CN203241477U - Test circuit and test device - Google Patents
Test circuit and test device Download PDFInfo
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- CN203241477U CN203241477U CN 201320268681 CN201320268681U CN203241477U CN 203241477 U CN203241477 U CN 203241477U CN 201320268681 CN201320268681 CN 201320268681 CN 201320268681 U CN201320268681 U CN 201320268681U CN 203241477 U CN203241477 U CN 203241477U
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Abstract
The utility model discloses a test circuit and a test device. The object of the utility model is to solve the problems of incapability of determining probes that do not contact with a conductive film to be tested, incapability of accomplishing the testing of sheet resistance and realizing the mentoring of film thickness uniformity in a conductive film production process. The test circuit provided by the utility model comprises a sheet resistance testing sub-circuit which comprises a current source. The test circuit further comprises probes connected with the sheet resistance testing sub-circuit and a first switching control circuit which is arranged between the current source and the probes; and the test circuit may further comprises a second switching control circuit and a detection circuit, wherein the detection circuit comprises a current source. The energization and de-energization of the probes which are connected with the first switching control circuit and/or the second switching control circuit can be controlled through the first switching control circuit and/or the second switching control circuit, and probes that are in conduction with the conductive film to be tested and probes that are not in conduction with the conductive film can be determined respectively, and therefore, contact characteristics of energized probes and the conductive film to be tested can be determined.
Description
Technical field
The utility model relates to the equipment Inspection field, relates in particular to a kind of test circuit and proving installation.
Background technology
Square resistance, be called for short sheet resistance, claim again film resistance, square resistance has a characteristic, and namely the square measured value of arbitrary size all is the same, and the size of sheet resistance is only relevant with the thickness of conductive film, the measurement of therefore using square resistance, for detection of the thickness of conductive film, the Thickness Monitoring homogeneity is widely used in the conductive film production run.
Four point probe square resistance proving installation, it is square resistance proving installation relatively more commonly used at present, be illustrated in figure 1 as existing four point probe square resistance test circuit synoptic diagram, mainly reometer is connected the square resistance test circuit with voltage table and four probes being connected with the square resistance test circuit form by including, contact conducting by four probes with conductive film to be detected, thereby make probe, form measuring circuit between conductive film and the power supply, registration by reading current table and voltage table, can measure the square resistance of conductive film, then calculate the thickness of conductive film according to formula Rs=ρ/t, wherein, Rs is square resistance, ρ is the resistivity of conductive film, and t is the thickness of conductive film.
Yet in carrying out the square resistance test process, four probes often can not all contact with conductive film to be detected, and then can't form measuring circuit, can't finish the test of square resistance, and realize the monitoring to film thickness uniformity in the conductive film production run.
The utility model content
The purpose of this utility model provides a kind of test circuit and proving installation, to solve existing square resistance test circuit owing to can not determine the probe that does not contact with conductive film to be detected, the problem that can't finish the test of square resistance and realize film thickness uniformity in the conductive film production run is monitored.
The purpose of this utility model is achieved through the following technical solutions:
The utility model provides a kind of test circuit, be applied to the square resistance test, comprise square resistance test electronic circuit, comprise current source in the described square resistance test electronic circuit, also comprise: test the probe that electronic circuit is connected with described square resistance, and be arranged at the first ON-OFF control circuit between described current source and the described probe; Wherein,
Whether described the first ON-OFF control circuit is tested the electronic circuit current source signal with square resistance for control and is inputed to connected probe.
Better, described probe is single probe, and described the first ON-OFF control circuit comprises: the single-pole single-throw switch (SPST) that is connected respectively with each described probe.
Better, described probe is two probes, described test circuit also comprises: and second switch control circuit and detection circuit, described detection circuit includes current source, wherein,
Described pair of probe is connected with square resistance test electronic circuit current source by described the first ON-OFF control circuit, and is connected with the detection circuit current source by described second switch control circuit.
Further, described the first ON-OFF control circuit comprises: with a single-pole double-throw switch (SPDT) that probe is connected respectively in each described pair of probe;
Described second switch control circuit comprises: with the single-pole single-throw switch (SPST) of another probe connection that is not connected with described square resistance test electronic circuit current source in each described pair of probe.
Further, described the first ON-OFF control circuit comprises a single-pole single-throw switch (SPST);
Described second switch control circuit comprises: with each described pair of double-pole single throw that probe is connected respectively.
Further, described the first ON-OFF control circuit comprises a single-pole single-throw switch (SPST);
Described second switch control circuit comprises: with two probes of each described pair of probe single-pole single-throw switch (SPST) of separate connection respectively.
Whether further, described detection circuit also comprises a reometer, be used for to survey between two probes of energising and the described detection circuit current source by conductive film conducting to be detected.
The utility model also provides a kind of proving installation, and this proving installation comprises above-mentioned test circuit.
The test circuit that the utility model provides and proving installation, between square resistance test electronic circuit and probe, the first ON-OFF control circuit is set, when probe is single probe, the test circuit that using the utility model provides can be controlled any two adjacent probe energisings successively by the first ON-OFF control circuit, utilize square resistance test electronic circuit can determine respectively and the probe of conductive film conducting to be detected and the probe of conducting not, namely can determine whether contacting of the probe of switching on and conductive film to be detected, realize the monitoring to film thickness uniformity in the conductive film production run.When the not two probe of probe, by second switch control circuit and the detection circuit that includes current source are set, whether the current source signal of detection circuit is inputed to connected each pair probe by the control of the first ON-OFF control circuit and/or second switch control circuit, and control successively each two probe by the second switch control circuit and switch on, whether survey between two probes of energising and the detection circuit current source by conductive film conducting to be detected by detection circuit, can determine respectively and two probes of conductive film conducting to be detected and two probes of conducting not, namely can determine whether contacting of the probe of switching on and conductive film to be detected, realize the monitoring to film thickness uniformity in the conductive film production run.
Description of drawings
Fig. 1 is the circuit diagram of square resistance test circuit in the prior art;
Fig. 2 consists of block diagram for the test circuit structure that the utility model provides;
The circuit diagram of the test circuit that Fig. 3 provides for the utility model;
The switch control probe energising synoptic diagram that Fig. 4 provides for the utility model;
Fig. 5 consists of block diagram for the another test circuit structure that the utility model provides;
The circuit diagram of two probe test circuit that Fig. 6 A provides for the utility model;
The circuit diagram of the another pair of probe test circuit that Fig. 6 B provides for the utility model
The circuit diagram of the detector probe contact performance that Fig. 7 provides for the utility model.
Embodiment
The test circuit that the utility model provides by circuit design, is controlled respectively probe energising, and determines and the probe of conductive film conducting to be detected and the probe of conducting not, and then can determine whether contacting of the probe of switching on and conductive film to be detected.
Below with reference to specific embodiment the test circuit that the utility model provides is elaborated, does not certainly regard it as and be limited.
Embodiment one
The utility model provides a kind of test circuit, this test circuit comprises square resistance test electronic circuit 1, the probe 2 that is connected with square resistance test electronic circuit 1 and be arranged on square resistance and test the first ON-OFF control circuit 3 between electronic circuit 1 current source and the probe 2, as shown in Figure 2.
Concrete, at least include reometer and current source in the square resistance test electronic circuit 1, and include four probes in the probe 2, whether 3 controls of the first ON-OFF control circuit test the current source signal that current source is exported in the electronic circuit 1 with square resistance inputs in connected each probe, whether switch on to control each probe, can conducting if the probe after the energising contacts with conductive film to be detected then, and the reometer in the square resistance test electronic circuit 1 has electric current to flow through, if not contact, then probe and conductive film to be detected can not conductings, do not have electric current in the reometer and flow through.
Further, in the utility model, the first ON-OFF control circuit 3 is by controlling successively any two adjacent probe energisings, and by whether having electric current to flow through in the square resistance test electronic circuit 1 measuring current table, the two adjacent probes that can determine respectively each energising whether with conductive film conducting to be detected, final according to determining the probe of conducting and the probe of conducting not, because the square dimensions of conductive film to be detected and the spacing between the probe are fixed, by controlling any two adjacent probe energisings, then according to the probe of the conducting finally determined and the probe of conducting not, can determine the probe that does not contact with conductive film to be detected.
The test circuit that the utility model provides, by between probe and square resistance test electronic circuit, the first ON-OFF control circuit being set, control successively any two adjacent probe energisings by the first ON-OFF control circuit, the probe of conducting and the probe of conducting not can be determined, the probe that does not contact with conductive film to be detected can be finally determined according to the probe of the probe of the conducting of determining and not conducting.
Embodiment two
The utility model embodiment two is elaborated to the test circuit that relates among the embodiment one in connection with practical application.
Being used for control in the utility model, whether square resistance to be tested the first ON-OFF control circuit 3 that the current source signal of electronic circuit 1 inputs to each probe can be any device that can the control circuit break-make, such as relay, switch etc.Whether the utility model control circuit 3 preferred switches switch on by closure and connected each probe of disconnection control of switch.
Concrete, for realizing that whether control respectively each probe switches on, then can connect respectively a switch by corresponding each probe in the utility model.The first ON-OFF control circuit 3 preferably includes four single-pole single-throw switch (SPST)s in the utility model, each single-pole single-throw switch (SPST) connects a probe, as shown in Figure 3, when single-pole single-throw switch (SPST) is closed, current source signal in the square resistance test electronic circuit 1 inputs to connected probe by this closed single-pole single-throw switch (SPST), and corresponding probe is switched on, when 3. 2. probe switched on probe, then Closing Switch 2 and switch 3, and switch 1 and switch 4 are disconnected, 3. 2. current source signal in the square resistance test electronic circuit 1 switch on probe to probe respectively by switch 2 and the switch 3 of closure according to the current direction shown in the arrow as shown in Figure 4.The single-pole single-throw switch (SPST) that the utility model connects by closed any two adjacent probes, make adjacent probe energising, when two probes of energising contact with conductive film to be detected when good, then two adjacent probes of energising can be by consisting of measuring circuit between the current source in conductive film to be detected and the square resistance test electronic circuit, two adjacent probe conductings of energising, otherwise, can not consist of the loop, determine two not conductings of adjacent probe of energising, and have a probe and conductive film loose contact to be detected at least.
Contrasted as can be known by Fig. 3 and Fig. 1, the test circuit that the utility model provides is compared with existing test circuit, difference is, between each probe and resistance test circuit, be provided with single-pole single-throw switch (SPST), single-pole single-throw switch (SPST) by any two adjacent probes of closure, make the current source of square resistance test electronic circuit to the probe energising of correspondence, and whether have electric current to pass through in the probe current table, can judge whether two probes corresponding to this Closing Switch contact well with conductive film to be detected.Concrete, when having electric current to pass through in the reometer, two probes that show energising, consisted of the loop between conductive film to be detected and the current source, be that two probes corresponding to Closing Switch contact well with conductive film to be detected, otherwise, two probes corresponding to Closing Switch have at least one not contact with conductive film to be detected, whether energising by controlling successively any two adjacent probes in four probes, according to the probe of the conducting of finally determining and the probe of conducting not, then can determine the probe that does not contact with conductive film to be detected, and in time adjust the probe location that contact with conductive film to be detected, finally so that four probes all contact with conductive film to be detected.
Concrete, in the conductive film production run, when the film thickness uniformity monitoring is carried out in the measurement of application square resistance, the square conductive film of dividing is generally 4mm*4mm, four probes of four point probe square resistance proving installation are arranged point-blank with constant spacing, spacing between adjacent two probes is generally 0.5mm, be that the straight length at four point probe place is less than the length of the square conductive film length of side to be detected of dividing, if the arrangement mode of four probes is arranged according to the order among Fig. 1, if there is a probe that does not contact with conductive film to be detected in the four point probe, the probe that does not then contact, be probe 1 or probe 4, if there are two probes that do not contact with conductive film to be detected in the four point probe, then the probe of contact is not probe 1, probe 2 or probe 3, probe 4, by that analogy, if there is the not probe of contact, then the probe of contact should not be adjacent probe, and the square dimensions of conductive film to be detected and the spacing between the probe are fixed, so can be according to the not probe of contact of judging, suitable adjustment square resistance proving installation carries out the movement of respective distance, and as shown in table 1 is that mode is adjusted in concrete judgement:
Table 1
The switch that the utility model connects by difference closed any two adjacent probes, to any two adjacent probe energisings, judge whether it consists of the loop with current source, and then can judge which probe does not contact with conductive film to be detected, and adopt the mobile adjustment mode of adjusting of above-mentioned table 1 according to judged result, not only can judge more accurately the probe that does not contact with conductive film to be detected, can also be by the probe that does not contact conductive film be moved accordingly, make resistance measuring circuit consist of the loop, guarantee the Measurement accuracy of square resistance, and then can realize measurement and monitoring to the conductive film thickness.
Embodiment three
The utility model embodiment three is to the embodiment one further improvement with embodiment two, be pair probe patterns with existing four single probe design in the present embodiment, with more accurate definite probe that does not contact with conductive film to be detected.
The test circuit that provides in the present embodiment comprises square resistance test electronic circuit 1, the first ON-OFF control circuit 3, also comprises two probe 4, second switch control circuits 5 and includes the detection circuit 6 of current source, as shown in Figure 5.
Concrete, two probes 4 are connected by the current source of the first ON-OFF control circuit 3 with square resistance test electronic circuit 1, be used for carrying out the measurement of square resistance, and be connected with the current source of detection circuit 6 by second switch control circuit 5, whether the current source signal in the detection circuit 6 is inputed in connected each pair probe by 5 controls of second switch control circuit, whether switch on to control each two probe, the current source that whether passes through conductive film to be detected and detection circuit by detecting each two probe consists of the loop, determines the contact performance of each two probe.
Concrete, in the utility model, one of them probe of each two probe is connected with square resistance test electronic circuit 1, is used for carrying out Square resistance measurement, and is connected with detection circuit 6 with another probe, is used for carrying out determining of probe contact performance; Two probes in each two probe are by the first ON-OFF control circuit 3 and/or second switch control circuit 5, be connected with detection circuit 6, whether control inputs to the current source signal of detection circuit 6 in connected each pair probe, whether switches on to control each two probe.
Concrete, use two probe test circuit that present embodiment provides, can control successively each two probe 4 energising, whether detection circuit 6 surveys two probes of energising by conductive film conducting to be detected, determine respectively and two probes of conductive film conducting to be detected and two probes of conducting not, if two probe conductings of energising, then the probe of correspondence contacts well with conductive film to be detected, otherwise loose contact can be determined the probe that does not contact with conductive film to be detected faster.
In the utility model, the first ON-OFF control circuit 3 and second switch control circuit 5 can be any devices that can the control circuit break-make, such as relay, switch etc., the utility model is not done restriction, the utility model preferably is designed to switch with the first ON-OFF control circuit 3 and second switch control circuit 5, by closure and the disconnection of switch, control connected pair of probe and whether switch on.
Preferably, in the utility model the first ON-OFF control circuit 3 comprise with each pair probe in a probe be connected respectively single-pole double-throw switch (SPDT), second switch control circuit 5 comprise with each pair probe in the single-pole single-throw switch (SPST) of another probe connection of not being connected with square resistance test electronic circuit current source, as shown in Figure 6A.
Concrete, single-pole double-throw switch (SPDT) in the first ON-OFF control circuit 3 when carrying out Square resistance measurement, makes a probe in two probes be connected with the current source of square resistance test electronic circuit 1, when carrying out the probe contact when determining, probe is connected with the current source of detection circuit 6.Further, when carrying out the probe contact when determining, the single-pole double-throw switch (SPDT) of the first ON-OFF control circuit 3 makes a probe in two probes be connected with the current source of detection circuit 6, the single-pole single-throw switch (SPST) of second switch control circuit 5, another probe that is not connected with square resistance test electronic circuit current source in two probes is connected with detection circuit 6, thereby so that the current source of detection circuit 6 is powered to this pair probe, and then the current source that can whether pass through by two probes of judging this energising conductive film to be detected and detection circuit 6 consists of the loop, determine the contact performance of two probes of this energising, shown in Fig. 6 B.
In the utility model, square resistance test electronic circuit 1 and detection circuit 6 work alone in the utility model, after making detection circuit survey 4 groups of two probes and conductive film to be detected contacts, carry out the measurement of square resistance, the utility model preferably is set to a single-pole single-throw switch (SPST) with the first ON-OFF control circuit 3, when this single-pole single-throw switch (SPST) is closed, square resistance test electronic circuit 1 is powered to probe, then carry out the Square resistance measurement of conductive film to be detected, this single-pole single-throw switch (SPST) disconnects, and then square resistance test electronic circuit 1 is not powered to probe.
Further, when the first ON-OFF control circuit 3 is set to a single-pole single-throw switch (SPST), second switch control circuit 5 preferred double-point double-throw switchs, each two probe connects respectively one group of double-point double-throw switch, and the closure by double-point double-throw switch whether, and whether the current source of control detection circuit 6 switches on to two probes of correspondence.
Further preferred, whether the effect of switch is exactly to switch on to two probes of correspondence in order to control the continuous current source in the utility model, therefore, working as probe design in the utility model is two probe patterns, when the first ON-OFF control circuit 3 comprises a single-pole single-throw switch (SPST), the switch of second switch control circuit 5 also can corresponding each two probe design two single-pole single-throw switch (SPST)s independently, and two probes of each two probe each single-pole single-throw switch (SPST) of separate connection respectively.
It is the change that reduces original square resistance test electronic circuit in the utility model, the second source that is different from current source in the existing square resistance test electronic circuit is set in detection circuit 6, and for adjacent two probes of determining fast energising are whether every group of two probes contact with conductive film to be detected, the utility model can arrange a reometer in detection circuit 6, when two probes of energising contact with conductive film to be detected, two probes of then switching on, formed the loop between the current source of conductive film to be detected and detection circuit, there is electric current to flow through in the reometer, namely in the reometer registration arranged.The circuit that is illustrated in figure 7 as the detector probe contact performance that present embodiment provides consists of synoptic diagram, every group of two probes connect by double-point double-throw switch, difference Closing Switch 1, switch 2, switch 3 and switch 4, then control respectively two probes 1., two probes 2., 4. 3. two probes switch on two probes, further then can judge two probes 1. by reometer, two probes 2., 4. 3. whether two probes contact with conductive film to be detected with two probes, judged result according to each Closing Switch, corresponding traveling probe, four groups of probes of final assurance all contact with conductive film to be detected, as shown in table 2 is under two probe patterns, the square conductive film of dividing is 4mm*4mm, when spacing was 0.5mm between adjacent two probes of four point probe square resistance proving installation, mode was adjusted in concrete judgement:
Table 2
The test circuit of two probe patterns that the utility model provides, every group of probe is set to two probes and independent design is the loop, test the current source of the detection circuit of electronic circuit powers to two probes by being independent of square resistance, minimizing is to the transformation of original circuit, and can determine more accurately the probe that do not contact with conductive film to be detected.Further, the utility model arranges switch between the current source of original square resistance test electronic circuit and connected probe, utilize the power supply of square resistance test electronic circuit to power to probe during switch closure, can carry out the measurement of square resistance, switch can carry out determining of probe contact performance when disconnecting, can further reduce the impact between the circuit.
Embodiment four
The utility model embodiment four also provides a kind of proving installation, and this proving installation comprises the test circuit that embodiment one to embodiment three is related, and other test structures with prior art are identical, do not repeat them here.
The proving installation that the utility model provides, by in test circuit, designing particular electrical circuit, pass through ON-OFF control circuit, control any two adjacent probe energisings, perhaps two probe energisings, determine and the probe of conductive film conducting to be detected and the probe of conducting not, can determine the probe of switching on and the contact performance of conductive film to be detected.
Obviously, those skilled in the art can carry out various changes and modification to the utility model and not break away from spirit and scope of the present utility model.Like this, if of the present utility model these are revised and modification belongs within the scope of the utility model claim and equivalent technologies thereof, then the utility model also is intended to comprise these changes and modification interior.
Claims (8)
1. test circuit, be applied to the square resistance test, comprise square resistance test electronic circuit, comprise current source in the described square resistance test electronic circuit, it is characterized in that, also comprise: test the probe that electronic circuit is connected with described square resistance, and be arranged at the first ON-OFF control circuit between described current source and the described probe; Wherein,
Whether described the first ON-OFF control circuit is tested the electronic circuit current source signal with square resistance for control and is inputed to connected probe.
2. test circuit as claimed in claim 1 is characterized in that, described probe is single probe, and described the first ON-OFF control circuit comprises:
The single-pole single-throw switch (SPST) that is connected respectively with each described probe.
3. test circuit as claimed in claim 1 is characterized in that, described probe is two probes, and described test circuit also comprises: second switch control circuit and detection circuit, and described detection circuit includes current source, wherein,
Described pair of probe is connected with square resistance test electronic circuit current source by described the first ON-OFF control circuit, and is connected with the detection circuit current source by described second switch control circuit.
4. test circuit as claimed in claim 3 is characterized in that, described the first ON-OFF control circuit comprises: with a single-pole double-throw switch (SPDT) that probe is connected respectively in each described pair of probe;
Described second switch control circuit comprises: with the single-pole single-throw switch (SPST) of another probe connection that is not connected with described square resistance test electronic circuit current source in each described pair of probe.
5. test circuit as claimed in claim 3 is characterized in that, described the first ON-OFF control circuit comprises a single-pole single-throw switch (SPST);
Described second switch control circuit comprises: with each described pair of double-pole single throw that probe is connected respectively.
6. test circuit as claimed in claim 3 is characterized in that, described the first ON-OFF control circuit comprises a single-pole single-throw switch (SPST);
Described second switch control circuit comprises: with two probes of each described pair of probe single-pole single-throw switch (SPST) of separate connection respectively.
7. such as each described test circuit of claim 3-6, it is characterized in that described detection circuit also comprises a reometer, whether be used for to survey between two probes of energising and the described detection circuit current source by conductive film conducting to be detected.
8. a proving installation is characterized in that, comprises each described test circuit of claim 1-7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN 201320268681 CN203241477U (en) | 2013-05-16 | 2013-05-16 | Test circuit and test device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320268681 CN203241477U (en) | 2013-05-16 | 2013-05-16 | Test circuit and test device |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107247186A (en) * | 2017-06-15 | 2017-10-13 | 加宏科技（无锡）有限公司 | A kind of resistance multi-point tester and its detection method |
| CN108445294A (en) * | 2018-06-01 | 2018-08-24 | 北京铂阳顶荣光伏科技有限公司 | Resistor detecting device, resistance detecting circuit and insulating properties detection method |
| CN108469580A (en) * | 2018-06-01 | 2018-08-31 | 北京铂阳顶荣光伏科技有限公司 | Resistor detecting device and system, insulating properties detection method |
| CN112345854A (en) * | 2020-10-30 | 2021-02-09 | 北京航天光华电子技术有限公司 | Two-port component measurement and test system between any two points |
| CN115119375A (en) * | 2022-07-15 | 2022-09-27 | 山东大学 | Multi-mode Langmuir probe three-in-one detection system and detection method |
| CN117008070A (en) * | 2023-10-07 | 2023-11-07 | 成都世源频控技术股份有限公司 | Radar simulator with electric leakage detection function |
| CN117214649A (en) * | 2023-11-07 | 2023-12-12 | 珠海格力电子元器件有限公司 | Power device testing device and method |
-
2013
- 2013-05-16 CN CN 201320268681 patent/CN203241477U/en not_active Expired - Lifetime
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107247186A (en) * | 2017-06-15 | 2017-10-13 | 加宏科技（无锡）有限公司 | A kind of resistance multi-point tester and its detection method |
| CN108445294A (en) * | 2018-06-01 | 2018-08-24 | 北京铂阳顶荣光伏科技有限公司 | Resistor detecting device, resistance detecting circuit and insulating properties detection method |
| CN108469580A (en) * | 2018-06-01 | 2018-08-31 | 北京铂阳顶荣光伏科技有限公司 | Resistor detecting device and system, insulating properties detection method |
| CN112345854A (en) * | 2020-10-30 | 2021-02-09 | 北京航天光华电子技术有限公司 | Two-port component measurement and test system between any two points |
| CN112345854B (en) * | 2020-10-30 | 2024-05-03 | 北京航天光华电子技术有限公司 | Two-port component measurement test system between any two points |
| CN115119375A (en) * | 2022-07-15 | 2022-09-27 | 山东大学 | Multi-mode Langmuir probe three-in-one detection system and detection method |
| CN115119375B (en) * | 2022-07-15 | 2024-05-28 | 山东大学 | Multimode Langmuir probe three-in-one detection system and detection method |
| CN117008070A (en) * | 2023-10-07 | 2023-11-07 | 成都世源频控技术股份有限公司 | Radar simulator with electric leakage detection function |
| CN117008070B (en) * | 2023-10-07 | 2023-12-19 | 成都世源频控技术股份有限公司 | Radar simulator with electric leakage detection function |
| CN117214649A (en) * | 2023-11-07 | 2023-12-12 | 珠海格力电子元器件有限公司 | Power device testing device and method |
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