CN202860872U - Base plate washing device - Google Patents
Base plate washing device Download PDFInfo
- Publication number
- CN202860872U CN202860872U CN 201220422568 CN201220422568U CN202860872U CN 202860872 U CN202860872 U CN 202860872U CN 201220422568 CN201220422568 CN 201220422568 CN 201220422568 U CN201220422568 U CN 201220422568U CN 202860872 U CN202860872 U CN 202860872U
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- Prior art keywords
- main body
- round brush
- brush main
- base plate
- flow chamber
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- Expired - Fee Related
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Abstract
The utility model discloses a turbo type base plate washing device with a liquid and brush mixed function, and belongs to the field of semiconductor washing devices. The base plate washing device comprises a roll brush main body and a drive device which drives the roll brush main body to rotate. Brush hair is arranged on the outer surface of the roll brush main body. The roll brush main body further comprises a liquid flow chamber which is located in the roll brush main body, and at least one spraying channel. The liquid flow chamber is provided with at least one liquid inlet. An opening of the inner end of the spraying channel is located on the inner wall of the liquid flow chamber. An opening of the outer end of the spraying channel is located on the outer surface of the roll brush main body. When the base plate washing device is used, the roll brush main body rotates, liquid enters the liquid flow chamber through the liquid inlet, then the liquid sprays out through the spraying channel, and the liquid sprays in a curve shape and is enabled to spray to contact points between the brush hair and the base plate as far as possible. Therefore, the base plate washing device enables the brush hair to achieve self-cleaning.
Description
Technical field
The utility model relates to the semiconductor cleaning device technical field, particularly relates to a kind of base plate cleaning device of turbine type liquid brush immixture.
Background technology
As shown in Figure 1, base-plate cleaning and semiconductor manufacturing base plate cleaning device mainly comprise round brush main body 01 and the drive unit that drives round brush main body 01 in process for manufacturing liquid crystal display at present, at present, in the base plate cleaning device of supplying on the market, round brush main body 01 is solid stainless steel metal, and the outer wall of round brush main body 01 has the bristle 02 of woollen goods material.Drive unit drives 01 motion of round brush main body, and cleans by 02 pair of substrate of bristle.
But liquid can't act on simultaneously with bristle 02 in the round brush main body 01 in the aforesaid substrate cleaning device, does not have the automatically cleaning ability, needs regular manual cleaning.
The utility model content
The utility model provides a kind of semiconductor manufacturing base plate cleaning device, and the bristle of this cleaning device can be realized automatically cleaning.
For achieving the above object, the utility model provides following technical scheme:
A kind of turbine type liquid brush immixture base plate cleaning device comprises:
The drive unit of the described round brush main body rotation of round brush main body and driving, described round brush main body outer surface has bristle, and described round brush main body also has:
The liquid flow chamber is positioned at described round brush body interior, and described liquid flow chamber runs through the length direction of described round brush main body, and described liquid flow chamber has two inlets, lays respectively at two end faces of described round brush main body;
Each described inlet place is provided with when rotating liquid is sucked the indoor half-opened impeller of described liquid flowing cavity, described impeller comprises a plurality of blades and an end cap, wherein an end of each described blade is fixed in described end cap, and relative fixing between each described blade and the described round brush main body;
At least one injection channel, interior end opening are positioned at described liquid flow chamber inner wall, and outer end opening is positioned at described round brush main body outer surface.
Preferably, described liquid flow chamber inner wall is provided with shape of threads water guide raceway groove, and the rotation direction of described shape of threads water guide raceway groove is identical with the direction of rotation of described round brush main body, and the interior end opening of described injection channel is positioned at described shape of threads water guide raceway groove.
Preferably, described injection channel bearing of trend is identical with the eddy current direction of described water guide raceway groove.
Preferably, the outer end opening of described bristle and described injection channel is spaced.
Preferably, described bristle is shape of threads and is fixed in round brush main body outer surface.
Preferably, described liquid flowing cavity is indoor to run through one with the turbine rod of helical wheel sheet, and described turbine rod and described round brush main body are coaxial fixing.
Preferably, described drive unit is servo motor, and described round brush main body one end arranges magnetic transmission disk, and the magnetic transmission disk magnetic that the magnetic transmission disk that described round brush main body one end arranges is connected with the dynamical system servo motor connects.
The base plate cleaning device that the utility model provides comprises: the drive unit of the described round brush main body rotation of round brush main body and driving, and described round brush main body outer surface has bristle, and described round brush main body also has:
The liquid flow chamber is positioned at described round brush body interior, and described liquid flow chamber runs through the length direction of described round brush main body, and described liquid flow chamber has two inlets, lays respectively at two end faces of described round brush main body;
Each described inlet place is provided with when rotating liquid is sucked the indoor half-opened impeller of described liquid flowing cavity, described impeller comprises a plurality of blades and an end cap, wherein an end of each described blade is fixed in described end cap, and relative fixing between each described blade and the described round brush main body;
At least one injection channel, interior end opening are positioned at described liquid chamber inwall, and outer end opening is positioned at described round brush main body outer surface.
The base plate cleaning device that the utility model provides, in use, drive unit drives the round brush main body and rotates, and it is indoor that liquid enters liquid flowing cavity by inlet, and by the injection channel ejection, thereby realize that liquid and bristle act on simultaneously, realize automatically cleaning.
So the base plate cleaning device that the utility model provides makes bristle can realize automatically cleaning.
The base plate cleaning device that provides of the utility model can alleviate himself weight because inside is provided with the liquid flow chamber in addition, drives load little, can significantly prolong attached component service life.
Description of drawings
Fig. 1 is existing round brush agent structure schematic diagram;
Fig. 2 is eddy current type liquid brush immixture round brush main body overall diagram;
Fig. 3 is that eddy current type liquid brush immixture round brush main body is along round brush main body axial cross-sectional view;
Fig. 4 is eddy current type liquid brush immixture round brush body interior profile;
Fig. 5 is with the round brush body interior cross-sectional view of scroll bar device.
The specific embodiment
Below in conjunction with the accompanying drawing among the utility model embodiment, the technical scheme among the utility model embodiment is clearly and completely described, obviously, described embodiment only is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that obtains under the creative work prerequisite, all belong to the scope of the utility model protection.
Please refer to Fig. 2 and Fig. 3; Wherein, Fig. 2 is overall diagram of the present utility model; Fig. 3 is that the utility model is along round brush main body axial cross-sectional view.
The base plate cleaning device that the utility model provides comprises: the drive unit of round brush main body 1 and 1 rotation of driving round brush main body, and round brush main body 1 outer surface has bristle 11, and round brush main body 1 also has:
At least one injection channel 12, interior end opening are positioned at liquid flow chamber 13 inwalls, and outer end opening 121 is positioned at round brush main body 1 outer surface.
The base plate cleaning device that the utility model provides, in use, drive unit drives round brush main body 1 and rotates, liquid enters in the liquid flow chamber 13 by inlet 15, and by injection channel 12 ejections, thereby realize that liquid and bristle 11 act on simultaneously, realize automatically cleaning.
So the base plate cleaning device that the utility model provides makes bristle can realize automatically cleaning.
In addition, the base plate cleaning device that the utility model provides can alleviate himself weight because inside is provided with liquid flow chamber 13, drives load little, can significantly prolong attached component service life.
As shown in Figure 2, on the basis of technique scheme, further, liquid flow chamber 13 runs through the length direction of round brush main body 1, and inlet 15 is two, lays respectively at two end faces of round brush main body 1.Two inlets 15 lay respectively at the two ends of round brush main body 1, can with in the two ends influent flow chamber 13 of liquid by round brush main body 1, make liquid flow chamber 13 internal pressures even.
Particularly, when each inlet 15 place is provided with and rotates liquid sucked the half-opened impeller 14 in the liquid flow chamber 13, impeller 14 comprises a plurality of blades 141 and an end cap 142, wherein an end of each blade 141 is fixed in end cap 142, and relative fixing between each blade 141 and the round brush main body 1.When round brush cleans, the impeller 14 at round brush main body 1 two ends inlet 15 places is arranged in the liquid tank of sealing, when the impeller 14 at round brush main body 1 two ends rotates, the liquid in the liquid tank can be sucked in the liquid flow chamber 13 by the inlet 15 that round brush main body 1 two ends are provided with.
Particularly, as shown in Figure 4, liquid flow chamber 13 inwalls are provided with shape of threads water guide raceway groove 131, and the rotation direction of shape of threads water guide raceway groove 131 is identical with the direction of rotation of round brush main body 1, and the interior end opening of injection channel 12 is positioned at shape of threads water guide raceway groove 131.Under the impeller 14 that liquid is provided with at round brush main body 1 two ends acts on, enter in the shape of threads water guide raceway groove 131, it is mobile to round brush main body 1 middle part that shape of threads water guide raceway groove 131 makes liquid be the eddy current shape, and then liquid pressurizeed, thereby liquid is entered in the injection channel 12, by the outer end opening 121 curved ejections of injection channel 12, improve the cleansing power of base plate cleaning device.
Simultaneously, this kind design can further alleviate the base plate cleaning device own wt, reduces to drive load.
Particularly, as shown in Figure 3, injection channel 12 bearing of trends are identical with the eddy current direction of water guide raceway groove 131.Make injection channel 12 consistent with the liquid flow direction of these injection channel 12 inner opening parts, be convenient to liquid and enter in the injection channel 12, and then sprayed by the outer end opening 121 of injection channel 12.
Particularly, bristle 11 is spaced with the outer end opening 121 of injection channel 12.When liquid is sprayed by injection channel 12, make the curved contact point that is ejected into as much as possible bristle 11 and substrate of liquid, improve the cleansing power of base plate cleaning device.Certainly, preferably bristle 11 is arranged with outer end opening 121 equidistant intervals of injection channel 12, is convenient to the processing and manufacturing of round brush.
Particularly, bristle 11 is shape of threads and is fixed in round brush main body 1 outer surface.Bristle 11 can be shape of threads and be wrapped on the round brush main body 1, and said structure can when 1 rotation of round brush main body, will clean an end of booty orienting roll body of the brush 1, and then will clean booty and get rid of.
Certainly, bristle 11 also can along round brush main body 1 axial direction, be shape of threads and be fixed on round brush main body 1 surface.
Particularly, as shown in Figure 5, run through one in the liquid flow chamber 13 with the turbine rod 2 of helical wheel sheet 21, turbine rod 2 and round brush main body 1 are coaxial fixing.Enter liquid again pressurization under turbine rod 2 effects of liquid flowing cavity indoor 13, make the liquid of injection channel 12 ejections realize the foam jet function.Can drive turbine rod 2 and 1 rotation of round brush main body with same drive unit simultaneously.
Particularly, drive unit is servo motor, and the magnetic transmission disk transmission magnetic that the magnetic transmission disk 3 that round brush main body 1 one ends arrange is connected with the dynamical system servo motor connects.Because the relative magnetic action of two disks, the transmission disk 3 on the round brush main body 1 also begin action, and then realize the driving to round brush main body 1 and turbine rod 2.
Certainly, drive unit can also be selected other devices, such as motor etc., by transmission power such as sprocket wheel, gear and belt wheels.Here give unnecessary details no longer one by one.
Obviously, those skilled in the art can carry out various changes and modification to the utility model and not break away from spirit and scope of the present utility model.Like this, if of the present utility model these are revised and modification belongs within the scope of the utility model claim and equivalent technologies thereof, then the utility model also is intended to comprise these changes and modification interior.
Claims (7)
1. a base plate cleaning device comprises the round brush main body and drives the drive unit that described round brush main body is rotated, and described round brush main body outer surface has bristle, it is characterized in that, described round brush main body also has:
The liquid flow chamber is positioned at described round brush body interior, and described liquid flow chamber runs through the length direction of described round brush main body, and described liquid flow chamber has two inlets, lays respectively at two end faces of described round brush main body;
Each described inlet place is provided with when rotating liquid is sucked the indoor half-opened impeller of described liquid flowing cavity, described impeller comprises a plurality of blades and an end cap, wherein an end of each described blade is fixed in described end cap, and relative fixing between each described blade and the described round brush main body;
At least one injection channel, interior end opening are positioned at described liquid flow chamber inner wall, and outer end opening is positioned at described round brush main body outer surface.
2. base plate cleaning device according to claim 1, it is characterized in that, described liquid flow chamber inner wall is provided with shape of threads water guide raceway groove, the rotation direction of described shape of threads water guide raceway groove is identical with the direction of rotation of described round brush main body, and the interior end opening of each described injection channel is positioned at described shape of threads water guide raceway groove.
3. base plate cleaning device according to claim 2 is characterized in that, described injection channel bearing of trend is identical with the eddy current direction of described water guide raceway groove.
4. base plate cleaning device according to claim 3 is characterized in that, the outer end opening of described bristle and described injection channel is spaced.
5. base plate cleaning device according to claim 4 is characterized in that, described bristle is shape of threads and is fixed in described round brush main body outer surface.
6. each described base plate cleaning device is characterized in that according to claim 1 ~ 5, and described liquid flowing cavity is indoor to run through one with the turbine rod of helical wheel sheet, and described turbine rod and described round brush main body are coaxial fixing.
7. base plate cleaning device according to claim 6, it is characterized in that, described drive unit is servo motor, and described round brush main body one end arranges magnetic transmission disk, and the magnetic transmission disk magnetic that the magnetic transmission disk that described round brush main body one end arranges is connected with the dynamical system servo motor connects.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220422568 CN202860872U (en) | 2012-08-23 | 2012-08-23 | Base plate washing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220422568 CN202860872U (en) | 2012-08-23 | 2012-08-23 | Base plate washing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202860872U true CN202860872U (en) | 2013-04-10 |
Family
ID=48027631
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220422568 Expired - Fee Related CN202860872U (en) | 2012-08-23 | 2012-08-23 | Base plate washing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202860872U (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104043604A (en) * | 2014-06-26 | 2014-09-17 | 深圳市华星光电技术有限公司 | Cleaning brush structure |
| CN104858195A (en) * | 2015-06-17 | 2015-08-26 | 京东方科技集团股份有限公司 | Spray device and cleaning equipment |
| CN105665318A (en) * | 2014-11-18 | 2016-06-15 | 中国石油天然气股份有限公司 | Thread cleaning device |
| CN107159602A (en) * | 2017-05-03 | 2017-09-15 | 深圳市华星光电技术有限公司 | Substrate cleaning apparatus |
| CN107234117A (en) * | 2016-03-28 | 2017-10-10 | 盟立自动化股份有限公司 | Wiper mechanism |
| CN109037116A (en) * | 2018-08-31 | 2018-12-18 | 上海华力微电子有限公司 | Wafer cleaning device |
| CN109171539A (en) * | 2018-10-29 | 2019-01-11 | 谢丽华 | A kind of washer turns face toilet lid |
| CN109305538A (en) * | 2018-11-02 | 2019-02-05 | 河南昊化黎明智能清洗科技有限公司 | A kind of conveyer belt with cleaning function |
| CN113243834A (en) * | 2021-03-10 | 2021-08-13 | 北京顺造科技有限公司 | Rolling brush assembly, cleaning head device, cleaning equipment and method |
-
2012
- 2012-08-23 CN CN 201220422568 patent/CN202860872U/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104043604A (en) * | 2014-06-26 | 2014-09-17 | 深圳市华星光电技术有限公司 | Cleaning brush structure |
| CN105665318A (en) * | 2014-11-18 | 2016-06-15 | 中国石油天然气股份有限公司 | Thread cleaning device |
| CN104858195A (en) * | 2015-06-17 | 2015-08-26 | 京东方科技集团股份有限公司 | Spray device and cleaning equipment |
| CN107234117A (en) * | 2016-03-28 | 2017-10-10 | 盟立自动化股份有限公司 | Wiper mechanism |
| CN107159602A (en) * | 2017-05-03 | 2017-09-15 | 深圳市华星光电技术有限公司 | Substrate cleaning apparatus |
| CN109037116A (en) * | 2018-08-31 | 2018-12-18 | 上海华力微电子有限公司 | Wafer cleaning device |
| CN109171539A (en) * | 2018-10-29 | 2019-01-11 | 谢丽华 | A kind of washer turns face toilet lid |
| CN109305538A (en) * | 2018-11-02 | 2019-02-05 | 河南昊化黎明智能清洗科技有限公司 | A kind of conveyer belt with cleaning function |
| CN113243834A (en) * | 2021-03-10 | 2021-08-13 | 北京顺造科技有限公司 | Rolling brush assembly, cleaning head device, cleaning equipment and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: JINGDONGFANG SCIENCE AND TECHNOLOGY GROUP CO., LTD Free format text: FORMER OWNER: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY CO., LTD. Effective date: 20150623 Owner name: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY Effective date: 20150623 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20150623 Address after: 100015 Jiuxianqiao Road, Beijing, No. 10, No. Patentee after: BOE TECHNOLOGY GROUP Co.,Ltd. Patentee after: BEIJING BOE OPTOELECTRONICS TECHNOLOGY Co.,Ltd. Address before: 100176 Beijing city in Western Daxing District economic and Technological Development Zone, Road No. 8 Patentee before: BEIJING BOE OPTOELECTRONICS TECHNOLOGY Co.,Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130410 Termination date: 20210823 |