CN202872792U - A multi-wavelength single-port transmitting and receiving optical device using silicon photon integration technology - Google Patents
A multi-wavelength single-port transmitting and receiving optical device using silicon photon integration technology Download PDFInfo
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- CN202872792U CN202872792U CN 201220461532 CN201220461532U CN202872792U CN 202872792 U CN202872792 U CN 202872792U CN 201220461532 CN201220461532 CN 201220461532 CN 201220461532 U CN201220461532 U CN 201220461532U CN 202872792 U CN202872792 U CN 202872792U
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- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 132
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Abstract
The utility model relates to a multi-wavelength single-port transmitting and receiving optical device using silicon photon integration technology. The optical device comprises a transmitting part, a receiving part, and a light multi-ejection Zig-Zag part. The convex objects of the silicon substrate of the transmitting part and the convex objects of the silicon substrate of the receiving part are matched with the concave objects of the silicon substrate of the Zig-Zag part. The convex objects and the concave objects are connected by Jigsaw technology and fixed by glue. The transmitting part communicates with an external optical network system via optical fiber fixed on the V-shaped groove on the silicon substrate. The external optical network system communicates with the receiving part via optical fiber fixed on the V-shaped groove on the silicon substrate. The transmitting part, the receiving part, and the Zig-Zag part are produced by using standard silicon technology. Multiple silicon substrates are connected and fixed by a Jigsaw jointing manner. Optical length of the Zig-Zag part can be controlled by the sizes of the convex objects and the concave objects of the silicon substrate. Compared with a multi-wavelength single-port transmitting and receiving optical device achieved in the industry at present, the method provided by the utility model has advantages of low insertion loss and a compact structure.
Description
Technical field
The utility model relates to optic communication device, photon is integrated and optical-fiber network, based on the silicon photon integrated technology of high integration, realizes that high speed, the integrated multi-wavelength single port of silicon photon integrated, low-power consumption transmit and receive optical device.
Background technology
Because the fast development from cloud computing, mobile Internet video, data center, HDTV (High-Definition Television), video request program and mobile broadband service etc., the service traffics that how to satisfy sustainable growth become the in recent years main flow direction of network Development, have directly caused global optical-fiber network industry towards the future development of large capacity, Highgrade integration and low-power consumption.In order to tackle the bandwidth requirement of witched-capacity network, the transmission technology of two-forty becomes the emphasis of dealing with problems, pass through the 40G(4X10G that wavelength division multiplexing is realized comprising at present popular) and 100G(10X10G or 4X25G) etc. technology: adopt a plurality of thick wavelength-division (CWDM) wavelength channels or a plurality of dense wavelength division (DWDM) wavelength channel, each passage carries different information, then multiplexing these have the different wave length signal and transmit at same optical fiber, realize jumbo communication, for example NX10G(wherein 10G as basic transmission rate).Therefore, how to realize that it is the technical problem underlying that present industry runs into that the multi-wavelength single port is launched the optical device of (for example NX10G) and reception (for example NX10G).
The photon integrated technology is similar to the large scale integrated circuit technology of current maturation, and its advantage is low cost, small size, low-power consumption, flexible expansion and high reliability etc.Silicon photon integrated technology is thought the most promising photon integrated technology by industry at present, adopt silicon photon integrated technology microelectronics and photoelectron can be combined, consist of silicon based opto-electronics mixing integrated chip and device, can give full play to the advantage of the advanced and mature technology of silica-based microelectronics, Highgrade integration, low cost etc., have widely market prospects.The multi-wavelength single port that adopts the silicon photon to realize transmits and receives optical device, has the characteristic of integrated level height, flexible expansion and low-power consumption etc.
Summary of the invention
The purpose of this utility model is: for the above-mentioned urgent market demand, silicon photon integrated technology based on the advanced person, a kind of large capacity, easily flexible configuration and expansion, High Density Integration, low-power consumption are provided, the integrated multi-wavelength single port of silicon photon transmits and receives optical device cheaply, transmitting-receiving optical device of the present utility model has adopted standard technology equipment and silicon technology flow process, has broken through and has adopted expensive process equipment to realize the method for multi-wavelength single port optical device on the Vehicles Collected from Market.Adopt technology of the present utility model, can directly the several functions optical chip be integrated on the same silicon substrate, also can be integrated on the Different Silicon substrate according to practical application, then it is final fixing to realize that by assembly unit location (" Jigsaw " technology) optocoupler merges, greatly reduce the production cost of the high-end optical device of current manufacturing, be easy to batch production.
The integrated multi-wavelength single port of silicon photon transmits and receives optical device, comprise that radiating portion, receiving unit, light repeatedly launch the Zig-Zag part, it is characterized in that: the silicon substrate projection of the silicon substrate of radiating portion projection, receiving unit is complementary and fixes by the assembly unit location and with glue with the silicon substrate of Zig-Zag part is recessed respectively, radiating portion is communicated with the exterior light network system by the optical fiber that is fixed on silicon substrate V-type groove, and the exterior light network system is communicated with receiving unit by the optical fiber that is fixed on silicon substrate V-type groove.
Described radiating portion, comprise silicon substrate, the laser chip of N different wave length, N+1 silicon optical waveguide, N wave division multiplexing WDM filter, N speculum, optical fiber, N is not equal to 1 natural number, all laser chips, all silicon optical waveguides, all wave division multiplexing WDM filters are integrated in respectively on the same silicon substrate, the corresponding speculum of each wave division multiplexing WDM filter, each laser chip output links to each other with a wave division multiplexing WDM filter by a silicon optical waveguide, the light of each wave division multiplexing WDM filter output and the light of reflection incide on the speculum corresponding with it, N speculum adopts the plated film mode to be produced on accordingly silicon substrate side or the direct silicon substrate side that N speculum is bonded in accordingly the Zig-Zag part of Zig-Zag part, and each wave division multiplexing WDM filter only allows the light of corresponding wavelength to pass through, and all reflect the light of its commplementary wave length, multi-wavelength multiplex light by last speculum is reflected and enters another silicon optical waveguide, imports in the optical fiber that is fixed on silicon substrate V-type groove by another silicon optical waveguide to be communicated with the exterior light network system.
A described N speculum is made into integral body, is produced on accordingly the silicon substrate side of Zig-Zag part by the plated film mode.
Described radiating portion, comprise silicon substrate, the laser chip of N different wave length, N silicon optical waveguide, two Si mirrors, another silicon optical waveguide or multiple-mode interfence waveguide, optical fiber, N is not equal to 1 natural number, all laser chips, all silicon optical waveguides are integrated in respectively on the same silicon substrate, if adopt the multiple-mode interfence waveguide also to be integrated on the same silicon substrate, two Si mirrors directly are produced on the silicon substrate of Zig-Zag part, each laser chip output gradually converges by a silicon optical waveguide and other carrying different wave length waveguide but does not merge, jointly incide on the Si mirror, and be driven in the silicon optical waveguide or multiple-mode interfence waveguide with optical mode conversion function by another Si mirror, enter in the optical fiber that is fixed on silicon substrate V-type groove by another silicon optical waveguide or multiple-mode interfence waveguide and be communicated with the exterior light network system.
Described receiving unit, comprise silicon substrate, the detector chip of N different wave length, N+1 silicon optical waveguide, N the multiplexing WDM filter of Wave Decomposition, N speculum, optical fiber, N is not equal to 1 natural number, all detector chips, all silicon optical waveguides, the multiplexing WDM filter of all Wave Decompositions is integrated in respectively on the same silicon substrate, N speculum adopts the plated film mode to be produced on accordingly silicon substrate side or the direct silicon substrate side that N speculum is bonded in accordingly the Zig-Zag part of Zig-Zag part, the corresponding speculum of each Wave Decomposition wave division multiplexing WDM filter, each detector chip input links to each other with the output of a multiplexing WDM filter of Wave Decomposition by a silicon optical waveguide, the light signal of exterior light network system imports to a silicon optical waveguide by the optical fiber that is fixed on silicon substrate V-type groove, be driven on first speculum by this silicon optical waveguide, the light of each mirror reflects incides on the multiplexing WDM filter of the Wave Decomposition corresponding with it, and the multiplexing WDM filter of each Wave Decomposition only allows the light of corresponding wavelength to pass through and output, and all reflects the light of its commplementary wave length.
A described N speculum is made into integral body, is produced on accordingly the silicon substrate side of Zig-Zag part by the plated film mode.
The utility model adopts the standard silicon process equipment to make respectively radiating portion, receiving unit and light and repeatedly launches the Zig-Zag part, connect a plurality of silicon substrates fixed by the picture mosaic connecting method, and by silicon substrate projection and recessed size, can control the light path that light repeatedly launches part.The multi-wavelength single port that realizes at present with respect to industry transmits and receives optical device, and the utility model method has the advantages such as insertion loss is less, structure is compacter.
Description of drawings
Fig. 1 is example structure block diagram of the present utility model;
Fig. 2 is the operation principle schematic diagram of radiating portion of the present utility model;
Fig. 3 is making schematic diagram of the present utility model;
Fig. 4 is for adopting the integrated multi-wavelength single port of the monolithic ballistic device schematic diagram of Si mirror.
Embodiment
The utility model will be further described by reference to the accompanying drawings.
As shown in Figure 1, the utility model comprises: radiating portion 100, receiving unit 110, light repeatedly launch (Zig-Zag) part 107 and be used for to realize the filter of optical wavelength-division multiplex/demultiplexing and speculum etc.
The multi-wavelength single port radiating portion of silicon photon integrated technology is adopted in 100 expressions that identify among Fig. 1, monolithic is integrated or mix integrated a plurality of different wave length laser chip on same silicon substrate, take 4 different wave length laser chips as example, same method can expand to the laser chip of N different wave length among Fig. 1.4 laser chips 101 send different wave length signal (adding of information can add by direct modulated laser or investigation mission outside the city or town electrooptic modulator, does not give unnecessary details), these four wavelength X here
1, λ
2, λ
3, λ
4Light signal enter into each self-corresponding silicon optical waveguide 102.For the coupling efficiency that improves laser chip 101 and silicon optical waveguide 102 and finally improve and luminous power, 101 also can adopt have the output optical mode conversion laser chip of (SSC, Spot-Size Converter).After 102 guiding, wavelength X
1, λ
2, λ
3, λ
4Optical signal transmission to each self-corresponding narrow band filter 103 or be referred to as the WDM(wavelength division multiplexing) filter, have and allow designated band light to pass through, and the whole function of other band of light of reflection.Like this, work as wavelength X
1Flashlight enter at 103 o'clock, λ
1Flashlight can pass through this WDM filter, arrives on the speculum 106 be positioned at Zig-Zag substrate 107 to be reflected back on the WDM filter of opposite side: this moment wavelength X
2Flashlight by its corresponding WDM filter, and λ
1Flashlight can be reflected by this WDM filter, thereby realizes λ
1Flashlight and λ
2Flashlight is together multiplexing.The rest may be inferred, repeatedly launches operation principle (Zig-Zag photoelasticity technique) based on light, finally realizes a plurality of optical wavelength signal light λ
1, λ
2, λ
3, λ
4Together multiplexing, finally enter into the optical fiber 111 that is arranged in V-type groove 112, form the emission of multi-wavelength single port and output to the exterior light network system.This technical method adopts light repeatedly to launch operation principle (Zig-Zag photoelasticity technique), uses for multi-wavelength, multichannel, and the light path of realization is compacter, reaches the purpose of miniaturization.The multi-wavelength single port that the array waveguide grating (AWG) that generally adopts with respect to industry is realized transmits and receives optical device, adopts the utility model method insertion loss less (perfect condition can ignore insertion loss), and structure can be compacter.
The multi-wavelength single port receiving unit of silicon photon integrated technology is adopted in 110 expressions that identify among Fig. 1, monolithic is integrated or mix integrated a plurality of detector chip on same silicon substrate, take 4 detector chips as example, same method can expand to N detector chip among Fig. 1.When the multi-wavelength input optical signal from the exterior light network system enters into 110 silicon optical waveguide by the optical fiber 111 that is arranged in V-type groove 112, be similar to the light radiating portion, consist of the light that is achieved based on 110 and 107 light paths and repeatedly launch work (Zig-Zag photoelasticity technique), it is final that this has the flashlight of multi-wavelength, each wavelength (λ through Wave Decomposition multiplex filter 108
1, λ
2, λ
3, λ
4) light signal enters into respectively each self-corresponding detector chip 109.
Fig. 2 is take radiating portion 200 as example, specific explanations how to realize the operation principle of multi-wavelength single port output.Laser chip 210 is launched wavelength X
1Light signal, arrive WDM filter 201: only allow λ
1Wave band optical signal is by reflecting all other wave bands.λ by 201
1Light signal arrives speculum 206, all is reflected back and arrives on the WDM filter 203.Because 203 allow λ
2Wave band optical signal is by reflecting all other wave bands, λ
1Light signal is reflected back again.At this moment, λ
2Wave band optical signal is by 203 and λ
1Optical multiplexed signal is with arrive speculum 207, λ together
1And λ
2Closing wave optical signal can all be reflected back in the light path by 207, and arrives on the WDM filter 216, with λ
3Wave optical signal is closed in formation.The rest may be inferred, λ
1, λ
2, λ
3Close wave optical signal and can pass through speculum 208 total reflections, arrive behind the WDM filter 215 and λ
4Close ripple, finally obtain λ
1, λ
2, λ
3, λ
4Close wave optical signal, be formed on the multi-wavelength output optical signal on the single port optical fiber.Wherein, 201,203,215,216 and 206,207,208,209 can be by plated film mode realize the function of filtering and total reflection at silicon substrate, also can adopt independent filter plate and speculum is gluing is cemented on the silicon substrate.In order to realize splicing fast a plurality of silicon substrates, repeatedly launch Zig-Zag part 217 as example take radiating portion 200 and light among Fig. 2, be positioned at silicon substrate projection 202 on 200,214 and be positioned at silicon substrate recessed 205,218 on 217 and make by standard silicon technique and realize coupling, and fixing at last with glue, thereby be easy to large-scale production.202,214 height and 205,218 the degree of depth can be determined by design and simulation, and purpose is to obtain suitable light repeatedly to launch (Zig-Zag) optical path length.
Further, Fig. 3 has illustrated making assembly technology of the present utility model.Making respectively emission silicon substrate 300, light by standard silicon technique repeatedly launches (Zig-Zag) silicon substrate 301 and receives silicon substrate 302.Wherein, can adopt on 300 and 302 standard silicon technique to make V-type groove and silicon optical waveguide, be used for optical coupling and leaded light, and can adopt the plated film mode to make the WDM filter in its side, perhaps directly single WDM filter plate is bonded in its side.300 and 302 substrate bossing can adopt standard silicon process equipment (Saw Cutter) to go cutting and grind, and realizes designing the craft precision that needs, and is used for control light and repeatedly launches (Zig-Zag) optical path length.301 making is similar to above-mentioned silicon standard technology, also can adopt the plated film mode to make completely reflecting mirror in its side, perhaps directly single or full wafer speculum is bonded in its side.When 300,301 and 302 complete respectively after, projection and recessed utilization " Jigsaw " technology by silicon substrate separately realize coupling, have at last glue fixed fixing.
Fig. 4 has shown a more compact multi-wavelength single port utilizing emitted light device 400 by adopting Si mirror to realize.Be similar to top described, 4 four wavelength X that laser chip 401 sends
1, λ
2, λ
3, λ
4Light signal enter into different silicon optical waveguide 402, each fiber waveguide of carrying different wave length gradually converges but does not merge, finally enter into Si mirror group 403, arrived on the another one speculum 405 after one of them speculum 404 reflection, optical coupling is advanced on 406 the most at last.406 is a silica-based optical mode converter or a multiple-mode interfence instrument, can be coupled to the optical fiber 407 that is arranged in V-type groove 408 after the light conversion with multi-wavelength, realizes the multi-wavelength output optical signal.The method has adopted total silicon base function to realize that structure is more compact, and integrated level is higher.
Claims (6)
1. the integrated multi-wavelength single port of silicon photon transmits and receives optical device, comprise that radiating portion, receiving unit, light repeatedly launch the Zig-Zag part, it is characterized in that: the silicon substrate projection of the silicon substrate of radiating portion projection, receiving unit is complementary and fixes by the assembly unit location and with glue with the silicon substrate of Zig-Zag part is recessed respectively, radiating portion is communicated with the exterior light network system by the optical fiber that is fixed on silicon substrate V-type groove, and the exterior light network system is communicated with receiving unit by the optical fiber that is fixed on silicon substrate V-type groove.
2. the integrated multi-wavelength single port of silicon photon according to claim 1 transmits and receives optical device, it is characterized in that: described radiating portion, comprise silicon substrate, the laser chip of N different wave length, N+1 silicon optical waveguide, N wave division multiplexing WDM filter, N speculum, optical fiber, N is not equal to 1 natural number, all laser chips, all silicon optical waveguides, all wave division multiplexing WDM filters are integrated in respectively on the same silicon substrate, the corresponding speculum of each wave division multiplexing WDM filter, each laser chip output links to each other with a wave division multiplexing WDM filter by a silicon optical waveguide, the light of each wave division multiplexing WDM filter output and the light of reflection incide on the speculum corresponding with it, N speculum adopts the plated film mode to be produced on accordingly silicon substrate side or the direct silicon substrate side that N speculum is bonded in accordingly the Zig-Zag part of Zig-Zag part, and each wave division multiplexing WDM filter only allows the light of corresponding wavelength to pass through, and all reflect the light of its commplementary wave length, multi-wavelength multiplex light by last speculum is reflected and enters another silicon optical waveguide, imports in the optical fiber that is fixed on silicon substrate V-type groove by another silicon optical waveguide to be communicated with the exterior light network system.
3. the integrated multi-wavelength single port of silicon photon according to claim 2 transmits and receives optical device, it is characterized in that: a described N speculum is made into integral body, is produced on accordingly the silicon substrate side of Zig-Zag part by the plated film mode.
4. the integrated multi-wavelength single port of silicon photon according to claim 1 transmits and receives optical device, it is characterized in that: described radiating portion, comprise silicon substrate, the laser chip of N different wave length, N silicon optical waveguide, two Si mirrors, another silicon optical waveguide or multiple-mode interfence waveguide, optical fiber, N is not equal to 1 natural number, all laser chips, all silicon optical waveguides are integrated in respectively on the same silicon substrate, if adopt the multiple-mode interfence waveguide also to be integrated on the same silicon substrate, two Si mirrors directly are produced on the silicon substrate of Zig-Zag part, each laser chip output gradually converges by a silicon optical waveguide and other carrying different wave length waveguide but does not merge, jointly incide on the Si mirror, and be driven in the silicon optical waveguide or multiple-mode interfence waveguide with optical mode conversion function by another Si mirror, enter in the optical fiber that is fixed on silicon substrate V-type groove by another silicon optical waveguide or multiple-mode interfence waveguide and be communicated with the exterior light network system.
5. the integrated multi-wavelength single port of silicon photon according to claim 1 transmits and receives optical device, it is characterized in that: described receiving unit, comprise silicon substrate, the detector chip of N different wave length, N+1 silicon optical waveguide, N the multiplexing WDM filter of Wave Decomposition, N speculum, optical fiber, N is not equal to 1 natural number, all detector chips, all silicon optical waveguides, the multiplexing WDM filter of all Wave Decompositions is integrated in respectively on the same silicon substrate, N speculum adopts the plated film mode to be produced on accordingly silicon substrate side or the direct silicon substrate side that N speculum is bonded in accordingly the Zig-Zag part of Zig-Zag part, the corresponding speculum of each Wave Decomposition wave division multiplexing WDM filter, each detector chip input links to each other with the output of a multiplexing WDM filter of Wave Decomposition by a silicon optical waveguide, the light signal of exterior light network system imports to a silicon optical waveguide by the optical fiber that is fixed on silicon substrate V-type groove, be driven on first speculum by this silicon optical waveguide, the light of each mirror reflects incides on the multiplexing WDM filter of the Wave Decomposition corresponding with it, and the multiplexing WDM filter of each Wave Decomposition only allows the light of corresponding wavelength to pass through and output, and all reflects the light of its commplementary wave length.
6. the integrated multi-wavelength single port of silicon photon according to claim 5 transmits and receives optical device, it is characterized in that: a described N speculum is made into integral body, is produced on accordingly the silicon substrate side of Zig-Zag part by the plated film mode.
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| CN 201220461532 CN202872792U (en) | 2012-09-12 | 2012-09-12 | A multi-wavelength single-port transmitting and receiving optical device using silicon photon integration technology |
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| CN 201220461532 CN202872792U (en) | 2012-09-12 | 2012-09-12 | A multi-wavelength single-port transmitting and receiving optical device using silicon photon integration technology |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104901745A (en) * | 2014-03-03 | 2015-09-09 | 颖飞公司 | Optical module |
| CN114384643A (en) * | 2020-10-19 | 2022-04-22 | 青岛海信宽带多媒体技术有限公司 | Optical module |
| WO2022083041A1 (en) * | 2020-10-19 | 2022-04-28 | 青岛海信宽带多媒体技术有限公司 | Optical module |
-
2012
- 2012-09-12 CN CN 201220461532 patent/CN202872792U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104901745A (en) * | 2014-03-03 | 2015-09-09 | 颖飞公司 | Optical module |
| CN104901745B (en) * | 2014-03-03 | 2018-11-09 | 颖飞公司 | Integrated equipment for communication |
| CN114384643A (en) * | 2020-10-19 | 2022-04-22 | 青岛海信宽带多媒体技术有限公司 | Optical module |
| WO2022083041A1 (en) * | 2020-10-19 | 2022-04-28 | 青岛海信宽带多媒体技术有限公司 | Optical module |
| CN114384643B (en) * | 2020-10-19 | 2023-08-15 | 青岛海信宽带多媒体技术有限公司 | Optical module |
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Effective date of registration: 20160707 Address after: 215021, 1310, international science and Technology Park, 1355 Jinji Lake Avenue, Suzhou Industrial Park, Jiangsu, China Patentee after: Suzhou Crealights Technology Co., Ltd. Address before: 430000, room 214, long voyage village, Hanyang port, Wuhan, Hubei 101, China Patentee before: Hu Chaoyang Patentee before: Yu Dao Patentee before: Shi Zhangru |
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