CN203733774U - 半导体叠层封装结构 - Google Patents

半导体叠层封装结构 Download PDF

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CN203733774U
CN203733774U CN201320850018.1U CN201320850018U CN203733774U CN 203733774 U CN203733774 U CN 203733774U CN 201320850018 U CN201320850018 U CN 201320850018U CN 203733774 U CN203733774 U CN 203733774U
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chip
package
packaging body
packaging
salient point
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张卫红
张童龙
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Tongfu Microelectronics Co Ltd
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Nantong Fujitsu Microelectronics Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA

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  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Abstract

本实用新型公布了一种半导体叠层封装结构,至少包括叠层设计的上封装体和封装有芯片的下封装体,所述封装有芯片的下封装体包括:基板、金属凸点、芯片、塑封体和焊球;所述金属凸点形成于所述基板上表面,用于连接上封装体和下封装体;所述芯片通过倒装方式连接在所述基板上表面,所述塑封体包覆所述芯片和金属凸点,并且露出所述芯片的顶部;所述焊球设置在所述基板下表面。本实用新型提供的半导体叠层封装结构,解除了现有封装技术中锡球互联的体积等限制,同时铜柱互联相对于锡球互联有更好的电性能,减少了传统叠层封装中封装体翘曲的问题,封装更加节省空间,具有较高的密度。

Description

半导体叠层封装结构
技术领域
本实用新型涉及一种半导体封装结构,尤其涉及一种半导体叠层封装结构。 
背景技术
POP(Package on Package叠层装配)技术的出现模糊了一级封装与二级装配之间的界线,在大大提高逻辑运算功能和存储空间的同时,也为终端用户提供了自由选择器件组合的可能,生产成本也得以更有效的控制。 
在POP结构中,记忆芯片通常以键合方式连接于基板,而应用处理器芯片以倒装方式连接于基板,记忆芯片封装体是直接叠在应用处理器封装体上,相互往往以锡球焊接连接。这样上下结构以减少两个芯片的互连距离来达到节省空间和获得较好的信号完整性。由于记忆芯片与逻辑芯片的连接趋于更高密度,传统封装的POP结构已经很有局限,在进行传统封装过程中,常常会遇到封装体翘曲等问题。 
实用新型内容
在下文中给出关于本实用新型的简要概述,以便提供关于本实用新型的某些方面的基本理解。应当理解,这个概述并不是关于本实用新型的穷举性概述。它并不是意图确定本实用新型的关键或重要部分,也不是意图限定本实用新型的范围。其目的仅仅是以简化的形式给出某些概念,以此作为稍后论述的更详细描述的前序。 
本实用新型提供一种半导体叠层封装结构,至少包括叠层设计的上封装体和封装有芯片的下封装体,所述封装有芯片的下封装体包括:基板、金属凸点、芯片、塑封体和焊球;所述金属凸点形成于所述基板上表面,用于连接上封装体和下封装体;所述芯片通过倒装方式连接在所述基板上表面,所述塑封体包覆所述芯片和金属凸点,并且露出所述芯片的顶部;所述焊球设置在所述基板下表面。 
本实用新型提供的半导体叠层封装结构,通过在基板上形成金属凸点实现互联,解除了现有封装技术中锡球互联的体积等限制;下封装体的芯片采用模塑底部填充技术固定芯片,减少了传统叠层封装中封装体翘曲的问题;同时,通过对塑封体的打磨将整个封装体的厚度减小了,金属凸点的高度也减小了,封装更加节省空间,具有较高的密度。 
附图说明
为了更清楚地说明本实用新型实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本实用新型的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。 
图1为本实用新型叠层封装结构示意图。 
附图标记: 
1-基板;      2-金属凸点;   3-芯片; 
4-塑封体;    5-焊球;       6-上封装体。 
具体实施方式
为使本实用新型实施例的目的、技术方案和优点更加清楚,下面将结合本实用新型实施例中的附图,对本实用新型实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例是本实用新型一部分实施例,而不是全部的实施例。在本实用新型的一个附图或一种实施方式中描述的元素和特征可以与一个或更多个其它附图或实施方式中示出的元素和特征相结合。应当注意,为了清楚的目的,附图和说明中省略了与本实用新型无关的、本领域普通技术人员已知的部件和处理的表示和描述。基于本实用新型中的实施例,本领域普通技术人员在没有付出创造性劳动的前提下所获得的所有其他实施例,都属于本实用新型保护的范围。 
图1为本实用新型提供的一种半导体叠层封装结构的示意图,如图1所示,所述结构至少包括叠层设置的上封装体和封装有芯片的下封装 体,所述封装有芯片的下封装体包括:基板1、金属凸点2、芯片3、塑封体4和焊球5;所述金属凸点2形成于所述基板1上表面,用于连接上封装体和下封装体;所述芯片3通过倒装方式连接在所述基板上表面,所述塑封体4包覆所述芯片3和金属凸点2,并且露出所述芯片的顶部;所述焊球5设置在所述基板下表面。 
首先提供基板,在基板上表面形成金属凸点,将芯片通过倒装方式连接在基板上表面,与下封装体形成电互通。 
可选的,凸点材料为具有高导电和高熔点的金属材料,如铜等,例如,金属凸点可为铜柱,铜柱的高度不必很高,低于塑封体顶部或者芯片顶部,可以根据实际情况的需要进行上下调整。本实施例中,金属凸点2的高度低于所述芯片3的厚度。 
在基板上表面形成金属凸点实现互联,解除了现有封装技术中锡球互联的体积等限制,同时,使用铜柱作为金属凸点相对于锡球有更好的电性能。 
可选的,所述芯片3通过底填塑封料方式固定在基板上表面,采用模塑底部填充技术,所述模塑底部填充技术是将成型化合物填充芯片的间隙并压缩整个芯片,使得固定和封装两个步骤一次性完成,减少了制造的时间,并且提高了机械稳定性;模塑底部填充技术能够降低成本,提高可靠性,并且减少了芯片的翘曲问题。 
上述用于模塑底部填充技术的胶为一种化学胶,主要成分可为环氧树脂,将芯片与下封装体上表面之间的空隙填满,并且包裹所述芯片,对填充胶进行加热固话,即可达到加固的目的,有保证了焊接工艺的电气安全性。 
所述塑封体包覆所述芯片和金属凸点,在生产制造过程中,所述将芯片和金属凸点先完全包覆在塑封体内,再打磨所述塑封体,将金属凸点的顶面和芯片的上表面裸露出来,经过打磨,整个封装体的厚度减小了,并且,露出所述芯片的表面,对于芯片的散热性能有更好的效果,一方面减薄了封装体的厚度使得封装更加趋于高密度,另一方面还增加了芯片的散热性能。 
对于现有封装方法越来越高密度的要求,通常也会采取减薄芯片的方法来减小封装体的大小,本实用新型通过在塑封后打磨,相应的可以 节省芯片减薄的工序;芯片的厚度大于所述金属凸点的高度,节省了金属凸点的材料,相对于其他叠层封装方法金属凸点的生长高度不必要过高。 
可选的,设置在所述基板下表面为焊球或者可焊接膜层,在基板下表面形成焊球为了便于以后焊接于印刷电路板上,除了布置焊球之外,还可以形成可焊接膜层,效果与焊球类似。本实用新型附图中提供的为基板下表面为焊球5的情况。 
本实用新型提供的半导体叠层封装结构中的上封装体和所述下封装体通过连接柱实现电互连;所述连接柱为金属凸点。 
本发明实施例中图1所示的上封装体基板底部有锡球,但是本方法仍然使用上封装层下表面有锡球加金属凸点的情况。同时,本方案提出的叠层封装为上下两个封装体的连接,根据实际的需要,叠层封装的封装体个数可以根据实际情况决定,可以在上封装体上表面叠层封装更多的芯片封装层,增加叠层封装的结构。 
可选的,所述上封装体上表面还可以设有一个或者多个封装体,封装体的个数根据实际应用的需要决定,所述上封装体上表面设有的多个封装体的结构可以是与上封装体或者是与下封装体相似的结构。 
本实施例提供的叠层封装方法包括任何顶部球栅阵列封装的情况,可以但是不仅仅应用于移动设备的芯片封装。 
本实用新型所述的叠层封装结构通过在下封装体基板上表面形成金属凸点解除了锡球互联的限制并且相对于单纯锡球互联,金属凸点采用铜柱,铜柱互联相比锡球互联有更好的电性能;下封装体表面的芯片封装后,通过打磨塑封体减少整体的厚度,使得叠层封装更加高密度,对塑封体的打磨使得芯片的表面裸露出来,提高了芯片的散热效果。 
在本实用新型的装置和方法等实施例中,显然,各部件或各步骤是可以分解、组合和/或分解后重新组合的。这些分解和/或重新组合应视为本实用新型的等效方案。同时,在上面对本实用新型具体实施例的描述中,针对一种实施方式描述和/或示出的特征可以以相同或类似的方式在一个或更多个其它实施方式中使用,与其它实施方式中的特征相组合,或替代其它实施方式中的特征。 
最后应说明的是:虽然以上已经详细说明了本实用新型及其优点, 但是应当理解在不超出由所附的权利要求所限定的本实用新型的精神和范围的情况下可以进行各种改变、替代和变换。而且,本实用新型的范围不仅限于说明书所描述的过程、设备、手段、方法和步骤的具体实施例。本领域内的普通技术人员从本实用新型的公开内容将容易理解,根据本实用新型可以使用执行与在此所述的相应实施例基本相同的功能或者获得与其基本相同的结果的、现有和将来要被开发的过程、设备、手段、方法或者步骤。因此,所附的权利要求旨在在它们的范围内包括这样的过程、设备、手段、方法或者步骤。 

Claims (7)

1.一种半导体叠层封装结构,至少包括叠层设计的上封装体和封装有芯片的下封装体,其特征在于,所述封装有芯片的下封装体包括:基板、金属凸点、芯片、塑封体和焊球;所述金属凸点形成于所述基板上表面,用于连接上封装体和下封装体;所述芯片通过倒装方式连接在所述基板上表面,所述塑封体包覆所述芯片和金属凸点,并且露出所述芯片的顶部;所述焊球设置在所述基板下表面。
2.根据权利要求1所述的半导体叠层封装结构,其特征在于,所述上封装体和所述下封装体通过连接柱实现电互连;所述连接柱为金属凸点。
3.根据权利要求1所述的半导体叠层封装结构,其特征在于,所述金属凸点为铜柱。
4.根据权利要求1所述的半导体叠层封装结构,其特征在于,所述金属凸点的高度小于芯片厚度。
5.根据权利要求1所述的半导体叠层封装结构,其特征在于,所述芯片通过底填塑封料方式固定在基板上表面。
6.根据权利要求1所述的半导体叠层封装结构,其特征在于,设置在所述基板下表面为焊球或者可焊接膜层。
7.根据权利要求1-6任一所述的半导体叠层封装结构,其特征在于,所述上封装体上表面还设有一个或者多个封装体。
CN201320850018.1U 2013-12-20 2013-12-20 半导体叠层封装结构 Expired - Lifetime CN203733774U (zh)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111977609A (zh) * 2020-08-28 2020-11-24 青岛歌尔智能传感器有限公司 传感器封装结构及传感器封装工艺

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111977609A (zh) * 2020-08-28 2020-11-24 青岛歌尔智能传感器有限公司 传感器封装结构及传感器封装工艺

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