CN203002085U

CN203002085U - Filtering device

Info

Publication number: CN203002085U
Application number: CN 201220602640
Authority: CN
Inventors: 王波雷; 张豹; 贾星杰; 高�浩
Original assignee: Beijing Sevenstar Electronics Co Ltd
Current assignee: Beijing Sevenstar Electronics Co Ltd
Priority date: 2012-11-14
Filing date: 2012-11-14
Publication date: 2013-06-19
Anticipated expiration: 2022-11-14

Abstract

The utility model relates to the field of silicon wafer wet-method treatment and particularly relates to a filtering device. The filtering device comprises a liquid inlet connector, a liquid inlet connector connecting piece, a filtering piece, a liquid discharging opening connector connecting piece and a liquid discharging opening connector, wherein one end of the liquid inlet connector is externally connected with a process cavity liquid discharging opening and the other end of the liquid inlet connector is connected with the liquid inlet connector connecting piece; the liquid inlet connector connecting piece is connected with the liquid discharging opening connector connecting piece; one end of the liquid discharging opening connector is connected with the liquid discharging opening connector connecting piece and the other end of the liquid discharging opening connector is externally connected with a switching valve; and the filtering piece is arranged between the liquid inlet connector connecting piece and the liquid discharging opening connector connecting piece. The filtering device disclosed by the utility model can filter fragments through the filtering piece so that damages to a valve body by the fragments are reduced; and when the filtering device is maintained after the fragments are crushed, only the filtering device needs to be maintained, cleaned or replaced and a valve behind the filtering device does not need to be maintained, so that the maintenance time and the maintenance cost are reduced and the service life of the valve is prolonged.

Description

A kind of filter

Technical field

The utility model relates to silicon chip wet-treating field, relates in particular to the filter that silicon chip detritus after fragment occurs in process cavity in wet processing apparatus.

Background technology

In the technical process of the wet processing apparatus of silicon chip, often can run into the problem that silicon chip goes to sticks and staves in process cavity.Because silicon chip is very thin, in case after fragment, can produce many tiny and sharp chips, after occuring, this situation needs immediately arrestment and to the apparatus and process chamber clearing up, because wet processing apparatus is used the number of chemical liquid, therefore when silicon chip goes to sticks and staves, understand some chip and drain by the leakage fluid dram in process cavity under the drive of chemical liquid, chip can enter into the valve inner that is connected with process cavity like this, causes the damage to valve body.May be connected to a plurality of valves after a common process cavity leakage fluid dram, if chip causes damage can make overhaul of the equipments very time-consuming to these valves, and the valve price of using in wet processing apparatus is all more expensive, causes a large amount of economic losses.

The utility model content

The technical problem that (one) will solve

The purpose of this utility model is, a kind of filter is provided, with solve in wet processing apparatus in process cavity, fragment occurs after, the processing problem of silicon chip chip.

(2) technical scheme

in order to solve the problems of the technologies described above, the utility model provides a kind of filter, comprise the inlet joint, the inlet connector for joint, filtration members, leakage fluid dram connector for joint and leakage fluid dram joint, the one external process cavity leakage fluid dram of end of described inlet joint, its other end connects described inlet connector for joint, described inlet connector for joint is connected with described leakage fluid dram connector for joint, one end of described leakage fluid dram joint connects described leakage fluid dram connector for joint, the external transfer valve of its other end, described filtration members is arranged between described inlet connector for joint and leakage fluid dram connector for joint.

Preferably, described inlet joint and leakage fluid dram joint are straight coupling or elbow.

Preferably, the caliber size of described inlet joint is less than or equal to the caliber size of described leakage fluid dram joint.

Preferably, the inwall of described inlet connector for joint and leakage fluid dram connector for joint is smooth surface, and the form of curved surface is taper seat or band radian face or irregular curved surface.

Preferably, the caliber size of described inlet connector for joint and described leakage fluid dram connector for joint junction is greater than the caliber size of itself and described inlet joint junction, and the caliber size of described leakage fluid dram connector for joint and described inlet connector for joint junction is greater than the caliber size of itself and described leakage fluid dram joint junction.

Preferably, described inlet connector for joint with the connected mode of described leakage fluid dram connector for joint for being threaded or welding.

Preferably, described inlet joint is with the connected mode of described leakage fluid dram connector for joint with described inlet connector for joint and described leakage fluid dram joint and is threaded.The described form that is threaded is NPT screw thread or RC screw thread etc.

Preferably, described filtration members has a plurality of tiny holes, and described hole is conical bore or cylindrical hole or irregular curved hole, and its spread pattern is annular array or rectangular array or irregular array; The sectional area sum in described a plurality of holes equals the caliber size of described process cavity leakage fluid dram.

Preferably, the connected mode of described filtration members and described leakage fluid dram connector for joint is welding or bonding.

(3) beneficial effect

Filter of the present utility model is connected between process cavity leakage fluid dram and transfer valve, when in process cavity, fragment occurs after, the silicon chip chip is brought to filter by chemical liquid, by filtration members, chip is filtered out, thereby reduced the infringement of chip to valve body, when doing maintenance after fragment, only need filter is keeped in repair, clears up or changes, and do not need the valve after filter is done maintenance, reduced like this maintenance time and maintenance cost, improved the service life of valve.

Description of drawings

Fig. 1 is the cut-away view of the utility model embodiment filter;

Fig. 2 is the external structure of the utility model embodiment filter;

Fig. 3 is the actual connection layout of the utility model embodiment filter.

In figure, 1: the inlet joint; 2: the inlet connector for joint; 3: the leakage fluid dram connector for joint; 4: the leakage fluid dram joint; 5: filtration members; 6: process cavity; 7: process cavity leakage fluid dram joint; 8: tube connector; 9: transfer valve; 10: filter.

The specific embodiment

Below in conjunction with drawings and Examples, embodiment of the present utility model is described in further detail.Following examples are used for explanation the utility model, but can not be used for limiting scope of the present utility model.

in description of the present utility model, need to prove, term " " center ", " vertically ", " laterally ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end " " interior ", orientation or the position relationship of indications such as " outward " are based on orientation shown in the drawings or position relationship, only the utility model and simplified characterization for convenience of description, rather than device or the element of indication or hint indication must have specific orientation, with specific orientation structure and operation, therefore can not be interpreted as restriction of the present utility model.In addition, term " first ", " second " only are used for describing purpose, and can not be interpreted as indication or hint relative importance.

In description of the present utility model, need to prove, unless clear and definite regulation and restriction are separately arranged, term " installation ", " being connected ", " connection " should be done broad understanding, for example, can be to be fixedly connected with, and can be also to removably connect, or connect integratedly; Can be mechanical connection, can be also to be electrically connected to; Can be directly to be connected, also can indirectly be connected by intermediary, can be the connection of two element internals.For the ordinary skill in the art, can concrete condition understand the concrete meaning of above-mentioned term in the utility model.In addition, in description of the present utility model, except as otherwise noted, the implication of " a plurality of " is two or more.

As shown in Figure 1, the filter of the present embodiment comprises inlet joint 1, inlet connector for joint 2, filtration members 5, leakage fluid dram connector for joint 3 and leakage fluid dram joint 4, the leakage fluid dram of the one external process cavity 6 of end of inlet joint 1, its other end connects inlet connector for joint 2, inlet connector for joint 2 is connected with leakage fluid dram connector for joint 3, one end connected drainage mouth connector for joint 3 of leakage fluid dram joint 4, the external transfer valve 9 of its other end, filtration members 5 is arranged between inlet connector for joint 2 and leakage fluid dram connector for joint 3.

Inlet joint 1 and the leakage fluid dram joint 4 of this filter are straight coupling or elbow, its shape can be other shapes such as cylindrical tube or square tubulose, their caliber size scope control is in 0.125 inch ~ 2 inches scopes, wherein, the caliber size of inlet joint 1 should be less than or equal to the caliber size of leakage fluid dram joint 4, so that liquid can in time discharge.

The inlet connector for joint 2 of this filter and the inwall of leakage fluid dram connector for joint 3 are smooth surface, the form of described curved surface can be taper seat or band radian face or irregular curved surface etc., wherein, the caliber size of inlet connector for joint 2 and leakage fluid dram connector for joint 3 junctions is greater than its caliber size with inlet joint 1 junction, and the caliber size of leakage fluid dram connector for joint 3 and inlet connector for joint 2 junctions is greater than the caliber size of itself and leakage fluid dram joint 4 junctions; The connected mode of inlet connector for joint 2 and leakage fluid dram connector for joint 3 can be for being threaded or welding.

Above-mentioned inlet joint 1 is with the connected mode of leakage fluid dram connector for joint 3 with inlet connector for joint 2 and leakage fluid dram joint 4 and is threaded, and the described pattern that is threaded can be NPT screw thread or RC screw thread.

The filtration members 5 of this filter offers a plurality of tiny holes, and these holes are conical bore or cylindrical hole or irregular curved hole etc., and its spread pattern can be annular array or rectangular array or irregular array; The sectional area sum in described a plurality of holes equals the caliber size of the process cavity leakage fluid dram that is connected with inlet joint 1; Filtration members 5 can be welding or bonding with the connected mode of leakage fluid dram connector for joint.

This filter is in the vertically placement of when work, horizontal positioned or with the slant setting of certain angle.

The filter of the present embodiment is applied to silicon chip wet-treating field, it is arranged between the process cavity and discharging of waste liquid transfer valve of silicon chip wet processing apparatus, when fragment occurs in the silicon chip in process cavity in technical process after, can first filter out by the detritus of this filter with silicon chip, to stop it to the damage of the valve body that is connected with process cavity, reduce the time of apparatus cavity maintenance and cleaning in the time of service life of improving valve.Certainly, also can use filter of the present utility model in similar field or similar equipment filters.

As shown in Figure 1, the internal work process of the filter of the present embodiment is: this filter need be connected between process cavity and discharging of waste liquid transfer valve, be connected with the process cavity leakage fluid dram by inlet joint 1, be connected with transfer valve by leakage fluid dram joint 4, when in process cavity, fragment occurs after, the chip of silicon chip at first the leakage fluid dram by process cavity to be brought to this filter by chemical liquid inner, then be filtered part 5 chip is filtered out, the chemical liquid that filters out after chip flow in follow-up valve body by the leakage fluid dram joint 4 of this filter again.

Process cavity 6, process cavity leakage fluid dram joint 7, tube connector 8, transfer valve 9 have been shown in Fig. 2, and the filter 10 of the present embodiment.Silicon chip carries out wet-treating in process cavity 6 inside, process cavity 6 bottoms have leakage fluid dram for the not discharging of chemical liquid of the same race, the leakage fluid dram place of process cavity 6 is provided with process cavity leakage fluid dram joint 7, process cavity leakage fluid dram joint 7 is connected with the inlet joint 1 of filter 10 by tube connector 8, and the leakage fluid dram joint 4 of filter 10 is connected with transfer valve 9 corresponding joints; In case after the inner generation fragment of process cavity 6, the chip of silicon chip can flow to filter 10 inside from the leakage fluid dram of process cavity 6 along with chemical liquid, filtration members 5 by filter 10 inside filters out chip, just can not be to the valve body injury when being filtered chemical liquid after chip and flowing through transfer valve 9 by the leakage fluid dram 4 of filter 10 again; When doing maintenance after equipment downtime, only need filter 10 is keeped in repair, clears up or changes, and do not need as method in the past, transfer valve 9 to be done maintenance.

Embodiment of the present utility model provides for example with for the purpose of describing, and is not exhaustively or with the utility model to be limited to disclosed form.Many modifications and variations are apparent for the ordinary skill in the art.Selecting and describing embodiment is for better explanation principle of the present utility model and practical application, thereby and makes those of ordinary skill in the art can understand the various embodiment with various modifications that the utility model design is suitable for special-purpose.

Claims

1. filter, it is characterized in that: comprise inlet joint, inlet connector for joint, filtration members, leakage fluid dram connector for joint and leakage fluid dram joint, the one external process cavity leakage fluid dram of end of described inlet joint, its other end connects described inlet connector for joint, described inlet connector for joint is connected with described leakage fluid dram connector for joint, one end of described leakage fluid dram joint connects described leakage fluid dram connector for joint, the external transfer valve of its other end, described filtration members are arranged between described inlet connector for joint and leakage fluid dram connector for joint.

2. filter according to claim 1, it is characterized in that: described inlet joint and leakage fluid dram joint are straight coupling or elbow.

3. filter according to claim 2, it is characterized in that: the caliber size of described inlet joint is less than or equal to the caliber size of described leakage fluid dram joint.

4. filter according to claim 1, it is characterized in that: the inwall of described inlet connector for joint and leakage fluid dram connector for joint is smooth surface, and the form of curved surface is taper seat or band radian face or irregular curved surface.

5. filter according to claim 4, it is characterized in that: the caliber size of described inlet connector for joint and described leakage fluid dram connector for joint junction is greater than the caliber size of itself and described inlet joint junction, and the caliber size of described leakage fluid dram connector for joint and described inlet connector for joint junction is greater than the caliber size of itself and described leakage fluid dram joint junction.

6. filter according to claim 5 is characterized in that: the connected mode of described inlet connector for joint and described leakage fluid dram connector for joint is for being threaded or welding.

7. any one described filter according to claim 1 ~ 6, it is characterized in that: described inlet joint is with the connected mode of described leakage fluid dram connector for joint with described inlet connector for joint and described leakage fluid dram joint and is threaded.

8. filter according to claim 1, it is characterized in that: described filtration members has a plurality of tiny holes, and described hole is conical bore or cylindrical hole or irregular curved hole, and its spread pattern is annular array or rectangular array or irregular array; The sectional area sum in described a plurality of holes equals the caliber size of described process cavity leakage fluid dram.

9. filter according to claim 8 is characterized in that: the connected mode of described filtration members and described leakage fluid dram connector for joint is welding or bonding.