CN203124192U - Constant temperature and humidity lifting coating machine - Google Patents
Constant temperature and humidity lifting coating machine Download PDFInfo
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- CN203124192U CN203124192U CN 201320073229 CN201320073229U CN203124192U CN 203124192 U CN203124192 U CN 203124192U CN 201320073229 CN201320073229 CN 201320073229 CN 201320073229 U CN201320073229 U CN 201320073229U CN 203124192 U CN203124192 U CN 203124192U
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Abstract
The utility model discloses a constant temperature and humidity lifting coating machine. The constant temperature and humidity lifting coating machine comprises a base, a coating chamber, a transmission device, a temperature and humidity induction device and a motor, wherein a fixture for clamping a coating substrate workpiece is arranged in the coating chamber, a lifting rope is arranged on the fixture, winds a motor driving shaft and is used for synchronously driving the fixture to move up and down, a heating trough is arranged on the lower part of the coating chamber and is connected with a heating and stirring device which is arranged on the base and can be used for controlling the temperature and the stirring speed of a sol-gel solution to be coated, a temperature and humidity detector is arranged in the middle of the coating chamber, a gas inlet into which required gas can be fed and a gas outlet for discharging excessive gas are formed in the back of the coating chamber, and the gas inlet and a bottle containing gas required by an experiment are connected with each other by controllable devices such as a reducing valve. The constant temperature and humidity lifting coating machine has the advantages that the type, the temperature and the humidity of atmosphere around, and the temperature of a coating solution can be controlled in a film forming process, the lifting speed is stable and can be continuously adjusted, the operation is easy, and thus the quality of thin films and the uniformity of formed film quality can be more accurately and effectively ensured.
Description
Technical field
The utility model relates to a kind of workpiece film formation device, is specifically related to a kind of constant temperature and humidity for the laboratory and carries film applicator.
Background technology
In recent years, along with the rise of photovoltaic industry, accelerate semiconductor and conductive film research in the laboratory.Film forming is changing the performance of substrate on substrates such as glass, flexible substrates to adopt dipping membrane technology, and the function of giving the efficiency light photoelectric transformation efficiency has obtained in the laboratory to use widely.Along with going deep into thin film study, requirement to performance, preparation technology and the operation repeatability of film improves, to its surrounding atmosphere character in coating solution temperature constant and the film forming procedure, temperature humidity etc. need accurately control, thereby very high to the film balance performance requirement.Present existing film balance is because design and structural reason, lift in the process usually owing to shake occurs with rail friction, cause the film became uneven, be difficult to accurately be controlled to film thickness, simultaneously because the collosol and gel liquid temperature differential, surrounding atmosphere character, temperature and humidity is fixing during membrane, for film forming on the accurate device, and the repeatability of the film that very difficult accurate assurance is pulled out at every turn and the stability of performance.
Present stage, the domestic vertical constant temperature and humidity in laboratory that still is not applicable to lifted film applicator.In actual applications, many entity and individual have proposed some technical schemes of being correlated with therewith.A kind of vertical film applicator that lifts was once disclosed before this as Guangzhou Energy Resource Inst., Chinese Academy of Sciences, its technical scheme comprises vertical support, motor, transmission device and a workbench, be characterised in that said vertical support is provided with a vertical leading screw that has feed screw nut, two ends, the left and right sides at leading screw are provided with slide rail, said feed screw nut is connected with a slide block, this slide block has a pair of sliding-rail groove and is nested on the slide rail, said workbench is fixedlyed connected with slide block, at workbench anchor clamps are housed, these anchor clamps comprise the adjustable set bolt in a vertical U-lag that Open Side Down and the screw-in groove, constitute clamp port by the end face of said set bolt and the medial surface of U-lag.The advantage of this technical scheme is that the process of lifting is steady, does not have vibration, can guarantee that the film forming thickness is even; Pull rate is stable and adjustable continuously, can be controlled to film thickness.But this technical scheme still has many parts to be hoisted in actual applications, for example, operation inconvenience, control accurate inadequately, can't eliminate the differentia influence that the extraneous temperature difference causes the sol-gel liquid system, it is consistent that the every batch of residing atmosphere character of film forming and temperature humidity can not be guaranteed, membrane structure and the character instability of preparation therefore occur, poor repeatability, product quality differs etc.
The utility model content
The technical problems to be solved in the utility model is at the operation inconvenience that exists in the actual use of existing film applicator, control inaccuracy, the unsettled deficiency of quality of forming film, provide a kind of constant temperature and humidity to lift film applicator, it is not only simple in structure, easy to operate, and lift steady, adjustable-speed, can guarantee effectively accurately that film quality and film forming uniform quality are standardized.
The utility model solves the problems of the technologies described above the technical scheme of taking: a kind of constant temperature and humidity lifts film applicator, comprise base, the chamber of filming, transmission device, warm and humid induction installation and motor, described indoor being equipped with for the film described anchor clamps of anchor clamps of substrate work pieces of clamping of filming is provided with rope, described rope is wound on the motor driving shaft and moves up and down for driving anchor clamps synchronously, the described bottom, chamber of filming is provided with heating tank, described heating tank links to each other with the heating and stirring device of controlling sol-gel solution temperature to be filmed and mixing speed on being located at base, the described middle part, chamber of filming is provided with warm and humid detector and electrically connects with the temperature humidity display of filming outdoor, the described rear portion, chamber of filming is provided with the air admission hole that can feed the experiment desired gas, the described chamber sidepiece of filming is provided with the steam vent that can discharge unnecessary gas, join by pipeline between the gas cylinder of described air admission hole and experiment desired gas, the adjusting device that feeds the air-flow size for the control air admission hole is housed on the described pipeline.
As preferably, described motor outer shaft be provided with can periodically cut photoelectric sensor the optoelectronic induction signal to adjust the baffle plate of motor speed.
As preferably, described anchor clamps are connected with two ropes, and described anchor clamps clamping end face is embedded with for the valve rubber that strengthens with the holding workpiece coefficient of friction.
As preferably, described motor is adjustable speed motor, and described rope is 2, and the spacing hole that passes the top, chamber of filming respectively is wound on the electric machine main shaft and is synchronized with the movement with motor.
In actual use, the utility model drives rope upper end twining movement by variable speed machine synchronously by transmission device, drive anchor clamps more synchronously by rope and do elevating movement, article two, rope guarantees to film indoor anchor clamps easy motion, do not spin, thereby film is steadily lifted from solution.Wherein, variable speed machine adopts the integrated electric motor that has current/voltage pressure regulator device, and adopts pulse-frequency modulation mode or programmable control unit to regulate the control motor speed; Transmission device adopts two ropes to do synchronous twining movement at electric machine main shaft, drives anchor clamps and moves up and down; The base heating and stirring device adopts magnetic agitation and temperature control equipment control solution mixing speed and temperature; Warm and humid detector adopts the digital integral sensor to show film indoor temperature and humidity; Rear portion, the chamber air admission hole of filming can join with the gas cylinder of testing desired gas, by device control throughputs such as pressure-reducing valves, shows current humidity in real time by warm and humid detector, and then controls the indoor humidity scope of filming.The above repeatability of more accurate effective assurance film quality and preparation.Film indoor anchor clamps for the clamping substrate work pieces of filming, need to keep the perpendicularity of anchor clamps and steadily lift motion, can be by two ropes be installed, making it twine the motor driving shaft is synchronized with the movement, held stationary promotes, and the motor outer shaft is provided with baffle plate cutting optoelectronic induction signal and adjusts rotating speed; The anchor clamps own wt is done up and down under the gravity effect and is moved both vertically, and clamping end face setting-in one valve rubber of holding workpiece substrate in the anchor clamps is stablized to keep the firm of clamping with the coefficient of friction that strengthens between clamping face and the substrate.
The utility model has the advantages that: pull rate is also adjustable, nothing vibration continuously steadily, can accurately control thickness and the uniformity of film of film forming.Heating and stirring device is housed in the base, can controls temperature and the mixing speed of sol-gel solution to be filmed.Indoor air admission hole and the steam vent of being provided with of filming can be controlled inertia, oxidation or reducing atmosphere around the film.Can control film indoor humidity and temperature by the size of regulating the air admission hole air-flow, warm and humid probe transfers data to temperature humidity display.Anchor clamps are easy to use, and clamping is firm, but clamping size and the substrate that varies in weight.Compare with import instrument, low price, easy to operate accurate, membrane structure good reproducibility, stable performance.
Description of drawings
Fig. 1 is structural representation of the present utility model.
Fig. 2 is the left view of Fig. 1.
Fig. 3 is the enlarged diagram of motor part among Fig. 1.
Fig. 4 is the working state schematic representation of holder part among Fig. 1.
Among the figure: 1, bearing; 2, the base that has the heating agitating function; 3, temperature and mixing speed are regulated button; 4, temperature and mixing speed display screen; 5, heating tank; 6, steam vent; 7, air admission hole; 8, the chamber of filming; 9, anchor clamps; 10, warm and humid probe; 11, temperature humidity display; 12, photoelectric sensor; 13, baffle plate; 14, the direct current generator of adjustable-speed; 15, fixed electrical machinery support; 16, locking motor screw; 17, sliding door; 91, the rubber sheet gasket on the clamping end face; 92, spacing hole; 93, two ropes.
The specific embodiment
Shown in Fig. 1-4, a kind of constant temperature and humidity lifts film applicator, comprise base, the chamber of filming, transmission device, warm and humid induction installation and motor, described indoor being equipped with for the film anchor clamps of substrate work pieces of clamping of filming, described anchor clamps are provided with rope, described rope is wound on the motor driving shaft and moves up and down for driving anchor clamps synchronously, the described bottom, chamber of filming is provided with heating tank, described heating tank be located at base on the temperature of controlling sol-gel solution to be filmed and the heating and stirring device of mixing speed link to each other, the described middle part, chamber of filming is provided with warm and humid detector and electrically connects with the temperature humidity display of filming outdoor, the described rear portion, chamber of filming is provided with the air admission hole that can feed the experiment desired gas and the steam vent that can discharge unnecessary gas, join by pipeline between the gas cylinder of described air admission hole and experiment desired gas, the pressure-reducing valve that feeds the air-flow size for the control air admission hole is housed on the described pipeline.Wherein: described motor outer shaft is provided with the optoelectronic induction signal that can periodically cut photoelectric sensor to adjust the baffle plate of motor speed; Described anchor clamps clamping end face is embedded with the valve rubber that strengthens with the holding workpiece coefficient of friction; Described motor is adjustable speed motor, and described rope is 2, and the spacing hole that passes the top, chamber of filming respectively is wound on the electric machine main shaft.
Before use, the gas that air admission hole 7 and film forming is required is switched in the chamber 8 of filming, during use, open sliding door 17, solution to be filmed is placed in the transparent heating tank 5, regulate temperature and mixing speed button 3 to the temperature that needs, stir a period of time, on the device 4 to be shown after display setting temperature and the mixing speed, close sliding door 17, the gas that feeds from air admission hole 7 is drained the air in the chamber 8 of filming, and can get rid of unnecessary gas from steam vent 6, and warm and humid probe 10 detects the indoor humiture of filming, and the feeding speed of passing through gas is regulated humiture, behind the good film-substrate workpiece of clip 9 clampings that has valve rubber 91, starter motor 14, beginning membrane, clip is connected with motor 14 driving shafts by two ropes 93, every rope passes a spacing hole 92 on the chamber of filming respectively, so because be that two rope anchor clamps 9 and slide can not rotate, it is reliable to operate steadily.Baffle plate 13 by on the motor periodically cuts photoelectric sensor 12 signals, becomes the speed of rope operation by data transaction, i.e. the substrate work pieces speed of filming.
Further specify the utility model below by embodiment and Comparative Examples, the temperature by treating coating solution and the temperature humidity of film forming surrounding atmosphere illustrate advantage of the present utility model place to the influence of sol-gel solution and quality of forming film.
Embodiment: under normal pressure, 3.96 gram triblock copolymer F127 are dissolved in the 36.88 gram ethanol, are dissolved to clarification fully at 40 ℃ of following agitating solutions, drip 3.4 gram titanium tetrachlorides again, continue to stir 4 hours, obtain sol-gel solution A, solution A is placed in the insulation groove of the present utility model, stir 40 ℃ of insulations, the adjusting indoor humidity to 15% of filming, temperature constant stirs when filming and stops, place solution A to lift film-substrate and film, obtain uniform and stable film A1.
Comparative Examples: repeat above-described embodiment by each constituent content, but use the common film applicator that lifts of non-constant temperature and humidity, treat coating solution at room temperature (subzero several years to 23 of room temperature in winter ℃) leave standstill and began to present curdled appearance gel B in 0.5 hour, leave standstill after 30 hours and change gel B2 fully into, place solution B to lift film-substrate and film, obtain having the non-film B1 of cotton-shaped bur.
As seen from the above comparison, improve by the utility model uniqueness structurally, the process of filming lifts steadily, adjustable-speed lifting, and guarantees that effectively film quality and film forming uniform quality are standardized.
Though it is pointed out that above-described embodiment to the utility model detailed text description of contrasting, these text descriptions are just to the simple description of the utility model mentality of designing, rather than to the restriction of the utility model thinking.Any combination, increase or modification that is no more than the utility model mentality of designing all falls in the protection domain of the present utility model.
Claims (4)
1. a constant temperature and humidity lifts film applicator, comprise base, the chamber of filming, transmission device, warm and humid induction installation and motor, it is characterized in that: described indoor being equipped with for the film anchor clamps of substrate work pieces of clamping of filming, described anchor clamps are provided with rope, described rope is wound on the motor driving shaft and moves up and down for driving anchor clamps synchronously, the described bottom, chamber of filming is provided with heating tank, described heating tank links to each other with the heating and stirring device of controlling sol-gel solution temperature to be filmed and mixing speed on being located at base, the described middle part, chamber of filming is provided with warm and humid detector and electrically connects with the temperature humidity display of filming outdoor, the described rear portion, chamber of filming is provided with the air admission hole that can feed the experiment desired gas, the described chamber sidepiece of filming is provided with the steam vent that can discharge unnecessary gas, join by pipeline between the gas cylinder of described air admission hole and experiment desired gas, the adjusting device that feeds the air-flow size for the control air admission hole is housed on the described pipeline.
2. constant temperature and humidity according to claim 1 lifts film applicator, it is characterized in that: described motor outer shaft is provided with the optoelectronic induction signal that can periodically cut photoelectric sensor to adjust the baffle plate of motor speed.
3. constant temperature and humidity according to claim 1 lifts film applicator, it is characterized in that: described anchor clamps are connected with two ropes, and described anchor clamps clamping end face is embedded with for the valve rubber of increasing with the holding workpiece coefficient of friction.
4. lift film applicator according to the described constant temperature and humidity of one of claim 1-3, it is characterized in that: described motor is adjustable speed motor, and described rope is 2, and the spacing hole that passes the top, chamber of filming respectively is wound on the electric machine main shaft and is synchronized with the movement with motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320073229 CN203124192U (en) | 2013-01-29 | 2013-01-29 | Constant temperature and humidity lifting coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320073229 CN203124192U (en) | 2013-01-29 | 2013-01-29 | Constant temperature and humidity lifting coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203124192U true CN203124192U (en) | 2013-08-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320073229 Withdrawn - After Issue CN203124192U (en) | 2013-01-29 | 2013-01-29 | Constant temperature and humidity lifting coating machine |
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| CN (1) | CN203124192U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103100504A (en) * | 2013-01-29 | 2013-05-15 | 石家庄铁道大学 | Constant temperature constant humidity pulling coating machine |
| CN108515629A (en) * | 2018-04-10 | 2018-09-11 | 绍兴文理学院 | A kind of silicon rod cutting equipment of photovoltaic products |
| CN113634435A (en) * | 2021-08-16 | 2021-11-12 | 浙江凯立特医疗器械有限公司 | Film coating structure for production of implantable biosensor |
-
2013
- 2013-01-29 CN CN 201320073229 patent/CN203124192U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103100504A (en) * | 2013-01-29 | 2013-05-15 | 石家庄铁道大学 | Constant temperature constant humidity pulling coating machine |
| CN103100504B (en) * | 2013-01-29 | 2016-09-28 | 石家庄铁道大学 | Constant temperature and humidity pulling coating machine |
| CN108515629A (en) * | 2018-04-10 | 2018-09-11 | 绍兴文理学院 | A kind of silicon rod cutting equipment of photovoltaic products |
| CN113634435A (en) * | 2021-08-16 | 2021-11-12 | 浙江凯立特医疗器械有限公司 | Film coating structure for production of implantable biosensor |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20130814 Effective date of abandoning: 20160928 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |