CN202888140U - Wafer carry tool air filling device capable of monitoring property of air from air outlet end - Google Patents
Wafer carry tool air filling device capable of monitoring property of air from air outlet end Download PDFInfo
- Publication number
- CN202888140U CN202888140U CN 201220325263 CN201220325263U CN202888140U CN 202888140 U CN202888140 U CN 202888140U CN 201220325263 CN201220325263 CN 201220325263 CN 201220325263 U CN201220325263 U CN 201220325263U CN 202888140 U CN202888140 U CN 202888140U
- Authority
- CN
- China
- Prior art keywords
- gas
- chip carrier
- air
- filling device
- exhaust end
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
The utility model discloses a wafer carry tool air filling device capable of monitoring properties of air from an air outlet end. The wafer carry tool air filling device comprises: a mass flow controller; an air inlet end connected with the mass flow controller; an air outlet end; an air collection box connected with the air outlet end; and an air property measuring device connected with the air collection box. During application, the air inlet end and the air outlet end are connected to a wafer carry tool and are controlled by the mass flow controller, and air is filled into the wafer carry tool through the air inlet end. After a value of properties of air discharged from the wafer carry tool is measured by the air property measuring device, the air is then discharged through the air outlet end.
Description
Technical field
The utility model relates to a kind of chip carrier gas filling device with monitoring exhaust end gas characteristic function, relate in particular to and a kind ofly at exhaust end the gas characteristic measurer is set, whereby when blanketing gas, measure the chip carrier gas filling device with monitoring exhaust end gas characteristic function of the gas characteristic of chip carrier Exhaust Gas.
Background technology
Because oxygen is active strong, easy and material produces reaction, forms unexpected oxide, thereby causes the product yields to be affected, and production capacity is caused serious loss.Therefore, in the processing procedure of the accurate industries such as some chemical industry, electronics, semiconductor or photoelectricity, must give the nitrogen envelope with very highly purified nitrogen, impel system held at the operating environment of an anaerobic.
Chip carrier commonly used is namely filled nitrogen or pure air (Clean Dry Air by the chip carrier gas filling device, CDA) (Extreme Clean Dry Air, XCDA) reach the purpose of getting rid of oxygen and aqueous vapor, avoid whereby the wafer of these two kinds of factors and chip carrier inside to produce chemical reaction and generate oxide in wafer surface, reduce the yields of processing procedure.But, because each chip carrier rate of pressurization differs, and the chip carrier gas filling device also may cause the gas flow loss because of component faults, therefore, essential monitor wafer inside carrier oxygen and aqueous vapor are with information and the data of the real-time inner oxygen of acquisition eliminating chip carrier and the reduction of aqueous vapor usefulness.
For chip carrier gas filling device schematic diagram commonly used, mass flow controller 11, inlet end 12, hand held hygrometer 13, exhaust end 14 and chip carrier 15 have wherein been comprised with reference to Fig. 1.Chip carrier gas filling device commonly used is filled to chip carrier 15 inside by inlet end 12 with nitrogen, and scavenges by exhaust end 14 by mass flow controller 11 controls.Chip carrier gas filling device commonly used mainly is to utilize hand held hygrometer 13 or hand held oxygen concentration detector are put into chip carrier 15, and mode detects chip carrier 15 inner eliminating aqueous vapors or the variation of the usefulness of oxygen whereby.
For chip carrier gas filling device pipeline allocation plan commonly used, mass flow controller 11, exhaust end 14, nitrogen 21, filter 22,26,27, electromagnetically operated valve 23,24,25, the first type chip carrier 28, Second-Type chip carrier 29 and waste gas electromagnetically operated valve 210 have wherein been comprised with reference to Fig. 2.Input nitrogen 21 to chip carrier gas filling device commonly used at source nitrogen, nitrogen 21 filters by filter 22 first, adjusts quality and the uninterrupted of the gas of wishs filling by mass flow controller 11 controls again.Before being filled to chip carrier, different in response to the type of chip carrier 28 and 29, filter unnecessary gas by filter 26 and 27 first respectively, recharge the first type chip carrier 28 and Second-Type chip carrier 29 to correspondence.Exhaust end 14 also is connected to chip carrier 28 and 29, in order to get rid of chip carrier 28 and 29 waste gas of discharging.In addition, in pipeline, be provided with the situation of plurality of electromagnetic valve 23,24,25,210 each stage gas communication of control.
Yet, as mentioned above, chip carrier gas filling device itself commonly used does not possess the function of the gas characteristics such as monitoring oxygen or aqueous vapor, can only hand held oxygen concentration detector or hygrometer be positioned over chip carrier inside with manual mode, detect whereby the inflation usefulness of gas filling device.Therefore, can not be in real time and linearly feedback, can't form effective monitoring mechanism.
Technology commonly used has lower Lieque point ︰
1. chip carrier gas filling device commonly used does not possess the function of the gas characteristics such as monitoring oxygen or aqueous vapor;
2. commonly used detect the mode of gas filling device inflation usefulness with manual mode, can not be in real time and feedback measurement linearly, can't form effective monitoring mechanism;
3. the mode with manual mode detection gas filling device inflation usefulness commonly used must expend extra human resources and regularly detect.
Therefore, how improving above-mentioned shortcoming commonly used, make the chip carrier gas filling device possess the function of monitoring gas characteristic, is that the utility model is wanted disclosed content.
Summary of the invention
The purpose of this utility model is to propose a novel and progressive chip carrier gas filling device with monitoring exhaust end gas characteristic function, be provided with the combination of one group of collector box and gas characteristic measurer at the exhaust end of chip carrier gas filling device, the characteristic of utilizing gas humidity not change because of changes in flow rate, the gas collection that chip carrier is discharged is to collector box, measured by the gas characteristic measurer with digital signal feedback function, and the control computer of data back chip carrier gas filling device compared the effect of Real Time Monitoring chip carrier internal gas characteristic when filling to reach gas.
For reaching above-mentioned purpose, the utility model discloses a kind of chip carrier gas filling device with monitoring exhaust end gas characteristic function, comprises:
A mass flow controller;
An inlet end connects this mass flow controller;
An exhaust end;
A collector box connects this exhaust end;
A gas characteristic measurer connects this collector box;
Wherein, when using, this inlet end and this exhaust end are connected to a chip carrier, and by this mass flow controller control, fill a gas to this chip carrier by this inlet end; After the gas that this chip carrier is discharged measures the numerical values recited of a gas characteristic by this gas characteristic measurer, discharge by this exhaust end again.
The chip carrier gas filling device with monitoring exhaust end gas characteristic function as described, this collector box wherein, be to be connected between this exhaust end and this gas characteristic measurer, the gas of discharging in order to collect this chip carrier provides this gas characteristic measurer to measure.
The chip carrier gas filling device with monitoring exhaust end gas characteristic function as described, wherein this gas is nitrogen or pure air.
The chip carrier gas filling device with monitoring exhaust end gas characteristic function as described, wherein this gas characteristic is temperature, humidity, pressure, oxygen or concentration.
The chip carrier gas filling device with monitoring exhaust end gas characteristic function as described, wherein this gas characteristic measurer is a Digital Hygrometer or an oxygen concentration detector.
Description of drawings
Fig. 1 is chip carrier gas filling device schematic diagram commonly used;
Fig. 2 is chip carrier gas filling device pipeline allocation plan commonly used;
Fig. 3 is the chip carrier gas filling device schematic diagram with monitoring exhaust end gas characteristic function of the utility model preferred embodiment;
Fig. 4 is the chip carrier gas filling device pipeline allocation plan with monitoring exhaust end gas characteristic function of the utility model preferred embodiment.
[primary clustering symbol description]
11,31 mass flow controllers
12,32 inlet ends
13 hand held hygrometers
14,33 exhaust ends
15,35 chip carriers
21,41 nitrogen
22,26,27,42,46,47 filters
23,24,25,43,44,45 electromagnetically operated valves
28,48 first type chip carriers
29,49 Second-Type chip carriers
210,410 waste gas electromagnetically operated valves
34 gas characteristic measurers
411 collector boxs
Embodiment
Be the chip carrier gas filling device schematic diagram that the utility model preferred embodiment has monitoring exhaust end gas characteristic function with reference to Fig. 3, wherein comprised mass flow controller 31, inlet end 32, exhaust end 33, gas characteristic measurer 34 and chip carrier 35.Inlet end 32 quality of connection flow controllers 31 and chip carrier 35, the gas that wish is filled, Li such as ︰ nitrogen or pure air etc. are by mass flow controller 31 control gaseous mass and uninterrupteds, and are filled to chip carrier 35 inside by inlet end 32.Exhaust end 33 connects gas characteristic measurer 34 and chip carrier 35, and the gas that chip carrier 35 is discharged is discharged by exhaust end 33 after measuring the numerical values recited of specific gas characteristic by gas characteristic measurer 34 first again.
Wherein, gas characteristic can be the concentration of temperature, humidity, pressure, oxygen or other specific gas etc.; And gas characteristic measurer 34 can be Digital Hygrometer or oxygen concentration detector etc., and when adopting the gas characteristic measurer 34 with digital signal feedback function to measure, measurement to the data control computer that can pass immediately the chip carrier gas filling device back compare in real time and then the situation of complete monitoring gas chip carrier internal gas characteristic variations when filling.
Be the chip carrier gas filling device pipeline allocation plan that the utility model preferred embodiment has monitoring exhaust end gas characteristic function with reference to Fig. 4, wherein comprised mass flow controller 31, exhaust end 33, gas characteristic measurer 34, nitrogen 41, filter 42,46,47, electromagnetically operated valve 43,44,45, the first type chip carrier 48, Second-Type chip carrier 49, waste gas electromagnetically operated valve 410 and collector box 411.Identical with common technology, behind the chip carrier gas filling device that source nitrogen input nitrogen 41 to the utility model proposes, nitrogen 41 is to filter by filter 42 first, adjusts gaseous mass and the uninterrupted that wish is filled by mass flow controller 31 controls again.Before being filled to chip carrier, different in response to the type of chip carrier 48 and 49, filter unnecessary gas by filter 46 and 47 first respectively, recharge the first type chip carrier 48 and Second-Type chip carrier 49 to correspondence.Be that with the common technology difference the utility model is provided with gas characteristic measurer 34 and collector box 411 at exhaust end 33, collector box 411 is to collect the gas that chip carrier 48 and 49 is discharged, and provide gas characteristic measurer 34 to measure, by exhaust end 33 waste gas is discharged again at last.In addition, in pipeline, be provided with equally the situation of plurality of electromagnetic valve 43,44,45,410 each stage gas communication of control.
The utlity model has following You Dian ︰
1. the chip carrier gas filling device with monitoring exhaust end gas characteristic function disclosed in the utility model possesses the function of monitoring gas characteristic;
2. the chip carrier gas filling device with monitoring exhaust end gas characteristic function disclosed in the utility model can be in real time and feedback measurement linearly, forms effective monitoring mechanism;
3. the chip carrier gas filling device of tool monitoring exhaust end gas characteristic function disclosed in the utility model measures in the automation mode, need not expend extra human resources and detect.
In sum; chip carrier gas filling device with monitoring exhaust end gas characteristic function disclosed in the utility model; the function that not only possesses the monitoring gas characteristic; can also be with automation mode feedback measurement in real time and linearly; progressive novel and practical; such as its change design; for example adopt various dissimilar gas characteristic measurers; measure various dissimilar gas characteristic numerical value or measurement is sent to various types of control system etc.; so long as the gas characteristic measurer that has any type at the exhaust end of chip carrier gas filling device all belongs to the claimed scope of the utility model.
Technology disclosed in the utility model can be implemented according to this by the relevant technical staff in the field, and its unprecedented way also possesses patentability, so propose patent application in accordance with the law.But above-described embodiment is not enough to contain the claimed scope of the utility model, and therefore, protection range of the present utility model is worked as with being as the criterion that claim was defined.
Claims (5)
1. the chip carrier gas filling device with monitoring exhaust end gas characteristic function is characterized in that, comprises:
A mass flow controller;
An inlet end connects this mass flow controller;
An exhaust end;
A collector box connects this exhaust end;
A gas characteristic measurer connects this collector box;
Wherein, this inlet end and this exhaust end are connected to a chip carrier, and by this mass flow controller control, fill a gas to this chip carrier by this inlet end; After the gas that this chip carrier is discharged measures the numerical values recited of a gas characteristic by this gas characteristic measurer, discharge by this exhaust end again.
2. the chip carrier gas filling device with monitoring exhaust end gas characteristic function as claimed in claim 1, it is characterized in that, should be to be connected between this exhaust end and this gas characteristic measurer in order to collect the gas that chip carrier discharges and this collector box that gas characteristic measurer measures is provided.
3. the chip carrier gas filling device with monitoring exhaust end gas characteristic function as claimed in claim 1 is characterized in that this gas is nitrogen or pure air.
4. the chip carrier gas filling device with monitoring exhaust end gas characteristic function as claimed in claim 1 is characterized in that this gas characteristic is temperature, humidity, pressure, oxygen or concentration.
5. the chip carrier gas filling device with monitoring exhaust end gas characteristic function as claimed in claim 1 is characterized in that this gas characteristic measurer is a Digital Hygrometer or an oxygen concentration detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220325263 CN202888140U (en) | 2012-07-05 | 2012-07-05 | Wafer carry tool air filling device capable of monitoring property of air from air outlet end |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220325263 CN202888140U (en) | 2012-07-05 | 2012-07-05 | Wafer carry tool air filling device capable of monitoring property of air from air outlet end |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202888140U true CN202888140U (en) | 2013-04-17 |
Family
ID=48079535
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220325263 Expired - Fee Related CN202888140U (en) | 2012-07-05 | 2012-07-05 | Wafer carry tool air filling device capable of monitoring property of air from air outlet end |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202888140U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105453246A (en) * | 2013-08-12 | 2016-03-30 | 应用材料公司 | Substrate processing systems, apparatus, and methods with factory interface environmental controls |
| CN109290321A (en) * | 2017-07-25 | 2019-02-01 | 春田科技顾问股份有限公司 | Blowing-out device and blowing-out method for loading port |
| US10359743B2 (en) | 2014-11-25 | 2019-07-23 | Applied Materials, Inc. | Substrate processing systems, apparatus, and methods with substrate carrier and purge chamber environmental controls |
-
2012
- 2012-07-05 CN CN 201220325263 patent/CN202888140U/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105453246A (en) * | 2013-08-12 | 2016-03-30 | 应用材料公司 | Substrate processing systems, apparatus, and methods with factory interface environmental controls |
| US10192765B2 (en) | 2013-08-12 | 2019-01-29 | Applied Materials, Inc. | Substrate processing systems, apparatus, and methods with factory interface environmental controls |
| CN111508871A (en) * | 2013-08-12 | 2020-08-07 | 应用材料公司 | Substrate processing system, apparatus and method with factory interface environment control |
| US11282724B2 (en) | 2013-08-12 | 2022-03-22 | Applied Materials, Inc. | Substrate processing systems, apparatus, and methods with factory interface environmental controls |
| US11450539B2 (en) | 2013-08-12 | 2022-09-20 | Applied Materials, Inc. | Substrate processing systems, apparatus, and methods with factory interface environmental controls |
| US10359743B2 (en) | 2014-11-25 | 2019-07-23 | Applied Materials, Inc. | Substrate processing systems, apparatus, and methods with substrate carrier and purge chamber environmental controls |
| US11003149B2 (en) | 2014-11-25 | 2021-05-11 | Applied Materials, Inc. | Substrate processing systems, apparatus, and methods with substrate carrier and purge chamber environmental controls |
| US11782404B2 (en) | 2014-11-25 | 2023-10-10 | Applied Materials, Inc. | Substrate processing systems, apparatus, and methods with substrate carrier and purge chamber environmental controls |
| CN109290321A (en) * | 2017-07-25 | 2019-02-01 | 春田科技顾问股份有限公司 | Blowing-out device and blowing-out method for loading port |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101858876B (en) | Detecting system and humidity detecting method for detecting volatile organic compound | |
| US8241412B2 (en) | Filter inspection with a gas mixing apparatus | |
| CN105334035A (en) | One-way valve performance test system and test method | |
| CN101876594B (en) | Method for detecting performance of pulse valve | |
| CN202888140U (en) | Wafer carry tool air filling device capable of monitoring property of air from air outlet end | |
| CN203053947U (en) | Multi-channel multi-component fixed source sampling analysis device | |
| CN203525677U (en) | Aerosol generator | |
| CN201925167U (en) | Control system for performance testing process of dry-type roots vacuum pump unit | |
| CN103698380A (en) | Electrochemical trace oxygen analyzer for effectively prolonging usage life of sensor | |
| CN105588916A (en) | Flowing/static two-purpose gas sensor test system | |
| CN111982784A (en) | PM2.5 cutterbar characteristic calibrating device | |
| CN104062409B (en) | Intelligence soot gas analyzes method and apparatus | |
| CN203643396U (en) | Electrochemical trace oxygen analyzer capable of effectively prolonging service life of sensor | |
| CN205262717U (en) | Check valve capability test system | |
| CN204882516U (en) | Novel gaseous detecting system of formula of breathing in | |
| CN114563492A (en) | Gas sensor inspection device for pipeline and test method | |
| CN203337628U (en) | Deoxidation catalyst detection device | |
| CN201811907U (en) | Air filter material tester | |
| CN107449875B (en) | Malodorous gas detection equipment of organic waste treatment facility | |
| CN203037283U (en) | Filter integrity testing instrument | |
| CN100538322C (en) | A kind of test table for easy penetrating grain size air filter paper property | |
| CN203037423U (en) | Air tightness detection device for positive-pressure containers | |
| CN207164022U (en) | A kind of debirs treatment facility foul gas detection device | |
| CN102830244B (en) | Flow velocity measuring device with pitot tube | |
| CN203731093U (en) | Intelligent device for emptying unqualified gas |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130417 Termination date: 20140705 |
|
| EXPY | Termination of patent right or utility model |