CN203163096U - Clean room system - Google Patents

Clean room system Download PDF

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Publication number
CN203163096U
CN203163096U CN 201320114054 CN201320114054U CN203163096U CN 203163096 U CN203163096 U CN 203163096U CN 201320114054 CN201320114054 CN 201320114054 CN 201320114054 U CN201320114054 U CN 201320114054U CN 203163096 U CN203163096 U CN 203163096U
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CN
China
Prior art keywords
air
clean room
return
room system
clean
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 201320114054
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Chinese (zh)
Inventor
黄晨东
田元健
黄梅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangsu Xinriyuan Building Energy Saving Technology Co Ltd
Original Assignee
JIANGSU XINRIYUAN BUILDING ENERGY EFFICIENCY TECHNOLOGY CO LTD
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Priority to CN 201320114054 priority Critical patent/CN203163096U/en
Application granted granted Critical
Publication of CN203163096U publication Critical patent/CN203163096U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model discloses a clean room system with a dust-free area defined therein. The clean room system comprises an air return port and a cleaning unit, wherein the air in the dust-free area flows out through the air return port to define an air return path; the air flows in dust-free area after being cleaned by the cleaning unit so as to define an air intake path; and a fan coil unit is arranged in the air return path. According to the utility model, with the air return coil in the air return path, stronger air return power can be provided to the air from the dust-free area, so as to optimize air return effect and ensure working reliability of the clean room system.

Description

Clean room system
Technical Field
The utility model belongs to the technical field of the purification engineering, concretely relates to toilet system.
Background
Clean rooms are widely used in the electronics industry and other industries where a clean, particle-free environment is essential in product assembly and inspection. The chamber is evaluated by the number of particles of a given standard size tested in a standard volume within the clean chamber. According to the evaluation system, a "class 10" clean room has only one tenth of the number of particles in a "class 100" clean room. The small particle count in a clean room is achieved by a large distribution of air changes in the room. The air changes wash particulate matter within the chamber. Other conditions are the same, the more times the air changes, the fewer the number of particles in the chamber. For example, a "class 1" clean room typically requires more than 450 air changes per hour.
Meanwhile, because the clean room needs to pass through a multi-layer filtering system, the resistance encountered during air circulation is large, and particularly during air return, the clean room in the prior art can not provide a reliable air return effect generally, so that the clean grade of the clean room can be influenced.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a toilet system, it can provide better return air effect, optimizes the return air mode, guarantees the reliable high efficiency of toilet's work.
In order to solve the above problem, the present invention provides a clean room system, which has a dust-free area defined therein, the clean room system comprises:
the air in the dust-free area flows out through the air return opening to define an air return path;
the purification unit is used for purifying air flowing into the dust-free area so as to define an air inlet path; wherein,
a fan coil is arranged in the return air path.
As a further improvement of the utility model, the clean room system further comprises an air return column, the air return inlet is formed on the air return column, the fan coil is arranged in the air return column adjacent to the air return inlet.
As a further improvement, the air return opening is provided with an air return shutter.
As a further improvement of the present invention, the return air path is in gaseous communication with the intake air path.
As a further improvement of the present invention, the clean room system further comprises an air conditioner and an air pipe connected to the air conditioner, wherein the air conditioner is used for purifying the air flowing out from the air return column and then discharging the air pipe.
As a further improvement, the purifying unit is disposed at the top of the clean area, and the air discharged from the air pipe passes through the purifying unit to be purified and then flow into the clean area.
As a further improvement of the utility model, the bottom in dustless district is provided with built on stilts floor, including a plurality of gas pockets on the built on stilts floor, the air in the dustless district certainly the gas pocket flows in the return air inlet.
As a further improvement of the utility model, the air return inlet is arranged at the lower part of the raised floor.
As a further improvement of the utility model, the purification unit comprises a fan filter unit.
As a further improvement, the fan coil is a vertical fan coil.
Compared with the prior art, the utility model provides a toilet system can provide stronger return air power for the air that flows from the clean room dustless area through set up the return air coil pipe in the return air route, optimizes the return air effect, guarantees the reliability of toilet system work.
Drawings
Fig. 1 is a schematic structural diagram of an embodiment of the clean room system of the present invention.
Detailed Description
The present invention will be described in detail below with reference to specific embodiments shown in the drawings. However, these embodiments are not intended to limit the present invention, and structural, methodical, or functional changes that may be made by one of ordinary skill in the art based on these embodiments are all included in the scope of the present invention.
Referring to fig. 1, a specific embodiment of the clean room system of the present invention is described. In the present embodiment, the clean room system 100 includes an air return opening 11, a purge unit 20, and a fan coil 30.
A clean room system 100 defines a clean room area 101, air in the clean room area 101 flows out through the return air inlet 11 to define a return air path P1, the air flowing back from the return air inlet 11 has a higher concentration of foreign particles, a fan coil 30 is disposed in the return air path P1 for providing a stronger return air power, and the air flows into the clean room area 101 through purification by the purification unit 20 to define an intake air path P2. The air purified by the air purifying unit 20 is continuously blown into the dust-free area 101, and then the polluted air is taken away through the air return opening 11, so that the clean grade in the dust-free area 101 can be maintained at a preset value, the smoothness of the air circulation can be ensured by the fan coil 30 in the air return path P1, and the capability of efficiently replacing the air in the dust-free area 101 is provided to a certain extent, so that the requirement of the clean room system 100 with higher cleanliness grade is met.
As a preferred embodiment, in the present embodiment, the return air path P1 and the intake air path P2 are in gas communication, that is, the return air path P1 and the intake air path P2 of the clean room system 100 of the present invention are in gas communication, so as to recycle the air returned from the return air inlet 11. Of course, it is understood that in some alternative embodiments, the air flowing out through the return air path P1 may be directly discharged to the outside, and such alternative embodiments should still fall within the scope of the present invention.
In this embodiment, the clean room system 100 further includes a return air column 10, and the return air inlet 11 is formed in the return air column 10, and a plurality of return air columns 10 may be provided. The fan coil 30 is arranged in the return air column 10 and close to the return air inlet 11, and air in the dust-free area 101 is driven by the fan coil 30 to circulate upwards along the return air column 10, so that the defect of insufficient return air pressure is overcome, and the purpose of smooth air circulation is achieved. Preferably, the fan coil 30 is an upright fan coil to provide efficient power for returning air to the upper portion of the return air column 10.
The bottom of the clean area 101 is provided with a raised floor 60, and the raised floor 60 includes a plurality of air holes (not shown) through which the air in the clean area 101 flows into the air return opening 11. In a particular installation, the return air duct 10 extends partially below the raised floor 60, and the return air opening 11 is provided in the return air duct 10 below the raised floor 60. The return air shutter 70 is disposed at the return air inlet 11, and the return air shutter 70 is used for primarily purifying air flowing back through the return air inlet 11.
The clean room system 100 further includes an air conditioner 40 and an air duct 50 connected to the air conditioner 40, wherein the air conditioner 40 is configured to purify the air returned from the return air column 10 by medium effect, and to discharge the purified air by medium effect through the air duct 50. The air conditioner 40 in the clean room is also used to maintain the temperature and humidity in the clean room. In the present embodiment, the clean room system 100 includes a region 102 located at an upper portion of the clean area 101, and the air outlet (not labeled) of the air duct 50 is disposed in the region 102, and the air purified from the air conditioner 40 is further discharged into the region 102 so as to further perform efficient purification of the purification unit 20. It should be understood that the specific path of air entering the air conditioning unit 40 from the return air column 10 is not specifically shown in fig. 1, but should be a part not related to the improvement of the present invention, and those skilled in the art can easily understand the contents of the present invention according to the present drawings.
The purifying unit 20 is disposed at the top of the dust-free area 101, and the air discharged from the air outlet of the air duct 50 is efficiently purified by the purifying unit 20 and finally blown into the dust-free area 101. The circulation achieves the purpose of purifying the air in the dust-free area 101.
In a preferred embodiment, the purification unit 20 comprises a Fan Filter Unit (FFU). The fan filter unit is formed by combining a fan and a filter (a high efficiency filter (HEPA) or an ultra high efficiency filter (ULPA)) to form a self-powered terminal purification device, and is a modular terminal air supply device with self-powered and filtering functions.
The utility model discloses an above-mentioned embodiment, following beneficial effect has: the utility model provides a toilet system 100 can provide stronger return air power for the air that flows from clean room dustless area 101 through set up the return air coil pipe in return air route P1, optimizes the return air effect, guarantees the reliability of toilet system 100 work.
It should be understood that although the present description refers to embodiments, not every embodiment contains only a single technical solution, and such description is for clarity only, and those skilled in the art should make the description as a whole, and the technical solutions in the embodiments can also be combined appropriately to form other embodiments understood by those skilled in the art.
The above list of details is only for the practical implementation of the present invention, and they are not intended to limit the scope of the present invention, and all equivalent implementations or modifications that do not depart from the technical spirit of the present invention should be included in the scope of the present invention.

Claims (10)

1. A clean room system having a clean area defined therein, said clean room system comprising:
the air in the dust-free area flows out through the air return opening to define an air return path;
the purification unit is used for purifying air flowing into the dust-free area so as to define an air inlet path; wherein,
a fan coil is arranged in the return air path.
2. The clean room system of claim 1, further comprising an air return column, the air return opening being formed in the air return column, the fan coil being disposed within the air return column adjacent the air return opening.
3. The clean room system of claim 1, wherein the return air inlet is provided with a return air shutter.
4. The clean room system of claim 1, wherein the return air path and the intake air path are in gaseous communication.
5. The clean room system of claim 4, further comprising an air conditioning device for purifying the gas flowing out of the air return column for discharge through the air duct, and an air duct connected to the air conditioning device.
6. The clean room system of claim 5, wherein the cleaning unit is disposed at a top of the clean area, and air exhausted from the air duct is cleaned by the cleaning unit and flows into the clean area.
7. The clean room system according to claim 6, wherein a raised floor is provided at the bottom of the clean zone, said raised floor comprising a plurality of air holes, wherein air in the clean zone flows into the air return opening through said air holes.
8. The clean room system of claim 7, wherein the air return is provided at a lower portion of the raised floor.
9. The clean room system of claim 1, wherein the purification unit comprises a fan filter unit.
10. The clean room system of claim 1, wherein the fan coil is an upright fan coil.
CN 201320114054 2013-03-13 2013-03-13 Clean room system Expired - Fee Related CN203163096U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201320114054 CN203163096U (en) 2013-03-13 2013-03-13 Clean room system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201320114054 CN203163096U (en) 2013-03-13 2013-03-13 Clean room system

Publications (1)

Publication Number Publication Date
CN203163096U true CN203163096U (en) 2013-08-28

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CN (1) CN203163096U (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104048356A (en) * 2013-03-13 2014-09-17 江苏心日源建筑节能科技有限公司 Clean room system
CN104713175A (en) * 2015-03-26 2015-06-17 深圳市华星光电技术有限公司 Technical sandwich structure
CN105987433A (en) * 2014-12-25 2016-10-05 世源科技工程有限公司 Air treatment system
CN106556085A (en) * 2016-12-06 2017-04-05 惠科股份有限公司 Clean room workshop and airflow adjusting method for clean room workshop
CN107990516A (en) * 2017-12-21 2018-05-04 河北工业职业技术学院 The aspiration of negative pressure equipment

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104048356A (en) * 2013-03-13 2014-09-17 江苏心日源建筑节能科技有限公司 Clean room system
CN105987433A (en) * 2014-12-25 2016-10-05 世源科技工程有限公司 Air treatment system
CN105987433B (en) * 2014-12-25 2019-04-09 世源科技工程有限公司 Air treatment system
CN104713175A (en) * 2015-03-26 2015-06-17 深圳市华星光电技术有限公司 Technical sandwich structure
CN104713175B (en) * 2015-03-26 2017-07-21 深圳市华星光电技术有限公司 Interlayer structure
CN106556085A (en) * 2016-12-06 2017-04-05 惠科股份有限公司 Clean room workshop and airflow adjusting method for clean room workshop
CN106556085B (en) * 2016-12-06 2019-05-24 惠科股份有限公司 Clean room workshop and airflow adjusting method for clean room workshop
US11378291B2 (en) 2016-12-06 2022-07-05 HKC Corporation Limited Clean room and method for regulating airflow of clean room
CN107990516A (en) * 2017-12-21 2018-05-04 河北工业职业技术学院 The aspiration of negative pressure equipment

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C14 Grant of patent or utility model
GR01 Patent grant
C56 Change in the name or address of the patentee

Owner name: JIANGSU XINRIYUAN BUILDING ENERGY SAVING TECHNOLOG

Free format text: FORMER NAME: JIANGSU XINRIYUAN BUILDING ENERGY SAVING TECHNOLOGY INC.

CP01 Change in the name or title of a patent holder

Address after: 215000 new eco building A16F, 18 industrial road, Suzhou Industrial Park, Jiangsu, Suzhou

Patentee after: Jiangsu Xinriyuan Building Energy Saving Technology Co., Ltd.

Address before: 215000 new eco building A16F, 18 industrial road, Suzhou Industrial Park, Jiangsu, Suzhou

Patentee before: Jiangsu Xinriyuan Building Energy Efficiency Technology Co.,Ltd.

CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20130828

Termination date: 20210313