, x axle along continuous straight runs, the x-y face vertical with system spindle (referring to Fig. 2) of birefringece crystal.
Fig. 2 has shown the work schematic diagram of birefringece crystal in the utility model point-source hologram distance measuring equipment.
Specifically, as depicted in figs. 1 and 2, the light of measurement point, after lensing, is propagated forward by picture point, incides birefringece crystal 5 to bore the form of light.In the time that light passes through birefringece crystal 5, except the light along birefringece crystal 5 optical axis directions, other light will be broken down into o light and e light.When from birefringece crystal outgoing, the phase differential of o light and e light
for:
Wherein, refraction angle when θ is light incident birefringece crystal 5, the wavelength that λ is incident laser, n
o, n
ebe respectively birefringece crystal principal refractive index with respect to o light and e light under incident wavelength, C is the length of birefringece crystal 5 along optical axis direction, Δ n=n
o-n
e.
Linear polarizer 6 is for changing the polarization direction of incident ray.In preferred embodiment of the present utility model, it is 45 ° of right avertence that the optical axis of linear polarizer 6 is arranged to the angle of vertical direction.
CCD7 is used for gathering hologram image signal and sends to computer processing system 8.CCD7 is connected with computer processing system 8 through data line.In preferred embodiment of the present utility model, CCD is of a size of 1/2 inch, but the CCD that uses other type instead does not affect the effect of the present embodiment.
Fig. 3 has shown the hologram image schematic diagram that in the utility model point-source hologram distance measuring equipment, CCD collects.
On the receiving plane of CCD7, there is o light and e light on the circumference of same distance with system spindle and there is identical phase differential
and along with radius of a circle becomes large, this phase differential
become large, thereby the hologram image that CCD7 is gathered is periodic structure, as shown in Figure 3.
Referring to Fig. 3, if can determine the relation of hologram image glazed thread phase place and radius of a circle, can, according to geometrical optics relation, obtain the position of measurement point picture point, and then obtain the positional information of measurement point.
Further, in the time that between measurement point and lens, distance u changes, image point position v also changes.This just makes the light θ that arrives CCD7 surface same position change, thereby the hologram image that CCD7 collects is changed.Monitor the change of hologram image by CCD7, can know the change of measurement point position.
Computer processing system 8 is electrically connected to CCD7 by data line, and the collection hologram image signal gathering for receiving CCD7 processes to obtain the actual range of measurement point 1 to lens to this signal.In the utility model, computer processing system 8 comprises the parts such as main frame, display, point-source hologram handling procedure.
Introduce the distance-finding method of point-source hologram distance measuring equipment of the present utility model below.
The point-source hologram of the present embodiment is obtained by following mode:
1) adopt semiconductor laser 10 illumination measurement points;
2) surface of retention wire polaroid 3, quarter wave plate 4, linear polarizer 6 is vertical with system spindle, then, by 45 ° of relative optical axis direction of linear polarizer 3 vertical direction left avertences, the optical axis direction of quarter wave plate 4 vertically, 45 ° of the relative vertical direction right avertence of the optical axis direction of linear polarizer 6 (being that linear polarizer 3 is mutually vertical with 6 optical axis);
3) birefringece crystal 5 major axes orientations are along system spindle direction, and the x of birefringece crystal, y face are vertical with system spindle, y axle overlap with vertical direction (referring to Fig. 2);
4) CCD7 gathers first hologram (as shown in Figure 3 a), and is delivered to computer processing system 8;
5) major axes orientation of adjustment linear polarizer 3 is 45 ° of relative vertical direction right avertence (main shaft that is linear polarizer 3 and 6 is parallel to each other), and CCD7 gathers second hologram (as shown in Figure 3 b), and is delivered to computer processing system 8.
The point-source hologram of the present embodiment is to be processed by the computer processing system 8 being connected with CCD7.By the point-source hologram handling procedure of operation computer processing system, can obtain the distance of measurement point apart from lens.
Point-source hologram handling procedure in the computer processing system of the present embodiment adopts following method to obtain the distance u of measurement point to lens, comprising:
1) by the first obtained hologram and the second hologram, (Fig. 3 a and Fig. 3 b) carry out filtering processing;
2) position of demarcation hologram phase place zero point (geometric center);
3) by the second hologram, (Fig. 3 b) deducts the first hologram, and (a), the data that obtain are carried out respectively binaryzation and skeletonizing processing to Fig. 3, obtain respectively binary image Fig. 4 a and skeletonizing image graph 4b;
4) determine the positional information of each bright fringes according to binary image Fig. 4 a;
Specifically, according to Fig. 4 a read hologram by phase place zero point in the x-direction to the level time n of the each bright fringes in hologram edge, the inferior n of this level has represented bright fringes residing positional information in hologram;
5) determine the phase information of each bright fringes according to skeletonizing image graph 4b.
Specifically, read hologram by edge to phase place each bright fringes at zero point center residing position coordinates in hologram according to Fig. 4 b, can determine the corresponding integer phase place of this coordinate according to step 4) again, this integer phase place has represented bright fringes residing phase information in hologram.
6) calculate respectively the position of measurement point according to the corresponding positional information of each bright fringes and phase information, these measurement point positional values are obtained to mean value to obtain final measurement point positional value.
[embodiment 1]
Fig. 3 is the point-source hologram that point-source hologram distance measuring equipment of the present utility model collects.First hologram Fig. 3 a captured hologram when to be linear polarizer 3 mutually vertical with 6 optical axis, second hologram Fig. 3 b is linear polarizer 3 and the hologram of 6 optical axises shooting when parallel.Fig. 3 a and Fig. 3 b meet respectively formula:
Fig. 3 b is deducted to Fig. 3 a and obtains a new figure, meet following formula:
Can be obtained the phase information of each point in CCD7 plane by this figure.This figure is carried out respectively to binaryzation and skeletonizing processing, obtain respectively binary image Fig. 4 a and skeletonizing image graph 4b.
Fig. 4 has shown the binary image and the skeletonizing image that obtain after treatment.
By Fig. 4 a can determine each bright fringes number level time (for example, bright fringes add up to 19, the level of each bright fringes time is respectively 1,2 ... 19), can be determined the center of each bright fringes by Fig. 4 b, i.e. the position of phase place integral multiple.
By following formula obtain corresponding certain one-level bright fringes k in birefringece crystal with the angle of system spindle:
Again by double refraction angle θ and picture point to the relational expression z=r/ θ n the interplanar distance z of CCD
o(in formula, r is the radial distance of certain one-level bright fringes k on CCD face) can obtain the position of picture point, and obtained the position of measurement point by (1) formula.
Point-source hologram distance measuring equipment of the present utility model and distance-finding method are owing to having adopted coaxial light path measuring system, can greatly strengthen the anti-interference of system, there is stable, high-level efficiency and be not subject to the feature of measured surface properties influence, can reach the measuring accuracy of 1 micron.In addition, be also conducive to light path part to be integrated in a less volumetric spaces, be convenient to, by itself and other system, realize Integration Design as industrial control system, mapping system etc., be with a wide range of applications at industrial circle.
Should be understood that, above-mentioned embodiment of the present utility model is only for exemplary illustration or explain principle of the present utility model, and do not form restriction of the present utility model.Therefore any amendment of, making, be equal to replacement, improvement etc., within all should being included in protection domain of the present utility model in the situation that not departing from spirit and scope of the present utility model.In addition, the utility model claims are intended to contain whole variations and the modification in the equivalents that falls into claims scope and border or this scope and border.
Claims (5)
1. a point-source hologram distance measuring equipment, be disposed with semiconductor laser (10), plane mirror (9), measurement point (1), lens (2), linear polarizer (3), quarter wave plate (4), birefringece crystal (5), linear polarizer (6), beam coupling device (7) and computer processing system (8) along light path working direction, wherein:
Semiconductor laser (10) is for sending laser;
Plane mirror (9) is arranged on the front of semiconductor laser (10), for the light path of laser being changed to measurement point (1);
Measurement point (1) goes out laser diffuse reflection;
Lens (2) are for the irreflexive light of convergence measurement point (1), and measurement point is imaged on to quarter wave plate (4) afterwards;
Linear polarizer (3) is arranged to polarization direction and can be rotated by system for winding main shaft, for changing the polarization direction of incident ray;
Quarter wave plate (4) is arranged to its optical axis vertically;
Birefringece crystal (5) is arranged to Z axis along system spindle direction, and vertically, x-y face is vertical with system spindle for y axle;
The angle that linear polarizer (6) is arranged to optical axis and vertical direction is 45 ° of right avertence, for changing the polarization direction of incident ray;
Beam coupling device 7 is for gathering hologram image signal and sending to computer processing system (8);
Computer processing system (8) processes to obtain the actual range of measurement point (1) to lens for the hologram image signal to received; Wherein
Described beam coupling device 7 gathers the first hologram in the time that the optical axis of linear polarizer (3) and linear polarizer (6) is mutually vertical, in the time that the optical axis of the two is parallel to each other, gather the second hologram, described computer processing system (8) obtains the actual range of measurement point (1) according to the difference processing of this first hologram and the second hologram.
2. point-source hologram distance measuring equipment according to claim 1, wherein, be arranged to make 45 ° of the relative vertical direction left avertences of its optical axis direction mutually vertical with the optical axis of linear polarizer (6) to realize linear polarizer (3), be arranged to make 45 ° of the relative vertical direction right avertence of its optical axis direction to be parallel to each other to realize with the optical axis of linear polarizer (6) linear polarizer (3).
3. point-source hologram distance measuring equipment according to claim 1, described lens (2) are arranged to make measurement point (1) to be imaged between quarter wave plate (4) and birefringece crystal (5).
4. point-source hologram distance measuring equipment according to claim 1, described linear polarizer (3) is liquid crystal light valve, realizes the change of its polarization direction by the voltage of controlling liquid crystal light valve.
5. point-source hologram distance measuring equipment according to claim 1, is characterized in that, described birefringece crystal (5) is LiNbO3 or kalzit.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201420034754.4U CN203759246U (en) | 2014-01-21 | 2014-01-21 | Distance measuring device of point-source hologram |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103698768A (en) * | 2014-01-21 | 2014-04-02 | 杭州先临三维科技股份有限公司 | Distance measuring device and distance measurement method of point-source hologram |
| CN107924562A (en) * | 2016-03-15 | 2018-04-17 | 欧姆龙株式会社 | Article detection device, object detecting method and program |
-
2014
- 2014-01-21 CN CN201420034754.4U patent/CN203759246U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103698768A (en) * | 2014-01-21 | 2014-04-02 | 杭州先临三维科技股份有限公司 | Distance measuring device and distance measurement method of point-source hologram |
| CN103698768B (en) * | 2014-01-21 | 2016-05-25 | 杭州先临三维科技股份有限公司 | Point-source hologram range unit and distance-finding method |
| CN107924562A (en) * | 2016-03-15 | 2018-04-17 | 欧姆龙株式会社 | Article detection device, object detecting method and program |
| CN107924562B (en) * | 2016-03-15 | 2021-04-20 | 欧姆龙株式会社 | Object detection device, object detection method, and recording medium |
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Address after: 311258 No. 1398, Wenbin Road, Wenyan street, Xiaoshan District, Hangzhou, Zhejiang. Patentee after: SHINING 3D TECH Co.,Ltd. Address before: 311215 Zhejiang Hangzhou Xiaoshan economic and Technological Development Zone Construction No. 66 Huarui Center 1 building 18 floor. Patentee before: HANGZHOU SHINING 3D TECH Co.,Ltd. |
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Granted publication date: 20140806 |