CN202921105U - Gas filter device - Google Patents

Gas filter device Download PDF

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Publication number
CN202921105U
CN202921105U CN2012203975847U CN201220397584U CN202921105U CN 202921105 U CN202921105 U CN 202921105U CN 2012203975847 U CN2012203975847 U CN 2012203975847U CN 201220397584 U CN201220397584 U CN 201220397584U CN 202921105 U CN202921105 U CN 202921105U
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China
Prior art keywords
gas
filtering device
ceramic element
hole
heat exchange
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Expired - Lifetime
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CN2012203975847U
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Chinese (zh)
Inventor
万烨
严大洲
毋克力
肖荣晖
汤传斌
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China ENFI Engineering Corp
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China ENFI Engineering Corp
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  • Filtering Of Dispersed Particles In Gases (AREA)

Abstract

The utility model discloses a gas filter device, comprising an upper end socket, a straight cylinder section and a lower end socket which are sequentially connected from top to bottom, wherein the gas filter device also comprises a heat exchange jacket; the heat exchange jacket is arranged outside the straight cylinder section; a heat exchange medium inlet is arranged at the lower part of the heat exchange jacket; and a heat exchange medium outlet is arranged at the upper part of the heat exchange jacket. According to the gas filter device disclosed by the utility model, a ceramic filter core is adopted as a filter device, so that the filter device has excellent characteristics of high thermal resistance and corrosion resistance; moreover, the material is stable and the quality of a polysilicon product is not affected. Since the heat exchange jacket is arranged outside the gas filter device, the filter temperature can be ensured, condensation of gas can be effectively prevented; and damage to a built-in fastener caused by over-high partial temperature can be effectively prevented.

Description

A kind of gas-filtering device
Technical field
The utility model relates to production of polysilicon technology field, and more specifically, the utility model relates to a kind of gas-filtering device.
Background technology
China's present stage polysilicon project technology all belongs to the Siemens process technology more than 85%, in this technical process, have numerous systems need to carry out gas filtration.Specifically have: producing trichloro hydrosilicon by hydrogenation of silicon tetrachloride system, trichlorosilane synthesis system, reduction tail gas dry process recovery system etc.
The general filter that adopts is cloth envelop collector at present, and in process of production, finds that there is following several shortcoming in cloth envelop collector:
1, the cloth envelop collector resistance to elevated temperatures is poor.Especially in trichlorosilane synthesis system and producing trichloro hydrosilicon by hydrogenation of silicon tetrachloride system, find that cloth envelop collector is very easy to breakage occur, cause the filter effect degradation, finally cause follow-up system to stop up;
2, cloth envelop collector is damaged easily, rolls up with regard to causing the Dust Capacity in the gas, finally causes product quality to occur declining to a great extent;
3, cloth envelop collector is expensive, and the filter material of at present import is converted on the finished product filter bag, and every square metre of price reaches more than 1000 yuan;
4, the filter material poor corrosion resistance of cloth envelop collector, simultaneously support member easily corrosion in maintenance process cause the maintenance difficulty, and the cost of overhaul is high.
The utility model content
The utility model one of is intended to solve the problems of the technologies described above at least to a certain extent or provides at least a kind of useful commerce to select.
For this reason, a purpose of the present utility model is to propose that a kind of strainability is good, cost is low, overhaul easily gas-filtering device.
Gas-filtering device according to the utility model example, comprise the upper cover that connects successively from top to bottom, vertical tube part and low head, wherein, the top of described filter is provided with for the gas outlet of discharging the gas after filtering and bottom and is provided with for the slag-drip opening of discharging waste residue, the bottom of described vertical tube part is provided with for the air inlet that imports gas to be filtered in described straight tube, and the top of described air inlet is provided with filter house, described filter house comprises the floral disc that is provided with through hole and is located at ceramic element in the described through hole, described gas-filtering device also comprises: heat exchange jacket, described heat exchange jacket is located at the outside of described vertical tube part, and the bottom of described heat exchange jacket is provided with the heat transferring medium import and top is provided with the heat transferring medium outlet.
According to the gas-filtering device of the utility model example, owing to adopt the gas-filtering device that is provided with ceramic element, this filter has high temperature resistant, and corrosion resistant good characteristic, and stable material quality can not impact the polysilicon product quality; Ceramic element can produce the filter core of different accuracy, and the ceramic element moulding be simple according to the requirement of filtering accuracy, and large-scale production is easy, and is cheap; The gas-filtering device outside is provided with heat exchange jacket, can guarantee filtration temperature, effectively prevents the condensation of gas, can prevent effectively that also portion temperature is too high, causes the damage of built-in securing member.
In addition, according to the gas-filtering device of the above-mentioned example of the utility model, can also have following additional technical characterictic:
Described through hole is a plurality of, and described a plurality of through holes are equipped with described ceramic element along the radial and axial even distribution of described floral disc in each described through hole.
The number of described through hole and described ceramic element is configured to flow control with described gas at 0.01~0.2m/s.
Described ceramic element is fixed on the described floral disc by securing member, described securing member comprises retainer ring and gland, described retainer ring be welded on the described floral disc and the endoporus of described retainer ring corresponding with described through hole, described gland snaps onto the top of described ceramic element and is connected that with described retainer ring described ceramic element is fixed in the described through hole.
Described ceramic element is the aluminium oxide filter core.
The filtering accuracy of described aluminium oxide filter core is 800~1500 orders.
Also be provided with air inlet endless tube and deflection plate in the described vertical tube part, described air inlet endless tube is connected with described air inlet, and described deflection plate is between described ceramic element and described air inlet endless tube.
Be interval with equably a plurality of outlets on the described air inlet endless tube, and described deflection plate has a plurality ofly, described a plurality of deflection plates rise and evenly distribute on the circumferencial direction of described vertical tube part along the spiral inner wall of described vertical tube part.
Described vertical tube part is provided with access hole, and described access hole is positioned at the top of described filter house.
Described gas outlet is located at the top of described upper cover and the bottom that described slag-drip opening is located at described low head.
Additional aspect of the present utility model and advantage in the following description part provide, and part will become obviously from the following description, or recognize by practice of the present utility model.
Description of drawings
Above-mentioned and/or additional aspect of the present utility model and advantage are from obviously and easily understanding becoming the description of example in conjunction with following accompanying drawing, wherein:
Fig. 1 is the gas-filtering device structural representation according to the utility model example;
Fig. 2 is the gas-filtering device ceramic element distribution schematic diagram according to the utility model example;
Fig. 3 is the gas-filtering device ceramic element securing member schematic diagram according to the utility model example;
Fig. 4 is the trichlorosilane synthesis system handling process schematic diagram according to the utility model example.
The specific embodiment
The below describes example of the present utility model in detail, and the example of described example is shown in the drawings, and wherein identical or similar label represents identical or similar element or the element with identical or similar functions from start to finish.Be exemplary below by the example that is described with reference to the drawings, be intended to for explaining the utility model, and can not be interpreted as restriction of the present utility model.
In description of the present utility model, it will be appreciated that, term " " center "; " vertically "; " laterally "; " length "; " width "; " thickness ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end " " interior ", " outward ", " clockwise ", orientation or the position relationship of indications such as " counterclockwise " are based on orientation shown in the drawings or position relationship, only be for convenience of description the utility model and simplified characterization, rather than device or the element of indication or hint indication must have specific orientation, with specific orientation structure and operation, therefore can not be interpreted as restriction of the present utility model.
In addition, term " first ", " second " only are used for describing purpose, and can not be interpreted as indication or hint relative importance or the implicit quantity that indicates indicated technical characterictic.Thus, one or more these features can be expressed or impliedly be comprised to the feature that is limited with " first ", " second ".In description of the present utility model, the implication of " a plurality of " is two or more, unless clear and definite concrete restriction is arranged in addition.
In the utility model, unless clear and definite regulation and restriction are arranged in addition, broad understanding should be done in the terms such as term " installation ", " linking to each other ", " connection ", " fixing ", for example, can be to be fixedly connected with, and also can be to removably connect, or connect integratedly; Can be mechanical connection, also can be to be electrically connected; Can be directly to link to each other, also can indirectly link to each other by intermediary, can be the connection of two element internals.For the ordinary skill in the art, can understand as the case may be the concrete meaning of above-mentioned term in the utility model.
In the utility model, unless clear and definite regulation and restriction are arranged in addition, First Characteristic Second Characteristic it " on " or D score can comprise that the first and second features directly contact, can comprise that also the first and second features are not directly contacts but by the other feature contact between them.And, First Characteristic Second Characteristic " on ", " top " and " above " comprise First Characteristic directly over Second Characteristic and oblique upper, or only represent that the First Characteristic level height is higher than Second Characteristic.First Characteristic Second Characteristic " under ", " below " and " below " comprise First Characteristic directly over Second Characteristic and oblique upper, or only represent that the First Characteristic level height is less than Second Characteristic.
The below specifically describes the gas-filtering device according to the utility model example at first by reference to the accompanying drawings.
As shown in Figure 1, the gas-filtering device according to the utility model example comprises: the upper cover 10, vertical tube part 20, low head 30 and the heat exchange jacket 40 that connect successively from top to bottom.
Wherein, the top of described gas-filtering device is provided with for the gas outlet 11 of discharging the gas after filtering and bottom and is provided with for the slag-drip opening 31 of discharging waste residue, the bottom of vertical tube part 20 is provided with for the air inlet 21 that imports gas to be filtered in described straight tube, and the top of air inlet 21 is provided with filter house, filter house comprises the floral disc 22 that is provided with through hole and is located at ceramic element 23 in the through hole, heat exchange jacket 40 is located at the outside of vertical tube part 20, and the bottom of heat exchange jacket 40 is provided with heat transferring medium import 41 and top is provided with heat transferring medium outlet 42.
Thus, according to the gas-filtering device of the utility model example, owing to adopted ceramic element 23, so that gas-filtering device has is high temperature resistant, corrosion resistant good characteristic, and stable material quality can not impact the polysilicon product quality; Ceramic element 23 can produce the filter core of different accuracy, and ceramic element 23 moulding be simple according to the requirement of filtering accuracy, and large-scale production is easy, and is cheap; The gas-filtering device outside is provided with heat exchange jacket 40, can guarantee filtration temperature, effectively prevents the condensation of gas, can prevent effectively that also portion temperature is too high, causes the damage of built-in securing member.
Further contemplate cost and mass production problem, in one example, preferably, ceramic element 23 is the aluminium oxide filter core.Thus, the ceramic element 23 of this material both can satisfy high temperature resistant, corrosion resistant requirement, and easily large-scale production, can further reduce production costs.
In one example, as shown in Figure 2, through hole is a plurality of, and a plurality of through holes are equipped with ceramic element 23 along the radial and axial even distribution of floral disc 22 in each through hole.Thus, by a plurality of through holes are set, can filter the duct separately, arrange that according to the size of heat exchange area and floral disc 22 ceramic element 23 reaches filter effect, avoiding appearance filtration duct to stop up is whole out of use situation, improves the practicality of filter.
Consider the problem of gas volume and filter area, in one example, the number of through hole and ceramic element 23 is configured to flow control with described gas at 0.01~0.2m/s.Thus, gas is filtered more fully.
In one example, as shown in Figure 3, ceramic element 23 is fixed on the floral disc 22 by securing member, described securing member comprises retainer ring 241 and gland 242, retainer ring 241 be welded on the floral disc 22 and the endoporus of retainer ring 241 corresponding with through hole, gland 242 snaps onto the top of ceramic element 23 and is connected that with retainer ring 241 ceramic element 23 is fixed in the through hole.Thus, ceramic element 23 can be fixed on the floral disc 22, and fixed form is reasonable, conveniently dismantles, reduction maintenance difficulty is installed.
In one example, the filtering accuracy of described aluminium oxide filter core is 800~1500 orders.Thus, can filter out as required the larger dust of order number.
In one example, also be provided with air inlet endless tube 25 and deflection plate 26 in the vertical tube part 20, air inlet endless tube 25 is connected with air inlet 21, and deflection plate 26 is between ceramic element 26 and air inlet endless tube 25.Further, in one example, be interval with equably a plurality of outlets 251 on the air inlet endless tube 25, and deflection plate 26 has a plurality ofly, a plurality of deflection plates 26 rise and evenly distribute on the circumferencial direction of vertical tube part 20 along the spiral inner wall of vertical tube part 20.Thus, air inlet endless tube 25 and deflection plate 26 can guarantee effectively that air inlet is even, reach to promote the uniform purpose of filter element filtering, and simultaneously, the dust in the air-flow can part sedimentation under deflection plate 26 effect, reaches the effect that alleviated the filter core load.
Advantageously, in one example, vertical tube part 20 is provided with access hole 27, and access hole 27 is positioned at the top of described filter house.Thus, by access hole 27 is set, can conveniently carry out trouble hunting, not need detaching equipment.
In one example, gas outlet 11 is located at the top of upper cover 10 and the bottom that slag-drip opening 31 is located at low head 30.Thus, can so that the deslagging of filter, save the process of detaching equipment.
The application of gas-filtering device in the trichlorosilane synthesis system according to the above-mentioned example of the utility model is described below.
Described trichlorosilane synthesis system comprises trichlorosilane synthesizer and tail gas treatment device, described tail gas treatment device will carry out vent gas treatment from the synthesis tail gas of described trichlorosilane synthesizer, preferably, described tail gas treatment device can comprise sedimentation device 50, gas-filtering device 60, condenser 70 and the adsorption tower 80 that connects successively
Wherein, gas-filtering device 60 is according to the described gas-filtering device of above-mentioned example, and gas-filtering device 60 flows to condenser 70 after being used for filtering from the synthesis tail gas of sedimentation device 50, synthesis tail gas after condenser 70 is used for filtering is separated into the chlorosilane of liquid and hydrogen and the hydrogen chloride of gaseous state, adsorption tower 80 is used for adsorptive gaseous hydrogen chloride, to obtain hydrogen.
Because have above-mentioned technique effect according to the gas-filtering device of the utility model example, therefore, above-mentioned trichlorosilane synthesis system also has corresponding technique effect, and can filter by this system and to obtain the higher hydrogen of purity.
The below further describes according to the application of gas-filtering device of the present utility model in the processing of technique of trichlorosilane synthetic tail gas.
Particularly, the processing method of described technique of trichlorosilane synthetic tail gas may further comprise the steps:
A) described technique of trichlorosilane synthetic tail gas being carried out sedimentation processes, and the technique of trichlorosilane synthetic tail gas after sedimentation processed utilizes gas-filtering device to filter, to remove solid impurity wherein, wherein, described gas-filtering device is according to the described gas-filtering device of above-mentioned example;
B) technique of trichlorosilane synthetic tail gas after will filtering carries out condensation, with chlorosilane and the hydrogen of gaseous state and the mixture of hydrogen chloride that obtains liquid; And
C) mixture with hydrogen and hydrogen chloride adsorbs by adsorbent, with absorption hydrogen chloride wherein, obtains high-purity hydrogen.
Because have above-mentioned technique effect according to the gas-filtering device of the utility model example, therefore, the processing method of above-mentioned technique of trichlorosilane synthetic tail gas also has corresponding technique effect, and can filter by this processing method and to obtain the higher hydrogen of purity.
In order to guarantee the normal operation of filter, improve filter efficiency, preferably, the intake air temperature that can control gas-filtering device is 250~300 ℃, and admission pressure is 0.05~0.3MPa, and charge flow rate is 500~2000Nm 3/ h.
Specifically describe the flow process of the processing method of technique of trichlorosilane synthetic tail gas in the above-mentioned trichlorosilane synthesis system below in conjunction with embodiment and accompanying drawing.
Embodiment 1
As shown in Figure 4, at first silica flour and hydrogen chloride being passed into trichlorosilane synthesizer, to carry out trichlorosilane synthetic, then synthesis tail gas is carried out sedimentation by sedimentation device 50 and gather dust to remove wherein high chlorosilane and solid impurity, the synthesis tail gas component is chlorosilane, hydrogen and hydrogen chloride.
Gas after sedimentation gathered dust passes into gas-filtering device 60 and filters, and the intake air temperature of control gas-filtering device 60 is 250~300 ℃, and admission pressure is 0.05~0.3MPa, and charge flow rate is 500~2000Nm 3/ h, filtering accuracy are 800~1500 orders.
Gas passes into condenser 70 and carries out condensation after will filtering, and the synthesis tail gas after filtering is separated into the chlorosilane of liquid and hydrogen and the hydrogen chloride of gaseous state, it being passed into the adsorptive gaseous hydrogen chloride of adsorption tower 80, obtains high-purity hydrogen.High-purity hydrogen synthesizes and obtains hydrogen chloride, and hydrogen chloride can be used as raw material and silica flour, and to carry out trichlorosilane synthetic.
In the description of this specification, the description of reference term " embodiment ", " some embodiment ", " example ", " concrete example " or " some examples " etc. means to be contained at least one example of the present utility model or the example in conjunction with specific features, structure, material or the characteristics of this example or example description.In this manual, the schematic statement of above-mentioned term not necessarily referred to identical example or example.And the specific features of description, structure, material or characteristics can be with suitable mode combinations in any one or more examples or example.
Although the above has illustrated and has described example of the present utility model, be understandable that, above-mentioned example is exemplary, can not be interpreted as restriction of the present utility model, those of ordinary skill in the art in scope of the present utility model, can change above-mentioned example in the situation that does not break away from principle of the present utility model and aim, modification, replacement and modification.

Claims (10)

1. a gas-filtering device is characterized in that, comprises the upper cover, vertical tube part and the low head that connect successively from top to bottom, wherein,
The top of described filter is provided with for the gas outlet of discharging the gas after filtering and bottom and is provided with for the slag-drip opening of discharging waste residue,
The bottom of described vertical tube part is provided with for the air inlet that imports gas to be filtered in described straight tube, and the top of described air inlet is provided with filter house, and described filter house comprises the floral disc that is provided with through hole and be located at ceramic element in the described through hole,
Described gas-filtering device also comprises:
Heat exchange jacket, described heat exchange jacket is located at the outside of described vertical tube part, and the bottom of described heat exchange jacket is provided with the heat transferring medium import and top is provided with the heat transferring medium outlet.
2. gas-filtering device according to claim 1 is characterized in that, described through hole is a plurality of, and described a plurality of through holes are equipped with described ceramic element along the radial and axial even distribution of described floral disc in each described through hole.
3. gas-filtering device according to claim 2 is characterized in that, the number of described through hole and described ceramic element is configured to flow control with described gas at 0.01~0.2m/s.
4. gas-filtering device according to claim 2, it is characterized in that, described ceramic element is fixed on the described floral disc by securing member, described securing member comprises retainer ring and gland, described retainer ring be welded on the described floral disc and the endoporus of described retainer ring corresponding with described through hole, described gland snaps onto the top of described ceramic element and is connected that with described retainer ring described ceramic element is fixed in the described through hole.
5. gas-filtering device according to claim 1 is characterized in that, described ceramic element is the aluminium oxide filter core.
6. gas-filtering device according to claim 5 is characterized in that, the filtering accuracy of described aluminium oxide filter core is 800~1500 orders.
7. gas-filtering device according to claim 1 is characterized in that, also is provided with air inlet endless tube and deflection plate in the described vertical tube part, and described air inlet endless tube is connected with described air inlet, and described deflection plate is between described ceramic element and described air inlet endless tube.
8. gas-filtering device according to claim 7, it is characterized in that, be interval with equably a plurality of outlets on the described air inlet endless tube, and described deflection plate has a plurality ofly, described a plurality of deflection plates rise and evenly distribute on the circumferencial direction of described vertical tube part along the spiral inner wall of described vertical tube part.
9. gas-filtering device according to claim 1 is characterized in that, described vertical tube part is provided with access hole, and described access hole is positioned at the top of described filter house.
10. gas-filtering device according to claim 1 is characterized in that, described gas outlet is located at the top of described upper cover and the bottom that described slag-drip opening is located at described low head.
CN2012203975847U 2012-08-10 2012-08-10 Gas filter device Expired - Lifetime CN202921105U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102814086A (en) * 2012-08-10 2012-12-12 中国恩菲工程技术有限公司 Gas filtering apparatus
CN103879705A (en) * 2014-03-06 2014-06-25 无锡双雄通用机械有限公司 Feeding device of powdery raw material

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102814086A (en) * 2012-08-10 2012-12-12 中国恩菲工程技术有限公司 Gas filtering apparatus
CN103879705A (en) * 2014-03-06 2014-06-25 无锡双雄通用机械有限公司 Feeding device of powdery raw material

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Granted publication date: 20130508