CN203440494U - External continuous feeding device shared by multiple coil bases - Google Patents
External continuous feeding device shared by multiple coil bases Download PDFInfo
- Publication number
- CN203440494U CN203440494U CN201320478978.XU CN201320478978U CN203440494U CN 203440494 U CN203440494 U CN 203440494U CN 201320478978 U CN201320478978 U CN 201320478978U CN 203440494 U CN203440494 U CN 203440494U
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- flange
- charging
- cavity
- single crystal
- oblique cavity
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Abstract
The utility model relates to czochralski silicon single crystal furnace equipment, and aims to provide an external continuous feeding device shared by multiple coil bases. The external continuous feeding device comprises a charging barrel, a conveying chamber and a loading trolley, wherein the charging barrel is provided with a feeding opening, a discharge opening and a bottom flange; the conveying chamber comprises a transverse cavity and an inclined cavity; a feeding opening and a feeding flange are arranged on the upper side of the end part of the transverse cavity; the feeding flange is connected with the bottom flange of the charging barrel; a conveying device is arranged in the transverse cavity; an inclined discharge opening and a taper flange are arranged at the bottom of the inclined cavity; the taper flange is connected with a ball valve on a single crystal furnace cover; a quartz track device is arranged in the inclined cavity. According to the external continuous feeding device, after external material feeding is completed, a quartz tube is lifted up to close the ball valve, the connecting part of a corrugated pipe and the ball valve is dismounted, operation on the charging barrel and the conveying chamber is not needed, the loading trolley is moved to other coil bases, and external material feeding can be performed again after simple mounting, so that the production efficiency is greatly improved, and the cost is reduced.
Description
Technical field
The utility model is about czochralski silicon monocrystal furnace apparatus, the outside continuous dosing device that particularly can share for many tables.
Background technology
In single crystal growing furnace Grown by CZ Method process, polycrystalline silicon raw material is put into quartz crucible and is carried out melt, crystal pulling.After single crystal growing furnace crystal pulling completes, the need of production of preparing a new stove is done a lot of numerous and diverse previous works, comprise that blowing out is cooling, prepurging, feed, vacuumize, the operation such as material, these previous works, have wasted a large amount of time and energy consumption.Single crystal growing furnace, after a silicon single-crystal has drawn, can use outside continuous dosing device, continues to drop into polycrystalline silicon material, to draw many crystal bars.
Common outside continuous dosing device volume is larger, and more time-consuming, effort is installed, therefore can not effectively transfer to other stove after finishing into again, carries out multiple throwing again.
Utility model content
Main purpose of the present utility model is to overcome deficiency of the prior art, and the outside continuous dosing device that can share for many tables of a kind of installation, convenient disassembly is provided.For solving the problems of the technologies described above, solution of the present utility model is:
The outside continuous dosing device that can share for many tables is provided, comprises barrel and conveyor chamber, for single crystal growing furnace is carried out to outside, feed intake, the top of described barrel is provided with charging opening, and bottom is provided with discharge port, and discharge port is provided with flange in the bottom; Described conveyor chamber comprises transverse passageway and oblique cavity, transverse passageway and oblique cavity connect into the acute angle-shaped L shaped structure of internal cavities intercommunication, the end upside of transverse passageway is provided with opening for feed, opening for feed is provided with charging flange, charging flange is connected with the flange in the bottom of barrel, and transport unit is housed in transverse passageway, and transport unit comprises motor, main drive shaft, transmission shaft and conveying belt, between main drive shaft and transmission shaft, by conveying belt, connect, motor is used to main drive shaft that the power of rotation is provided; The bottom of oblique cavity is provided with oblique discharge port, tiltedly discharge port is provided with angle flange, angle flange is connected with the ball valve on single crystal growing furnace bell by corrugated tube, in oblique cavity, be provided with quartzy rail set, on quartzy rail set, a silica tube is installed, silica tube can be on quartzy rail set be axially realized displacement along oblique cavity.
As further improvement, described silica tube on quartzy rail set along the axial displacement of oblique cavity, can realize state: one end of silica tube is through angle flange, corrugated tube and ball valve, and the furnace chamber that is positioned at single crystal growing furnace is inner, and the other end of silica tube is positioned at the bottom of oblique cavity.
As further improvement, described outside continuous dosing device also comprises charging carriage, the bottom of charging carriage is provided with wheel and can regulates the feet of height, and charging carriage is provided with the support platform that can carry out lifting, and the transverse passageway in conveyor chamber is fixed in support platform.
As further improvement, described charging carriage is provided with motor, and motor is used to the wheel of charging carriage that power is provided, and realizes the movement of charging carriage.
Compared with prior art, the beneficial effects of the utility model are:
After completing after outside feeds intake, promoting silica tube, close ball valve, then corrugated tube and ball valve junction are dismantled, do not need barrel and conveyor chamber to operate, mobile charging carriage, to other table, carries out outside after can again simply installing and feeds intake, significantly improving production efficiency, cost-saving.
Accompanying drawing explanation
Fig. 1 is device schematic diagram of the present utility model.
Reference numeral in figure is: 1 barrel; 2 charging openings; 3 conveyor chambers; 4 quartzy rail sets; 5 angle flanges; 6 transport units; 7 charging carriages; 8 support platforms; 9 feets; 10 wheels; 11 corrugated tubes; 12 ball valves; 13 bells; 14 quartz crucibles; 15 silica tubes.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the utility model is described in further detail:
The outside continuous dosing device that can share for many tables in Fig. 1 comprises barrel 1, conveyor chamber 3 and charging carriage 7, for single crystal growing furnace is carried out to outside, feeds intake.The top of barrel 1 is provided with charging opening 2, and bottom is provided with discharge port, and discharge port is provided with flange in the bottom.Conveyor chamber 3 comprises transverse passageway and oblique cavity, transverse passageway and oblique cavity connect into the acute angle-shaped L shaped structure of internal cavities intercommunication, the end upside of transverse passageway is provided with opening for feed, opening for feed is provided with charging flange, charging flange is connected with the flange in the bottom of barrel 1, and transport unit 6 is housed in transverse passageway.Transport unit 6 comprises motor, main drive shaft, transmission shaft and conveying belt, between main drive shaft and transmission shaft, by conveying belt, connect, motor is used to main drive shaft that the power of rotation is provided, and transport unit 6 can make the silicon material falling into conveying belt from barrel 1 discharge port be moved horizontally to oblique cavity.The bottom of oblique cavity is provided with oblique discharge port, tiltedly discharge port is provided with angle flange 5, angle flange 5 is connected with the ball valve 12 on single crystal growing furnace bell 13 by corrugated tube 11, in oblique cavity, be provided with quartzy rail set 4, on quartzy rail set 4, a silica tube 15 is installed, silica tube 15 can be on quartzy rail set 4 axially carries out displacement along oblique cavity, can realize state: one end of silica tube 15 is through angle flange 5, corrugated tube 11 and ball valve 12, the furnace chamber that is positioned at single crystal growing furnace is inner, and the other end of silica tube 15 is positioned at the bottom of oblique cavity.The bottom of charging carriage 7 is provided with wheel 10 and can regulates the feet 9 of height, and charging carriage 7 is provided with and can by hydraulic pressure, carries out the support platform 8 of lifting, and the transverse passageway in conveyor chamber 3 is fixed in support platform 8.Charging carriage 7 can move it in manual operation, also can be on charging carriage 7 mounted motor, the wheel 10 that motor is charging carriage 7 provides power, realizes the movement of charging carriage 7.
Charging carriage 7, barrel 1 and conveyor chamber 3 are all separate.Barrel 1 and conveyor chamber 3 stressed all on charging carriage 7, does not have load-bearing to single crystal growing furnace.This outside continuous dosing device completes and after outside feeds intake, can for convenience detachly move to other table and carry out outside and feed intake.
During use, first the conveyor chamber after internals installation 3 is fixed in the support platform 8 of charging carriage 7, barrel 1 is arranged on conveyor chamber 3 by flange in the bottom face, by mobile charging carriage 7 and lifting support platform 8, corrugated tube 11 can be connected with the ball valve 12 on single crystal growing furnace bell 13, regulate again feet 9, make it stressed to ground, its objective is and prevent in the process charging dolly 7 position skews that feed intake.After installation, operate quartzy rail set 4, make silica tube 15 axially realize displacement along oblique cavity, and the final state after displacement is: silica tube 15 is through angle flange 5, corrugated tube 11 and ball valve 12, its end is positioned at the furnace chamber inside of single crystal growing furnace, and the other end is positioned at the bottom of oblique cavity.
Then according to crystal pulling technique step, operate: silicon material is added from the charging opening 2 of barrel 1, by transport unit 6, be sent to the bottom of oblique cavity, from silica tube 15, fall into quartz crucible 14.After completing after outside feeds intake, promoting silica tube 15, close ball valve 12, dismounting corrugated tube 11 and ball valve 12 junctions, do not need barrel 1 and conveyor chamber 3 to operate, mobile charging carriage 7 is to other table, then after installing simply, can again carry out outside and feed intake.
The blanking velocity size of silicon material determines the working efficiency of blanking, and blanking velocity meets formula v
g=K * Φ * h * v
0, blanking velocity v wherein
grefer to speed when silicon material falls in single crystal growing furnace, K is scale-up factor, and the value of K is at 2x10
8～4x10
8between, the caliber size that Φ is discharge port, and the value of Φ is between 10mm～60mm, h is the distance between barrel 1 bottom and transport unit 6 conveying belt, and the value of h is between 5mm～30mm, v
0for the speed that in transport unit 6, conveying belt moves horizontally, and v
0value between 1mm/s～15mm/s.As value one timing of Φ, h, v
0and v
grelation in direct ratio, when Φ or the variation of h value, Proportional coefficient K also changes thereupon.Silicon material is converted into kinetic energy according to potential energy after entering silica tube 15, mgH=1/2mv
2, wherein m is the quality of silicon material, and g is universal gravity constant, and H is the position of silicon material in silica tube 15 to the vertical range of silicon liquid level in stove, and v is the speed that silicon material enters silicon liquid level.H is larger, and the speed v that enters silicon liquid level is just larger, to the reactive force of silicon liquid level, makes the sputter situation of silicon liquid more serious.As from the foregoing, the fluctuation size of silicon liquid level depends on v
gand v, and the working efficiency of blanking depends on v
g, v
gmore great fluctuation process is larger, but working efficiency is relatively lower, and v more H is larger, and the fluctuation of generation is also larger; Otherwise less, therefore can, according to practical situation, determine the suitable speed of blanking.
Finally, it should be noted that above what enumerate is only specific embodiment of the utility model.Obviously, the utility model is not limited to above embodiment, can also have a lot of distortion.All distortion that those of ordinary skill in the art can directly derive or associate from the disclosed content of the utility model, all should think protection domain of the present utility model.
Claims (4)
1. the outside continuous dosing device that can share for many tables, comprises barrel and conveyor chamber, for single crystal growing furnace is carried out to outside, feeds intake, and it is characterized in that, the top of described barrel is provided with charging opening, and bottom is provided with discharge port, and discharge port is provided with flange in the bottom; Described conveyor chamber comprises transverse passageway and oblique cavity, transverse passageway and oblique cavity connect into the acute angle-shaped L shaped structure of internal cavities intercommunication, the end upside of transverse passageway is provided with opening for feed, opening for feed is provided with charging flange, charging flange is connected with the flange in the bottom of barrel, and transport unit is housed in transverse passageway, and transport unit comprises motor, main drive shaft, transmission shaft and conveying belt, between main drive shaft and transmission shaft, by conveying belt, connect, motor is used to main drive shaft that the power of rotation is provided; The bottom of oblique cavity is provided with oblique discharge port, tiltedly discharge port is provided with angle flange, angle flange is connected with the ball valve on single crystal growing furnace bell by corrugated tube, in oblique cavity, be provided with quartzy rail set, on quartzy rail set, a silica tube is installed, silica tube can be on quartzy rail set be axially realized displacement along oblique cavity.
2. outside continuous dosing device according to claim 1, it is characterized in that, described silica tube on quartzy rail set along the axial displacement of oblique cavity, can realize state: one end of silica tube is through angle flange, corrugated tube and ball valve, the furnace chamber that is positioned at single crystal growing furnace is inner, and the other end of silica tube is positioned at the bottom of oblique cavity.
3. outside continuous dosing device according to claim 1, it is characterized in that, described outside continuous dosing device also comprises charging carriage, the bottom of charging carriage is provided with wheel and can regulates the feet of height, charging carriage is provided with the support platform that can carry out lifting, and the transverse passageway in conveyor chamber is fixed in support platform.
4. outside continuous dosing device according to claim 3, is characterized in that, described charging carriage is provided with motor, and motor is used to the wheel of charging carriage that power is provided, and realizes the movement of charging carriage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320478978.XU CN203440494U (en) | 2013-08-06 | 2013-08-06 | External continuous feeding device shared by multiple coil bases |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320478978.XU CN203440494U (en) | 2013-08-06 | 2013-08-06 | External continuous feeding device shared by multiple coil bases |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203440494U true CN203440494U (en) | 2014-02-19 |
Family
ID=50091562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320478978.XU Expired - Lifetime CN203440494U (en) | 2013-08-06 | 2013-08-06 | External continuous feeding device shared by multiple coil bases |
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| CN (1) | CN203440494U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103451722A (en) * | 2013-08-06 | 2013-12-18 | 浙江晶盛机电股份有限公司 | External continuous feeder capable of being shared by multiple coil bases |
| TWI622750B (en) * | 2017-08-09 | 2018-05-01 | 維冠精密股份有限公司 | High performance combustion furnace structure |
| CN108368637A (en) * | 2015-08-20 | 2018-08-03 | 太阳能爱迪生半导体有限公司 | System for selectively feeding chunk polysilicon or granular polycrystalline silicon in crystal growing chamber |
| CN111850679A (en) * | 2020-08-14 | 2020-10-30 | 内蒙古中环领先半导体材料有限公司 | Semiconductor-grade straight-pulling re-casting barrel |
-
2013
- 2013-08-06 CN CN201320478978.XU patent/CN203440494U/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103451722A (en) * | 2013-08-06 | 2013-12-18 | 浙江晶盛机电股份有限公司 | External continuous feeder capable of being shared by multiple coil bases |
| CN108368637A (en) * | 2015-08-20 | 2018-08-03 | 太阳能爱迪生半导体有限公司 | System for selectively feeding chunk polysilicon or granular polycrystalline silicon in crystal growing chamber |
| CN108368637B (en) * | 2015-08-20 | 2023-03-03 | 环球晶圆股份有限公司 | System for selectively feeding chunk or granular polycrystalline silicon in a crystal growth chamber |
| CN116145234A (en) * | 2015-08-20 | 2023-05-23 | 环球晶圆股份有限公司 | System for selectively feeding chunk or granular polycrystalline silicon in a crystal growth chamber |
| TWI622750B (en) * | 2017-08-09 | 2018-05-01 | 維冠精密股份有限公司 | High performance combustion furnace structure |
| CN111850679A (en) * | 2020-08-14 | 2020-10-30 | 内蒙古中环领先半导体材料有限公司 | Semiconductor-grade straight-pulling re-casting barrel |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140219 |