CN202945377U - Heat insulation and heat preservation system for sapphire single crystal furnace - Google Patents

Heat insulation and heat preservation system for sapphire single crystal furnace Download PDF

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Publication number
CN202945377U
CN202945377U CN 201220494050 CN201220494050U CN202945377U CN 202945377 U CN202945377 U CN 202945377U CN 201220494050 CN201220494050 CN 201220494050 CN 201220494050 U CN201220494050 U CN 201220494050U CN 202945377 U CN202945377 U CN 202945377U
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China
Prior art keywords
thermofin
heat insulation
tungsten
heat
molybdenum
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Expired - Lifetime
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CN 201220494050
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Chinese (zh)
Inventor
李辉
姜宏伟
毛瑞川
张洪涛
闫杰
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Nanjing Jingsheng Equipment Co ltd
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NANJING JINGSHENG ENERGY EQUIPMENT CO Ltd
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Abstract

The utility model relates to a heat insulation and heat preservation system for a sapphire single crystal furnace. The heat insulation and heat preservation system comprises middle heat insulation layers and a lower heat insulation layers, wherein each inner layer of the middle heat insulation layers serves as a central heat insulation tungsten screen; the central heat insulation tungsten screens and the middle heat insulation layers are assembled on support steel plates arranged on the inner wall of a cavity body by virtue of positioning pins; the central heat insulation tungsten screens are separated from each of the middle heat insulation layers at intervals by virtue of spaced tungsten filament springs of the middle heat insulation layers; an upper heat insulation layer is arranged on the tops of the central heat insulation tungsten screens and the middle heat insulation layers; the lower heat insulation layer is assembled on a lower copper disc of a lower flange; a tower type heat insulation layer is arranged in the center of the upper heat insulation layer and is connected with an upper flange by virtue of a suspension bolt; corresponding positioning holes are formed among the lower heat insulation layer, the upper heat insulation layer and the tower type heat insulation layer; molybdenum spacer rings are arranged among the positioning holes and respectively penetrate through the upper heat insulation layer, each positioning hole of the tower type heat insulation layer and interlayer molybdenum spacer rings and are fixed by molybdenum nuts; and tungsten columns penetrate through the positioning holes and the interlayer molybdenum spacer rings in the lower heat insulation layers, are connected in series and fixed.

Description

Sapphire single-crystal furnace heat-insulation and heat-preservation system
Technical field
The utility model relates to a kind of High Temperature Furnaces Heating Apparatus inner heat insulation system, especially a kind of heat-insulation and heat-preservation system that can be satisfied with the required good thermal insulation property of Sapphire Crystal Growth for sapphire single-crystal furnace.
Background technology
Sapphire single-crystal furnace is crystal growth equipment important in the LED industry.Thermofin is the heat insulation and preservation device in sapphire single-crystal furnace, in order to ensure the temperature homogeneity of thermal field in stove, improves heat utilization rate.Because sapphire monocrystal must slowly be grown under high temperature (approximately 2050 ° of C) condition and formed, the homogeneity of the thermal field under hot conditions in stove and heat-insulating property directly determine the quality of crystal growth, therefore in sapphire single-crystal furnace the design utilization to have the heat-insulation and heat-preservation system of better resistance toheat and heat-insulating property most important.
The heat-insulation and heat-preservation system that the tradition sapphire single-crystal furnace is commonly used adopts tungsten and molybdenum material, usually includes only middle part thermofin and bottom thermofin.A thick tungsten cylinder (wall thickness is about 10mm) is housed outside well heater; the tungsten cylinder is outward the middle part thermofin; thin-walled molybdenum matter cylinder by a multi-layer nested is assembled; and the bottom thermofin is the moulding of multilayer thin-walled molybdenum plate closed assembly; the top thermofin is not set and for the protection of the thermofin of seeding device in stove; thermal insulation system is not sealed, and will affect homogeneity and the heat-insulating property of the thermal field in stove.Simultaneously, in the tradition sapphire single-crystal furnace, bottom thermofin innermost layer heat shield material is metal molybdenum, under hot conditions, highly volatile destroys, cause thermofin not high work-ing life, and have a strong impact on hot heat-insulating property and uniform and stable property, and not volatile under hot conditions of tungsten, stability is better.
At present; in sapphire single-crystal furnace except being provided with the heat insulation tungsten screen of middle thermofin, center and lower thermofin; also be provided with the tower thermofin of protection seeding lever apparatus; the upper thermofin on protection sapphire single-crystal furnace top; and adopt the heat insulation tungsten screen in center to replace heavy wall tungsten cylinder, form the closed loop thermal insulation system, and change the thin-walled molybdenum sheet of thermofin innermost layer into the thin-wall tungsten sheet; with the reliability of raising thermofin, and the design that postpones work-ing life is not seen in report.
The utility model content
The purpose of this utility model is: the heat-insulation and heat-preservation system for the long brilliant stove of existing sapphire adopts non-closed-loop structure form, and the thermal field heat-insulating property is bad, and thermofin work-ing life is with the problem such as low.A kind of novel heat-insulation and heat-preservation system that is used for reliably sapphire single-crystal furnace is provided.
The purpose of this utility model is achieved in that a kind of heat-insulation and heat-preservation system for sapphire single-crystal furnace, comprises middle thermofin and lower thermofin, it is characterized in that:
A) heat insulation tungsten screen centered by the thermofin internal layer in, center heat insulation tungsten screen and middle thermofin are assemblied on the supporting steel plate that cavity inner wall arranges by steady brace, the heat insulation tungsten in center shield and middle each layer of thermofin between all evenly separate by middle thermofin interval tungsten filament spring;
B) top of the heat insulation tungsten screen in center and middle thermofin is provided with the upper thermofin of coupling, and lower thermofin is assemblied on the lower copper dish of lower flange, with the heat insulation tungsten screen in center and middle thermofin coupling;
C) upward the thermofin center is provided with concentric tower thermofin, and described tower thermofin is connected with upper flange by hanging bolt and arranges to form with upper thermofin level and coordinates;
D) lower thermofin, upper thermofin, each interlayer of tower thermofin are provided with corresponding pilot hole, be provided with contour molybdenum spacer ring between pilot hole corresponding to interlayer, after in upper thermofin, tower thermofin, the molybdenum bolt passes each pilot hole and interlayer molybdenum spacer ring, fix by the molybdenum nut, and pass pilot hole and interlayer molybdenum spacer ring by the tungsten post in lower thermofin, and its series connection is fixing.
In the utility model: one deck cylinder that the heat insulation tungsten screen in center is spliced by monoblock rolled metal tungsten coiled sheet system or polylith rolled metal tungsten plate.
In the utility model: middle thermofin is 9 ~ 11 layers of nested component location guide core structure of split, and each layer core structure all adopts monoblock rolled metal molybdenum plate to roll or polylith rolled metal molybdenum plate is spliced.
In the utility model: upper thermofin, lower thermofin, tower thermofin all adopt the stacked structure of multilayer parallel, and its interior layer of plate all adopts rolled metal tungsten plate, and all the other each layers all adopt the rolled metal molybdenum plate.
In the utility model: the tungsten post of fixing lower thermofin is arranged on lower copper dish, and the tungsten post passes pilot hole and the interlayer molybdenum spacer ring and its series connection is fixing of lower each layer of thermofin.
The utility model has the advantage of: because the heat insulation tungsten screen in employing center in the heat-insulation and heat-preservation system replaces heavy wall tungsten cylinder, provide cost savings its implement convenient; Because the heat insulation tungsten screen in center, middle thermofin, lower thermofin, tower thermofin and upper thermofin form the closed loop thermal insulation system in stove by assembly relation, heat-insulating property and temperature homogeneity in sapphire single-crystal furnace have been improved; Due to the thermofin innermost layer is designed to the thin-wall tungsten sheet, the reliability of thermofin is high, long service life.Due to each thermofin split design and installation, be conducive to follow-up maintenance and change and maintain.
Description of drawings
Fig. 1 is a kind of example structure assembling schematic diagram of the heat-insulation and heat-preservation system that relates to of the utility model;
Fig. 2 is the A section's enlarged view (upper thermofin is local) in Fig. 1;
Fig. 3 is the B section's enlarged view (tower thermofin is local) in Fig. 1;
Fig. 4 is the C section's enlarged view (lower thermofin is local) in Fig. 1;
Fig. 5 is the D section's enlarged view (middle thermofin is local) in Fig. 1.
In figure: 1, cavity, 2, upper flange, 3, upper copper dish, 4, lower flange, 5, lower copper dish, 6, the heat insulation tungsten screen in center, 7, middle thermofin, 8, upper thermofin, 9, tower thermofin, 10, lower thermofin, 11, steady brace, 12, middle thermofin interval tungsten filament spring, 13, molybdenum spacer ring, 14, molybdenum bolt, 15, the molybdenum nut, 16, the tungsten post.
Embodiment
Accompanying drawing discloses the concrete structure of a kind of embodiment that the utility model relates to without limitation, below in conjunction with accompanying drawing, this embodiment of the present utility model is done to describe further.
As seen from Figure 1, the utility model comprises middle thermofin 7 and lower thermofin 10, heat insulation tungsten screen 6 centered by middle thermofin 7 internal layers, center heat insulation tungsten screen 6 and middle thermofin 7 are assemblied on the supporting steel plate that cavity 1 inwall arranges by steady brace 11, all evenly separate by middle thermofin interval tungsten filament spring 12 between the heat insulation tungsten screen 6 in center and middle thermofin 7 each layers.The top of the heat insulation tungsten screen 6 in center and middle thermofin 7 is provided with the upper thermofin 8 of coupling, and lower thermofin 10 is assemblied on the lower copper dish 5 of lower flange 4, with the heat insulation tungsten screen 6 in center and middle thermofin 7 couplings.Upper thermofin 8 centers are provided with concentric tower thermofin 9, and described tower thermofin 9 is connected with upper flange 2 by hanging bolt and arranges to form with upper thermofin 8 levels and coordinates.Lower thermofin 10, upper thermofin 8, tower thermofin 9 each interlayers are provided with corresponding pilot hole, be provided with contour molybdenum spacer ring 13 between pilot hole corresponding to interlayer, after in upper thermofin 8, tower thermofin 9, molybdenum bolt 14 passes each pilot hole and interlayer molybdenum spacer ring 13, fixing by molybdenum nut 15, and pass pilot hole and interlayer molybdenum spacer ring 13 by tungsten post 16 in lower thermofin 10, and its series connection is fixing.
During concrete enforcement: the heat insulation tungsten screen 6 in center can form one deck cylinder by monoblock rolled metal tungsten coiled sheet system, also can be spliced to form one deck cylinder by polylith rolled metal tungsten plate.Middle thermofin 7 is 9 ~ 11 layers of nested component location guide core structure of split, and each layer core structure all can adopt monoblock rolled metal molybdenum plate to roll, and also can adopt polylith rolled metal molybdenum plate to be spliced.Upper thermofin 8, lower thermofin 10, tower thermofin 9 all adopt the stacked structure of multilayer parallel, and its interior layer of plate all adopts rolled metal tungsten plate, and all the other each layers all adopt the rolled metal molybdenum plate.The tungsten post 16 of fixing lower thermofin 10 is arranged on lower copper dish 5, and tungsten post 16 passes pilot hole and interlayer molybdenum spacer ring 13, and its series connection is fixing.

Claims (5)

1. a heat-insulation and heat-preservation system that is used for sapphire single-crystal furnace, comprise middle thermofin and lower thermofin, it is characterized in that:
A) heat insulation tungsten screen centered by the thermofin internal layer in, center heat insulation tungsten screen and middle thermofin are assemblied on the supporting steel plate that cavity inner wall arranges by steady brace, the heat insulation tungsten in center shield and middle each layer of thermofin between all evenly separate by middle thermofin interval tungsten filament spring;
B) top of the heat insulation tungsten screen in center and middle thermofin is provided with the upper thermofin of coupling, and lower thermofin is assemblied on the lower copper dish of lower flange, with the heat insulation tungsten screen in center and middle thermofin coupling;
C) upward the thermofin center is provided with concentric tower thermofin, and described tower thermofin is connected with upper flange by hanging bolt and arranges to form with upper thermofin level and coordinates;
D) lower thermofin, upper thermofin, each interlayer of tower thermofin are provided with corresponding pilot hole, be provided with contour molybdenum spacer ring between pilot hole corresponding to interlayer, after in upper thermofin, tower thermofin, the molybdenum bolt passes each pilot hole and interlayer molybdenum spacer ring, fix by the molybdenum nut, and pass pilot hole and interlayer molybdenum spacer ring by the tungsten post in lower thermofin, and its series connection is fixing.
2. sapphire single-crystal furnace heat-insulation and heat-preservation according to claim 1 system, is characterized in that: one deck cylinder that the heat insulation tungsten screen in center is spliced by monoblock rolled metal tungsten coiled sheet system or polylith rolled metal tungsten plate.
3. sapphire single-crystal furnace heat-insulation and heat-preservation according to claim 1 system, it is characterized in that: middle thermofin is 9 ~ 11 layers of nested component location guide core structure of split, and each layer core structure all adopts monoblock rolled metal molybdenum plate to roll or polylith rolled metal molybdenum plate is spliced.
4. sapphire single-crystal furnace heat-insulation and heat-preservation according to claim 1 system is characterized in that:
Upper thermofin, lower thermofin, tower thermofin all adopt the stacked structure of multilayer parallel, and its interior layer of plate all adopts rolled metal tungsten plate, and all the other each layers all adopt the rolled metal molybdenum plate.
5. one of according to claim 1 ~ 4 described sapphire single-crystal furnace heat-insulation and heat-preservation systems, it is characterized in that: the tungsten post of fixing lower thermofin is arranged on lower copper dish, and the tungsten post passes pilot hole and the interlayer molybdenum spacer ring and its series connection is fixing of lower each layer of thermofin.
CN 201220494050 2012-09-26 2012-09-26 Heat insulation and heat preservation system for sapphire single crystal furnace Expired - Lifetime CN202945377U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201220494050 CN202945377U (en) 2012-09-26 2012-09-26 Heat insulation and heat preservation system for sapphire single crystal furnace

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Application Number Priority Date Filing Date Title
CN 201220494050 CN202945377U (en) 2012-09-26 2012-09-26 Heat insulation and heat preservation system for sapphire single crystal furnace

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CN202945377U true CN202945377U (en) 2013-05-22

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105862127A (en) * 2016-05-26 2016-08-17 石河子市鑫磊光电科技有限公司 Heat preservation side screen for growth of 230kg-350kg-grade sapphire

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105862127A (en) * 2016-05-26 2016-08-17 石河子市鑫磊光电科技有限公司 Heat preservation side screen for growth of 230kg-350kg-grade sapphire

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CP03 Change of name, title or address

Address after: 210000 west side of building B4, Hongfeng Science Park, Nanjing Economic and Technological Development Zone, Nanjing City, Jiangsu Province

Patentee after: Nanjing Jingsheng Equipment Co.,Ltd.

Address before: 210000 No. 30, HENGFA Road, Nanjing Economic and Technological Development Zone, Nanjing, Jiangsu Province

Patentee before: NANJING CRYSTAL GROWTH & ENERGY EQUIPMENT Co.,Ltd.

CX01 Expiry of patent term
CX01 Expiry of patent term

Granted publication date: 20130522