CN203643683U - 一种可双轴旋转的mems微镜芯片 - Google Patents
一种可双轴旋转的mems微镜芯片 Download PDFInfo
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- CN203643683U CN203643683U CN201420001491.7U CN201420001491U CN203643683U CN 203643683 U CN203643683 U CN 203643683U CN 201420001491 U CN201420001491 U CN 201420001491U CN 203643683 U CN203643683 U CN 203643683U
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0062—Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/042—Micromirrors, not used as optical switches
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0109—Bridges
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0145—Flexible holders
- B81B2203/0154—Torsion bars
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/05—Type of movement
- B81B2203/058—Rotation out of a plane parallel to the substrate
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201420001491.7U CN203643683U (zh) | 2014-01-02 | 2014-01-02 | 一种可双轴旋转的mems微镜芯片 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201420001491.7U CN203643683U (zh) | 2014-01-02 | 2014-01-02 | 一种可双轴旋转的mems微镜芯片 |
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Publication Number | Publication Date |
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CN203643683U true CN203643683U (zh) | 2014-06-11 |
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CN201420001491.7U Expired - Lifetime CN203643683U (zh) | 2014-01-02 | 2014-01-02 | 一种可双轴旋转的mems微镜芯片 |
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CN (1) | CN203643683U (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103744178A (zh) * | 2014-01-02 | 2014-04-23 | 桂林市光隆光电科技有限公司 | 一种可双轴旋转的mems微镜芯片 |
CN104267582A (zh) * | 2014-09-29 | 2015-01-07 | 天津津芯微电子科技有限公司 | 一种用于dmd控制的电路板*** |
WO2016020716A1 (en) * | 2014-08-04 | 2016-02-11 | Ba-Tis Faez | 3-dof mems piston-tube electrostatic microactuator |
-
2014
- 2014-01-02 CN CN201420001491.7U patent/CN203643683U/zh not_active Expired - Lifetime
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103744178A (zh) * | 2014-01-02 | 2014-04-23 | 桂林市光隆光电科技有限公司 | 一种可双轴旋转的mems微镜芯片 |
WO2016020716A1 (en) * | 2014-08-04 | 2016-02-11 | Ba-Tis Faez | 3-dof mems piston-tube electrostatic microactuator |
CN106604887A (zh) * | 2014-08-04 | 2017-04-26 | 费斯·巴-提斯 | 三自由度mems活塞管静电微致动器 |
CN106604887B (zh) * | 2014-08-04 | 2019-04-02 | 费斯·巴-提斯 | 三自由度mems活塞管静电微致动器 |
CN104267582A (zh) * | 2014-09-29 | 2015-01-07 | 天津津芯微电子科技有限公司 | 一种用于dmd控制的电路板*** |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: 541004 the Guangxi Zhuang Autonomous Region Guilin high tech Zone Chaoyang Road National Information Industrial Park D-08 Guang long Science Park Patentee after: GLsun Science and Technology Co.,Ltd. Address before: 541004 the Guangxi Zhuang Autonomous Region Guilin high tech Zone Chaoyang Road National Information Industrial Park D-08 Guang long Science Park Patentee before: GLSUN SCIENCE AND TECH CO.,LTD. |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Dual-axis rotatable MEMS (micro-electromechanical system) microscope chip Effective date of registration: 20190429 Granted publication date: 20140611 Pledgee: Qixing Branch of Guilin Bank Co.,Ltd. Pledgor: GLsun Science and Technology Co.,Ltd. Registration number: 2019450000015 |
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CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: 541004 D-08 hi tech park, National Information Industry Park, Chaoyang Road, hi tech Zone, the Guangxi Zhuang Autonomous Region, Guilin Patentee after: GUILIN GUANGLONG SCIENCE AND TECHNOLOGY GROUP Co.,Ltd. Address before: 541004 D-08 hi tech park, National Information Industry Park, Chaoyang Road, hi tech Zone, the Guangxi Zhuang Autonomous Region, Guilin Patentee before: GLsun Science and Technology Co.,Ltd. |
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PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20211014 Granted publication date: 20140611 Pledgee: Qixing Branch of Guilin Bank Co.,Ltd. Pledgor: GLsun Science and Technology Co.,Ltd. Registration number: 2019450000015 |
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CX01 | Expiry of patent term | ||
CX01 | Expiry of patent term |
Granted publication date: 20140611 |