CN203578277U - 一种改造后的硅片清洗机用槽体 - Google Patents
一种改造后的硅片清洗机用槽体 Download PDFInfo
- Publication number
- CN203578277U CN203578277U CN201320804318.6U CN201320804318U CN203578277U CN 203578277 U CN203578277 U CN 203578277U CN 201320804318 U CN201320804318 U CN 201320804318U CN 203578277 U CN203578277 U CN 203578277U
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- Prior art keywords
- trough
- cell body
- cleaning machine
- improved
- silicon wafer
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 19
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 19
- 239000010703 silicon Substances 0.000 title claims abstract description 19
- 238000004140 cleaning Methods 0.000 title abstract description 21
- 210000005056 cell body Anatomy 0.000 claims description 37
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 239000012459 cleaning agent Substances 0.000 abstract description 6
- 238000005406 washing Methods 0.000 abstract description 4
- 230000000694 effects Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 abstract description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 4
- 239000003795 chemical substances by application Substances 0.000 abstract 1
- 238000007599 discharging Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229940095676 wafer product Drugs 0.000 description 1
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- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201320804318.6U CN203578277U (zh) | 2013-12-05 | 2013-12-05 | 一种改造后的硅片清洗机用槽体 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201320804318.6U CN203578277U (zh) | 2013-12-05 | 2013-12-05 | 一种改造后的硅片清洗机用槽体 |
Publications (1)
Publication Number | Publication Date |
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CN203578277U true CN203578277U (zh) | 2014-05-07 |
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ID=50576254
Family Applications (1)
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CN201320804318.6U Expired - Lifetime CN203578277U (zh) | 2013-12-05 | 2013-12-05 | 一种改造后的硅片清洗机用槽体 |
Country Status (1)
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CN (1) | CN203578277U (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104690030A (zh) * | 2013-12-05 | 2015-06-10 | 天津中环领先材料技术有限公司 | 一种改造后的硅片清洗机用槽体 |
-
2013
- 2013-12-05 CN CN201320804318.6U patent/CN203578277U/zh not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104690030A (zh) * | 2013-12-05 | 2015-06-10 | 天津中环领先材料技术有限公司 | 一种改造后的硅片清洗机用槽体 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20191230 Address after: 214200 Dongfen Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Co-patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Patentee after: Zhonghuan leading semiconductor materials Co.,Ltd. Address before: 300384 in Tianjin Binhai high tech Zone Huayuan Industrial Zone (outer ring road No. 12 in Haitai) Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. |
|
CX01 | Expiry of patent term | ||
CX01 | Expiry of patent term |
Granted publication date: 20140507 |