CN203642641U - Drying device for semiconductor quartz tube - Google Patents
Drying device for semiconductor quartz tube Download PDFInfo
- Publication number
- CN203642641U CN203642641U CN201320730741.6U CN201320730741U CN203642641U CN 203642641 U CN203642641 U CN 203642641U CN 201320730741 U CN201320730741 U CN 201320730741U CN 203642641 U CN203642641 U CN 203642641U
- Authority
- CN
- China
- Prior art keywords
- air
- quartz ampoule
- blower fan
- heat preserving
- quartz tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010453 quartz Substances 0.000 title claims abstract description 31
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 31
- 238000001035 drying Methods 0.000 title claims abstract description 25
- 239000004065 semiconductor Substances 0.000 title claims abstract description 20
- 238000010438 heat treatment Methods 0.000 claims abstract description 26
- 239000003708 ampul Substances 0.000 claims description 26
- 238000009413 insulation Methods 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 3
- 230000003749 cleanliness Effects 0.000 abstract description 5
- 238000004140 cleaning Methods 0.000 abstract 1
- 238000001914 filtration Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000011086 high cleaning Methods 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Images
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- Drying Of Solid Materials (AREA)
Abstract
The utility model discloses a drying device for a semiconductor quartz tube. The drying device comprises a heat preserving casing, wherein an air blower system and an air heating device are arranged at the top of the heat preserving casing; air supply outlets are formed in the top of the heat preserving casing, and communicated with the heating device; exhaust inlets are formed in the bottom of the heat preserving casing, and communicated with the air blower system; filters are mounted in the air supply outlets; air outlets of the filters are formed toward the inner part of the heat preserving casing; the air blower system and the air heating device are arranged in the same housing; the air blower system is positioned above the air heating device. According to the drying device for the semiconductor quartz tube provided by the utility model, heating circulating air is compulsively filtered by the efficient filters, so that the cleanliness of a cleaning room can reach a hundred thousand level, the quartz tube is ensured to be dried in the highly clean heat preserving casing, and the pollution problem produced in the drying process of the quartz tube is solved.
Description
Technical field
The utility model relates to a kind of semiconductor quartz ampoule drying unit.
Background technology
Determine that semiconductor is exactly its surperficial cleanliness factor by a key factor of quartz ampoule quality, because semiconductor is all to quantize with PPM level by the purity of material, so equally very high to its surface requirements, it is all later that nature dries (or air-dry) or easy drying room is dried mostly that existing quartz ampoule is washed, these methods all can not guarantee that its surface is not contaminated, also do not reach semi-conductive quality requirement.
Utility model content
The technical problems to be solved in the utility model is to provide a kind of semiconductor quartz ampoule drying unit, as a kind of novel clean drying unit, by to heat cycles air through high efficiency particulate air filter forced filtration, cleanliness factor in clean room is reached in 100,000 grades, guarantee that quartz ampoule dries in the insulation shell of high cleaning, thereby solved the pollution problem that quartz ampoule produces in dry run.
The utility model provides a kind of semiconductor quartz ampoule drying unit, comprises insulation shell, and the top of described insulation shell is provided with blower fan system and air heating apparatus; The top of described insulation shell has air outlet, and described air outlet is connected with described air heating apparatus; The bottom of described insulation shell has inlet scoop, and described inlet scoop is connected with described blower fan system.
In described air outlet, filter is installed, the air outlet of described filter is towards the inner setting of insulation shell.
Described blower fan system and air heating apparatus are arranged in same shell, and the top of described blower fan system in air heating apparatus.
The number of described air outlet is multiple, and each described air outlet is all connected with described air heating apparatus by ajutage.
The number of described inlet scoop is multiple, and each inlet scoop is all connected with described blower fan system by aspiration channel.
Described blower fan system is fan.
The material of described insulation shell is battenboard.
The advantage the utlity model has is:
The utility model provides a kind of semiconductor quartz ampoule drying unit, as a kind of novel clean drying unit, by to heat cycles air through high efficiency particulate air filter forced filtration, cleanliness factor in clean room is reached in 100,000 grades, guarantee that quartz ampoule dries in the insulation shell of high cleaning, thereby solved the pollution problem that quartz ampoule produces in dry run.
Accompanying drawing explanation
Fig. 1 is the Facad structure schematic diagram of a kind of semiconductor quartz ampoule drying unit that provides of the utility model;
Fig. 2 is the side structure schematic diagram of a kind of semiconductor quartz ampoule drying unit that provides of the utility model.
The specific embodiment
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail, so that those skilled in the art can better understand the utility model being implemented, but illustrated embodiment is not as to restriction of the present utility model.
The utility model relates to a kind of semiconductor quartz ampoule drying unit, as depicted in figs. 1 and 2, according to the length of quartz ampoule, adopts filled board to prepare an insulation shell 1, and described quartz ampoule 9 passes through pepe support 10 spread configurations in this insulation shell 1.The top of described insulation shell 1 is provided with blower fan system 2 and air heating apparatus 3, wherein said blower fan system is arranged at the top of air heating apparatus 3, and be installed with by a housing 11, described blower fan system 2 is dried towards air heating apparatus 3, and described air heating apparatus 3 heats the air blowing.Described blower fan system 2 can be powerful fan.The top of described insulation shell 1 has one or more air outlets 8, the interior high efficiency particulate air filter 5 that is all provided with of each air outlet 8, high efficiency particulate air filter 5 has air outlet towards the direction of insulation shell 1, outwards blows out the high-temperature gas after filtration by the air outlet of high efficiency particulate air filter 5.Each air outlet 8 is all connected with described air heating apparatus 3 by ajutage 4.The bottom of described insulation shell 1 is provided with one or more inlet scoops 6, described inlet scoop 6 is all connected with top blower fan system 2 by aspiration channel 7, by advertising of blower fan system 2, the gas of bottom high humidity is blown in aspiration channel 7 by inlet scoop 6, and by the rotation of blower fan system 2, by gas after the air heating apparatus 3 of blower fan system 2 belows heats, blow downwards to the high efficiency particulate air filter 5 of air outlet through ajutage 4, after forced filtration, improve the cleanliness factor of gas, then blow out through the air outlet of high efficiency particulate air filter.Gas after dry filter is dried heating for quartz ampoule 9, humid air after heating can be drawn in aspiration channel 7 through inlet scoop 7 again, advertising and the heating of air heating apparatus 3 through blower fan system 2 again, pass into insulation shell 1 inside through high efficiency particulate air filter 5, and then form circulatory system dry heat system.
The present embodiment is designed with high efficiency particulate air filter, can filter the internal gas of drying unit, avoid producing the problem that quartz ampoule pollutes, and produce circulation hot gas by air heating apparatus and blower fan system, so that hot gas circulates in baking room, reach quartz ampoule is continued to the object of drying.
The above embodiment is only the preferred embodiment for absolutely proving that the utility model is lifted, and protection domain of the present utility model is not limited to this.What those skilled in the art did on the utility model basis is equal to alternative or conversion, all within protection domain of the present utility model.Protection domain of the present utility model is as the criterion with claims.
Claims (7)
1. a semiconductor quartz ampoule drying unit, is characterized in that, comprises insulation shell, and the top of described insulation shell is provided with blower fan system and air heating apparatus; The top of described insulation shell has air outlet, and described air outlet is connected with described air heating apparatus; The bottom of described insulation shell has inlet scoop, and described inlet scoop is connected with described blower fan system.
2. semiconductor quartz ampoule drying unit according to claim 1, is characterized in that, in described air outlet, filter is installed, and the air outlet of described filter is towards the inner setting of insulation shell.
3. semiconductor quartz ampoule drying unit according to claim 2, is characterized in that, described blower fan system and air heating apparatus are arranged in same shell, and the top of described blower fan system in air heating apparatus.
4. semiconductor quartz ampoule drying unit according to claim 3, is characterized in that, the number of described air outlet is multiple, and each described air outlet is all connected with described air heating apparatus by ajutage.
5. semiconductor quartz ampoule drying unit according to claim 4, is characterized in that, the number of described inlet scoop is multiple, and each inlet scoop is all connected with described blower fan system by aspiration channel.
6. semiconductor quartz ampoule drying unit according to claim 5, is characterized in that, described blower fan system is fan.
7. semiconductor quartz ampoule drying unit according to claim 6, is characterized in that, the material of described insulation shell is battenboard.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320730741.6U CN203642641U (en) | 2013-11-19 | 2013-11-19 | Drying device for semiconductor quartz tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320730741.6U CN203642641U (en) | 2013-11-19 | 2013-11-19 | Drying device for semiconductor quartz tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203642641U true CN203642641U (en) | 2014-06-11 |
Family
ID=50873877
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320730741.6U Expired - Lifetime CN203642641U (en) | 2013-11-19 | 2013-11-19 | Drying device for semiconductor quartz tube |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203642641U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104482750A (en) * | 2014-12-29 | 2015-04-01 | 西安向阳航天材料股份有限公司 | Dehumidification and dust removal device and method for inner wall of metal tube |
| CN108365522A (en) * | 2018-01-31 | 2018-08-03 | 乐志胜 | A kind of electric power bin dehumidification device |
| CN108939834A (en) * | 2017-05-17 | 2018-12-07 | 应用材料公司 | Radio-frequency signal generator clean dry air is blown off |
-
2013
- 2013-11-19 CN CN201320730741.6U patent/CN203642641U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104482750A (en) * | 2014-12-29 | 2015-04-01 | 西安向阳航天材料股份有限公司 | Dehumidification and dust removal device and method for inner wall of metal tube |
| CN108939834A (en) * | 2017-05-17 | 2018-12-07 | 应用材料公司 | Radio-frequency signal generator clean dry air is blown off |
| CN108365522A (en) * | 2018-01-31 | 2018-08-03 | 乐志胜 | A kind of electric power bin dehumidification device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140611 |