CN202862022U - 一种可延长抛光上垫使用寿命的新型装置 - Google Patents
一种可延长抛光上垫使用寿命的新型装置 Download PDFInfo
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- CN202862022U CN202862022U CN 201220206850 CN201220206850U CN202862022U CN 202862022 U CN202862022 U CN 202862022U CN 201220206850 CN201220206850 CN 201220206850 CN 201220206850 U CN201220206850 U CN 201220206850U CN 202862022 U CN202862022 U CN 202862022U
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CN 201220206850 CN202862022U (zh) | 2012-05-09 | 2012-05-09 | 一种可延长抛光上垫使用寿命的新型装置 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106166701A (zh) * | 2016-07-22 | 2016-11-30 | 成都贝瑞光电科技股份有限公司 | 一种紫外超薄片上盘工艺方法 |
CN109605137A (zh) * | 2018-12-27 | 2019-04-12 | 衢州晶哲电子材料有限公司 | 一种硅片无动力自转无蜡抛光模板及其抛光方法 |
CN110265350A (zh) * | 2019-06-27 | 2019-09-20 | 中国电子科技集团公司第四十四研究所 | 一种用于焦平面器件减薄抛光的限高保护夹具及方法 |
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2012
- 2012-05-09 CN CN 201220206850 patent/CN202862022U/zh not_active Expired - Fee Related
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106166701A (zh) * | 2016-07-22 | 2016-11-30 | 成都贝瑞光电科技股份有限公司 | 一种紫外超薄片上盘工艺方法 |
CN109605137A (zh) * | 2018-12-27 | 2019-04-12 | 衢州晶哲电子材料有限公司 | 一种硅片无动力自转无蜡抛光模板及其抛光方法 |
CN110265350A (zh) * | 2019-06-27 | 2019-09-20 | 中国电子科技集团公司第四十四研究所 | 一种用于焦平面器件减薄抛光的限高保护夹具及方法 |
CN110265350B (zh) * | 2019-06-27 | 2022-03-01 | 中国电子科技集团公司第四十四研究所 | 一种用于焦平面器件减薄抛光的限高保护夹具及方法 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Nanchang zhengixng Photoelectric Technology Co. Ltd. Assignor: Shenzhen ZhengXing Optoelectronics Technology Co., Ltd. Contract record no.: 2014440020172 Denomination of utility model: Novel device capable of prolonging service life of polishing upper pad Granted publication date: 20130410 License type: Exclusive License Record date: 20140523 |
|
LICC | Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model | ||
DD01 | Delivery of document by public notice | ||
DD01 | Delivery of document by public notice |
Addressee: Shenzhen ZhengXing Optoelectronics Technology Co., Ltd. Document name: Notification to Pay the Fees |
|
DD01 | Delivery of document by public notice | ||
DD01 | Delivery of document by public notice |
Addressee: Shenzhen ZhengXing Optoelectronics Technology Co., Ltd. Document name: Notification of Termination of Patent Right |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130410 Termination date: 20190509 |