CN203443554U - Detection device of off-axis ellipsoidal lens - Google Patents
Detection device of off-axis ellipsoidal lens Download PDFInfo
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- CN203443554U CN203443554U CN201320573778.2U CN201320573778U CN203443554U CN 203443554 U CN203443554 U CN 203443554U CN 201320573778 U CN201320573778 U CN 201320573778U CN 203443554 U CN203443554 U CN 203443554U
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- axle
- measured
- fizeau interferometer
- lens
- mirror
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- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
A detection device of an off-axis ellipsoidal lens is provided. The detection device of the off-axis ellipsoidal lens is composed of a Fizeau interferometer and a standard spherical lens thereof, a five-dimensional adjusting rack, a compensation small ball and a three-dimensional adjusting rack; the standard spherical lens is a light beam output window of the Fizeau interferometer; a base is fixed on the top surface of the five-dimensional adjusting rack; the three-dimensional adjusting rack is fixed at one end of the base; and an off-axis ellipsoidal lens to be measured is arranged at the other end of the base; and the Fizeau interferometer is located right above a position where the off-axis ellipsoidal lens to be measured is arranged at the base. With the detection device of the off-axis ellipsoidal lens adopted, a measured off-axis ellipsoidal surface can be fast positioned, and detection efficiency of the off-axis ellipsoidal surface can be improved, and therefore, production efficiency can be improved, and detection cost can be reduced, and detection of various kinds of off-axial ellipsoidal surfaces can be realized, and blank in the prior art can be filled.
Description
Technical field
The utility model relates to optical detective technology field, particularly a kind of pick-up unit from axle ellipsoidal mirror and detection method thereof based on fizeau interferometer.
Background technology
The traditional detection method of optical element and technology have been continued to use many decades.Optical detection relates to detected element material, bore, kind and measuring technology, instrument and equipment etc.Detected element of a great variety, includes parallel flat, sphere, aspheric surface, free form surface, diffraction grating, axicon lens, cylindrical lens etc., has special aspheric surface as parabola, ellipsoid, hyperboloid and other aspheric surface in addition in aspheric surface.In optical detection, conventional key instrument can be divided into interferometer class, surface profiler class, MTF tester class, precision spherometer class, focal length and eccentric testing instrument class and Other Instruments etc.
Both at home and abroad all at development and development advanced instrument separately.Domesticly take the interferometer manufacturing firm that Institutes Of Technology Of Nanjing and Chengdu Tai Ke company be representative, the product bore of all kinds of Digital interferometers has Φ 25mm～Φ 600mm; All kinds of interferometers from bore 4 "～32 " that U.S. Zygo company is representative are take in import; Zygo company take 3D interference microscope and is the contactless surface profiler of ultimate principle development, the Zemapper System from early stage Maxim3D5700 to latest modern technological etc.; Britain Tayloy-Hobson contact pin type contourgraph; The three-coordinates measuring machine of practical requirement, 4D interferometer etc.
Yet, in optical detecting instrument and technology application, still there are a lot of problem and shortage.At present, not yet relevant for method or device from axle ellipsoid fast detecting.Existing detecting instrument as Zygo interferometer, newton's interferometer, 4D interferometer, Tayloy-Hobson etc. all cannot direct-detection from axle ellipsoid.
Utility model content
The purpose of this utility model is to overcome at present the adjustment difficulty detecting from axle ellipsoid, provide a kind of based on fizeau interferometer from axle ellipsoid pick-up unit and detection method thereof.
Technical solution of the present utility model is as follows:
A kind of pick-up unit from axle ellipsoidal mirror, its feature is, this device is comprised of fizeau interferometer and standard spherical mirror, five dimension adjustment racks, compensation bead and three-dimensional trim holder thereof, standard spherical mirror is the light beam output window of described fizeau interferometer, the end face of five described dimension adjustment racks is fixed a pedestal, at the fixing described three-dimensional trim holder in one end of this pedestal, the other end is put from axle ellipsoidal mirror for to be measured, and described fizeau interferometer is positioned at described pedestal and puts to be measured directly over axle ellipsoidal mirror.
Described three-dimensional trim holder has X, Y, Z is three-dimensional, and five described dimension adjustment racks have X, Y, Z, Tip & Tilt five dimensions.
Described to be measured from axle ellipsoidal mirror, be concave mirror.
The described pick-up unit from axle ellipsoidal mirror detects the method from axle ellipsoidal mirror to be measured, and its feature is, the method comprises the following steps:
1. according to the design size from axle ellipsoidal mirror to be measured, shown in Fig. 6, calculate θ 1, θ 1 can be tried to achieve by triangle formula according to known L1, L2, L3;
can try to achieve according to the known parameters R0 of standard spherical mirror and D0.According to
principle select to select close to θ
1corresponding standard spherical mirror is installed on described fizeau interferometer, and the selection of standard spherical mirror, to utilize to greatest extent the outgoing luminous energy of fizeau interferometer, guarantees that the emergent light full illumination of fizeau interferometer is to be measured on axle ellipsoidal mirror at this;
2. by be measured, from axle ellipsoidal mirror, be fixed on pedestal, adjusting five dimension adjustment racks makes the upper surface of pedestal in level, open described fizeau interferometer, the light beam that this fizeau interferometer sends is to be measured from axle ellipsoidal mirror on pedestal through described standard spherical mirror full illumination;
3. adjust the height of five dimension adjustment racks, light beam that fizeau interferometer sends is to be measuredly focused on through described after axle ellipsoidal mirror, this focus is the focal point F 2 from axle ellipsoidal mirror to be measured, and now the focus of the spherical wave of described fizeau interferometer output is positioned at another focal point F 1 from axle ellipsoidal mirror to be measured;
4. by the adjustment of three-dimensional trim holder being made compensate on the position that bead is placed in the focal point F 2 from axle ellipsoidal mirror to be measured;
5. described fizeau interferometer obtains the face type from axle ellipsoidal mirror to be measured.
Compared with prior art, the beneficial effects of the utility model are to locate fast testedly from axle ellipsoid, improve to detect the efficiency from axle ellipsoid, thereby have improved production efficiency, have reduced testing cost.
Accompanying drawing explanation
Fig. 1 is that the utility model is from the structural representation of the pick-up unit of axle ellipsoidal mirror.
Fig. 2 is that the utility model is from the index path of the pick-up unit of axle ellipsoidal mirror.
Fig. 3 is compensation bead and three-dimensional trim holder and the front elevation from axle ellipsoidal mirror to be measured.
Fig. 4 is the side view of five dimension adjustment racks.
Fig. 5 is the tested three-view diagram from axle ellipsoid, is (a) front elevation, is (b) right view, is (c) vertical view.
Fig. 6 is the calculating schematic diagram of choice criteria spherical mirror.
In figure: 1-fizeau interferometer, 2-fizeau interferometer standard spherical mirror, 3-to be measured from axle off-axis paraboloids and ellipsoids mirrors, 4-compensation bead, the three-dimensional trim holder of 5-compensation bead, 6-the collimated monochromatic ligth sending from five dimension adjustment rack 7-fizeau interferometers of axle ellipsoidal mirror to be measured, 8-through the light of standard spherical mirror transmission, 9-through the light from the reflection of axle off-axis paraboloids and ellipsoids mirrors to be measured, 10-through compensating the light of bead reflection, 11-through to be measured from the axle off-axis paraboloids and ellipsoids mirrors light of secondary reflection again, 12-through standard spherical mirror surface refraction, return the light of interferometer, the interior reflective surface of A-standard spherical mirror, the outside surface of A '-standard spherical mirror, B-to be measured from axle off-axis paraboloids and ellipsoids mirrors.
Embodiment
Below in conjunction with drawings and Examples, the utility model is described in further detail, but should not limit protection domain of the present utility model with this.
Please first consult Fig. 1, Fig. 1 is that the utility model is from the structural representation of the pick-up unit of axle ellipsoidal mirror, as shown in the figure, a kind of pick-up unit from axle ellipsoidal mirror, by fizeau interferometer 1 and standard spherical mirror 2 thereof, five dimension adjustment racks 6, compensation bead 4 and three-dimensional trim holder 5 thereof form, standard spherical mirror 2 is light beam output windows of described fizeau interferometer 1, the end face of five described dimension adjustment racks 6 is fixed a pedestal, at the fixing described three-dimensional trim holder 5 in one end of this pedestal, the other end is put from axle ellipsoidal mirror 3 for to be measured, described fizeau interferometer 1 is positioned at described pedestal and puts to be measured directly over axle ellipsoidal mirror.
1, fizeau interferometer: collimate the light sending from pin hole with the object lens of a fine correction of process.Between collimator objective and pin hole (spatial filter), place a spectroscope, to observe from the side interference fringe.The light that fizeau interferometer sends is collimated monochromatic ligth.
According to the design size from axle ellipsoidal mirror to be measured, shown in Fig. 6, compute ray incides the number of degrees of the tested maximum solid angle θ 1 from axle ellipsoid, θ 1 can be tried to achieve by triangle formula according to known L1, L2, L3, wherein L1 is that the focal point F 2 from axle ellipsoidal mirror to be measured is to the distance from axle ellipsoidal mirror one projecting edge to be measured, L2 is that the focal point F 2 from axle ellipsoidal mirror to be measured arrives the distance from another projecting edge of axle ellipsoidal mirror to be measured, and L3 is the spacing of two projecting edges.The maximum outgoing solid angle of standard spherical mirror outgoing
the number of degrees, can try to achieve according to the maximum dimension D 0 of the radius of curvature R 0 of known parameters standard spherical mirror and emergent ray.According to
principle select to select close to θ
1corresponding standard spherical mirror is installed on described fizeau interferometer, and the selection of standard spherical mirror to be to utilize to greatest extent the outgoing luminous energy of interferometer, guarantee emergent light full illumination to be measured on axle off-axis paraboloids and ellipsoids mirrors.
2, integrated to be measured from axle off-axis paraboloids and ellipsoids mirrors, three-dimensional trim holder and five dimension adjustment racks.
Fig. 2 be the utility model from the index path of the pick-up unit of axle ellipsoidal mirror, the internal reflection A face of standard spherical mirror is as with reference to sphere, to be measured from axle elliptical area B as sphere to be measured.According to the distance between two focuses of axle off-axis paraboloids and ellipsoids mirrors to be measured, determine compensation bead and the relative position from axle off-axis paraboloids and ellipsoids mirrors to be measured, and by the position of repeatedly adjusting to find compensation bead to three-dimensional trim holder and five dimension adjustment racks, be located to be measured in another focal point F 2 of axle ellipsoidal mirror.
The inside surface A face of standard spherical mirror is as with reference to sphere, and its surface precision is to be less than λ/10, B face be through single-point Buddha's warrior attendant car stone lathe, process from axle ellipsoid as tested surface.The utility model device index path as shown in Figure 2.The collimated monochromatic ligth 7 that fizeau interferometer sends incides after standard transmission sphere, the referenced sphere inside surface A reflection of a part of light, and this reflection ray carries standard ball ground roll information.Another part light converge to focal point F 1 after with reference to sphere A transmission (being called light 8) after, disperse incide to be measured from axle ellipsoid B.According to the optical property of elliptical area: the light that pointolite F1 sends converges at another focal point F 2 of ellipsoid after ellipsoid, on the position of ordering at F2, place compensation bead, the surface precision of bead is less than λ/10.Light overlaps with the centre of sphere point of bead from axle ellipsoidal mirror reflection (being called light 9) focus pooling through to be measured, light is got back to be measured from axle ellipsoid through bead sphere An Yuan road reflection (being called light 10), again through ellipsoid reflection (being called light 11), converge at focal point F 1, after F1, disperse the outside surface A ' that projects standard spherical mirror, through A ' face refraction (being called light 12), get back in interferometer.Collimated monochromatic ligth 7 through the reflection ray with reference to sphere inside surface A and light 12 meet that frequency is identical, direction of vibration is consistent, three conditions of constant phase difference, thereby the phenomenon of interfering produces interference fringe.Observe interference fringe and thereby interference fringe analysis is drawn to the face type measurement result from axle ellipsoidal surfaces by fizeau interferometer.
Fizeau interferometer is a kind of more conventional equal thickness interferometer, is mainly used in checking plane or spherical surface type.The light that monochromatic source is sent is focused on circular hole diaphragm by lens, and diaphragm is positioned on the focal plane of collimator objective.From the parallel beam of collimator objective outgoing, at the lower plane of the reference planes with wedge degree and the upper plane reflection of tested plane, return, then by collimator objective and object lens, on the focal plane of eyepiece, form two pictures of the aperture of circular hole diaphragm.Adjust the worktable at tested part place, two pictures are overlapped.If replace eyepiece with telescopic magnifier, just can see equal thick interference fringe in tested plane.Utilize the principle of work of above-mentioned fizeau interferometer, in the utility model device, through the reflection ray with reference to sphere inside surface A and light 12, there is coherence stack in collimated monochromatic ligth 7, produce interference fringe, and in fizeau interferometer, observe interference fringe, by fizeau interferometer, analyze to obtain the type measurement result of appearing.Fizeau interferometer has a measurement key, clicks and measures the result that key can obtain face type.
Claims (1)
1. the pick-up unit from axle ellipsoidal mirror, it is characterized in that, this device is by fizeau interferometer (1) and standard spherical mirror (2) thereof, five dimension adjustment racks (6), compensation bead (4) and three-dimensional trim holder (5) thereof form, standard spherical mirror (2) is the light beam output window of described fizeau interferometer (1), the end face of five described dimension adjustment racks (6) is fixed a pedestal, at the fixing described three-dimensional trim holder (5) in one end of this pedestal, the other end is put from axle ellipsoidal mirror (3) for to be measured, described fizeau interferometer (1) is positioned at described pedestal and puts to be measured directly over axle ellipsoidal mirror.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320573778.2U CN203443554U (en) | 2013-09-16 | 2013-09-16 | Detection device of off-axis ellipsoidal lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320573778.2U CN203443554U (en) | 2013-09-16 | 2013-09-16 | Detection device of off-axis ellipsoidal lens |
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| Publication Number | Publication Date |
|---|---|
| CN203443554U true CN203443554U (en) | 2014-02-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320573778.2U Expired - Lifetime CN203443554U (en) | 2013-09-16 | 2013-09-16 | Detection device of off-axis ellipsoidal lens |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103438831A (en) * | 2013-09-16 | 2013-12-11 | 上海现代先进超精密制造中心有限公司 | Detection device and detection method of off-axis elliptical mirror |
| TWI800368B (en) * | 2022-05-04 | 2023-04-21 | 張朝凱 | Measuring device for focal length of off-axis elliptical cylindrical mirror |
-
2013
- 2013-09-16 CN CN201320573778.2U patent/CN203443554U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103438831A (en) * | 2013-09-16 | 2013-12-11 | 上海现代先进超精密制造中心有限公司 | Detection device and detection method of off-axis elliptical mirror |
| TWI800368B (en) * | 2022-05-04 | 2023-04-21 | 張朝凱 | Measuring device for focal length of off-axis elliptical cylindrical mirror |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140219 |