CN202967542U - Substrate conveying system - Google Patents

Substrate conveying system Download PDF

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Publication number
CN202967542U
CN202967542U CN 201220538490 CN201220538490U CN202967542U CN 202967542 U CN202967542 U CN 202967542U CN 201220538490 CN201220538490 CN 201220538490 CN 201220538490 U CN201220538490 U CN 201220538490U CN 202967542 U CN202967542 U CN 202967542U
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CN
China
Prior art keywords
substrate
height
processing section
breeze way
high degree
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Expired - Fee Related
Application number
CN 201220538490
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Chinese (zh)
Inventor
陈麒文
詹前洋
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Manz Taiwan Ltd
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Manz Taiwan Ltd
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Priority to CN 201220538490 priority Critical patent/CN202967542U/en
Application granted granted Critical
Publication of CN202967542U publication Critical patent/CN202967542U/en
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Abstract

The utility model provides a substrate conveying system which comprises a processing section, an input section and an output section, wherein the processing section is positioned at a first height; the input section is provided with a first end and a second end that are opposite to each other; the first end is positioned at a second height; the second height is higher than the first height; the second end is connected in series with one end of the processing section; a substrate is provided by the input section and conveyed into the processing section; the output section is provided with a third end and a fourth end that are opposite to each other; the third end is connected in series with the other end, opposite to one end connected with the input section, of the processing section; the fourth end is positioned at a third height; the third height is higher than the first height; and the substrate is conveyed into the output section by the processing section.

Description

Substrate conveyance system
Technical field
The utility model relates to a kind of substrate conveyance system, espespecially a kind of substrate conveyance system of avoiding treat liquid to leak.
Background technology
In the Modern high-tech industry such as PCB (printed circuit board (PCB)), FPD (flat-panel monitor), PV (light energy battery) etc., its product structure can comprise a slice-shaped and have elastomeric flexible base plate.In the PCB industry, this flexible base plate can rely on chemical pre-processing flow process, development/etching/stripping flow process, horizontal de-smear and copper facing flow process, horizontal brown flow process and the level silver-colored flow process of chemistry and form.
The processing mode of above-mentioned flexible base plate treatment scheme comprises immersion type and fountain, wherein, immersion type is provided with chemical treatment liquid in a treatment trough, rely on roller devices that flexible base plate is sent in treatment trough, by chemical treatment liquid, flexible base plate is carried out chemical treatment, then send treatment trough by the flexible base plate that roller devices is completed chemical reaction.And fountain is sent flexible base plate into a process chamber, utilizes spray pattern that chemical treatment liquid is sprayed on flexible base plate and carries out chemical treatment, then send process chamber by the flexible base plate that roller devices is completed chemical reaction.So no matter take which kind of mode, when flexible base plate is sent treatment trough or process chamber, all can carry chemical treatment liquid secretly, not only cause the waste of chemical treatment liquid, also can pollute roller devices, delivery system and environment simultaneously.
in addition, in the described a kind of existing etching machines of TaiWan, China new patent M363073, its entrance and outlet at a soaking compartment is respectively equipped with a pan feeding floating roller and a discharging floating roller, one effect of this pan feeding floating roller and discharging floating roller is used for sealing entrance and the outlet of soaking compartment, avoid soak solution to leak, when substrate wants to enter this soaking compartment, the fixture of seizing substrate on both sides by the arms can upwards push up the pan feeding floating roller, smoothly substrate is sent into soaking compartment, when substrate is processed when completing, fixture can be sent soaking compartment with substrate, this moment, fixture can upwards push up the discharging floating roller, smoothly substrate is sent soaking compartment, in pan feeding floating roller and discharging floating roller by the process on upper top in, the capital causes some soak solutions to be leaked by soaking compartment.
Summary of the invention
Because the disappearance of prior art the utility model proposes a kind of substrate conveyance system, can avoid treat liquid to leak.
For achieving the above object, the technical solution adopted in the utility model is:
A kind of substrate conveyance system is characterized in that, comprises:
One processing section is positioned at one first height;
One input section, it has a relative first end and one second end, and this first end is positioned at one second height, this second height is higher than this first height, this second end is connected with a wherein end of this processing section, and this input section provides a substrate, this substrate to be transmitted and enters this processing section; And
One deferent segment, it has one the 3rd relative end and one the 4th end, and with respect to an end series connection that is connected this input section, the 4th end is positioned at a third high degree to the 3rd end with this processing section, this third high degree is higher than this first height, and this substrate enters this deferent segment by this processing section transmission.
In described substrate conveyance system, this input section comprises:
One first horizontal segment, this first horizontal segment are positioned at this second height, and this first horizontal segment extends a length in this second height level; And
One first breeze way, it has relative two ends, and this first a breeze way wherein end is connected with this first horizontal segment, and the other end of this first breeze way is connected with this processing section.
In described substrate conveyance system, this deferent segment comprises:
One second breeze way, it has relative two ends, and this second a breeze way wherein end connects with respect to an end that is connected this input section with this processing section, and the height of the other end of this second breeze way is positioned at this third high degree; And
One second horizontal segment is positioned at this third high degree, and this second horizontal segment is in this third high degree horizontal-extending one length, and this second a horizontal segment wherein end is connected with this other end that this second breeze way is positioned at this third high degree.
In described substrate conveyance system, this processing section is positioned at a treatment trough, is provided with treat liquid in this treatment trough, this treat liquid has an electrolyte level, this substrate is transmitted when being positioned at this processing section, and this substrate is arranged in this treatment trough, and this substrate is submerged in this treat liquid.
In described substrate conveyance system, this deferent segment is provided with at least one washing equipment, and this washing equipment sprays cleaning liquid towards this substrate that is positioned at this deferent segment.
In described substrate conveyance system, this cleaning liquid is water.
Compared with prior art, adopt the advantage that the utlity model has of technique scheme to be: to utilize the treatment trough of trapezoidal sagging formula to coordinate slow fall the input section of formula and the deferent segment of climbing type, and the entrained treat liquid of collocation washing equipment cleaning base plate, the treat liquid that substrate is carried outside is back in treatment trough, really the purpose of avoiding treat liquid to leak be can reach, treat liquid performance optimization process benefit and reagentia made.
Description of drawings
Fig. 1 is the side-looking structural representation of an embodiment of the present utility model;
Fig. 2 is the arrange in pairs or groups plan structure schematic diagram of fixture of Fig. 1 embodiment;
Fig. 3 is the A-A cross-sectional view of Fig. 2;
Fig. 4 to Fig. 6 is the arrange in pairs or groups action schematic diagram of fixture of Fig. 1 embodiment;
Fig. 7 is the structural representation that the utility model arranges washing equipment;
Fig. 8 is the forward sight structural representation of another embodiment of the utility model.
Description of reference numerals: 100,200-substrate conveyance system; 1A, 1B-track; 10,220-processing section; 20,210-input section; 21-the first horizontal segment; 22-the first breeze way; 30,230-deferent segment; 31-the second breeze way; 32-the second horizontal segment; The 40-treatment trough; The 41-treat liquid; The 50-substrate; 60,240-fixture; 61,260-roller; The 70-washing equipment; The 71-cleaning liquid; 250-chain band; The H-electrolyte level; H1-the first height; H2-the second height; H3-third high degree.
The specific embodiment
Be to reach technological means and the effect that purpose is used hereinafter with reference to the graphic the utility model of describing of enclosing, and following graphic cited embodiment is only aid illustration, your understand in order to juror, but that the technological means of this case is not limited to is cited graphic.
See also Fig. 1 to shown in Figure 3, this substrate conveyance system 100 comprises a processing section 10, input section 20 and one deferent segment 30.In the present embodiment, this substrate conveyance system 100 comprises two symmetrically arranged track 1A, 1B, and each this track 1A, 1B present a trapezoidal up concave type structure.
This processing section 10 is positioned at one first height H 1, is provided with a treatment trough 40 in this processing section 10, is provided with treat liquid 41 in treatment trough 40, and this treat liquid 41 has an electrolyte level H, and this first height H 1 is preferably greater than this electrolyte level H.This treat liquid 41 is that a substrate 50 is carried out chemical treatment, for example development/etching/stripping processing, horizontal de-smear and copper plating treatment, the processing of horizontal brown and level chemistry silver are processed, different according to processing processing procedure, the kind of this treat liquid 41 and the chemical nature that has are also different.This substrate 50 can be a soft electronic material, soft electronic substrate, extensible material or has elasticity or the material of flexibility or be applicable to the materials such as Copper Foil of PCB industry.In the present embodiment, by fixture 60 clampings and support this substrate 50, the kenel of fixture 60 does not have certain limitation, for example can adopt magnetic fixture, utilizes magnetic attraction and is held on relative two sides of substrate 50; The application number that also can adopt the applicant to file an application on July 27th, 2012 is that 101214591,101214593 the described rolled-up stock of TaiWan, China new patent or tensioner come clamping substrate 50, and the content of above-mentioned application case is and in this as a reference.These fixture 60 2 sides are extended the position that corresponds to track 1A, 1B and are provided with plural roller 61, this fixture 60 can be driven by the chain (not shown), roller 61 rolls in track 1A, 1B, but auxiliary clamp 60 moves together with substrate 50, so that substrate 50 is transferred to this processing section 10 by this input section 20, then by processing section 10, substrate 50 is transferred to this deferent segment 30.
This input section 20 comprises that it is higher than the first height H 1 that one first horizontal segment 21 and one first breeze way 22, the first horizontal segments 21 are positioned at one second height H 2, the second height H 2, and the first horizontal segment 21 has a length in these the second height H 2 horizontal-extendings.This first breeze way 22 has relative two ends, the first breeze way 22 a wherein end (also namely illustrating the left end of the first breeze way 22) is connected with the first horizontal segment 21, and the first other end of breeze way 22 (also namely illustrating the right-hand member of the first breeze way 22) is connected with processing section 10.
This deferent segment 30 comprises one second breeze way 31 and one second horizontal segment 32.The second breeze way 31 has relative two ends, the second breeze way 31 a wherein end (also namely illustrating the left end of the second breeze way 31) connects with respect to an end that is connected this input section 20 with this processing section 10, and the height of the second other end of breeze way 31 (also namely illustrating the right-hand member of the second breeze way 31) is positioned at a third high degree H3.This second horizontal segment 32 is positioned at this third high degree H3, and this second horizontal segment 32 has a length in this third high degree H3 horizontal-extending, and this second horizontal segment 32 a wherein end (also namely illustrating the left end of the second horizontal segment 32) is connected with this end that this second breeze way 31 is positioned at this third high degree H3.This third high degree H3 can be identical or different with this second height H 2, but the second height H 2 and third high degree H3 are higher than the first height H 1.
See also Fig. 4 to shown in Figure 6, the continuous action of this case conveying substrate is described, simplify partial structure in Fig. 4 to Fig. 6, the process of advancing with clear and definite display base plate.After substrate 50 passes through the first breeze way 22 by the first horizontal segment 21, enter again this processing section 10 (as shown in Figure 4), when substrate 50 is transmitted when being positioned at this processing section 10, substrate 50 is positioned at treatment trough 40, and substrate 50 is to be submerged in treat liquid 41 (as shown in Figure 5), at this moment, substrate 50 stays in treatment trough 40, can with treatment trough 40 in treat liquid 41 produce chemical reactions, after question response is completed, substrate 50 is sent this treatment trough 40 (as shown in Figure 6), substrate 50 can rise to the second horizontal segment 32 by the second breeze way 31 again.When substrate 50 left treatment trough 40, the treat liquid 41 that is attached to substrate 50 can be dripped in the second breeze way 31, and is back in treatment trough 40.In the present embodiment, owing to utilizing extra fixture, make substrate when changing direct of travel, still can keep smooth and distortion hardly, then coordinate the delivery system of this case, so all can keep treat liquid not leak before and after soaking.
See also shown in Figure 7ly, this embodiment is shown in this deferent segment 30 and is provided with a washing equipment 70, and washing equipment 70 sprays cleaning liquids 71 towards this deferent segment 30, and this cleaning liquid 71 can adopt water.Rely on 70 pairs of substrates of washing equipment 50 to spray cleaning liquid 71, rely on the cleaning liquid 71 entrained treat liquid of cleaning base plate 50, avoid treat liquid to residue in substrate 50.According to the difference of substrate 50 sizes and treat liquid 41 kinds, can control the amount of the cleaning liquid 71 of actual required sprinkling.The cleaning liquid 71 that sprays can flow in treatment trough 40 in the lump together with the treat liquid that is washed away by substrate 50, therefore can not cause the waste of treat liquid 41.Amount with respect to treat liquid 41 in treatment trough 40, the amount of the cleaning liquid 71 of washing equipment 70 each cleaning base plates 50 is very little, in other words, in the scope of a tolerance, even flowing in treatment trough 40, mixes with treat liquid 41 cleaning liquid 71, although can cause treat liquid 41 to be diluted, can't affect the chemical reaction ability of 41 pairs of substrates 50 of treat liquid.And the user also can look the purity of actual needs monitoring treat liquid 41, lower than allowed value, can add treat liquid 41 when treat liquid 41 purity again, and the purity of treat liquid 41 can be maintained in tolerance band all the time.
See also embodiment illustrated in fig. 8ly, this substrate conveyance system 200 comprises sequentially input section 210, one processing section 220 and a deferent segment 230 of series connection.Be provided with plural fixture 240 in substrate 50 2 sides, this fixture 240 is driven by a chain band 250 and plural roller 260, makes fixture 240 drive substrate 50 and moves to this deferent segment 230 by input section 210, processing section 220.Be provided with a treatment trough 40 in processing section 220, be provided with treat liquid 41 in treatment trough 40, be provided with a washing equipment 70 in deferent segment 230.The principal character of the present embodiment still is, the height of this processing section 220 is lower than the height of this input section 210 and this output 230, so the entrained treat liquid 41 of substrate 50 can be back to treat liquid 41, and unlikely generation is leaked.
The explanation of above-mentioned different embodiment framework, this case has the multiple different specific embodiment, the main of this case is characterised in that the treatment trough that utilizes trapezoidal sagging formula coordinates slow fall the input section of formula and the deferent segment of climbing type, and the entrained treat liquid of collocation washing equipment cleaning base plate, the treat liquid that substrate is carried outside is back in treatment trough, really the purpose of avoiding treat liquid to leak be can reach, treat liquid performance optimization process benefit and reagentia made.
For avoiding unnecessarily obscuring technology contents of the present utility model, some members or device are omitted in above explanation.Example, chain, refining band or roller must rely on the connection of the transmission devices such as motor, gear and be moved.Described these transmission devices all can be completed with reference to this case technology contents easily for being familiar with the art person.
Above explanation is just illustrative for the utility model; and nonrestrictive, those of ordinary skills understand, in the situation that do not break away from the spirit and scope that claim limits; can make many modifications, variation or equivalence, but within all falling into protection domain of the present utility model.

Claims (6)

1. a substrate conveyance system, is characterized in that, comprises:
One processing section is positioned at one first height;
One input section, it has a relative first end and one second end, and this first end is positioned at one second height, this second height is higher than this first height, this second end is connected with a wherein end of this processing section, and this input section provides a substrate, this substrate to be transmitted and enters this processing section; And
One deferent segment, it has one the 3rd relative end and one the 4th end, and with respect to an end series connection that is connected this input section, the 4th end is positioned at a third high degree to the 3rd end with this processing section, this third high degree is higher than this first height, and this substrate enters this deferent segment by this processing section transmission.
2. substrate conveyance system according to claim 1, is characterized in that, this input section comprises:
One first horizontal segment, this first horizontal segment are positioned at this second height, and this first horizontal segment extends a length in this second height level; And
One first breeze way, it has relative two ends, and this first a breeze way wherein end is connected with this first horizontal segment, and the other end of this first breeze way is connected with this processing section.
3. substrate conveyance system according to claim 1, is characterized in that, this deferent segment comprises:
One second breeze way, it has relative two ends, and this second a breeze way wherein end connects with respect to an end that is connected this input section with this processing section, and the height of the other end of this second breeze way is positioned at this third high degree; And
One second horizontal segment is positioned at this third high degree, and this second horizontal segment is in this third high degree horizontal-extending one length, and this second a horizontal segment wherein end is connected with this other end that this second breeze way is positioned at this third high degree.
4. substrate conveyance system according to claim 1, it is characterized in that, this processing section is positioned at a treatment trough, be provided with treat liquid in this treatment trough, this treat liquid has an electrolyte level, this substrate is transmitted when being positioned at this processing section, and this substrate is arranged in this treatment trough, and this substrate is submerged in this treat liquid.
5. substrate conveyance system according to claim 1, is characterized in that, this deferent segment is provided with at least one washing equipment, and this washing equipment sprays cleaning liquid towards this substrate that is positioned at this deferent segment.
6. substrate conveyance system according to claim 5, is characterized in that, this cleaning liquid is water.
CN 201220538490 2012-10-19 2012-10-19 Substrate conveying system Expired - Fee Related CN202967542U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201220538490 CN202967542U (en) 2012-10-19 2012-10-19 Substrate conveying system

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Application Number Priority Date Filing Date Title
CN 201220538490 CN202967542U (en) 2012-10-19 2012-10-19 Substrate conveying system

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105636363A (en) * 2016-03-21 2016-06-01 奥士康科技股份有限公司 Rapid forming method for brown oxidization film for PCB with multi-layer inner cores

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105636363A (en) * 2016-03-21 2016-06-01 奥士康科技股份有限公司 Rapid forming method for brown oxidization film for PCB with multi-layer inner cores
CN105636363B (en) * 2016-03-21 2018-10-09 奥士康科技股份有限公司 Multi-layer PCB core material brown film crashing

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CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20130605

Termination date: 20181019