CN203697597U - Composite coating on surface of valve sealing element - Google Patents
Composite coating on surface of valve sealing element Download PDFInfo
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- CN203697597U CN203697597U CN201320631678.0U CN201320631678U CN203697597U CN 203697597 U CN203697597 U CN 203697597U CN 201320631678 U CN201320631678 U CN 201320631678U CN 203697597 U CN203697597 U CN 203697597U
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- 238000000576 coating method Methods 0.000 title claims abstract description 133
- 239000011248 coating agent Substances 0.000 title claims abstract description 129
- 239000002131 composite material Substances 0.000 title claims abstract description 46
- 238000007789 sealing Methods 0.000 title claims abstract description 26
- 239000011159 matrix material Substances 0.000 claims description 53
- 238000005121 nitriding Methods 0.000 claims description 13
- 239000000203 mixture Substances 0.000 claims description 10
- 238000005260 corrosion Methods 0.000 abstract description 9
- 230000007797 corrosion Effects 0.000 abstract description 7
- 239000000758 substrate Substances 0.000 abstract description 3
- 230000002349 favourable effect Effects 0.000 abstract 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 84
- 239000010410 layer Substances 0.000 description 77
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 64
- 229910052757 nitrogen Inorganic materials 0.000 description 42
- 229910052786 argon Inorganic materials 0.000 description 32
- 238000004062 sedimentation Methods 0.000 description 21
- 238000005516 engineering process Methods 0.000 description 15
- 238000007733 ion plating Methods 0.000 description 10
- 238000002441 X-ray diffraction Methods 0.000 description 8
- 239000007789 gas Substances 0.000 description 7
- 238000001994 activation Methods 0.000 description 6
- 238000005137 deposition process Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000000151 deposition Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- 239000010963 304 stainless steel Substances 0.000 description 4
- 229910000589 SAE 304 stainless steel Inorganic materials 0.000 description 4
- 230000004913 activation Effects 0.000 description 4
- 238000010276 construction Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- 238000005299 abrasion Methods 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 230000007704 transition Effects 0.000 description 3
- 238000004506 ultrasonic cleaning Methods 0.000 description 3
- 229910000619 316 stainless steel Inorganic materials 0.000 description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 208000037656 Respiratory Sounds Diseases 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 238000000026 X-ray photoelectron spectrum Methods 0.000 description 2
- 238000005422 blasting Methods 0.000 description 2
- 238000007751 thermal spraying Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 238000010923 batch production Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000008199 coating composition Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 239000001488 sodium phosphate Substances 0.000 description 1
- 229910000162 sodium phosphate Inorganic materials 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- Physical Vapour Deposition (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
Abstract
The utility model provides a composite coating on the surface of a valve sealing element. The composite coating consists of a Cr layer, a CR/Cr2N layer, a Cr2N layer, a Cr2N/CrN layer and a CrN layer stacked in sequence on the surface of the valve sealing element from the bottom to the top by taking the valve sealing element as a substrate. Compared with the CrN coatings which are in simple structures, the composite coating uses a plurality of layers of gradients, so that the bearing wear resistance and the corrosion resistance of the coating are improved and the composite coating has the favorable application prospect.
Description
Technical field
The utility model belongs to component of machine surface strengthening treatment technology field, is specifically related to the composite coating on a kind of valve sealing element surface.
Background technology
Valve is widely used in the projects such as oil, chemical industry and power plant construction.Valve sealing element is a vitals of valve.In actual applications, require valve sealing element long service life, minimumly can guarantee that (general 1～2 year) valve does not damage within a turn(a)round, to guarantee the normal operation of whole system safety.For example, higher for the valve sealing element requirement of nuclear power station, must guarantee that safe operation is more than 30 years; Some petrochemical pipe privileged sites is also very high to the requirement of valve sealing element, must guarantee that safety switch is more than 100,000 times.
In addition, in use, its seal in medium, is subject to the corrosion of medium and washes away valve for a long time, also exists the friction and wear between the sealing pair under seal pressure effect simultaneously, and therefore working condition is quite harsh.For improving the performances such as anticorrosive, the heat resistanceheat resistant of seal and anti scuffing, generally the process for treating surface such as built-up welding, thermal spraying is applied in valve sealing element.But because the protective layer porosity of built-up welding and thermal spraying acquisition is higher, corrosive medium easily runs through coating by pin hole and crackle etc. and causes the entirety of coating to be peeled off, and causes seal failure.
At present, utilizing CrN coating prepared by PVD technology is the protective coating that wear parts mainly adopts.But, traditional CrN coating with columnar crystal structure is easily corroded and is come off in corrosive medium, and coating fragility is larger, under contact stress effect, holiday (dimpling, Wei Keng, stress raiser etc.) locates to be easy to germinate crackle, causes early stage improper the peeling off and the wear out failure that accelerates fatigue of coating.Therefore, the single CrN coating of tradition has been difficult to adapt to harsh operating mode Service Environment and the performance requirement of valve sealing element in current and following high mechanical load and corrosive environment, as low friction, long-life and corrosion resistance etc. under heavy duty.
Utility model content
Technical purpose of the present utility model is the deficiency for above-mentioned existing valve sealing element face coat, and the composite coating on a kind of valve sealing element surface is provided, and this composite coating has higher abrasion resistance properties and decay resistance.
For realizing above-mentioned technical purpose, the utility model adopts following technical scheme: the composite coating on a kind of valve sealing element surface, this coating is take valve sealing element as matrix, and as shown in Figure 1, this coating is stacked gradually Cr layer, the Cr/Cr of arrangement from bottom to top by matrix surface
2n layer, Cr
2n layer, Cr
2n/CrN layer, and CrN layer composition; Wherein, Cr/Cr
2n layer is by Cr and Cr
2the coating that N is mixed to form; Cr
2n/CrN coating is by CrN and Cr
2the coating that N is mixed to form; The thickness of described composite coating is 30 μ m～50 μ m.
As preferably, the thickness of described Cr layer is 1um～2um; Described Cr/Cr
2the thickness of N layer is 8um～12um; Described Cr
2the thickness of N layer is 8um～12um; Described Cr
2the thickness of N/CrN layer is 8um～12um; Described Cr
2the thickness of N layer is 8um～12um.
In order to improve the hardness of matrix, as preferably, first described matrix surface carries out glow discharge nitriding processing.
The utility model also provides a kind of method of the composite coating of preparing above-mentioned valve sealing element surface, and the method adopts multi sphere ion plating technology, specifically comprises the steps:
Step 1, to matrix surface clean, oil removing, surface activation process;
As preferably, utilize ultrasonic wave to carry out ultrasonic cleaning to matrix surface;
As preferably, described surface activation process is: matrix is placed in to filming equipment vacuum cavity and utilizes argon plasma to applying the matrix surface bombardment activation of back bias voltage.Further preferably, described vacuum cavity is evacuated to (3～6) × 10
-3pa, by substrate preheating to 400 ℃～450 ℃, passes into work argon gas 100～350sccm, starts grid bias power supply, with-900～-1200V bias voltage bombardment matrix 10 minutes, makes matrix surface activation;
Step 2, matrix after treatment step 1 is placed in to filming equipment vacuum cavity, select Cr target, Cr target current is 50～100A, on workpiece, apply-20～-50V back bias voltage, controlling heating-up temperature is 400 ℃～450 ℃, pass into argon gas and nitrogen, by control argon flow amount, nitrogen flow and sedimentation time deposits Cr layer successively at matrix surface, by Cr and Cr
2the Cr/Cr that N is mixed to form
2n layer, Cr
2n layer, by Cr
2the Cr that N and CrN are mixed to form
2n/CrN layer, and CrN layer composition, specific as follows:
(1) argon flow amount remains 100sccm～200sccm, and nitrogen flow is 0sccm, deposits 1 hour～2 hours, obtains Cr layer;
(2) argon flow amount remains 100sccm～200sccm, and nitrogen flow is 20sccm～30sccm, and sedimentation time is 8 hours～12 hours, obtains by Cr and Cr
2the Cr/Cr that N is mixed to form
2n layer;
(3) argon flow amount remains 100sccm～200sccm, and nitrogen flow is 45sccm～50sccm, and sedimentation time is 8 hours～12 hours, obtains Cr
2n layer;
(4) argon flow amount remains 100sccm～200sccm, and nitrogen flow is 75sccm～125sccm, and sedimentation time is 8 hours～12 hours, obtains by Cr
2the Cr that N and CrN are mixed to form
2n/CrN layer;
(5) argon flow amount remains 0～100sccm, and nitrogen flow is 200sccm～400sccm, and sedimentation time is 8 hours～12 hours, obtains CrN layer;
As preferably, two groups of Cr targets are set in described vacuum plant, every group is three Cr targets of upper, middle and lower positioned vertical;
As preferably, described nitrogen is selected high-purity 99.95% nitrogen;
Step 3, treat coating deposition after, under vacuum environment, be cooled to below 220 ℃, then under nitrogen protection atmosphere, be cooled to below 100 ℃, finally exit to atmospheric pressure, begin to speak to come out of the stove, obtain composite coating at matrix surface.
In order to improve the hardness of matrix self, for follow-up composite coating provides the matrix of high rigidity, as preferably, after described step 1, carry out matrix surface glow discharge nitriding processing, make matrix surface obtain the nitriding layer of high rigidity, then carry out step 2.Further preferably, this nitriding processing is specially: matrix after treatment step 1 is placed in to filming equipment vacuum cavity, passing into nitrogen flow is 1000～1200sccm, operating air pressure is controlled at 8～10Pa, matrix applies-800～-1000V back bias voltage, temperature is controlled at 450～500 ℃, and the nitriding processing time is 2～4 hours.
In sum, the utility model is the composite coating structure that multilayer component gradient changes by the coated designs of valve sealing element matrix surface, compared with the single CrN coating of preparing, has following beneficial effect with existing PVD technology:
(1) adopt the coating structure of multi-gradient, by coating composition by Cr through Cr
2n, gradually to CrN transition, has not only reduced the residual stress in coated grains size and lattice, has improved the deposit thickness of film, thereby has significantly improved the carrying abrasion-resistance of coating; And formed heterogeneous nanocrystalline and amorphous composite construction, and interrupt single crystal orientation growth, can effectively prevent that corrosive medium from running through coating and causing that coating lost efficacy and peeled off, and had improved the decay resistance of coating.
(2) in addition, the utility model adopts multi sphere ion plating technology to prepare this composite coating, deposits successively and obtains Cr layer, Cr/Cr at matrix surface by controlling argon flow amount, nitrogen flow and sedimentation time
2n layer, Cr
2n layer, Cr
2n/CrN layer, and CrN layer, compared with the single CrN coating of preparing with existing PVD technology, this preparation method is simple, can realize batch production, can obtain the super thick gradient composite coating of wear-resistant, corrosion-resistant and anti-contact fatigue characteristic.As preferably, after combining with glow discharge nitriding technology, can further strengthen matrix hardness, obtain the super thick gradient composite coating of high rigidity, wear-resistant, corrosion-resistant and anti-contact fatigue characteristic.
Therefore, composite coating of the present utility model can meet the high performance requirements to valve sealing element under bad working environments condition, in high accuracy aqueous vapor induction system equipment, petrochemical pipe and nuclear power plant equipment etc., has a good application prospect.
Accompanying drawing explanation
Fig. 1 is the composition structural representation of the composite coating on the utility model valve sealing element surface;
Fig. 2 to Fig. 8 is the Cross Section Morphology that the utility model embodiment 1 adopts the coating 1-7 of different nitrogen flows generations;
Fig. 9 is the XRD spectra of the coating 1-7 that makes in the utility model embodiment 1;
Figure 10 (a) and Figure 10 (b) are the XPS spectrum figure of the coating 1-7 that makes in the utility model embodiment 1;
Figure 11 is the TEM figure of the composite coating that makes in the utility model embodiment 2.
The specific embodiment
Below in conjunction with accompanying drawing, embodiment is described in further detail the utility model, it is pointed out that the following stated embodiment is intended to be convenient to understanding of the present utility model, and it is not played to any restriction effect.
Embodiment 1:
In the present embodiment, matrix is selected valve 304 stainless steel spheroids or butterfly valve 316 stainless steel dish plates.To multiple matrix sample clean, oil removal treatment, then utilize multi sphere ion plating technology respectively at each matrix surface deposited coatings, in the deposition process of each sample, Cr target is selected in ion plating, the electric current of Cr target remains 50～100A, on matrix, apply-20～-50V back bias voltage, control heating-up temperature and remain 400 ℃～450 ℃ in deposition process, the concrete sedimentary condition of different samples is as follows respectively.
(1) sample 1: argon flow amount remains 100sccm, nitrogen flow is 25sccm, sedimentation time is 4 hours, obtains coating 1;
The Cross Section Morphology of this coating 1 as shown in Figure 2, can find out that the planar thickness of this coating is about 3.3um, its surfacing.Known according to the XRD spectra that generates coating under the different nitrogen flows shown in Fig. 3, this coating is by Cr and Cr
2the Cr/Cr that N is mixed to form
2n layer;
(2) sample 2: argon flow amount remains 100sccm, nitrogen flow is 50sccm, sedimentation time is 4 hours, obtains coating 2;
The Cross Section Morphology of this coating 2 as shown in Figure 3, can find out that the planar thickness of this coating is about 3.75um, its surfacing.Known according to the XRD spectra that generates coating under the different nitrogen flows shown in Fig. 3, this coating is by Cr
2the Cr that N forms
2n layer;
(3) sample 3: argon flow amount remains 100sccm, nitrogen flow is 75sccm, sedimentation time is 4 hours, obtains coating 3;
The Cross Section Morphology of this coating 3 as shown in Figure 4, can find out that the planar thickness of this coating is about 4.15um, its surfacing.Known according to the XRD spectra that generates coating under the different nitrogen flows shown in Fig. 3, this coating is by Cr
2the CrN layer that N forms;
(4) sample 4: argon flow amount remains 100sccm, nitrogen flow is 100sccm, sedimentation time is 4 hours, obtains coating 4;
The Cross Section Morphology of this coating 4 as shown in Figure 5, can find out that the planar thickness of this coating is about 4.4um, its surfacing.Known according to the XRD spectra that generates coating under the different nitrogen flows shown in Fig. 3, this coating is by Cr
2the Cr that N and CrN are mixed to form
2n/CrN layer.
(5) sample 5: argon flow amount remains 100sccm, nitrogen flow is 125sccm, sedimentation time is 4 hours, obtains coating 5;
The Cross Section Morphology of this coating 5 as shown in Figure 6, can find out that the planar thickness of this coating is about 4.66um, its surfacing.Known according to the XRD spectra that generates coating under the different nitrogen flows shown in Fig. 3, this coating is by Cr
2the Cr that N and CrN are mixed to form
2n/CrN layer.
(6) sample 6: argon flow amount remains 100sccm, nitrogen flow is 150sccm, sedimentation time is 4 hours, obtains coating 6;
The Cross Section Morphology of this coating 6 as shown in Figure 7, can find out that the planar thickness of this coating is about 5.25um, its surfacing.Known according to the XRD spectra that generates coating under the different nitrogen flows shown in Fig. 3, this coating is by Cr
2the Cr that N and CrN are mixed to form
2n/CrN layer.
(7) sample 7: argon flow amount remains 100sccm, nitrogen flow is 200sccm, sedimentation time is 4 hours, obtains coating 7;
The Cross Section Morphology of this coating 7 as shown in Figure 8, can find out that the planar thickness of this coating is about 4.2um, its surfacing.Known according to the XRD spectra that generates coating under the different nitrogen flows shown in Fig. 3, this coating is the CrN layer being formed by CrN.
The XPS spectrum figure of the above-mentioned coating 1-7 making if Figure 10 (a) is with as shown in Figure 10 (b), can find out by adjusting argon flow amount and nitrogen flow, can generate the coating of heterogeneity.
Embodiment 2:
In the present embodiment, matrix part is valve 304 stainless steel spheroids, the composite coating of this matrix surface be by matrix surface stack gradually the Cr layer of arrangement from bottom to top, by Cr and Cr
2the Cr/Cr that N is mixed to form
2n layer, Cr
2n layer, by Cr
2the Cr that N and CrN are mixed to form
2n/CrN layer, and CrN layer composition.Wherein, the thickness of this composite coating is 30 μ m～50 μ m.Wherein, the thickness of Cr layer is 0.3um～1um; Cr/Cr
2the thickness of N layer is 5um～10um; Cr
2the thickness of N/CrN layer is that the thickness of CrN layer is 5um～8um.
Adopt glow discharge nitriding technology and multi sphere ion plating technology to prepare above-mentioned composite coating, concrete preparation process is as follows:
1,304 stainless steel spheroids are carried out to blasting treatment, the technological parameter of blasting treatment is: pressure 0.3MPa, and sand rain size is 320#, sandblast distance is 100mm; Then, by the ultrasonic cleaning 20 minutes in acetone soln of 304 stainless steel spheroids, proceed to sodium carbonate 30g/L after air-dry, in sodium phosphate 50g/L mixed solution, at 60 ℃, process 5 minutes, warm water ultrasonic cleaning, nitrogen is air-dry and dry at 80 ℃; The vacuum chamber that again 304 stainless steels is placed in to glow discharge nitriding and multi-arc ion coating Integration Equipment, base vacuum is evacuated to 4 × 10
-3pa, by substrate preheating to 400～450 ℃, utilizes argon plasma to applying the matrix surface bombardment activation of back bias voltage, 350sccm flow passes into work argon gas, start grid bias power supply, respectively with-900 ,-1100 and-each 2 minutes of the enough parts of 1200V bias voltage bombardment sealing, make matrix surface activation.
2, the glow discharge nitriding of matrix surface:
Passing into nitrogen flow is 1200sccm, and operating air pressure is controlled at 10Pa, applies-800～-1000V back bias voltage on matrix, temperature is controlled at 500 ℃, the nitriding processing time is 2-4 hour, after completing, obtains the nitriding layer of high rigidity at matrix surface, for follow-up thick coating provides the matrix of high rigidity.
3, the coating CrN of matrix surface
xgradient coating:
Pass into argon gas and high-purity nitrogen (purity is 99.95%), at the thick compound CrN of matrix surface deposition 30～50 μ m
xgradient coating, in deposition process, ion plating Cr target current is 50～100A, applies-20～-50V back bias voltage on matrix, and when plated film, controlling heating-up temperature is 400 ℃, and concrete deposition process is as follows:
Specific as follows:
(1) argon flow amount remains 100sccm, and nitrogen flow is 0, deposits 1 hour, obtains Cr layer;
(2) argon flow amount remains 100sccm, and nitrogen flow is 25sccm, and sedimentation time is 8 hours, obtains by Cr and Cr
2the Cr/Cr that N is mixed to form
2n layer;
(3) argon flow amount remains 100sccm, and nitrogen flow is 50sccm, and sedimentation time is 8 hours, obtains Cr
2n layer;
(4) argon flow amount remains 100sccm, and nitrogen flow is 100sccm, and sedimentation time is 8 hours, obtains by Cr
2the Cr that N and CrN are mixed to form
2n/CrN layer;
(5) argon flow amount remains 100sccm, and nitrogen flow is 200sccm, and sedimentation time is 8 hours, obtains CrN layer.
4, after coating deposition forms, under vacuum environment, be cooled to below 220 ℃, be then filled with protective gas N
2, under protective atmosphere, be cooled to below 100 ℃, exit to atmospheric pressure, begin to speak to come out of the stove, finally obtain the super thick gradient CrN of high rigidity, high abrasion, high anti-corrosion and anti-contact fatigue characteristic at matrix surface
xcomposite coating.
The TEM of the above-mentioned composite coating making schemes as shown in figure 11, and the thickness of this coating is about 35-40um.As can be seen from the figure, this coating be from matrix surface, stack gradually the Cr layer of arrangement from bottom to top, by Cr and Cr
2the Cr/Cr that N is mixed to form
2n layer, Cr
2n layer, by Cr
2the Cr that N and CrN are mixed to form
2n/CrN layer, and CrN layer composition., this coating be composition by Cr through Cr
2n is gradually to the CrN multi-layer composite coatings of gradual transition in gradient.
Just because of this gradient multi-layer compound structure, not only reduce the residual stress in single coating crystallite dimension and lattice, improve the deposit thickness of coating, thereby significantly improved the carrying abrasion-resistance of coating; And formed heterogeneous nanocrystalline and amorphous composite construction, and interrupt single crystal orientation growth, can effectively prevent that corrosive medium from running through coating and causing that coating lost efficacy and peeled off, and had improved the decay resistance of coating.
In addition, above-mentioned composite coating adopts multi sphere ion plating technology combine with nitridation technique and prepare, not only simple, and this can further strengthen matrix hardness, obtains the super thick gradient composite coating of high rigidity, wear-resistant, corrosion-resistant and anti-contact fatigue characteristic.
Embodiment 3:
In the present embodiment, matrix part is butterfly valve 316 stainless steel dish plates, the composite coating of this matrix surface be by matrix surface stack gradually the Cr layer of arrangement from bottom to top, by Cr and Cr
2the Cr/Cr that N is mixed to form
2n layer, Cr
2n layer, by Cr
2the Cr that N and CrN are mixed to form
2n/CrN layer, and CrN layer composition.Wherein, the thickness of this composite coating is 30 μ m～50 μ m.Wherein, the thickness of Cr layer is 0.3um～1um; Cr/Cr
2the thickness of N layer is 5um～10um; Cr
2the thickness of N/CrN layer is that the thickness of CrN layer is 5um～8um.
Adopt glow discharge nitriding technology and multi sphere ion plating technology to prepare above-mentioned composite coating, the step 1 in concrete preparation process and step 2 respectively with embodiment 2 in step 1 identical with step 2, step 3 and step 4 are as follows:
3, pass into argon gas and high-purity nitrogen (purity is 99.95%), at the thick CrNx complex gradient coating of matrix surface deposition 30～50 μ m, in deposition process, ion plating Cr target current is 50～100A, on matrix, apply-20～-50V back bias voltage, when plated film, controlling heating-up temperature is 400 ℃, and concrete deposition process is as follows:
Specific as follows:
(1) argon flow amount remains 100sccm, and nitrogen flow is 0, deposits 2 hours, obtains Cr layer;
(2) argon flow amount remains 100sccm, and nitrogen flow is 25sccm, and sedimentation time is 12 hours, obtains by Cr and Cr
2the Cr/Cr that N is mixed to form
2n layer;
(3) argon flow amount remains 100sccm, and nitrogen flow is 50sccm, and sedimentation time is 12 hours, obtains Cr
2n layer;
(4) argon flow amount remains 100sccm, and nitrogen flow is 100sccm, and sedimentation time is 12 hours, obtains by Cr
2the Cr that N and CrN are mixed to form
2n/CrN layer;
(5) argon flow amount remains 100sccm, and nitrogen flow is 200sccm, and sedimentation time is 12 hours, obtains CrN layer.
4, after coating deposition forms; under vacuum environment, be cooled to below 220 ℃; then be filled with protective gas N2; under protective atmosphere, be cooled to below 100 ℃; exit to atmospheric pressure; begin to speak to come out of the stove, finally obtain the super thick gradient CrNx composite coating of high rigidity, high abrasion, high anti-corrosion and anti-contact fatigue characteristic at matrix surface.
The TEM of the above-mentioned composite coating making schemes shown in similar Figure 11, and the thickness of this coating is about 35-45um.As can be seen from the figure, this coating be from matrix surface, stack gradually the Cr layer of arrangement from bottom to top, by Cr and Cr
2the Cr/Cr that N is mixed to form
2n layer, Cr
2n layer, by Cr
2the Cr that N and CrN are mixed to form
2n/CrN layer, and CrN layer composition., this coating be composition by Cr through Cr
2n is gradually to the CrN multi-layer composite coatings of gradual transition in gradient.
Just because of this gradient multi-layer compound structure, not only reduce the residual stress in single coating crystallite dimension and lattice, improve the deposit thickness of coating, thereby significantly improved the carrying abrasion-resistance of coating; And formed heterogeneous nanocrystalline and amorphous composite construction, and interrupt single crystal orientation growth, can effectively prevent that corrosive medium from running through coating and causing that coating lost efficacy and peeled off, and had improved the decay resistance of coating.
In addition, above-mentioned composite coating adopts multi sphere ion plating technology combine with nitridation technique and prepare, not only simple, and this can further strengthen matrix hardness, obtains the super thick gradient composite coating of high rigidity, wear-resistant, corrosion-resistant and anti-contact fatigue characteristic.
Above-described embodiment has been described in detail the technical solution of the utility model; be understood that and the foregoing is only specific embodiment of the utility model; be not limited to the utility model; all any modifications of making within the scope of principle of the present utility model, supplement or similar fashion substitute etc., within all should being included in protection domain of the present utility model.
Claims (3)
1. the composite coating on valve sealing element surface, this coating is the composite coating take valve sealing element as matrix, it is characterized in that: described composite coating is stacked gradually Cr layer, the Cr/Cr of arrangement from bottom to top by matrix surface
2n layer, Cr
2n layer, Cr
2n/CrN layer, and CrN layer composition; The thickness of described composite coating is 30 μ m～50 μ m.
2. the composite coating on valve sealing element as claimed in claim 1 surface, is characterized in that: the thickness of described Cr layer is 1um～2um; Described Cr/Cr
2the thickness of N layer is 8um～12um; Described Cr
2the thickness of N layer is 8um～12um; Described Cr
2the thickness of N/CrN layer is 8um～12um; Described Cr
2the thickness of N layer is 8um～12um.
3. the composite coating on valve sealing element as claimed in claim 1 surface, is characterized in that: described matrix is the matrix of surface through glow discharge nitriding processing.
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| CN201320631678.0U CN203697597U (en) | 2013-10-12 | 2013-10-12 | Composite coating on surface of valve sealing element |
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|---|---|---|---|
| CN201320631678.0U CN203697597U (en) | 2013-10-12 | 2013-10-12 | Composite coating on surface of valve sealing element |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103522627A (en) * | 2013-10-12 | 2014-01-22 | 中国科学院宁波材料技术与工程研究所 | Composite coating on surface of valve sealing piece and preparation method for composite coating |
| CN109666904A (en) * | 2018-12-27 | 2019-04-23 | 安徽多晶涂层科技有限公司 | A kind of low stress high abrasion erosion resistant coating, preparation method and application |
| CN109898056A (en) * | 2019-03-13 | 2019-06-18 | 广东工业大学 | A kind of bulk metal based on PVD technique/metal-ceramic nano functionally gradient material (FGM) and its preparation method and application |
| WO2022132733A1 (en) * | 2020-12-16 | 2022-06-23 | Dresser, Llc | Protecting valve parts from erosion |
-
2013
- 2013-10-12 CN CN201320631678.0U patent/CN203697597U/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103522627A (en) * | 2013-10-12 | 2014-01-22 | 中国科学院宁波材料技术与工程研究所 | Composite coating on surface of valve sealing piece and preparation method for composite coating |
| CN103522627B (en) * | 2013-10-12 | 2016-03-30 | 中国科学院宁波材料技术与工程研究所 | The composite coating on a kind of valve sealing element surface and preparation method thereof |
| CN109666904A (en) * | 2018-12-27 | 2019-04-23 | 安徽多晶涂层科技有限公司 | A kind of low stress high abrasion erosion resistant coating, preparation method and application |
| CN109898056A (en) * | 2019-03-13 | 2019-06-18 | 广东工业大学 | A kind of bulk metal based on PVD technique/metal-ceramic nano functionally gradient material (FGM) and its preparation method and application |
| WO2022132733A1 (en) * | 2020-12-16 | 2022-06-23 | Dresser, Llc | Protecting valve parts from erosion |
| US11840453B2 (en) | 2020-12-16 | 2023-12-12 | Dresser, Llc | Protecting valve parts from erosion |
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