CN203699393U - Automatic material handling system of maglev trolley - Google Patents
Automatic material handling system of maglev trolley Download PDFInfo
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- CN203699393U CN203699393U CN201320776620.5U CN201320776620U CN203699393U CN 203699393 U CN203699393 U CN 203699393U CN 201320776620 U CN201320776620 U CN 201320776620U CN 203699393 U CN203699393 U CN 203699393U
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- automatic transporting
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- dolly
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- 239000000463 material Substances 0.000 title claims abstract description 53
- 239000000725 suspension Substances 0.000 claims abstract description 26
- 230000005540 biological transmission Effects 0.000 claims abstract description 21
- 238000005339 levitation Methods 0.000 claims abstract description 20
- 230000001360 synchronised effect Effects 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims description 6
- SZVJSHCCFOBDDC-UHFFFAOYSA-N iron(II,III) oxide Inorganic materials O=[Fe]O[Fe]O[Fe]=O SZVJSHCCFOBDDC-UHFFFAOYSA-N 0.000 claims description 4
- 238000005516 engineering process Methods 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 description 11
- 239000002245 particle Substances 0.000 description 9
- 239000004065 semiconductor Substances 0.000 description 9
- 230000001133 acceleration Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 230000003993 interaction Effects 0.000 description 2
- 238000000746 purification Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000012010 growth Effects 0.000 description 1
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- Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
- Non-Mechanical Conveyors (AREA)
Abstract
The utility model discloses an automatic material handling system of a maglev trolley, which operates by utilizing the magnetic levitation technology. The automatic material handling system comprises an automatic handling trolley (OHT), an OHT track, and an OHT transmission system, wherein a wafer is operated on the OHT, a cantilever is arranged at the upper part of the OHT, and hung on the OHT track, a magnet is mounted on the cantilever, and another magnet is mounted on the OHT track, the magnet mounted on the cantilever 7 and that mounted on the OHT track form the OHT transmission system comprising three systems which are respectively a guidance system, a propulsion system and a suspension system; the guidance system ensures the OHT 5 to be operated along the OHT track; the propulsion system is operated in the direction of the OHT track; the propulsion system takes a linear synchronous motor as a power to be pushed forward; the suspension system ensures that the OHT can operate on the horizontal OHT track.
Description
Technical field
The utility model relates to semiconductor crystal wafer factory wafer material transferring, particularly a kind of maglev trolley automatic material handling system.
Background technology
Semiconductor fabrication is according to the development of Moore's Law, and the semiconductor factory of 300mm has become the main flow of global semiconductor industry.Due to the huge input of 300mm semiconductor production line, people's have to excavate as much as possible production efficiency of 300mm factory, to obtaining larger wafer output.An automatic material conveyer powerful and stable performance has been played the part of a very important role in 300mm factory.Automatic material conveyer not only can actv. utilizes the production space of valuable clean room, and can improve the degree of utilization of production facilities, shorten at the Cycle of goods WIP Time, so in the semiconductor factory of a lot of 300mm, automatic material conveyer is in fast lifting production capacity, increase production efficiency aspect and play the part of more and more important role, stability: because full factory all carries out the conveyance of wafer applying on a large scale automatic material conveyer, so once automatic material conveyer system et out of order will cause the production facilities of whole plant because there is no to stop production for the wafer of producing, and then have a strong impact on the normal production and operation, high efficiency: compared with the automatic material conveyer of 200mm semiconductor factory, the automatic material conveyer computed carrier amount of 300mm factory has had growths more than several times.In the face of in huge computed carrier amount, how to guarantee the conveyance efficiency of full factory, within the shorter time, complete the conveyance of wafer, for automatic material conveyer, be a huge challenge.Meanwhile, the height of automatic material conveyer conveyance efficiency, also will directly have influence on the degree of utilization of production facilities.The current traditional automatic material conveyer of wafer factory, compared with invented automatic material conveyer transmission system, has transmission efficiency low, and speed is slow, and noise is large, produces the problems such as particle is many.Therefore utilize magnetic levitation transmission system, eliminate the friction of transmitting device and track, improve speed of transmission, reduce particle and noise, in future, unmanned 450mm wafer factory has more advantage.
Utility model content
Wafer current factory tradition automatic material conveyer transmission system, has transmission efficiency low, and speed is slow, and noise is large, produces the problems such as particle is many.In order to address the above problem, magnetic levitation technology is applied to automatic material conveyer transmission system by we, utilizes magnetic levitation transmission system, eliminate the friction of transmitting device and track, improve speed of transmission, reduce particle and noise, in future, unmanned 450mm wafer factory has more advantage.
One wafer factory magnetic suspension automatic material handling system, wherein, described wafer factory magnetic suspension automatic material handling system utilizes magnetic levitation technology to realize operation, comprise automatic transporting dolly (automatic transporting dolly), automatic transporting trolley track and automatic transporting dolly transmission system, described automatic transporting dolly top is provided with cantilever, be suspended on described automatic transporting trolley track, on described cantilever, magnet is installed, magnet is also installed on described guide rail, also the magnet of installing on the magnet of installing on described cantilever and described guide rail forms described automatic transporting dolly transmission system, described automatic transporting dolly transmission system is respectively levitation device, propelling unit and levitation device,
Described guide piece is guidance magnets, and described guidance magnets, at described floor truck walker two ends, guarantees that automatic transporting dolly moves along automatic transporting trolley track direction;
Described propelling unit is take linear synchronous generator as power, and the rotor arrangements of described motor, on automatic transporting dolly, is laid on the stator of linear synchronous generator on transporting rail; In the coil that is positioned at transporting rail both sides, connect alternating current, coil is become electromagnet by described alternating current, and the interaction of the electromagnet on described permanent magnet and described dolly drives dolly to start.Described levitation device is suspension magnet, and described suspension magnet, in described propelling unit bottom, guarantees that automatic transporting dolly can move on horizontal automatic transporting trolley track.
Above-mentioned wafer factory magnetic suspension automatic material handling system, wherein, described guidance magnets is that arrange left and right two, and described automatic transporting dolly the right and left is respectively with a magnetite, utilizes the principle that opposite pole is inhaled mutually to keep automatic transporting dolly along automatic transporting trolley track direction linear running.
Above-mentioned wafer factory magnetic suspension automatic material handling system, wherein, described automatic transporting dolly the right and left respectively with a magnetite on the cantilever of automatic transporting dolly.
Above-mentioned wafer factory magnetic suspension automatic material handling system, wherein, the magnet of described propelling unit is two rows, its magnetic pole facing to cantilever of the adjacent magnet of the every row of magnet of described propelling unit is contrary each other, and the principle of utilizing two like magnetic poles repel each other to inhale mutually with opposite pole makes automatic transporting dolly advance along automatic transporting trolley track direction level.
Above-mentioned wafer factory magnetic suspension automatic material handling system, wherein, magnet on described levitation device automatic transporting trolley track is two rows, the magnetic pole of equidirectional adjacent magnet is contrary, form described levitation device with the magnet on described cantilever, guarantee automatic transporting dolly level run in operational process, limit described automatic transporting dolly and move up and down.
Above-mentioned wafer factory magnetic suspension automatic material handling system, wherein, described automatic transporting dolly is suspended in all the time on described automatic transporting trolley track in operational process; The speed of travel of automatic transporting dolly and acceleration/accel are the important parameters that affects automatic material conveyer overall operation efficiency.The higher speed of travel and acceleration/accel can reduce the time of single conveyance effectively; Magnetic suspension, because automatic transporting dolly separates with track, effectively improves running velocity, and simultaneously due to less friction force, speed is more prone to fast lifting; For current common automatic material conveyer, when conveyance task is too frequently time, itself can run into regular temporary term stop automatic transporting dolly, the speed that this time is too high and acceleration/accel can increase the burden of automatic transporting dolly car body itself on the contrary, accelerate the wearing and tearing of automatic transporting dolly car body, therefore, the road speed of automatic material conveyer all can be limited to, and magnetic suspension automatic material conveyer has overcome this problem; Tradition automatic material conveyer transmits the degree of purification that directly has influence on wafer factory because of the particle of car body and track friction generation, adopts maglev automatic material conveyer, and track separates with vehicle body, eliminates the particle that mechanical friction produces, and reduces noise simultaneously.
In 450mm semiconductor factory, although wafer size only increases by 1.5 times, wafer weight increases at least 2 times, as continues to use current 300mm wafer automatic material conveyer, and track and the wearing and tearing of automatic transporting dolly are more obvious.The track vehicle body of magnetic suspension automatic material conveyer separates, and the application advantage in 450mm wafer transfer is more obvious.
Adopt the beneficial effect after the utility model to be:
(1) improve automatic transporting carriage walking speed and acceleration/accel;
(2) reduce the wearing and tearing of automatic transporting dolly car body, increase the life-span of automatic transporting dolly transmission accessory;
(3) particle reducing in transmitting procedure produces and noise;
(4) automatic transporting cart transport ability has had significantly lifting.
Accompanying drawing explanation
Fig. 1 is a kind of wafer of the utility model factory magnetic suspension automatic material handling system schematic diagram;
Fig. 2 is a kind of wafer of the utility model factory magnetic suspension automatic material handling system guide piece principle of work schematic diagram;
Fig. 3 is a kind of wafer of the utility model factory magnetic suspension automatic material handling system propelling unit principle of work schematic diagram;
Fig. 4 is a kind of wafer of the utility model factory magnetic suspension automatic material handling system levitation device principle of work schematic diagram.
The specific embodiment
Below in conjunction with accompanying drawing 1 to 4 and concrete example, the utility model is described further, but not as restriction of the present utility model.
As shown in Figure 1, one wafer factory magnetic suspension automatic material handling system utilizes magnetic levitation technology to realize operation, comprise automatic transporting dolly (automatic transporting dolly) 5, automatic transporting trolley track 6 and automatic transporting dolly transmission system, wafer 1 is suspended on automatic transporting dolly 5, described automatic transporting dolly 5 tops are provided with cantilever 7, be suspended on described automatic transporting dolly 5 tracks 6, on described cantilever 7, magnet is installed, on described automatic transporting dolly 5 guide rails 6, magnet is also installed, also the magnet of installing on the magnet of installing on described cantilever 7 and described automatic transporting vehicle guide 6 forms described automatic transporting dolly transmission system, described automatic transporting dolly transmission system is respectively levitation device 2, propelling unit 3 and the large system of levitation device 4 three,
As shown in Figure 2, described levitation device 2 is guidance magnets, and described guidance magnets, at described floor truck walker two ends, guarantees that automatic transporting dolly 5 is along the 6 direction operations of automatic transporting trolley track.
As shown in Figure 3, described propelling unit 3 is take linear synchronous generator as power, and the rotor arrangements of described motor, on automatic transporting dolly 5, is laid on the stator of linear synchronous motor on transporting rail; In the coil that is positioned at track 6 both sides, connect alternating current, coil is become electromagnet by described alternating current, and the interaction of the electromagnet on described permanent magnet and described dolly 5 drives dolly 5 to start.
As shown in Figure 4, described levitation device 4 is suspension magnet, and described suspension magnet, in described propelling unit bottom, guarantees that automatic transporting dolly 5 can move on horizontal automatic transporting trolley track 6.
Automatic transporting dolly 5 is suspended in all the time on described automatic transporting trolley track 6 in operational process; The speed of travel of automatic transporting dolly 5 and acceleration/accel are the important parameters that affects automatic material conveyer overall operation efficiency.The higher speed of travel and acceleration/accel can reduce the time of single conveyance effectively; Magnetic suspension, because automatic transporting dolly 5 separates with automatic transporting trolley track 6, effectively improves running velocity, and simultaneously due to less friction force, speed is more prone to fast lifting; For current common automatic material conveyer, when conveyance task is too frequently time, automatic transporting dolly 5 itself can run into regular temporary term stop, the speed that this time is too high and acceleration/accel can increase the burden of automatic transporting dolly 5 car bodies itself on the contrary, accelerate the wearing and tearing of automatic transporting dolly 5 car bodies, therefore, the road speed of automatic material conveyer all can be limited to, and magnetic suspension automatic material conveyer has overcome this problem; Tradition automatic material conveyer transmits the degree of purification that directly has influence on wafer factory because of the particle of car body and track friction generation, adopt maglev automatic material conveyer, automatic transporting trolley track 6 separates with vehicle body, eliminates the particle that mechanical friction produces, and reduces noise simultaneously.In 450mm semiconductor factory, although wafer size only increases by 1.5 times, wafer weight increases at least 2 times, as continues to use current 300mm wafer automatic material conveyer, and track and the wearing and tearing of automatic transporting dolly are more obvious.The track vehicle body of magnetic suspension automatic material conveyer separates, and the application advantage in 450mm wafer transfer is more obvious.
The foregoing is only preferably example of the utility model; not thereby limit embodiment of the present utility model and protection domain; to those skilled in the art; the scheme that being equal to of should recognizing that all utilization the utility model specification sheetss and diagramatic content done replaces and apparent variation obtains, all should be included in protection domain of the present utility model.
Claims (6)
1. a maglev trolley automatic material handling system, it is characterized in that, comprise automatic transporting dolly, automatic transporting trolley track and automatic transporting dolly transmission system, described automatic transporting dolly top is provided with cantilever, be suspended on described automatic transporting trolley track, on described cantilever, magnet is installed, magnet is also installed on described guide rail, also the magnet of installing on the magnet of installing on described cantilever and described guide rail forms described automatic transporting dolly transmission system, and described automatic transporting dolly transmission system is divided into guide piece, propelling unit and levitation device;
Described guide piece is guidance magnets, and described guidance magnets is arranged on described floor truck walker two ends;
Described propelling unit is take linear synchronous generator as power, and the rotor arrangements of described linear synchronous generator, on automatic transporting dolly, is laid the stator of described linear synchronous generator on described track; In the coil that is positioned at described track both sides, lay alternating current;
Described levitation device is suspension magnet, and described suspension magnet is arranged on described propelling unit bottom.
2. maglev trolley automatic material handling system according to claim 1, it is characterized in that, described guidance magnets is that arrange left and right two, described automatic transporting dolly the right and left is respectively with a magnetite, utilizes the principle that opposite pole is inhaled mutually to keep automatic transporting dolly along automatic transporting trolley track direction linear running.
3. maglev trolley automatic material handling system according to claim 1, is characterized in that, described automatic transporting dolly the right and left respectively with a magnetite on the cantilever of automatic transporting dolly.
4. maglev trolley automatic material handling system according to claim 1, it is characterized in that, the magnet of described propelling unit is two rows, its magnetic pole facing to cantilever of the adjacent magnet of the every row of magnet of described propelling unit is contrary each other, and the principle of utilizing two like magnetic poles repel each other to inhale mutually with opposite pole makes automatic transporting dolly advance along automatic transporting trolley track direction level.
5. maglev trolley automatic material handling system according to claim 1, it is characterized in that, magnet on described levitation device automatic transporting trolley track is two rows, the magnetic pole of equidirectional adjacent magnet is contrary, form described levitation device with the magnet on described cantilever, guarantee automatic transporting dolly level run in operational process, limit described automatic transporting dolly and move up and down.
6. maglev trolley automatic material handling system according to claim 1, is characterized in that, described automatic transporting dolly is suspended in all the time on described automatic transporting trolley track in operational process.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320776620.5U CN203699393U (en) | 2013-11-29 | 2013-11-29 | Automatic material handling system of maglev trolley |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320776620.5U CN203699393U (en) | 2013-11-29 | 2013-11-29 | Automatic material handling system of maglev trolley |
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| CN203699393U true CN203699393U (en) | 2014-07-09 |
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| CN201320776620.5U Expired - Lifetime CN203699393U (en) | 2013-11-29 | 2013-11-29 | Automatic material handling system of maglev trolley |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104803199A (en) * | 2015-04-22 | 2015-07-29 | 上海电机学院 | Automatic transporting device of electromagnetic rail |
| CN105270871A (en) * | 2015-11-03 | 2016-01-27 | 西南交通大学 | Weight reduction heavy-duty transferring platform with controllable hybrid force of permanent magnets and electromagnets |
| CN105668231A (en) * | 2016-03-28 | 2016-06-15 | 马根昌 | Intelligent magnetic motion transfer device |
| CN106429460A (en) * | 2015-07-13 | 2017-02-22 | 南通大学 | High-reliability self-driving type magnetic suspension bend and straight composite circulation type conveying unit |
| CN108483254A (en) * | 2018-03-20 | 2018-09-04 | 北京石油化工学院 | A kind of double drive low-load overhead traveling cranes of driven suspension |
| CN108506342A (en) * | 2018-03-20 | 2018-09-07 | 北京石油化工学院 | A kind of double drive overhead traveling crane of active levitation |
| CN108584445A (en) * | 2018-01-18 | 2018-09-28 | 佛山科学技术学院 | A kind of remote-controllable magnetic levitation transmission system |
| CN109436002A (en) * | 2018-11-08 | 2019-03-08 | 中车长春轨道客车股份有限公司 | A kind of magnetic suspension secondary suspension device |
| CN109484794A (en) * | 2017-09-13 | 2019-03-19 | 京东方科技集团股份有限公司 | A kind of base plate transfer device |
| CN111392351A (en) * | 2020-03-23 | 2020-07-10 | 深圳柏缔自动化科技有限公司 | Material conveying equipment |
| CN111498509A (en) * | 2020-04-28 | 2020-08-07 | 上海磁骋交通科技有限公司 | Magnetic suspension transmission system |
| CN112061793A (en) * | 2020-08-28 | 2020-12-11 | 陈华青 | Magnetic suspension logistics transportation device |
-
2013
- 2013-11-29 CN CN201320776620.5U patent/CN203699393U/en not_active Expired - Lifetime
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104803199A (en) * | 2015-04-22 | 2015-07-29 | 上海电机学院 | Automatic transporting device of electromagnetic rail |
| CN104803199B (en) * | 2015-04-22 | 2017-09-29 | 上海电机学院 | A kind of electromagnetic path automatic carriage |
| CN106429460A (en) * | 2015-07-13 | 2017-02-22 | 南通大学 | High-reliability self-driving type magnetic suspension bend and straight composite circulation type conveying unit |
| CN105270871A (en) * | 2015-11-03 | 2016-01-27 | 西南交通大学 | Weight reduction heavy-duty transferring platform with controllable hybrid force of permanent magnets and electromagnets |
| CN105668231A (en) * | 2016-03-28 | 2016-06-15 | 马根昌 | Intelligent magnetic motion transfer device |
| CN105668231B (en) * | 2016-03-28 | 2017-09-29 | 冷国强 | Intelligent magnetic moves transporter |
| US11230436B2 (en) | 2017-09-13 | 2022-01-25 | Boe Technology Group Co., Ltd. | Substrate conveyance device |
| CN109484794A (en) * | 2017-09-13 | 2019-03-19 | 京东方科技集团股份有限公司 | A kind of base plate transfer device |
| CN108584445A (en) * | 2018-01-18 | 2018-09-28 | 佛山科学技术学院 | A kind of remote-controllable magnetic levitation transmission system |
| CN108506342A (en) * | 2018-03-20 | 2018-09-07 | 北京石油化工学院 | A kind of double drive overhead traveling crane of active levitation |
| CN108483254B (en) * | 2018-03-20 | 2019-07-26 | 北京石油化工学院 | A kind of double drive low-load overhead traveling cranes of driven suspension |
| CN108483254A (en) * | 2018-03-20 | 2018-09-04 | 北京石油化工学院 | A kind of double drive low-load overhead traveling cranes of driven suspension |
| CN109436002A (en) * | 2018-11-08 | 2019-03-08 | 中车长春轨道客车股份有限公司 | A kind of magnetic suspension secondary suspension device |
| CN109436002B (en) * | 2018-11-08 | 2024-05-28 | 中车长春轨道客车股份有限公司 | Magnetic suspension secondary suspension device |
| CN111392351A (en) * | 2020-03-23 | 2020-07-10 | 深圳柏缔自动化科技有限公司 | Material conveying equipment |
| CN111498509A (en) * | 2020-04-28 | 2020-08-07 | 上海磁骋交通科技有限公司 | Magnetic suspension transmission system |
| CN112061793A (en) * | 2020-08-28 | 2020-12-11 | 陈华青 | Magnetic suspension logistics transportation device |
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| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140709 |
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| CX01 | Expiry of patent term |