CN203376710U - Piezoelectric type touch panel - Google Patents

Piezoelectric type touch panel Download PDF

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Publication number
CN203376710U
CN203376710U CN201320460224.1U CN201320460224U CN203376710U CN 203376710 U CN203376710 U CN 203376710U CN 201320460224 U CN201320460224 U CN 201320460224U CN 203376710 U CN203376710 U CN 203376710U
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China
Prior art keywords
contact panel
piezoelectric
type contact
piezoelectric type
layer
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Expired - Fee Related
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CN201320460224.1U
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Chinese (zh)
Inventor
戈卡尔普.贝拉默戈鲁
朱浚斈
王燕儒
杨贵宝
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TPK Touch Solutions Xiamen Inc
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TPK Touch Solutions Xiamen Inc
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Priority to CN201320460224.1U priority Critical patent/CN203376710U/en
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Abstract

The utility model provides a piezoelectric type touch panel which comprises a plurality of piezoelectric sensing units. The piezoelectric sensing units are arranged on one side of a base plate. Each piezoelectric sensing unit comprises a grounding layer, a signal layer, a piezoelectric material layer and a plurality of signal leading wires. The piezoelectric material layers are arranged between the grounding layers and the signal layers and are electrically connected with the grounding layers and the signal layers. Materials of the piezoelectric material layers comprise a solid solution formed by 3d-state transition metal doping zinc oxide. The signal leading wires are electrically connected with the signal layers of piezoelectric sensing units respectively.

Description

The piezoelectric type contact panel
Technical field
The utility model relates to contact panel, and particularly relevant for the piezoelectric type contact panel.
Background technology
On market for the requirement of the size of electronic product towards compact future development, so many electronic products, for example mobile phone, personal digital assistant and global position system, no longer design can occupy the keyboard input devices of large quantity space, but the touch-control input equipment is integrated in each electronic product.
The contact panel that can support at present multi-point touch is to take capacitance type touch-control panel as main flow.Yet, capacitance type touch-control panel detects is the electric capacity between two axial sensing electrodes of contact panel, perhaps two of contact panel axial sensing electrodes respectively and the electric capacity between earth terminal, are being touched the capacitance change produced before and after object (as finger) impact.Therefore touching object must be that conductor could affect electric capacity, if the touching object is insulator, contact panel can't detect the position of touching.
Therefore, develop and a kind ofly can not touched object type restriction and support that the contact panel technology of multi-point touch is the place that is worth at present in addition research and development.
Summary of the invention
For addressing the above problem, make a kind of contact panel and reach and can detect dissimilar touching object and can realize the purpose of multi-point touch again.The utility model provides a kind of piezoelectric type contact panel, comprising: a plurality of piezoelectricity sensing units, be disposed at one of substrate side, and each piezoelectricity sensing unit comprises: a ground plane; One signal layer; One piezoelectric material layer, be disposed between this ground plane and this signal layer, and be electrically connected ground plane and signal layer, and wherein the material of this piezoelectric material layer comprises the solid solution formed with a 3d state transition metal doping zinc oxide; And many Communication signal wires, be electrically connected respectively this signal layer of piezoelectricity sensing unit.
The contact panel that the utility model provides, adopt piezoelectric to make sensing unit, utilizes a plurality of piezoelectricity sensing unit direct sensing external pressure deformation on substrate, judges and press position, to touching object indefinite, and can realize multi-point touch.In addition, because piezoelectric can be converted into electric signal by mechanical deformation, do not need extra driving voltage just can detect the information on contact panel, make contact panel of the present utility model there are the characteristics of low energy consumption simultaneously; The piezoelectric adopted comprises the solid solution formed with a 3d state transition metal doping zinc oxide, has larger internal resistance, makes contact panel reaction of the present utility model sensitiveer.
The accompanying drawing explanation
Figure 1A illustrates the top view of the piezoelectric type contact panel of the utility model one embodiment.
Figure 1B illustrates the sectional view of the piezoelectric type contact panel of Figure 1A along I-I ' line segment.
Fig. 2 A illustrates the top view of the piezoelectric type contact panel of the utility model one embodiment.
Fig. 2 B illustrates the sectional view of the piezoelectric type contact panel of Fig. 2 A along I-I ' line segment.
Fig. 3 A illustrates the top view of the piezoelectric type contact panel of the utility model one embodiment.
Fig. 3 B illustrates the sectional view of the piezoelectric type contact panel of Fig. 3 A along I-I ' line segment.
Fig. 4 A illustrates the top view of the piezoelectric type contact panel of the utility model one embodiment.
Fig. 4 B illustrates the sectional view of the piezoelectric type contact panel of Fig. 4 A along I-I ' line segment.
Embodiment
Below will describe making and the use-pattern of the utility model embodiment in detail.It should be noted, the utility model provides many inventive concepts for application, and it can multiple specific pattern be implemented.In literary composition, the specific embodiment of the discussion of giving an example is only for manufacturing and the ad hoc fashion of using the utility model, non-in order to limit the scope of the utility model.In addition, may use label or the sign of repetition in different embodiment.These only repeat to have any association in order simply clearly to narrate the utility model, not represent between the different embodiment that discussed and/or structure.Moreover, when address that one first material layer is positioned on one second material layer or on the time, comprise that the first material layer directly contacts with the second material layer or be separated with the situation of one or more other materials layers.In graphic, the shape of embodiment or thickness may enlarge, to simplify or to highlight its feature.Moreover the assembly that does not illustrate in figure or describe, have the arbitrary form of usually knowing known to the knowledgeable in technical field under can be.
The utility model system provides a kind of piezoelectric type contact panel, it has a plurality of piezoelectricity sensing unit and many Communication signal wires that are electrically connected respectively these piezoelectricity sensing units that are disposed at one of substrate side, and the material of the piezoelectric material layer of piezoelectricity sensing unit comprises the solid solution formed with 3d state transition metal doping zinc oxide.The utility model effectively improves the resistivity of piezoelectric material layer by the mode of doping 3d state transition metal in zinc paste, can effectively retain by this electric charge produced because of touching piezoelectricity sensing unit, and see through Communication signal wire by this charge-conduction to controller, so that touch position is located accurately.Below will introduce piezoelectric material layer of the present utility model will be applied in to the embodiment in the piezoelectric type contact panel of number of different types.
Figure 1A illustrates the top view of the piezoelectric type contact panel of the utility model one embodiment.Figure 1B illustrates the sectional view of the piezoelectric type contact panel of Figure 1A along I-I ' line segment.Referring to Figure 1A and Figure 1B, the contact panel 100 of the present embodiment comprises a substrate 110, a plurality of piezoelectricity sensing unit 120 and many Communication signal wires 130, wherein substrate 110 can be for example to adopt transparent material to make, for example glass substrate, plastic base or film substrate.Substrate 110 has a relative first surface 112 and a second surface 114, and wherein, in practical application, first surface 112 is the surfaces that for example represent away from user's side, and second surface 114 is the surface of representative near user's side.
Piezoelectricity sensing unit 120 is disposed at one of substrate 100 side, and the present embodiment is the side that for example is disposed at first surface 112.Subsidiary one carries, and the quantity of piezoelectricity sensing unit 120 is to design according to actual resolution requirements, at this, there is no and is limited, and the quantity of the higher piezoelectricity of resolution sensing unit 120 is more, and sensing is also just more accurate.Be separated from one another between each piezoelectricity sensing unit 120 of the present embodiment and be electrically insulated each other, and all piezoelectricity sensing units 120 are to be the design that matrix arranges to be disposed on first surface 112.Certainly, the arrangement mode of piezoelectricity sensing unit 120 is to decide according to actual design, and the utility model there is no and limited.The piezoelectric type contact panel 100 of the present embodiment can further comprise an insulation course 140, is disposed between piezoelectricity sensing unit 120, and these piezoelectricity sensing units 120 better are electrically insulated each other.
Communication signal wire 130 equally for example is disposed at the side of the first surface 112 of substrate 110, and correspondence is electrically connected piezoelectricity sensing unit 120 and is positioned at the outer controller (not illustrating) of Touch Zone T, be used for transmitting the signal between piezoelectricity sensing unit 120 and controller, allow controller can utilize specific algorithm to process the sensing signal of piezoelectricity sensing unit 120 to position.
Further for piezoelectricity sensing unit 120, illustrate, each piezoelectricity sensing unit 120 comprises a ground plane 122, a piezoelectric material layer 124 and a signal layer 126.According to the laminated architecture design of the present embodiment, ground plane 122 is disposed on the first surface 112 of substrate 110.Piezoelectric material layer 124 is disposed on ground plane 122, and the material of piezoelectric material layer 124 comprises the solid solution formed with a 3d state transition metal doping zinc oxide.Signal layer 126 is disposed on piezoelectric material layer 124.In other words, piezoelectric material layer 124 is to be disposed between signal layer 126 and ground plane 122, and is electrically connected signal layer 126 and ground plane 122.Under this framework, aforesaid Communication signal wire 130 is to be disposed on signal layer 126, and described many Communication signal wires 130 are the signal layers 126 that are electrically connected respectively a plurality of piezoelectricity sensing units 120, allow each piezoelectricity sensing unit 120 be that a Communication signal wire 130 by correspondence carries out the signal transmission.Certainly, Communication signal wire 130 can be to be disposed on the surface of the insulation course 140 between piezoelectricity sensing unit 120 in the part of cabling layout.
In addition, in the present embodiment, piezoelectric type contactor control device 100 more comprises an earth lead layer 170, be used for being electrically connected ground plane 122, and earth lead layer 170 further is electrically connected at the earth terminal of controller, allow ground plane 122 and the ground voltage level of controller be able to consistent, be conducive to controller judgement touch position.Because the ground plane 122 of the present embodiment is separated from one another and is electrically insulated each other, so the earth lead layer 170 of the present embodiment can for example comprise many earth leads, is used for being electrically connected respectively each ground plane 122.More specifically, the earth lead layer 170 of the present embodiment is disposed on the first surface 112 of substrate 110, and between piezoelectricity sensing unit 120 and substrate 110, wherein correspondence be electrically connected between the earth lead of each ground plane 122 except be separated from each other, be further to reach and be electrically insulated by another insulation course 180.
In one embodiment, 3d state transition metal comprises chromium, manganese, copper or other applicable transition metal.In one embodiment, if 3d state transition metal with M, represent, the chemical formula of solid solution is Zn 1-xm xo, wherein x=0.0001~0.05.More specifically, in one embodiment, 3d state transition metal is copper, and the resistivity of piezoelectric material layer 124 is 1*10 4nurse centimetre (Ω * cm)~9.9*10 difficult to understand 4nurse centimetre (Ω * cm) difficult to understand.In another embodiment, 3d state transition metal is manganese, and the resistivity of piezoelectric material layer 124 is 1*10 5nurse centimetre (Ω * cm)~9.9*10 difficult to understand 5nurse centimetre (Ω * cm) difficult to understand.In another embodiment, 3d state transition metal is chromium, and the resistivity of piezoelectric material layer is 1*10 6nurse centimetre (Ω * cm)~9.9*10 difficult to understand 6nurse centimetre (Ω * cm) difficult to understand.
From above-mentioned experimental data, the piezoelectric material layer 124 of the 3d state transition metal doping zinc oxide that the present embodiment is designed has higher resistivity.Therefore, the piezoelectric material layer 124 that the present embodiment has larger internal resistance can effectively retain the electric charge that touching produces, and contributes to piezoelectric type contact panel 100 to carry out dynamic detection.In addition, also because piezoelectric material layer 124 has larger internal resistance, allow touch action also be not easy to occur the memory effect of signal after finishing, make and cause erroneous judgement touch action being positioned to the overlapping of Shi Buhui because of signal.
Specifically, 3d state transition metal can be replaced the Zn of part in zinc paste 2+ion.In the process of doping, because the defect of zinc paste increases the more crystal boundary formed, and the easy scattering charge carrier of crystal boundary, therefore, the made film of zinc paste of doping 3d transition metal has higher resistivity.In addition, replace Zn 2+thereby the 3d state transition metal of ion can attract and fetter free electron reduces carrier concentration, and then promote resistivity.Moreover, transient metal doped residue oxygen concentration and then the lifting resistivity that can increase the peripheral region of crystal grain of 3d state.
From the above, because the principle of piezoelectricity sensing unit 120 is directly by mechanical deformation, to be converted into electric signal, therefore can not be limited to the type (conductor or nonconductor) of touching object, but and also do not need just detecting touch position of extra driving voltage, can be effectively energy-conservation.In addition, because each piezoelectricity sensing unit 120 has independent corresponding Communication signal wire 130, carry out transmission of signal, therefore can carry out addressing to each piezoelectricity sensing unit 120, reach the function of multi-point touch.
In one embodiment, signal layer 126 and ground plane 122 are respectively a transparency conducting layer, and piezoelectric material layer 124 is a transparent piezoelectric material layer.Specifically, ground plane 122 and signal layer 126 can be comprised of transparent conductive material, for example tin indium oxide (indium tin oxide, ITO), indium zinc oxide (indium zinc oxide, IZO), cadmium tin (cadmium tin oxide, CTO), aluminum zinc oxide (aluminum zinc oxide, AZO), indium oxide zinc-tin (indium tin zinc oxide, ITZO), tin oxide (tin oxide), zinc paste (zinc oxide), cadmium oxide (cadmium oxide), hafnia (hafnium oxide, HfO), indium oxide gallium zinc (indium gallium zinc oxide, InGaZnO), indium oxide gallium zinc-magnesium (indium gallium zinc magnesium oxide, InGaZnMgO), indium oxide gallium magnesium (indium gallium magnesium oxide, InGaMgO), indium oxide gallium aluminium (indium gallium aluminum oxide, InGaAlO), carbon nanotube (Carbon Nano Tube, CNT), silver carbon nanotube or copper carbon nanotube etc., or other electrically conducting transparent materials and metal or nonmetallic complex.
In one embodiment, the material of Communication signal wire 130 can be transparent conductive material or opaque conductive material, transparent conductive material is for example aforementioned ground plane 122 and the spendable material of signal layer 126, and opaque conductive material is for example silver, gold, carbon nanotube.How Communication signal wire 130 can be meter level or the plain conductor of micron order width.In addition, in the present embodiment, piezoelectric type contact panel 400 more comprises an earth lead layer 170, be used for being electrically connected ground plane 122, and earth lead layer 170 further is electrically connected at the earth terminal of controller, allow ground plane 122 and the ground voltage level of controller be able to consistent, be conducive to controller judgement touch position.Because the ground plane 122 of the present embodiment is separated from one another and is electrically insulated each other, so the earth lead layer 170 of the present embodiment can for example comprise many earth leads, is used for being electrically connected respectively each ground plane 122.More specifically, the earth lead layer 170 of the present embodiment is disposed on the first surface 112 of substrate 110, and between piezoelectricity sensing unit 120 and substrate 110, wherein correspondence be electrically connected between the earth lead of each ground plane 122 except be separated from each other, be further to reach and be electrically insulated by another insulation course 180.
In one embodiment, contact panel 100 can more comprise an anti-reflection film 150.The piezoelectric material layer 124 of at least corresponding piezoelectricity sensing unit 120 of anti-reflection film 150 is disposed at the surface of substrate 110, and the present embodiment is for example anti-reflection film 150 to be disposed on the second surface 114 of substrate 110.In one embodiment, the area of anti-reflection film 150 is same as the area that correspondence is positioned at the piezoelectric material layer 124 directly over it.Anti-reflection film 150 can increase transmittance, to make up the transmittance reduced because of piezoelectric material layer 124.The material of anti-reflection film 150 comprise magnesium fluoride (MgF2), titanium dioxide (TiO2), vulcanized lead (PbS), lead selenide (PbSe), calcium dioxide (SiO2) and niobium pentaoxide (Nb2O5) at least one of them.Certainly, in a further embodiment, anti-reflection film 150 is also configurable in first surface 112 and between substrate 110 and piezoelectricity sensing unit 120, at this, not by the present embodiment, is limited.In addition, anti-reflection film 150 also can be adopted the surface that a continuous film attitude sample is covered in substrate 110 comprehensively, is used for mating the refractive index difference produced because of the material difference between piezoelectricity sensing unit 120 and insulation course 140.
What remark additionally is, laminated framework by Figure 1B, piezoelectricity sensing unit 120 is sequentially the laminated aspect of earth lead layer 170, ground plane 122, piezoelectric material layer 124 and signal layer 126 from the first surface 112 of substrate 110, and Communication signal wire 130 is disposed on signal layer 126 again.Yet, on actual design, the laminated aspect of piezoelectricity sensing unit 120 also can be contrary with the present embodiment, from the first surface 112 of substrate 110, be sequentially signal layer 126, piezoelectric material layer 124 and ground plane 122, earth lead layer 170, and Communication signal wire 130 is to be disposed between substrate 110 and signal layer 126, and this laminated aspect is not limited by the utility model.
Although the piezoelectricity sensing unit 120 that Figure 1A illustrates is square, and is not limited to this, in other embodiments, piezoelectricity sensing unit 120 also can the rounded or shape that other are applicable.
Fig. 2 A illustrates the top view of the piezoelectric type contact panel of the utility model one embodiment.Fig. 2 B illustrates the sectional view of the piezoelectric type contact panel of Fig. 2 A along I-I ' line segment.Referring to Fig. 2 A and Fig. 2 B, the piezoelectric type contact panel 200 of the present embodiment is similar in appearance to the piezoelectric type contact panel 100 shown in Figure 1A and Figure 1B, both difference parts are that the piezoelectric material layer 124 of all piezoelectricity sensing units 120 of the piezoelectric type contact panel 200 of the present embodiment is to be electrical connected each other, and be to be electrically insulated by insulation course 140 between the signal layer 126 of all piezoelectricity sensing units 120, and be to be electrically insulated by another insulation course 160 between ground plane 122.
Fig. 3 A illustrates the top view of the piezoelectric type contact panel of the utility model one embodiment.Fig. 3 B illustrates the sectional view of the piezoelectric type contact panel of Fig. 3 A along I-I ' line segment.Referring to Fig. 3 A and Fig. 3 B, the piezoelectric type contact panel 300 of the present embodiment is similar in appearance to the piezoelectric type contact panel 100 shown in Figure 1A and Figure 1B, and both difference parts are that the ground plane 122 of all piezoelectricity sensing units 120 of the piezoelectric type contact panel 300 of the present embodiment is to be electrical connected each other to form the aspect on stratum altogether.This ground plane 122 can be electrically connected at the earth terminal of controller by an earth lead layer, allow ground plane 122 and the ground voltage level of controller be able to consistent, is conducive to controller judgement touch position.Because the ground plane 122 of all piezoelectricity sensing units 120 of the present embodiment is to be electrical connected into the aspect on stratum altogether, so the earth lead layer can be designed to an earth lead and get final product, and is overlapped in the periphery on common stratum, thereby do not draw in the drawings.
Fig. 4 A illustrates the top view of the piezoelectric type contact panel of the utility model one embodiment.Fig. 4 B illustrates the sectional view of the piezoelectric type contact panel of Fig. 4 A along I-I ' line segment.Referring to Fig. 4 A and Fig. 4 B, the piezoelectric type contact panel 400 of the present embodiment is similar in appearance to the piezoelectric type contact panel 100 shown in Fig. 3 A and Fig. 3 B, and both difference parts are that the piezoelectric material layer 124 of all piezoelectricity sensing units 120 of the piezoelectric type contact panel 300 of the present embodiment is to be electrical connected each other.In other words, to be disposed at the insulation course 140 between piezoelectricity sensing unit 120 be only the signal layer 126 that is electrically insulated to the present embodiment.The material of the piezoelectric material layer 124 used due to the utility model has larger internal resistance, therefore the piezoelectric material layer 124 when all piezoelectricity sensing units 120 is that while being electrical connected to form continuous rete design, the signal produced between different piezoelectricity sensing units 120 can not influence each other yet.
In addition, because anti-reflection film 150 at least needs the corresponding setting of piezoelectric material layer 124 with each piezoelectricity sensing unit 120, therefore, the anti-reflection film 150 of the present embodiment is all piezoelectric material layers 124 of being electrical connected of correspondence and be designed to a continuous rete.
By this, because adopting, the utility model usings solid solution that 3d state transition metal doping zinc oxide forms as piezoelectric material layer, therefore can effectively promote the resistivity of piezoelectric material layer, and then effectively retain the electric charge produced because of touching piezoelectricity sensing unit, and see through Communication signal wire by this charge-conduction to controller so that touch position is located accurately.Moreover the piezoelectric material layer of the utility model is not prone to memory effect, therefore, can orient more accurately touch position.
In sum, the piezoelectric type contact panel of the utility model can not be limited to the type of touching object, but and do not need extra driving voltage with regard to detecting touch position yet, directly mechanical deformation is converted into to electrical signal transfer to controller by each piezoelectricity sensing unit, and then directly judge user's touch position, therefore the piezoelectric type contact panel of the utility model can be effectively energy-conservation.Moreover piezoelectricity sensing unit of the present utility model is can not influence each other on sensing, and carrys out transmission of signal to controller thereby can support the function of multi-point touch by each self-corresponding Communication signal wire.
Though the utility model discloses as above with preferred embodiment; so it is not in order to limit scope of the present utility model; have and usually know the knowledgeable in technical field under any; in the spirit and scope that do not break away from the utility model; when doing a little change and retouching, so the protection domain of the utility model attached claim person of defining after looking is as the criterion.

Claims (13)

1. a piezoelectric type contact panel comprises:
A plurality of piezoelectricity sensing units, be disposed at one of substrate side, and respectively this piezoelectricity sensing unit comprises:
One ground plane;
One signal layer; And
One piezoelectric material layer, be disposed between this ground plane and this signal layer, and be electrically connected this ground plane and this signal layer, and wherein the material of this piezoelectric material layer comprises the solid solution formed with a 3d state transition metal doping zinc oxide; And
Many Communication signal wires, be electrically connected respectively this signal layers of those piezoelectricity sensing units.
2. piezoelectric type contact panel as claimed in claim 1, wherein this 3d state transition metal comprises chromium, manganese or copper.
3. piezoelectric type contact panel as claimed in claim 1, if wherein this 3d state transition metal represents with M, the chemical formula of this solid solution is Zn 1-xm xo, wherein x=0.0001~0.05.
4. piezoelectric type contact panel as claimed in claim 1, wherein this 3d state transition metal is copper, and the resistivity of this piezoelectric material layer is 1*10 4nurse centimetre (Ω * cm)~9.9*10 difficult to understand 4nurse centimetre (Ω * cm) difficult to understand.
5. piezoelectric type contact panel as claimed in claim 1, wherein this 3d state transition metal is manganese, and the resistivity of this piezoelectric material layer is 1*10 5nurse centimetre (Ω * cm)~9.9*10 difficult to understand 5nurse centimetre (Ω * cm) difficult to understand.
6. piezoelectric type contact panel as claimed in claim 1, wherein this 3d state transition metal is chromium, and the resistivity of this piezoelectric material layer is 1*10 6nurse centimetre (Ω * cm)~9.9*10 difficult to understand 6nurse centimetre (Ω * cm) difficult to understand.
7. piezoelectric type contact panel as claimed in claim 1, wherein these piezoelectric series of strata of those piezoelectricity sensing units are electrical connected each other.
8. as the piezoelectric type contact panel as described in claim 1 or 7, wherein these ground connection series of strata of those piezoelectricity sensing units are electrical connected to form stratum altogether each other.
9. piezoelectric type contact panel as claimed in claim 1, wherein those voltage inductances answer unary system separated from one another and be electrically insulated each other.
10. piezoelectric type contact panel as claimed in claim 9, wherein those voltage inductances answer unary system to be matrix to arrange.
11. piezoelectric type contact panel as claimed in claim 1 more comprises:
One earth lead layer, be electrically connected this ground planes of those piezoelectricity sensing units.
12. piezoelectric type contact panel as claimed in claim 1, wherein this signal layer and this ground plane are respectively a transparency conducting layer.
13. piezoelectric type contactor control device as claimed in claim 1 more comprises:
One anti-reflection film, the piezoelectric material layer of at least corresponding those piezoelectricity sensing units is disposed at a surface of this substrate.
CN201320460224.1U 2013-07-30 2013-07-30 Piezoelectric type touch panel Expired - Fee Related CN203376710U (en)

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Application Number Priority Date Filing Date Title
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104345934A (en) * 2013-07-30 2015-02-11 宸鸿科技(厦门)有限公司 Piezoelectric type touch panel
CN105807988A (en) * 2016-02-25 2016-07-27 京东方科技集团股份有限公司 Touch display substrate, touch display screen and fabrication method for touch display substrate
JP2017538189A (en) * 2014-10-14 2017-12-21 コーニング インコーポレイテッド Piezoelectric film structure and sensor and display assembly using them

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104345934A (en) * 2013-07-30 2015-02-11 宸鸿科技(厦门)有限公司 Piezoelectric type touch panel
JP2017538189A (en) * 2014-10-14 2017-12-21 コーニング インコーポレイテッド Piezoelectric film structure and sensor and display assembly using them
US10649588B2 (en) 2014-10-14 2020-05-12 Corning Incorporated Piezoelectric film structures and sensors and display assemblies using same
CN105807988A (en) * 2016-02-25 2016-07-27 京东方科技集团股份有限公司 Touch display substrate, touch display screen and fabrication method for touch display substrate

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Termination date: 20180730