CN203013688U - 一种移动式密封装置 - Google Patents
一种移动式密封装置 Download PDFInfo
- Publication number
- CN203013688U CN203013688U CN 201220652756 CN201220652756U CN203013688U CN 203013688 U CN203013688 U CN 203013688U CN 201220652756 CN201220652756 CN 201220652756 CN 201220652756 U CN201220652756 U CN 201220652756U CN 203013688 U CN203013688 U CN 203013688U
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- sealing device
- guide rail
- mobile sealing
- slide block
- drive unit
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Application Number | Priority Date | Filing Date | Title |
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CN 201220652756 CN203013688U (zh) | 2012-11-30 | 2012-11-30 | 一种移动式密封装置 |
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CN 201220652756 CN203013688U (zh) | 2012-11-30 | 2012-11-30 | 一种移动式密封装置 |
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CN203013688U true CN203013688U (zh) | 2013-06-19 |
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CN 201220652756 Expired - Lifetime CN203013688U (zh) | 2012-11-30 | 2012-11-30 | 一种移动式密封装置 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020248326A1 (zh) * | 2019-06-13 | 2020-12-17 | 上海提牛机电设备有限公司 | 空气阻隔装置、晶圆上料设备与空气阻隔控制方法 |
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2012
- 2012-11-30 CN CN 201220652756 patent/CN203013688U/zh not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020248326A1 (zh) * | 2019-06-13 | 2020-12-17 | 上海提牛机电设备有限公司 | 空气阻隔装置、晶圆上料设备与空气阻隔控制方法 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP03 | Change of name, title or address |
Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100015 Jiuxianqiao Chaoyang District, East Beijing Road, building M2, floor 1, No. 2 Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
|
CP03 | Change of name, title or address | ||
TR01 | Transfer of patent right |
Effective date of registration: 20170913 Address after: 101312 Beijing city Shunyi District Zhu Yuan three Street No. 6 (Tianzhu Free Trade Zone) Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT CO.,LTD. Address before: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: North China Science and technology group Limited by Share Ltd. |
|
TR01 | Transfer of patent right | ||
CX01 | Expiry of patent term |
Granted publication date: 20130619 |
|
CX01 | Expiry of patent term |