CN203256369U - Ingot pulling mechanism of directional solidification device - Google Patents
Ingot pulling mechanism of directional solidification device Download PDFInfo
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- CN203256369U CN203256369U CN 201320233456 CN201320233456U CN203256369U CN 203256369 U CN203256369 U CN 203256369U CN 201320233456 CN201320233456 CN 201320233456 CN 201320233456 U CN201320233456 U CN 201320233456U CN 203256369 U CN203256369 U CN 203256369U
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- water
- lifting table
- pulling mechanism
- directional solidification
- cooling shaft
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Abstract
The utility model belongs to the field of vacuum devices, and relates to an ingot pulling mechanism of a directional solidification device. A lead screw and a vacuum pump are fixedly arranged on a furnace body, a lifting platform is movably arranged at the lower end of the lead screw through a nut, a low-speed motor and a high-speed motor are fixedly arranged on the outer wall of the lifting platform and are connected with the nut through an electromagnetic clutch and a transmission mechanism, a rotary joint is fixedly arranged inside the platform, the lower end of a water-cooling shaft is movably arranged inside the rotary joint, the upper end of the water-cooling shaft is arranged inside the furnace body, a water-cooling disc is arranged at the top of the water-cooling shaft, and a rotation motor is fixedly arranged on the outer wall of the lifting platform and is connected with the water-cooling shaft in a meshing way through a rotary gear. The ingot pulling mechanism is unique in design and is created and improved on the basis of an original device so as to be capable of enabling the water-cooling shaft to move up and down and the water-cooling shaft to rotate. The ingot pulling mechanism is stable in structure, simple to operate and easy to control and calculate.
Description
Technical field
The utility model belongs to the vacuum apparatus field, particularly a kind of ingot pulling mechanism of apparatus for directional solidification.
Background technology
Directional freeze refers to adopt compulsive means in process of setting, in the frozen metal with do not set up the thermograde of specific direction in the melt of frozen metal, thereby melt is solidified along the direction opposite with hot-fluid, finally obtains having the technology of specific orientation column crystal.Directional freeze is the important means of research solidification theory and metal freezing rule, also is the important method of the brilliant high performance structures material of preparation monocrystal material and micron order (or nano level) continuous fibre and functional materials.Since the sixties in 20th century, the directional solidification technique development is very fast.Developed into high speed freezing method, liquid metal method of cooling and the continuous directional solidification technology of present widespread use by initial heat-generating agent method, power reduction method.Directional solidification technique is widely used in the power faces such as preparation of superalloy, magneticsubstance, single crystal growing, in-situ composite, and compound, shape memory alloy field have extremely wide application prospect between the class single-crystal metal.
The most outstanding achievement of directional solidification technique is the application in aircraft industry.Now, we are applied in directional solidification technique on the equipment for purifying of polysilicon, adopt directional solidification technique with the metallic impurity enrichment in the polysilicon, to excise the purpose that the top enrichment region can be realized purification of metals.
In whole device for purifying polysilicon technique, need following processing requirement:
(1) keeps vacuum state in the inside of equipment;
(2) aqueous cold plate is rotatable;
(3) lifting distance of aqueous cold plate is more than or equal to 1.7 meters;
(4) need logical recirculated water to material and container cooling in the aqueous cold plate;
(5) aqueous cold plate central authorities need the ventilation body that crucible is cooled off;
(6) aqueous cold plate must can load-bearing more than 1 ton;
(7) rising or falling speed of ingot pulling mechanism can be controlled.
Present device can only realize separately logical recirculated water or separately ventilation carry out the cooling of crucible, and the lifting distance of aqueous cold plate is below 1.7 meters, the load-carrying specification is less.Also there is not at present device can realize above requirement fully.
The utility model content
The utility model overcomes above-mentioned not enough problem, and a kind of ingot pulling mechanism of apparatus for directional solidification is provided, and can realize above-mentioned all functions, and Stability Analysis of Structures, and is easy to operate.
The technical scheme that the utility model adopts for achieving the above object is: a kind of ingot pulling mechanism of apparatus for directional solidification, body of heater are fixedly installed on the body frame, and fire door is installed on the body of heater, it is characterized in that: be installed with leading screw and vacuum pump on the body of heater; Lifting table is movably installed in the leading screw lower end by screw; Slow speed motor and quick motor are fixedly installed on the lifting table outer wall, and are connected with screw with transmission rig by electromagnetic clutch; Swivel joint is fixedly installed in lifting table inside, and the water-cooling shaft lower end is movably installed in swivel joint inside, and its upper end places body of heater inner, and aqueous cold plate is installed on the water-cooling shaft top; Rotating machine is fixedly installed in the lifting table outer wall, and is connected by swing pinion and water-cooling shaft are intermeshing.
Described lifting table adopts the lifting table loam cake to be fixedly installed on the lifting table base
Between described water-cooling shaft and the body of heater shaft seal is installed.
Described swivel joint inside is equipped with the swivel arrangement of water-through and ventilating.
Described swivel joint upper end is fixedly connected with the lifting table loam cake, and the lower end is fixedly connected with the lifting table base.
Described leading screw has 2-4.
Described transmission rig comprises that 5-7 is to intermeshing gear.
The rising or falling speed 20-60mm/min of described leading screw.
Transmitting ratio between described rotating machine and the water-cooling shaft is 5-10:1.
The design of the utility model device is unique, on the basis of existing equipment, is innovated improvement, and water-cooling shaft is moved up and down, also can the water-cooling shaft rotation.In the process of rotation, can keep the vacuum tightness of equipment in the scope of 1-5Pa.Motor can make hoisting appliance descend with the speed rising of 60mm/min fast, and slow speed motor can make hoisting appliance descend with the speed rising of 0.1mm/min.Simple to operate, be easy to control and calculating.
Description of drawings
Fig. 1 is a kind of structural representation of ingot pulling mechanism of apparatus for directional solidification.
Among the figure, 1. body of heater, 2. aqueous cold plate, 3. shaft seal, 4. vacuum pump, 5. swing pinion, 6. rotating machine, 7. lifting table loam cake, 8. swivel joint, 9. water-cooling shaft, 10. lifting table, 11. the lifting table base, 12. quick motors, 13. transmission rigs, 14. electromagnetic clutch, 15. slow speed motors, 16. screws, 17. screw mandrel, 18. vacuum valves, 19. fire doors.
Embodiment
Describe the utility model in detail below in conjunction with specific embodiment and accompanying drawing, but the utility model is not limited to specific embodiment.
The ingot pulling mechanism of a kind of apparatus for directional solidification as shown in Figure 1, body of heater 1 is fixedly installed on the body frame, and fire door is installed on the body of heater 1.
Be installed with leading screw 17 and vacuum pump 4 on the body of heater 1; Lifting table 10 is movably installed in leading screw 17 lower ends by screw 16; Slow speed motor 15 and fast motor 9 be fixedly installed on lifting table 10 outer walls, and are connected with transmission rig by electromagnetic clutch 14 and are connected with screw 16; Swivel joint 8 is fixedly installed in lifting table 10 inside, and water-cooling shaft 9 lower ends are movably installed in swivel joint 8 inside, and its upper end places body of heater 1 inside, and aqueous cold plate 2 is installed on water-cooling shaft 9 tops; Rotating machine 6 is fixedly installed in lifting table 10 outer walls, and by swing pinion 5 and 9 intermeshing connections of water-cooling shaft.
Lifting table 10 adopts lifting table loam cake 7 to be fixedly installed on the lifting table base 11
Between water-cooling shaft 9 and the body of heater 1 shaft seal 3 is installed.
Leading screw 17 has 3.
Rotating machine 6 is 10:1 with the transmitting ratio of water-cooling shaft 9.
At first will need the material of melting to be contained in the quartz crucible, behind the installation graphite backplate, be put on the aqueous cold plate 2.With the power supply opening of equipment, water circulating pump is opened in body of heater 1, swivel joint 8 and the aqueous cold plate 2 and is full of recirculated water, checks whether normal the ventilation source of the gas in the swivel joint 8 connects.Source of the gas starts electromagnetic clutch 14 after connecting normally, makes electromagnetic clutch 14 stay open state.Start quick motor 12, make lifting table 10 drive that aqueous cold plates 2 upwards rise with 60mm/min until the predetermined position, motor 12 slows down until stop fast.When treating that the melting material reaches the melting zone, close electromagnetic clutch 14.
Secondly, the vacuum system of equipment is opened, with vacuum pump 4 vacuum tightness of equipment is extracted into 5Pa, the ruhmkorff coil energising begins the melting material.In the process of melting, in order to suppress the volatilization of material, need to pass into argon gas to body of heater 1 inside until body of heater 1 interior pressure when reaching 50000Pa, stops to pass into argon gas.
When melting is complete by the time, start slow speed motor 15, the quick motor 12 of this moment is in off-position, and the rotation of slow speed motor 15 drives the decline of lifting table 0.1mm/min, and lifting table 10 has driven the speed decline of aqueous cold plate 2 with 0.1mm/min simultaneously.Draw in the ingot process of setting at this, open vacuum pump 4, body of heater 1 inside is vacuumized, open gas valve this moment, passes into the flow velocity of gas with the control of flow mass controller, with the pressure-stabilisation of vacuumometer and proportional valve control body of heater 1 inside of giving vent to anger in 50000Pa.Material in the argon gas atmosphere that flows, after 80 hours, cooled and solidified.After material solidifies fully, stop slow speed motor 15.Open electromagnetic clutch 14, start quick motor 12, make lifting table 10 drive aqueous cold plate 2 to dropping to initial original position.Motor 12 slows down until stop fast.Motor stops rear clutch coupling 14 and recovers closure state.
At last, open vacuum valve 18, air is entered in the body of heater 1, fire door 19 is opened, material is taken out end of operation.
The ingot pulling mechanism of a kind of apparatus for directional solidification as shown in Figure 1, body of heater 1 is fixedly installed on the body frame, and fire door is installed on the body of heater 1.
Be installed with leading screw 17 and vacuum pump 4 on the body of heater 1; Lifting table 10 is movably installed in leading screw 17 lower ends by screw 16; Slow speed motor 15 and fast motor 9 be fixedly installed on lifting table 10 outer walls, and are connected with transmission rig by electromagnetic clutch 14 and are connected with screw 16; Swivel joint 8 is fixedly installed in lifting table 10 inside, and water-cooling shaft 9 lower ends are movably installed in swivel joint 8 inside, and its upper end places body of heater 1 inside, and aqueous cold plate 2 is installed on water-cooling shaft 9 tops; Rotating machine 6 is fixedly installed in lifting table 10 outer walls, and by swing pinion 5 and 9 intermeshing connections of water-cooling shaft.
Lifting table 10 adopts lifting table loam cake 7 to be fixedly installed on the lifting table base 11
Between water-cooling shaft 9 and the body of heater 1 shaft seal 3 is installed.
Swivel joint 8 upper ends are fixedly connected with lifting table loam cake 7, and the lower end is fixedly connected with lifting table base 11.
Leading screw 17 has 4.
Rotating machine 6 is 5:1 with the transmitting ratio of water-cooling shaft 9.
At first will need the material of melting to be contained in the quartz crucible, behind the installation graphite backplate, be put on the aqueous cold plate 2.With the power supply opening of equipment, water circulating pump is opened in body of heater 1, swivel joint 8 and the aqueous cold plate 2 and is full of recirculated water, checks whether normal the ventilation source of the gas in the swivel joint 8 connects.Source of the gas starts electromagnetic clutch 14 after connecting normally, makes electromagnetic clutch 14 stay open state.Start quick motor 12, make lifting table 10 drive that aqueous cold plates 2 upwards rise with 40mm/min until the predetermined position, motor 12 slows down until stop fast.When treating that the melting material reaches the melting zone, close electromagnetic clutch 14.
Secondly, the vacuum system of equipment is opened, with vacuum pump 4 vacuum tightness of equipment is extracted into 5Pa, the ruhmkorff coil energising begins the melting material.In the process of melting, in order to suppress the volatilization of material, need to pass into argon gas to body of heater 1 inside until body of heater 1 interior pressure when reaching 50000Pa, stops to pass into argon gas.
When melting is complete by the time, start slow speed motor 15, the quick motor 12 of this moment is in off-position, and the rotation of slow speed motor 15 drives the decline of lifting table 0.5mm/min, and lifting table 10 has driven the speed decline of aqueous cold plate 2 with 0.5mm/min simultaneously.Draw in the ingot process of setting at this, open vacuum pump 4, body of heater 1 inside is vacuumized, open gas valve this moment, passes into the flow velocity of gas with the control of flow mass controller, with the pressure-stabilisation of vacuumometer and proportional valve control body of heater 1 inside of giving vent to anger in 50000Pa.Material in the argon gas atmosphere that flows, after 80 hours, cooled and solidified.After material solidifies fully, stop slow speed motor 15.Open electromagnetic clutch 14, start quick motor 12, make lifting table 10 drive aqueous cold plate 2 to dropping to initial original position.Motor 12 slows down until stop fast.Motor stops rear clutch coupling 14 and recovers closure state.
At last, open vacuum valve 18, air is entered in the body of heater 1, fire door 19 is opened, material is taken out end of operation.
Claims (8)
1. the ingot pulling mechanism of an apparatus for directional solidification, body of heater (1) is fixedly installed on the body frame, and fire door is installed on the body of heater (1), it is characterized in that: be installed with leading screw (17) and vacuum pump (4) on the body of heater (1); Lifting table (10) is movably installed in leading screw (17) lower end by screw (16); Slow speed motor (15) and quick motor (9) are fixedly installed on lifting table (10) outer wall, and are connected 13 by electromagnetic clutch (14) with transmission rig) be connected with screw (16); Swivel joint (8) is fixedly installed in lifting table (10) inside, and water-cooling shaft (9) lower end is movably installed in swivel joint (8) inside, and its upper end places body of heater (1) inside, and aqueous cold plate (2) is installed on water-cooling shaft (9) top; Rotating machine (6) is fixedly installed in lifting table (10) outer wall, and by swing pinion (5) and intermeshing connection of water-cooling shaft (9).
2. the ingot pulling mechanism of a kind of apparatus for directional solidification according to claim 1, it is characterized in that: described lifting table (10) adopts lifting table loam cake (7) to be fixedly installed on the lifting table base (11), between described water-cooling shaft (9) and the body of heater (1) shaft seal (3) is installed.
3. the ingot pulling mechanism of a kind of apparatus for directional solidification according to claim 1, it is characterized in that: described swivel joint (8) inside is equipped with the swivel arrangement of water-through and ventilating.
4. the ingot pulling mechanism of a kind of apparatus for directional solidification according to claim 2 is characterized in that: described swivel joint (8) upper end is fixedly connected with lifting table loam cake (7), and the lower end is fixedly connected with lifting table base (11).
5. the ingot pulling mechanism of a kind of apparatus for directional solidification according to claim 1 is characterized in that: described leading screw (17) has 2-4.
6. the ingot pulling mechanism of a kind of apparatus for directional solidification according to claim 1, it is characterized in that: described transmission rig (13) comprises that 5-7 is to intermeshing gear.
7. the ingot pulling mechanism of a kind of apparatus for directional solidification according to claim 1, it is characterized in that: the rising or falling speed of described screw (16) is 0.1-60mm/min.
8. the ingot pulling mechanism of a kind of apparatus for directional solidification according to claim 1, it is characterized in that: the transmitting ratio between described rotating machine (6) and the water-cooling shaft (9) is 5-10:1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320233456 CN203256369U (en) | 2013-05-03 | 2013-05-03 | Ingot pulling mechanism of directional solidification device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320233456 CN203256369U (en) | 2013-05-03 | 2013-05-03 | Ingot pulling mechanism of directional solidification device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203256369U true CN203256369U (en) | 2013-10-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320233456 Expired - Fee Related CN203256369U (en) | 2013-05-03 | 2013-05-03 | Ingot pulling mechanism of directional solidification device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203256369U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111270303A (en) * | 2020-03-26 | 2020-06-12 | 北京北方华创微电子装备有限公司 | Coil driving device of semiconductor processing equipment |
| CN111910247A (en) * | 2019-05-08 | 2020-11-10 | 赛维Ldk太阳能高科技(新余)有限公司 | Ingot furnace for directionally solidifying and growing crystalline silicon and application |
-
2013
- 2013-05-03 CN CN 201320233456 patent/CN203256369U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111910247A (en) * | 2019-05-08 | 2020-11-10 | 赛维Ldk太阳能高科技(新余)有限公司 | Ingot furnace for directionally solidifying and growing crystalline silicon and application |
| CN111270303A (en) * | 2020-03-26 | 2020-06-12 | 北京北方华创微电子装备有限公司 | Coil driving device of semiconductor processing equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20171114 Address after: 1 road 266000 in Shandong province Qingdao city Laoshan District No. 1 Keyuan latitude B block 7 layer B4-2 Patentee after: Qingdao Changsheng Dongfang Industry Group Co., Ltd. Address before: Pudong solar energy industry base in Jimo city of Shandong Province, Qingdao City, 266234 Patentee before: Qingdao Longsheng Crystalline Silicon Science & Technology Co., Ltd. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20171204 Address after: Pudong Town Jimo city Shandong province 266234 city of Qingdao Ren Jia Tun Cun Ren Jia Tun Lu Patentee after: QINGDAO NEW ENERGY SOLUTIONS INC. (NESI) Address before: 1 road 266000 in Shandong province Qingdao city Laoshan District No. 1 Keyuan latitude B block 7 layer B4-2 Patentee before: Qingdao Changsheng Dongfang Industry Group Co., Ltd. |
|
| TR01 | Transfer of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131030 Termination date: 20190503 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |