CN203269564U - Separation and purification system for sulphur hexafluoride and carbon tetrafluoride - Google Patents

Separation and purification system for sulphur hexafluoride and carbon tetrafluoride Download PDF

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Publication number
CN203269564U
CN203269564U CN2013202189235U CN201320218923U CN203269564U CN 203269564 U CN203269564 U CN 203269564U CN 2013202189235 U CN2013202189235 U CN 2013202189235U CN 201320218923 U CN201320218923 U CN 201320218923U CN 203269564 U CN203269564 U CN 203269564U
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China
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high pressure
pressure pipe
magnetic valve
sulfur hexafluoride
valve
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***
汪献忠
蔡巍
李国兴
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State Grid Corp of China SGCC
North China Electric Power Research Institute Co Ltd
Electric Power Research Institute of State Grid Heilongjiang Electric Power Co Ltd
Henan Relations Co Ltd
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State Grid Corp of China SGCC
North China Electric Power Research Institute Co Ltd
Electric Power Research Institute of State Grid Heilongjiang Electric Power Co Ltd
Henan Relations Co Ltd
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Abstract

The utility model discloses a separation and purification system for sulphur hexafluoride and carbon tetrafluoride. The separation and purification system for sulphur hexafluoride and carbon tetrafluoride comprises a mixed gas recovery pipeline, wherein the mixed gas recovery pipeline is connected with a circulating purification pipeline, a sulphur hexafluoride purification pipeline and a carbon tetrafluoride purification pipeline respectively. According to the separation and purification system for sulphur hexafluoride and carbon tetrafluoride disclosed by the utility model, the defect that carbon tetrafluoride gas cannot be separated and purified by sulphur hexafluoride gas recovery and purification equipment on the market is overcome, thus realizing separation and respective purification for sulphur hexafluoride gas and carbon tetrafluoride gas, and integrating the technologies of recovery, respective separation and purification, and re-filling for gas; the separation and purification system for sulphur hexafluoride and carbon tetrafluoride has the characteristics of being complete in function, simple to operate, economical, applicable, and the like.

Description

Sulfur hexafluoride and tetrafluoro-methane system for separating and purifying
Technical field
The utility model belongs to gas recovery, separation and purification techniques field, relates in particular to a kind of sulfur hexafluoride and tetrafluoro-methane system for separating and purifying.
Background technology
Due to sulfur hexafluoride (SF 6) gas has good insulation and arc extinction performance, be widely used in high-tension switch gear.But, under the envrionment temperature of cold (external temperature as the Heilungkiang Harbin in winter reaches subzero 40 ℃), (SF that will liquefy of the SF6 gas under certain pressure 6The gas-liquid critical temperature of gas is-50 ℃), meeting build-up of pressure or density reduce, and its insulation and arc extinction performance also will reduce accordingly.This situation is ubiquity in China Northeast China Power Grid system.
So, generally adopt SF at the high and cold low temp area of China 6/ tetrafluoro-methane (CF 4) high-tension switch gear of mixed gas.This be because, after deliberation, at SF 6Sneaking into a certain proportion of other rare gas element in gas, is to solve SF 6The high-voltage switch gear low-temperature liquefaction causes its insulation and arc extinction performance to reduce the effective way of this problem, and mixed gas also can obtain more satisfactory insulation and arc quenching effect as long as ratio is suitable.That use is more at present is SF 6+ CF 4Mixed gas.Test shows, pressure ratio is the SF of 60%: 40% 6, CF 4The insulating power of mixed gas and connecting-disconnecting function and pure SF 6Gas is identical, can cut-off the short-circuit current of 40kA under 145kV.At present, the severe cold area in China is with SF 6+ CF 4Mixed gas is the high-tension switch gear of dielectric and arc-extinguishing medium, widespread use, and these equipment comprise SF 6The high-voltage such as gas-break switch, GIS electrical equipment.
SF 6Gas or its mixed gas have been widely used in various electric installations such as switch in mesohigh, supergrid as good insulation and arc-extinguishing medium, strict regulation has been carried out in the quality surveillance of country to the sulfur hexafluoride gas that moves in this class high-voltage switch gear.As in " sulfur hexafluoride gas analytical technology " book, " internal flashover is occuring or other should carry out Disintegration overhaul when abnormal in equipment, also should carry out Disintegration overhaul when the sulfur hexafluoride breaker operation reaches the open and close times of regulation or accumulative total dropout current with regard to proposing." decompose generation gas or solid-state poisonous, mordant product under arcing due to sulfur hexafluoride gas, so must take strict supervision and management measure when disintegrating, prevent intoxication accident.Relevant regulation has: need discharging before equipment disintegrates and process used sulfur hexafluoride gas Used sulfur hexafluoride gas will all reclaim by gas concentration unit, must not be to airborne release The sulfur hexafluoride gas that reclaims, when not meeting by analysis new makings amount standard, must purifying treatment, through confirm qualified after reuse again ...
The SF that generally uses at the high and cold low temp area of China 6/ CF 4The high-tension switch gear of mixed gas, the gas that it is inner does not need reclaiming clean in the situation that meet operating sulfur hexafluoride gas Application standard yet.But what fill due to such high-tension switch gear is mixed gas, is not pure SF 6Gas, CF 4Gas also occupies suitable ratio, is generally more than 40%, sometimes even reaches 48%, so this class SF 6/ CF 4Insulating gas in the mixed gas high-tension switch gear not only needs SF in the processes such as recovery, purification 6Gas purification and purification also need CF 4Separate and purified and purify.But on present stage market, mostly similar equipment is about the purification of sulfur hexafluoride gas and purification aspect, does not also relate to CF 4The relevant device of separating-purifying.
The utility model content
The utility model provides in a kind of high-voltage switch gear as the sulfur hexafluoride of insulation arc-extinguishing medium and the system for separating and purifying of tetrafluoro-methane mixed gas in order to solve weak point of the prior art.
For solving the problems of the technologies described above, the utility model adopts following technical scheme: sulfur hexafluoride and tetrafluoro-methane system for separating and purifying, it is characterized in that: comprise the mixed gas recycling pipeline, the mixed gas recycling pipeline is connected with respectively circularly purifying pipeline, sulfur hexafluoride purification pipeline and tetrafluoro-methane purification pipeline.
Described mixed gas recycling pipeline comprises recovery mouth self-sealing joint 2, the first magnetic valve V2 that connects by the first high pressure pipe 1 successively, Air cooler 3, molecular sieve 4, the first manual normally open valve C1, the first compressor 5, Air cooler 3 bypasses, the first check valve 6, the first cool-heat-exchanger 7, the second magnetic valve V9, the 3rd magnetic valve V8, the second manual normally open valve C2 and sulfur hexafluoride purification tank 8; The first cool-heat-exchanger 7 is connected with the first refrigerator 9 by the 4th magnetic valve D1; The first high pressure pipe 1 is imported and exported both sides at the first magnetic valve V2 and is connected with vacuum compressor 10, and the entrance end of vacuum compressor 10 and exit end are respectively equipped with the 5th magnetic valve V3 and the 6th magnetic valve V4; The first high pressure pipe 1 is provided with the first pressure transmitter P7, is provided with the first tensimeter 11, is provided with the second pressure transmitter P1, is provided with the first pressure operated switch YL1 between the first check valve 6 and the first cool-heat-exchanger 7 at the on the suction side of molecular sieve 4 at the first magnetic valve V2 on the suction side reclaiming mouthful self-sealing joint 2 places.
Described circularly purifying pipeline comprises the second high pressure pipe 12 that extend into sulfur hexafluoride purification tank 8 inner bottom parts, the other end of the second high pressure pipe 12 is connected between the first magnetic valve V2 and Air cooler 3 on the first high pressure pipe 1, the second high pressure pipe 12 is provided with the 3rd manual normally open valve C3, the 7th magnetic valve V5 and the 4th manual normally open valve C6 successively along air flow line, be provided with heating tube 13 with temperature sensor in sulfur hexafluoride purification tank 8, sulfur hexafluoride purification tank 8 is being provided with the first temperature sensor T1 near the place, bottom, the first LOAD CELLS TR1 is arranged at sulfur hexafluoride purification tank 8 bottoms.
Described sulfur hexafluoride purification pipeline comprises third high pressure pipe 14, third high pressure pipe 14 1 ends are connected with cold-trap 15, third high pressure pipe 14 the other ends are connected with sulfur hexafluoride purification tank 8, be provided with successively condenser 16, the 5th manual normally open valve C4, sulfur hexafluoride purity instrument 17 and the 8th magnetic valve D4 by sulfur hexafluoride purification tank 8 to cold-trap 15 on third high pressure pipe 14, condenser 16 is connected with the first refrigerator 9 by the 4th high pressure pipe 18, the 4th high pressure pipe 18 is provided with the 9th magnetic valve D2, and cold-trap 15 is connected with the second refrigerator 19.
described tetrafluoro-methane purification pipeline comprises the 5th high pressure pipe 20, the 15 high pressure pipe 53 and tetrafluoro-methane purification tank 21, are connected with tetrafluoro-methane purification tank with cold-trap 15 respectively and are connected in the two ends of the 5th high pressure pipe 20, be provided with successively the 3rd pressure transmitter P3 by cold-trap 15 to tetrafluoro-methane purification tank 21 on the 5th high pressure pipe 20, the second tensimeter 22, the tenth magnetic valve V13, the 11 magnetic valve V14, air cooler 23, the 6th manual normally open valve C7, the second compressor 24, air cooler 23 bypasses, the second check valve 25, the second cool-heat-exchanger 26, the 12 magnetic valve DF3 and the 7th manual normally open valve C10, be provided with the second pressure operated switch YL2 in the ingress of the second check valve 25, tetrafluoro-methane purification tank 21 is provided with the second temperature sensor T2, tetrafluoro-methane purity instrument 27 and buffers packet 28, buffers packet 28 is provided with the 8th manual normally open valve C8 and the first safety valve 29, is provided with the 3rd tensimeter 30 and the 4th pressure transmitter P4 between the 8th manual normally open valve C8 and the first safety valve 29, the 15 high pressure pipe 53 two ends respectively with sulfur hexafluoride purification tank 8 be connected cool-heat-exchanger 26 and be connected, the 15 high pressure pipe 53 is provided with the 21 magnetic valve D3 and the 22 magnetic valve D6, and the second cool-heat-exchanger 26 is connected with the 3rd refrigerator 54 by the 21 magnetic valve D3.
Also comprise sulfur hexafluoride residual air recycling pipeline, sulfur hexafluoride residual air recycling pipeline comprises the 6th high pressure pipe 31 and the 7th high pressure pipe 32, the 6th high pressure pipe 31 1 ends are connected with cold-trap 15, the 6th high pressure pipe 31 the other ends are connected between the 7th magnetic valve V5 and the 4th manual normally open valve C6 on the second high pressure pipe 12, and the 6th high pressure pipe 31 is provided with the 13 magnetic valve V11; One end of the 7th high pressure pipe 32 is connected between the tenth magnetic valve V13 and the 11 magnetic valve V14 on the 5th high pressure pipe 20, is provided with successively the 14 magnetic valve V12, vacuum packet 33 and external vacuumizing joint 34 along air-flow on the 7th high pressure pipe 32.
Comprise that also sulfur hexafluoride gas recharges pipeline, sulfur hexafluoride gas recharges pipeline and comprises the 8th high pressure pipe 35 and the 9th high pressure pipe 36, the 8th high pressure pipe 35 1 ends are connected between the second magnetic valve V9 and the 3rd magnetic valve V8 on the first high pressure pipe 1, the other end of the 8th high pressure pipe 35 is provided with and recharges mouthful 37, the eight high pressure pipes 35 and be provided with the 15 magnetic valve V6 and be positioned at the 4th tensimeter 38 that recharges mouthful 37 places; One end of the 9th high pressure pipe 36 is connected on the second high pressure pipe 12 between the 3rd manual normally open valve C3 and the 7th magnetic valve V5, the other end of the 9th high pressure pipe 36 is connected between the first check valve 6 and the first cool-heat-exchanger 7 on the first high pressure pipe 1, and the 9th high pressure pipe 36 is provided with the 16 magnetic valve V10, supercharger 39 and the 3rd check valve 40; Be provided with the 17 magnetic valve V7 between the second high pressure pipe 12 and the 8th high pressure pipe 35, the 17 magnetic valve V7 is between the 3rd manual normally open valve C3 and the 7th magnetic valve V5, be connected with the tenth high pressure pipe 41 at the 15 magnetic valve V6 with between recharging mouthfuls 37 on the 8th high pressure pipe 35, the other end of the tenth high pressure pipe 41 is provided with pressure regulation outlet 42, the tenth high pressure pipe 41 be provided with relief valve 43 and be positioned at the 5th tensimeter 44, the eight high pressure pipes 35 at pressure regulation outlet 42 places and the first high pressure pipe 1 between be provided with the 23 magnetic valve V1.
Comprise that also carbon tetrafluoride gas recharges pipeline, carbon tetrafluoride gas recharges pipeline and comprises the 11 high pressure pipe 45 and the 12 high pressure pipe 46, one end of the 11 high pressure pipe 45 is connected on the 5th high pressure pipe 20 between the second cool-heat-exchanger 26 and the 12 magnetic valve DF3, the other end of the 11 high pressure pipe 45 is provided with tetrafluoro-methane outlet 48, the 11 high pressure pipes 45 and is provided with the 18 magnetic valve DF4; One end of the 12 high pressure pipe 46 is located at tetrafluoro-methane purification tank 21 inner bottom parts, the other end of the 12 high pressure pipe 46 is connected between the tenth magnetic valve V13 and the 11 magnetic valve V14 on the 5th high pressure pipe 20, is provided with successively the 9th manual normally open valve C9, the 19 magnetic valve DF2 on the 12 high pressure pipe 46 and transfers flow needle-valve C11.
A described recovery mouthful self-sealing joint 2 is connected with the 13 high pressure pipe 47, the 13 high pressure pipe 47 is provided with between 20 magnetic valve DF1, vacuum transducer P5, electromagnetism angle valve D5 and vacuum pump 48, the 13 high pressure pipes 47 and the 7th high pressure pipe 32 and connects by the 14 high pressure pipe 49.
Described sulfur hexafluoride purification tank 8 is provided with monitoring pipe 50, and monitoring pipe 50 is provided with the tenth manual normally open valve C5, the 5th pressure transmitter P2, the second safety valve 51 and the 6th tensimeter 52.
Adopt technique scheme, the mixed gas recycling pipeline with in high-voltage switch gear as the SF of the arc-extinguishing medium that insulate 6/ CF 4Mixed gas is recovered in sulfur hexafluoride purification tank, the circularly purifying pipeline is removed the degradation production of some poisonous subfluoride of the little water in sulfur hexafluoride waste gas in mixed gas in sulfur hexafluoride purification tank, sulfur hexafluoride gas and some impurity components, and the sulfur hexafluoride that sulfur hexafluoride purification pipeline is purified sulfur hexafluoride in tank is purified; The tetrafluoro-methane that tetrafluoro-methane purification pipeline is purified sulfur hexafluoride in tank is purified and separates, sulfur hexafluoride residual air recycling pipeline reclaims the residual air in cold-trap, sulfur hexafluoride gas recharges the sulfur hexafluoride that pipeline purifies sulfur hexafluoride in tank and recharges in steel cylinder or high-tension switch gear, and carbon tetrafluoride gas recharges pipeline tetrafluoro-methane is filled into container to be filled.In addition, the utility model can also vacuumize operation to the different pipelines of different steps in system.
The utility model has overcome the shortcoming that on the market sulfur hexafluoride gas reclaiming clean equipment can not the separating-purifying carbon tetrafluoride gas, not only realized separating and purifying respectively of sulfur hexafluoride and carbon tetrafluoride gas, and the recovery of gas collection body, separating-purifying and the technology that recharges in one, have the characteristics such as multiple functional, simple to operate, economic and practical respectively.
Description of drawings
Fig. 1 is schema of the present utility model.
Embodiment
As shown in Figure 1, sulfur hexafluoride of the present utility model and tetrafluoro-methane system for separating and purifying comprise the mixed gas recycling pipeline, and the mixed gas recycling pipeline is connected with respectively circularly purifying pipeline, sulfur hexafluoride purification pipeline and tetrafluoro-methane purification pipeline.
Described mixed gas recycling pipeline comprises recovery mouth self-sealing joint 2, the first magnetic valve V2 that connects by the first high pressure pipe 1 successively, Air cooler 3, molecular sieve 4, the first manual normally open valve C1, the first compressor 5, Air cooler 3 bypasses, the first check valve 6, the first cool-heat-exchanger 7, the second magnetic valve V9, the 3rd magnetic valve V8, the second manual normally open valve C2 and sulfur hexafluoride purification tank 8; The first cool-heat-exchanger 7 is connected with the first refrigerator 9 by the 4th magnetic valve D1; The first high pressure pipe 1 is imported and exported both sides at the first magnetic valve V2 and is connected with vacuum compressor 10, and the entrance end of vacuum compressor 10 and exit end are respectively equipped with the 5th magnetic valve V3 and the 6th magnetic valve V4; The first high pressure pipe 1 is provided with the first pressure transmitter P7, is provided with the first tensimeter 11, is provided with the second pressure transmitter P1, is provided with the first pressure operated switch YL1 between the first check valve 6 and the first cool-heat-exchanger 7 at the on the suction side of molecular sieve 4 at the first magnetic valve V2 on the suction side reclaiming mouthful self-sealing joint 2 places.Described sulfur hexafluoride purification tank 8 is provided with monitoring pipe 50, and monitoring pipe 50 is provided with the tenth manual normally open valve C5, the 5th pressure transmitter P2, the second safety valve 51 and the 6th tensimeter 52.
Described circularly purifying pipeline comprises the second high pressure pipe 12 that extend into sulfur hexafluoride purification tank 8 inner bottom parts, the other end of the second high pressure pipe 12 is connected between the first magnetic valve V2 and Air cooler 3 on the first high pressure pipe 1, the second high pressure pipe 12 is provided with the 3rd manual normally open valve C3, the 7th magnetic valve V5 and the 4th manual normally open valve C6 successively along air flow line, be provided with heating tube 13 with temperature sensor in sulfur hexafluoride purification tank 8, sulfur hexafluoride purification tank 8 is being provided with the first temperature sensor T1 near the place, bottom, the first LOAD CELLS TR1 is arranged at sulfur hexafluoride purification tank 8 bottoms.
Described sulfur hexafluoride purification pipeline comprises third high pressure pipe 14, third high pressure pipe 14 1 ends are connected with cold-trap 15, third high pressure pipe 14 the other ends are connected with sulfur hexafluoride purification tank 8, be provided with successively condenser 16, the 5th manual normally open valve C4, sulfur hexafluoride purity instrument 17 and the 8th magnetic valve D4 by sulfur hexafluoride purification tank 8 to cold-trap 15 on third high pressure pipe 14, condenser 16 is connected with the first refrigerator 9 by the 4th high pressure pipe 18, the 4th high pressure pipe 18 is provided with the 9th magnetic valve D2, and cold-trap 15 is connected with the second refrigerator 19.
described tetrafluoro-methane purification pipeline comprises the 5th high pressure pipe 20, the 15 high pressure pipe 53 and tetrafluoro-methane purification tank 21, are connected with tetrafluoro-methane purification tank with cold-trap 15 respectively and are connected in the two ends of the 5th high pressure pipe 20, be provided with successively the 3rd pressure transmitter P3 by cold-trap 15 to tetrafluoro-methane purification tank 21 on the 5th high pressure pipe 20, the second tensimeter 22, the tenth magnetic valve V13, the 11 magnetic valve V14, air cooler 23, the 6th manual normally open valve C7, the second compressor 24, air cooler 23 bypasses, the second check valve 25, the second cool-heat-exchanger 26, the 12 magnetic valve DF3 and the 7th manual normally open valve C10, be provided with the second pressure operated switch YL2 in the ingress of the second check valve 25, tetrafluoro-methane purification tank 21 is provided with the second temperature sensor T2, tetrafluoro-methane purity instrument 27 and buffers packet 28, buffers packet 28 is provided with the 8th manual normally open valve C8 and the first safety valve 29, is provided with the 3rd tensimeter 30 and the 4th pressure transmitter P4 between the 8th manual normally open valve C8 and the first safety valve 29, the 15 high pressure pipe 53 two ends respectively with sulfur hexafluoride purification tank 8 be connected cool-heat-exchanger 26 and be connected, the 15 high pressure pipe 53 is provided with the 21 magnetic valve D3 and the 22 magnetic valve D6, and the second cool-heat-exchanger 26 is connected with the 3rd refrigerator 54 by the 21 magnetic valve D3.
The utility model also comprises sulfur hexafluoride residual air recycling pipeline, sulfur hexafluoride residual air recycling pipeline comprises the 6th high pressure pipe 31 and the 7th high pressure pipe 32, the 6th high pressure pipe 31 1 ends are connected with cold-trap 15, the 6th high pressure pipe 31 the other ends are connected between the 7th magnetic valve V5 and the 4th manual normally open valve C6 on the second high pressure pipe 12, and the 6th high pressure pipe 31 is provided with the 13 magnetic valve V11; One end of the 7th high pressure pipe 32 is connected between the tenth magnetic valve V13 and the 11 magnetic valve V14 on the 5th high pressure pipe 20, is provided with successively the 14 magnetic valve V12, vacuum packet 33 and external vacuumizing joint 34 along air-flow on the 7th high pressure pipe 32.
The utility model comprises that also sulfur hexafluoride gas recharges pipeline, sulfur hexafluoride gas recharges pipeline and comprises the 8th high pressure pipe 35 and the 9th high pressure pipe 36, the 8th high pressure pipe 35 1 ends are connected between the second magnetic valve V9 and the 3rd magnetic valve V8 on the first high pressure pipe 1, the other end of the 8th high pressure pipe 35 is provided with and recharges mouthful 37, the eight high pressure pipes 35 and be provided with the 15 magnetic valve V6 and be positioned at the 4th tensimeter 38 that recharges mouthful 37 places; One end of the 9th high pressure pipe 36 is connected on the second high pressure pipe 12 between the 3rd manual normally open valve C3 and the 7th magnetic valve V5, the other end of the 9th high pressure pipe 36 is connected between the first check valve 6 and the first cool-heat-exchanger 7 on the first high pressure pipe 1, and the 9th high pressure pipe 36 is provided with the 16 magnetic valve V10, supercharger 39 and the 3rd check valve 40; Be provided with the 17 magnetic valve V7 between the second high pressure pipe 12 and the 8th high pressure pipe 35, the 17 magnetic valve V7 is between the 3rd manual normally open valve C3 and the 7th magnetic valve V5, be connected with the tenth high pressure pipe 41 at the 15 magnetic valve V6 with between recharging mouthfuls 37 on the 8th high pressure pipe 35, the other end of the tenth high pressure pipe 41 is provided with pressure regulation outlet 42, the tenth high pressure pipe 41 be provided with relief valve 43 and be positioned at the 5th tensimeter 44, the eight high pressure pipes 35 at pressure regulation outlet 42 places and the first high pressure pipe 1 between be provided with the 23 magnetic valve V1.
The utility model comprises that also carbon tetrafluoride gas recharges pipeline, carbon tetrafluoride gas recharges pipeline and comprises the 11 high pressure pipe 45 and the 12 high pressure pipe 46, one end of the 11 high pressure pipe 45 is connected on the 5th high pressure pipe 20 between the second cool-heat-exchanger 26 and the 12 magnetic valve DF3, the other end of the 11 high pressure pipe 45 is provided with tetrafluoro-methane outlet 48, the 11 high pressure pipes 45 and is provided with the 18 magnetic valve DF4; One end of the 12 high pressure pipe 46 is located at tetrafluoro-methane purification tank 21 inner bottom parts, the other end of the 12 high pressure pipe 46 is connected between the tenth magnetic valve V13 and the 11 magnetic valve V14 on the 5th high pressure pipe 20, is provided with successively the 9th manual normally open valve C9, the 19 magnetic valve DF2 on the 12 high pressure pipe 46 and transfers flow needle-valve C11.
A described recovery mouthful self-sealing joint 2 is connected with the 13 high pressure pipe 47, the 13 high pressure pipe 47 is provided with between 20 magnetic valve DF1, vacuum transducer P5, electromagnetism angle valve D5 and vacuum pump 48, the 13 high pressure pipes 47 and the 7th high pressure pipe 32 and connects by the 14 high pressure pipe 49.
The below introduces specific operation process of the present utility model in detail according to each function.
One, mixed gas reclaims: the recovery of gas comprises gas from SF 6/ CF 4High-tension switch gear is recovered into native system or purifies, or it is poured into the interim storage facilities such as steel cylinder.
(1), mixed gas reclaims and purifies.Open the first magnetic valve V2, the second magnetic valve V9 and the 3rd magnetic valve V8, start the first compressor 5, the first refrigerator 9, open the 4th magnetic valve D1, mixed gas is recycled to sulfur hexafluoride purification tank 8 purifyings.When being recycled to negative pressure, start the negative pressure recovery process, close the first magnetic valve V2, open the 5th magnetic valve V3, the 6th magnetic valve V4, the second magnetic valve V9 and the 3rd magnetic valve V8, start vacuum compressor 10.Detailed process is as follows:
Be divided into malleation recovery and negative pressure and reclaim two flow processs when the exhaust gas source such as sulfur hexafluoride tank body or high-voltage switch gear reclaim sulfur hexafluoride gas, first carry out malleation and reclaim, then carry out negative pressure and reclaim.When this is main, because level off to when zero when the pressure of source of the gas, still there is part waste gas in exhaust gas source, at this moment, by a vacuum pump 48 is set in the mixed gas recycling pipeline, then under the pressure of pump, reaches the purpose of waste gas suction recycling pipeline that exhaust gas source is residual.
Malleation recovery process: reclaim SF from exhaust gas source such as high-tension switch gears 6During gas, first open the first magnetic valve V2, the second magnetic valve V9 and the 3rd magnetic valve V8, start the first compressor 5, the first refrigerator 9, open the 4th magnetic valve D1, at this moment, sulfur hexafluoride waste gas enters into sulfur hexafluoride purification tank 8 through reclaiming mouthful self-sealing joint 2 along the first high pressure pipe 1 first magnetic valve V2 that flows through successively after Air cooler 3, molecular sieve 4, the first manual normally open valve C1, the first compressor 5, Air cooler 3 bypasses, the first check valve 6, the first cool-heat-exchanger 7, the second magnetic valve V9, the 3rd magnetic valve V8 and the second manual normally open valve C2.Molecular sieve 4 is secondary filters of a series connection, and molecular sieve 4 is the active surfaces with a large amount of micropores, can filter micro-water content in sulfur hexafluoride waste gas and the impurity such as degradation production of poisonous subfluoride.The first compressor 5 plays a part to increase pressure in gas piping, speeds the flow velocity of sulfur hexafluoride waste gas in the first high pressure pipe 1 of recovery.The inside of the first cool-heat-exchanger 7 is equipped with a condenser, this condenser connects first refrigerator 9 of-80 ℃ by the 4th magnetic valve D1, when the 4th magnetic valve D1 opened, the first refrigerator 9 started refrigerations, and the sulfur hexafluoride gas of the cool-heat-exchanger of flowing through is cooled.2 places are provided with first a pressure transmitter P7 at recovery mouth self-sealing joint, are used for detecting the pressure that reclaims mouth.Be provided with the first tensimeter 11 at the first magnetic valve V2 on the suction side, be used for showing the pressure that reclaims mouth.A second pressure transmitter P1 is set in the ingress of molecular sieve 4, because the pressure of molecular sieve 4 can not be too high, greatly between 0.2-0.6MPa, so the second pressure transmitter P1 is used for sentencing and distinguishes gaseous tension when entering molecular sieve 4, when the second pressure transmitter P1 pressure during greater than molecular sieve 4 upper limit of pressure, this pressure sensor signal is transferred to the watchdog routine of lower computer, start corresponding program autoshutdown the first magnetic valve V2, at this moment, the gaseous tension in pipeline reduces under the effect of the first compressor 5.When the pressure of molecular sieve 4 imports lower than molecular sieve 4 pressure lower watchdog routine starts the first magnetic valve V2 automatically in limited time, recovery process continues.Be provided with the first pressure operated switch YL1 between the first check valve 6 and the first cool-heat-exchanger 7, monitor the top hole pressure of the first compressor 5, if top hole pressure is too high, watchdog routine autoshutdown first compressor 5 of lower computer, and prompting " the first compressor 5 top hole pressures are too high! ".
When the pressure of exhaust gas source is reduced to and reclaims mouth pressure when suitable gradually, will start the negative pressure recovery process.close the first magnetic valve V2, open the 5th magnetic valve V3, the 6th magnetic valve V4, the second magnetic valve V9 and the 3rd magnetic valve V8, start vacuum compressor 10, at this moment, the recovery mouth self-sealing joint 2 of sulfur hexafluoride waste gas through reclaiming mouthful is along the first high pressure pipe 1 the 5th magnetic valve V3 that flows through successively, vacuum compressor 10, the 6th magnetic valve V4, Air cooler 3, molecular sieve 4, the first manual normally open valve C1, the first compressor 5, Air cooler 3 bypasses, the first check valve 6, the first cool-heat-exchanger 7, the second magnetic valve V9, enter into sulfur hexafluoride purification tank 8 after the 3rd magnetic valve V8 and the second manual normally open valve C2.
Above-mentioned sulfur hexafluoride gas recovery process (containing malleation and negative pressure reclaims) has been realized the quick recovery of sulfur hexafluoride gas from exhaust gas source to sulfur hexafluoride purification tank 8, can realize the quick recovery of sulfur hexafluoride waste gas in the site work process.Native system also can be recovered into the sulfur hexafluoride gas steel cylinder with the sulfur hexafluoride waste gas of exhaust gas source.Through the sulfur hexafluoride gas that reclaims, if will purify respectively and separate, next step can carry out the circularly purifying program.
(2), be recycled to steel cylinder.Open the first magnetic valve V2, the second magnetic valve V9, the 15 magnetic valve V6, start the first compressor 5, the first refrigerator 9, open the 4th magnetic valve D1, the recharge mouth 37 of the gas in high-voltage switch gear by the 8th high pressure pipe 35 is recycled in steel cylinder.When being recycled to negative pressure, start the negative pressure recovery process, close the first magnetic valve V2, open the 5th magnetic valve V3, the 6th magnetic valve V4, the second magnetic valve V9, the 15 magnetic valve V6, start vacuum compressor 10.
Two, circularly purifying
(1) sulfur hexafluoride purification tank 8 circularly purifyings: in the sulfur hexafluoride waste gas that reclaims, sulfur hexafluoride, tetrafluoro-methane are arranged not only from the SF 6 high-voltage switch, also have the components such as degradation production, air and other impurity of some poisonous subfluoride of little water, sulfur hexafluoride gas.At first the purification process of sulfur hexafluoride gas will purify degradation production and some impurity components of some poisonous subfluoride of little water in sulfur hexafluoride waste gas, sulfur hexafluoride gas and remove.
the circularly purifying flow process of sulfur hexafluoride gas: open the 7th magnetic valve V5, the second magnetic valve V9 and the 3rd magnetic valve V8, start the first compressor 5, the first refrigerator 9, open the 4th magnetic valve D1, sulfur hexafluoride gas to be purified in sulfur hexafluoride purification tank 8 is from extending near the second high pressure pipe 12 of sulfur hexafluoride purification tank 8 bottoms the 3rd manual normally open valve C3 that flows through, enter the main recovery process (Air cooler 3 of can flowing through successively of sulfur hexafluoride after the 7th magnetic valve V5 and the 4th manual normally open valve C6, molecular sieve 4, the first manual normally open valve C1, the first compressor 5, Air cooler 3 bypasses, the first check valve 6, the first cool-heat-exchanger 7, the second magnetic valve V9, enter into sulfur hexafluoride purification tank 8 after the 3rd magnetic valve V8 and the second manual normally open valve C2), this flow process can loop.
In this process, previous molecular sieve 4 filters out degradation production and some impurity of some poisonous subfluoride of the sulfur hexafluoride gas in waste gas, and a rear molecular sieve 4 filters out the micro-water content in waste gas.
In this process, can be learnt the purification rate (ton/h or ton/divide) of program by experiment, can draw the required clarification time of circularly purifying by the weight of sulfur hexafluoride gas to be clean (by the first LOAD CELLS TR1 that is arranged on sulfur hexafluoride purification tank 8 bottoms as can be known, this weight signal can be transferred to the watchdog routine of lower computer) so.After finishing cycling time, the lower computer of this system can send control signal, shut electromagnetic valve the 7th magnetic valve V5, the second magnetic valve V9 and the 3rd magnetic valve V8, and this circularly purifying flow process finishes automatically, at this moment, the sulfur hexafluoride gas after circularly purifying is stored in sulfur hexafluoride purification tank 8.The heating tube 13 of the medium position band temperature sensor of sulfur hexafluoride purification tank 8, near the first temperature sensor T1 of bottom, the first LOAD CELLS TR1, these temperature sensor signals and weight transducing signal can be transferred to the lower computer watchdog routine of this system.
(2), the interior sulfur hexafluoride of sulfur hexafluoride purification tank 8 is purified: start the first refrigerator 9, open the 9th magnetic valve D2, to rectifying tower refrigeration (the first refrigerator 9 drives the condenser working at the top that is arranged on rectifying tower).When the temperature of the first temperature sensor T1 of sulfur hexafluoride purification tank 8 continues in constant situation in 3 seconds, system judges that sulfur hexafluoride gas has been cooled to the limit, at this moment, opened for the 8th one second of magnetic valve D4, the light-component gas (tetrafluoro-methane, air and other gas) in sulfur hexafluoride purification tank 8 is along third high pressure pipe 14 flow through the 5th manual normally open valve C4 and the 8th magnetic valve D4 inflow cold-trap 15.When the temperature of the first temperature sensor T1 continues to change, close the 8th magnetic valve D4, until temperature continue again 3 seconds constant, system opens the 8th magnetic valve D4 again automatically, has again the part light-component gas to flow into cold-trap 15.Above-mentioned flow process is undertaken by the PLC controlled circulation, when the temperature of sulfur hexafluoride purification tank 8 reaches-10 ℃, and the sulfur hexafluoride purification schemes that the watchdog routine autoshutdown of lower computer is above-mentioned.
(3), CF4 purifies: after the sulfur hexafluoride gas purification schemes finishes, sulfur hexafluoride gas after purifying is stored in sulfur hexafluoride purification tank 8 with the gas-liquid mixed attitude, because the boiling point of carbon tetrafluoride gas, air and other component gas is higher, therefore these gases are not liquefied, these gases are collected into cold-trap 15 in " sulfur hexafluoride purification schemes " in.In the tetrafluoro-methane purification schemes, native system will utilize the boiling point of the tetrafluoro-methane characteristic lower than air, the way of the temperature by reducing tetrafluoro-methane, air and other these mixed gass of gas is with the tetrafluoro-methane liquefy, to reach the purpose that tetrafluoro-methane is purified and separated.
The tetrafluoro-methane purification schemes is: open the 9th magnetic valve D2, start the second refrigerator 19, (by being arranged on the condenser at rectifying tower top) freezes to rectifying tower.After 1 minute, start the 3rd refrigerator 54, open the 22 magnetic valve D6 and the 21 magnetic valve D3, control the refrigeration that is arranged on the condenser in sulfur hexafluoride purification tank 8 by the 22 magnetic valve D6, control the refrigeration that is arranged on the second cool-heat-exchanger 26 inner condensers by the 21 magnetic valve D3.
In this flow process, the second refrigerator 19 freezes to rectifying tower and cold-trap 15 simultaneously, when the temperature of rectifying tower and cold-trap 15 is less than or equal to-70 ℃, at this moment, sulfur hexafluoride exists with solid-state, and a small amount of tetrafluoro-methane that contains in sulfur hexafluoride and air and partial impurities still exist with gas due to the boiling point height, and opened eight magnetic valve D4 once every 12 seconds this moment, closes after 1 second.Cut-off by the circulation of controlling the 8th magnetic valve D4, purify a small amount of tetrafluoro-methane of containing in mixture in tank 8 and rectifying tower and air and other gas of sulfur hexafluoride collected in cold-trap 15 by the 8th magnetic valve D4.
when cold-trap 15 pressure during more than or equal to 0.5 MPa, starting the carbon tetrafluoride gas recovery process is recovered to tetrafluoro-methane in tetrafluoro-methane purification tank 21, namely open the tenth magnetic valve V13, the 11 magnetic valve V14, the second compressor 24, the 12 magnetic valve DF3, the gases such as the tetrafluoro-methane in cold-trap 15 and air are by the tenth magnetic valve V13, the 11 magnetic valve V14, air cooler 23, the second compressor 24, the 6th manual normally open valve C7, air cooler 23 bypasses, the second check valve 25, the second cool-heat-exchanger 26, the 12 magnetic valve DF3 and the 7th manual normally open valve C10 flow in tetrafluoro-methane purification tank 21.The pressure signal of the 3rd pressure transmitter P3 transmission cold-trap 15.The second pressure operated switch YL2 is used for pilot piping pressure and prevents that hypertonia from damaging the second compressor 24.When cold-trap 15 pressure were less than or equal to 0.1 MPa, autoshutdown carbon tetrafluoride gas recovery process was closed the tenth magnetic valve V13, the 11 magnetic valve V14, the second compressor 24, the 12 magnetic valve DF3.
The bottom of tetrafluoro-methane purification tank 21 is equipped with condenser, is controlled by electricity the 21 magnetic valve D3 by the 3rd refrigerator 54 and cut-offs.In the purification schemes of tetrafluoro-methane, gradually become liquid under the effect of tetrafluoro-methane at condenser through reclaiming, and still there are (the tetrafluoro-methane boiling point is as-128 ℃, and the boiling point of air is-192 ℃) in the higher gaseous fraction of the boiling points such as air take gaseous state.Tank body top at tetrafluoro-methane purification tank 21 also is equipped with the second temperature sensor T2 and tetrafluoro-methane purity instrument 27, tetrafluoro-methane purity instrument 27 is used for detecting the purity of tetrafluoro-methane purification tank 21 interior tetrafluoro-methanes, when the purity of tetrafluoro-methane does not meet testing requirement, open the 8th manual normally open valve C8, the component gas that the boiling points such as air that exist with gaseous state are higher is emptying from the first safety valve 29 by buffers packet 28 and the 8th manual normally open valve C8.So just reach the purpose with tetrafluoro-methane and air separation.The 3rd tensimeter 30 and the 4th pressure transmitter P4 are used for showing and transmitting the pressure of evacuation port.
(4), residual air reclaims: when cold-trap 15 pressure are greater than or equal to 1.5MPa; open the second refrigerator 19; when equaling-80 ℃ Deng condenser temperature; the second refrigerator 19 is not shut down; and kept 20 minutes; at this moment; sulfur hexafluoride in cold-trap 15 through after fully cooling take solid-state the existence (boiling point of sulfur hexafluoride is as-58 ℃); after the second refrigerator 19 is shut down; cold-trap 15 is vacuumized; at this moment, other impurity compositions in sulfur hexafluoride are pumped in vacuum packet 33 by the tenth magnetic valve V13 and the 14 magnetic valve V12, vacuumize after 2 minutes.
after the second refrigerator 19 is shut down, cold-trap 15 rises under the impact of envrionment temperature around, when cold-trap 15 temperature during more than or equal to-30 ℃, at this moment, sulfur hexafluoride in cold-trap 15 exists with gaseous state, open the 13 magnetic valve V11, the second magnetic valve V9, the 3rd magnetic valve V8 and the first compressor 5, start the residual air recovery process, at this moment, sulfur hexafluoride gas in cold-trap 15 flows through 13 magnetic valve V11, the 4th manual normally open valve C6 and the main sulfur hexafluoride recovery process (Air cooler 3 of can flowing through successively, molecular sieve 4, the first manual normally open valve C1, the first compressor 5, Air cooler 3 bypasses, the first check valve 6, the first cool-heat-exchanger 7, the second magnetic valve V9, enter into sulfur hexafluoride purification tank 8 after the 3rd magnetic valve V8 and the second manual normally open valve C2), reach the purpose that the sulfur hexafluoride residual air in cold-trap 15 is reclaimed.
When cold-trap 15 pressure are less than or equal to 0.1MPa, close 13 magnetic valve V11, the second magnetic valve V9, the 3rd magnetic valve V8 and the first compressor 5, the residual air recovery process is closed.
Three, gas recharges:
(1), sulfur hexafluoride purification tank 8 gases directly fill embodiment one: open the 17 magnetic valve V7, the sulfur hexafluoride liquid of sulfur hexafluoride purification tank 8 directly recharges gas bomb through the 3rd manual normally open valve C3, the 17 magnetic valve V7 by recharging mouth 37.The 4th tensimeter 38 is installed recharging mouthfuls 37, is used for detecting and recharges mouthfuls 37 pressure.
(2), sulfur hexafluoride purification tank 8 gases directly fill embodiment two: open the 17 magnetic valve V7, the sulfur hexafluoride liquid of sulfur hexafluoride purification tank 8 flow through the 3rd manual normally open valve C3, the 17 magnetic valve V7, regulate pressure through relief valve 43, make to export 42 self-sealing joint through the sulfur hexafluoride liquid of purifying by pressure regulation and directly recharge to switching device.
(3), sulfur hexafluoride purification tank 8 gases press and to fill: when the pressure of the pressure of the steel cylinder that fills sulfur hexafluoride gas and sulfur hexafluoride purification tank 8 is suitable, fill if want to continue just need to complete under the pressure-acting of supercharger 39 to sulfur hexafluoride gas cylinder filling gas.Open the 16 magnetic valve V10, the second magnetic valve V9, the 15 magnetic valve V6, start supercharger 39, start the first refrigerator 9 and open the 4th magnetic valve D1, at this moment, sulfur hexafluorides in sulfur hexafluoride purification tank 8 the 3rd manual normally open valve C3 that flows through successively, the 16 magnetic valve V10, supercharger 39, the 3rd check valve 40, the first cool-heat-exchanger 7, the second magnetic valve V9, the 15 magnetic valve V6 complete filling to the sulfur hexafluoride gas steel cylinder by the self-sealing joint that recharges mouth 37 at last.
(4), tetrafluoro-methane purification tank 21 directly fills: open the 12 magnetic valve DF3, the 18 magnetic valve DF4, the tetrafluoro-methane in tetrafluoro-methane purification tank 21 is filled with steel cylinder through the 12 magnetic valve DF3, the 18 magnetic valve DF4 by tetrafluoro-methane outlet 48.
(5), tetrafluoro-methane purification tank 21 presses and fills: when the pressure of the pressure of the container that fills carbon tetrafluoride gas (as steel cylinder) and tetrafluoro-methane purification tank 21 is suitable, just need to completes under pressure and fill if want to continue to fill tetrafluoro-methane to container to be filled.At this moment, open the 19 magnetic valve DF2, the 11 magnetic valve V14, the 18 magnetic valve DF4, start the second compressor 24, the three refrigerators 54, open the 21 magnetic valve D3.Tetrafluoro-methanes in tetrafluoro-methane purification tank 21 the 9th manual normally open valve C9 that flows through, the 19 magnetic valve DF2 and accent flow needle-valve C11, the 11 magnetic valve V14, air cooler 23, the 6th manual normally open valve C7, the second compressor 24, after air cooler 23 bypasses, the second pressure operated switch YL2, the second check valve 25, the second cool-heat-exchanger 26, be filled with to be filled tetrafluoro-methane container from tetrafluoro-methane outlet 48 through the 18 magnetic valve DF4 under the effect of the second compressor 24.In this process, air cooler 23 and 26 pairs of tetrafluoro-methanes of the second cool-heat-exchanger carry out cooling, in order to tetrafluoro-methane is filled into container to be filled with liquid form.
Four, vacuumize:
(1), reclaiming a mouthful self-sealing joint 2 vacuumizes: open electromagnetism angle valve D5, the 20 magnetic valve DF1.
(2), molecular sieve 4 vacuumizes: open electromagnetism angle valve D5, the 20 magnetic valve DF1, the first magnetic valve V2.
(3), the purification tank vacuumizes: open electromagnetism angle valve D5, the 20 magnetic valve DF1, the 23 magnetic valve V1, the 3rd magnetic valve V6, the 3rd magnetic valve V8.
(4), vacuumize recharging mouth: open electromagnetism angle valve D5, the 20 magnetic valve DF1, the 23 magnetic valve V1.
(5), externally vacuumize: directly connect outside tube just passable.
(6), whole system vacuumizes: open electromagnetism angle valve D5, magnetic valve DF1~DF4, magnetic valve V1~V14.
(7), vacuum packet 33 vacuumizes: when vacuum packet 33 pressure higher than 100 handkerchief the time vacuum pump 48 start, vacuum pump 48 stops when vacuum packet 33 pressure reach 20 handkerchief.

Claims (10)

1. sulfur hexafluoride and tetrafluoro-methane system for separating and purifying, it is characterized in that: comprise the mixed gas recycling pipeline, the mixed gas recycling pipeline is connected with respectively circularly purifying pipeline, sulfur hexafluoride purification pipeline and tetrafluoro-methane purification pipeline.
2. sulfur hexafluoride according to claim 1 and tetrafluoro-methane system for separating and purifying, it is characterized in that: described mixed gas recycling pipeline comprises the recovery mouth self-sealing joint (2) that connects by the first high pressure pipe (1) successively, the first magnetic valve (V2), Air cooler (3), molecular sieve (4), the first manual normally open valve (C1), the first compressor (5), Air cooler (3) bypass, the first check valve (6), the first cool-heat-exchanger (7), the second magnetic valve (V9), the 3rd magnetic valve (V8), the second manual normally open valve (C2) and sulfur hexafluoride purification tank (8), the first cool-heat-exchanger (7) is connected with the first refrigerator (9) by the 4th magnetic valve (D1), the first high pressure pipe (1) is imported and exported both sides at the first magnetic valve (V2) and is connected with vacuum compressor (10), and the entrance end of vacuum compressor (10) and exit end are respectively equipped with the 5th magnetic valve (V3) and the 6th magnetic valve (V4), the first high pressure pipe (1) is located to be provided with the first pressure transmitter (P7), is provided with the first tensimeter (11), is provided with the second pressure transmitter (P1), is provided with the first pressure operated switch (YL1) between the first check valve (6) and the first cool-heat-exchanger (7) at the on the suction side of molecular sieve (4) at the first magnetic valve (V2) on the suction side reclaiming mouthful self-sealing joint (2).
3. sulfur hexafluoride according to claim 2 and tetrafluoro-methane system for separating and purifying, it is characterized in that: described circularly purifying pipeline comprises the second high pressure pipe (12) that extend into sulfur hexafluoride purification tank (8) inner bottom part, the other end of the second high pressure pipe (12) is connected between the first magnetic valve (V2) and Air cooler (3) on the first high pressure pipe (1), the second high pressure pipe (12) is provided with the 3rd manual normally open valve (C3) successively along air flow line, the 7th magnetic valve (V5) and the 4th manual normally open valve (C6), be provided with the heating tube (13) with temperature sensor in sulfur hexafluoride purification tank (8), sulfur hexafluoride purification tank (8) is being provided with the first temperature sensor (T1) near the place, bottom, the first LOAD CELLS (TR1) is arranged at sulfur hexafluoride purification tank (8) bottom.
4. sulfur hexafluoride according to claim 3 and tetrafluoro-methane system for separating and purifying, it is characterized in that: described sulfur hexafluoride purification pipeline comprises third high pressure pipe (14), third high pressure pipe (14) one ends are connected with cold-trap (15), third high pressure pipe (14) the other end is connected with sulfur hexafluoride purification tank (8), third high pressure pipe (14) is upper is provided with condenser (16) by sulfur hexafluoride purification tank (8) successively to cold-trap (15), the 5th manual normally open valve (C4), sulfur hexafluoride purity instrument (17) and the 8th magnetic valve (D4), condenser (16) is connected with the first refrigerator (9) by the 4th high pressure pipe (18), the 4th high pressure pipe (18) is provided with the 9th magnetic valve (D2), cold-trap (15) is connected with the second refrigerator (19).
5. sulfur hexafluoride according to claim 4 and tetrafluoro-methane system for separating and purifying, it is characterized in that: described tetrafluoro-methane purification pipeline comprises the 5th high pressure pipe (20), the 15 high pressure pipe (53) and tetrafluoro-methane purification tank (21), the two ends of the 5th high pressure pipe (20) are connected 21 with cold-trap (15) with tetrafluoro-methane purification tank respectively) be connected, the 5th high pressure pipe (20) is upper is provided with the 3rd pressure transmitter (P3) by cold-trap (15) successively to tetrafluoro-methane purification tank (21), the second tensimeter (22), the tenth magnetic valve (V13), the 11 magnetic valve (V14), air cooler (23), the 6th manual normally open valve (C7), the second compressor (24), air cooler (23) bypass, the second check valve (25), the second cool-heat-exchanger (26), the 12 magnetic valve (DF3) and the 7th manual normally open valve (C10), be provided with the second pressure operated switch (YL2) in the ingress of the second check valve (25), tetrafluoro-methane purification tank (21) is provided with the second temperature sensor (T2), tetrafluoro-methane purity instrument (27) and buffers packet (28), buffers packet (28) is provided with the 8th manual normally open valve (C8) and the first safety valve (29), is provided with the 3rd tensimeter (30) and the 4th pressure transmitter (P4) between the 8th manual normally open valve (C8) and the first safety valve (29), the 15 high pressure pipe (53) two ends respectively with sulfur hexafluoride purification tank (8) be connected cool-heat-exchanger (26) and be connected, the 15 high pressure pipe (53) is provided with the 21 magnetic valve (D3) and the 22 magnetic valve (D6), and the second cool-heat-exchanger (26) is connected with the 3rd refrigerator (54) by the 21 magnetic valve (D3).
6. sulfur hexafluoride according to claim 5 and tetrafluoro-methane system for separating and purifying, it is characterized in that: also comprise sulfur hexafluoride residual air recycling pipeline, sulfur hexafluoride residual air recycling pipeline comprises the 6th high pressure pipe (31) and the 7th high pressure pipe (32), the 6th high pressure pipe (31) one ends are connected with cold-trap (15), the 6th high pressure pipe (31) the other end is connected between the 7th magnetic valve (V5) and the 4th manual normally open valve (C6) on the second high pressure pipe (12), and the 6th high pressure pipe (31) is provided with the 13 magnetic valve (V11); One end of the 7th high pressure pipe (32) is connected between the tenth magnetic valve (V13) and the 11 magnetic valve (V14) on the 5th high pressure pipe (20), and the 7th high pressure pipe (32) is upper is provided with the 14 magnetic valve (V12), vacuum packet (33) and external vacuumizing joint (34) successively along air-flow.
7. sulfur hexafluoride according to claim 6 and tetrafluoro-methane system for separating and purifying, it is characterized in that: comprise that also sulfur hexafluoride gas recharges pipeline, sulfur hexafluoride gas recharges pipeline and comprises the 8th high pressure pipe (35) and the 9th high pressure pipe (36), the 8th high pressure pipe (35) one ends are connected between the second magnetic valve (V9) and the 3rd magnetic valve (V8) on the first high pressure pipe (1), the other end of the 8th high pressure pipe (35) is provided with and recharges mouthful (37), the 8th high pressure pipe (35) is provided with the 15 magnetic valve (V6) and is positioned at and recharges the 4th tensimeter (38) that mouthful (37) are located, one end of the 9th high pressure pipe (36) is connected between the second high pressure pipe (12) the upper the 3rd manual normally open valve (C3) and the 7th magnetic valve (V5), the other end of the 9th high pressure pipe (36) is connected between the first check valve (6) and the first cool-heat-exchanger (7) on the first high pressure pipe (1), and the 9th high pressure pipe (36) is provided with the 16 magnetic valve (V10), supercharger (39) and the 3rd check valve (40), be provided with the 17 magnetic valve (V7) between the second high pressure pipe (12) and the 8th high pressure pipe (35), the 17 magnetic valve (V7) is between the 3rd manual normally open valve (C3) and the 7th magnetic valve (V5), the 8th high pressure pipe (35) is gone up at the 15 magnetic valve (V6) and is positioned to recharge between mouthful (37) and is connected with the tenth high pressure pipe (41), the other end of the tenth high pressure pipe (41) is provided with pressure regulation outlet (42), the tenth high pressure pipe (41) is provided with relief valve (43) and is positioned at the 5th tensimeter (44) that pressure regulation outlet (42) is located, be provided with the 23 magnetic valve (V1) between the 8th high pressure pipe (35) and the first high pressure pipe (1).
8. sulfur hexafluoride according to claim 7 and tetrafluoro-methane system for separating and purifying, it is characterized in that: comprise that also carbon tetrafluoride gas recharges pipeline, carbon tetrafluoride gas recharges pipeline and comprises the 11 high pressure pipe (45) and the 12 high pressure pipe (46), one end of the 11 high pressure pipe (45) is connected between upper the second cool-heat-exchanger of the 5th high pressure pipe (20) (26) and the 12 magnetic valve (DF3), the other end of the 11 high pressure pipe (45) is provided with tetrafluoro-methane outlet (48), and the 11 high pressure pipe (45) is provided with the 18 magnetic valve (DF4); One end of the 12 high pressure pipe (46) is located at tetrafluoro-methane purification tank (21) inner bottom part, the other end of the 12 high pressure pipe (46) is connected between the tenth magnetic valve (V13) and the 11 magnetic valve (V14) on the 5th high pressure pipe (20), is provided with successively the 9th manual normally open valve (C9), the 19 magnetic valve (DF2) on the 12 high pressure pipe (46) and transfers flow needle-valve (C11).
9. sulfur hexafluoride according to claim 8 and tetrafluoro-methane system for separating and purifying, it is characterized in that: a described recovery mouthful self-sealing joint (2) is connected with the 13 high pressure pipe (47), the 13 high pressure pipe (47) is provided with 20 magnetic valves (DF1), vacuum transducer (P5), electromagnetism angle valve (D5) and vacuum pump (48), connects by the 14 high pressure pipe (49) between the 13 high pressure pipe (47) and the 7th high pressure pipe (32).
10. according to claim 2-9 described sulfur hexafluoride of any one and tetrafluoro-methane system for separating and purifying, it is characterized in that: described sulfur hexafluoride purification tank (8) is provided with monitoring pipe (50), and monitoring pipe (50) is provided with the tenth manual normally open valve (C5), the 5th pressure transmitter (P2), the second safety valve (51) and the 6th tensimeter (52).
CN2013202189235U 2013-04-26 2013-04-26 Separation and purification system for sulphur hexafluoride and carbon tetrafluoride Expired - Lifetime CN203269564U (en)

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CN103213952A (en) * 2013-04-26 2013-07-24 河南省日立信股份有限公司 Separating and purifying system for sulfur hexafluoride and carbon tetrafluoride
CN105858619A (en) * 2016-05-20 2016-08-17 国家电网公司 Movable type sulfur hexafluoride and carbon tetrafluoride mixed gas quick recovery device
CN107588322A (en) * 2017-09-19 2018-01-16 国网安徽省电力公司电力科学研究院 Sulfur hexafluoride gas mixture Recovery Purifying distribution making-up air device and its operating method
CN113074320A (en) * 2021-03-19 2021-07-06 国网新疆电力有限公司检修公司 SF (sulfur hexafluoride)6/CF4High-purity separation and recovery device and method for mixed gas

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103213952A (en) * 2013-04-26 2013-07-24 河南省日立信股份有限公司 Separating and purifying system for sulfur hexafluoride and carbon tetrafluoride
CN105858619A (en) * 2016-05-20 2016-08-17 国家电网公司 Movable type sulfur hexafluoride and carbon tetrafluoride mixed gas quick recovery device
CN105858619B (en) * 2016-05-20 2018-06-08 国家电网公司 Mobile sulfur hexafluoride and carbon tetrafluoride mixed gas Rapid recovery device
CN107588322A (en) * 2017-09-19 2018-01-16 国网安徽省电力公司电力科学研究院 Sulfur hexafluoride gas mixture Recovery Purifying distribution making-up air device and its operating method
CN107588322B (en) * 2017-09-19 2024-05-17 国网安徽省电力公司电力科学研究院 Gas distribution and supplementing device for purifying and recycling sulfur hexafluoride mixed gas and operation method thereof
CN113074320A (en) * 2021-03-19 2021-07-06 国网新疆电力有限公司检修公司 SF (sulfur hexafluoride)6/CF4High-purity separation and recovery device and method for mixed gas
CN113074320B (en) * 2021-03-19 2022-06-14 国网新疆电力有限公司检修公司 SF (sulfur hexafluoride)6/CF4High-purity separation and recovery device and method for mixed gas

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