CN202839553U - On-line cleaning and drying equipment for chip - Google Patents
On-line cleaning and drying equipment for chip Download PDFInfo
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- CN202839553U CN202839553U CN 201220386068 CN201220386068U CN202839553U CN 202839553 U CN202839553 U CN 202839553U CN 201220386068 CN201220386068 CN 201220386068 CN 201220386068 U CN201220386068 U CN 201220386068U CN 202839553 U CN202839553 U CN 202839553U
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Abstract
The utility model discloses on-line cleaning and drying equipment for chips, which comprises an automatic feeding mechanism, a spray type cleaning unit, a vacuum drying unit and a positioning bench. The vacuum drying unit comprises a frame. The middle part of the frame is provided with a pair of drying conveyor belts connected with the cleaning unit. The pair of drying conveyor belts is capable of supporting the two side edges of a chip while performing the horizontal movement. A push plate capable of being controlled by the mechanical power to jack up the chip to move up and down and positioned between the two drying conveyor belts is arranged on the frame below the two drying conveyor belts. A first vacuum chamber provided with a vacuum chuck and an infrared heating pipe is arranged right over the push plate. A second vacuum chamber arranged on one side of the first vacuum chamber and movably connected with the first vacuum chamber through a linkage mechanism is provided with a sealing structure matched with the lower end of the first vacuum chamber. One side of the second vacuum chamber, which is provided with the sealing structure corresponding to the first vacuum chamber, is provided with vacuum absorption holes corresponding to the chip. The on-line cleaning and drying equipment has the advantages of simple structure and artful design, which can automatically pick up a chip to carry out the spray type cleaning and vacuum drying operation on the chip. The chip is subjected to thermal drying under the vacuum environment, thus is protected from being damaged.
Description
Technical field
The utility model relates to a kind of plant equipment for the cleaning-drying chip, specifically a kind of plant equipment for the cleaning-drying microbe chip.
Background technology
In recent years, the microbial technique development is swift and violent, and microbe chip is widely used in the every field such as biology, medicine.The preparation process of microbe chip is quite strict, in the ways such as production, cutting, transportation, the surface of microbe chip is contaminated easily, and microbe chip as a kind of take micron as the preparation unit workpiece, workpiece must be through strict cleaning in the production, otherwise, even micropollution also can cause the inefficacy of final products device.Therefore, being washed to of microbe chip is important process procedure, and this cleaning process exigent cleanliness factor all.
The purpose of cleaning is to remove surface contamination impurity, comprises organic substance and inorganic matter.These impurity have with state of atom or ionic condition, what have is present in the surface with form of film or particle form.Wherein, organic contamination comprises grease or the fiber that organic solvent residual and people's contact devices, instrument, vessel bring.Inorganic pollution comprises heavy metal gold, copper, iron, chromium etc., and these pollutants have a strong impact on later stage product verification and measurement ratio; Particle contamination then comprises glass dregs, plastic grain, dust, bacterium, microbe, organic colloid fiber etc., can cause various defectives.Remove the method for polluting and comprise physical cleaning, two kinds of patterns of chemical cleaning.
After microbe chip cleans, for removing the remained on surface globule, also need carry out drying process, existing drying process over-borrowing helps dryer to carry out, and dryer dries up as main take cold wind, although can remove the globule, but may stay watermark, not only affect outward appearance, also may bring secondary pollution.What is more important, the cold wind oven dry might be broken the point sample on the meeting chip, perhaps the plated film material on the chip is damaged.
The utility model content
The utility model technical issues that need to address provide a kind of automaticity height, drying effect chip on-line cleaning good, not defective chip drying equipment.
For solving the problems of the technologies described above, the technical scheme that the utility model adopts is:
Chip on-line cleaning drying equipment, comprise the vacuum dryer that is arranged on the cleaning machine rear end, described vacuum dryer comprises frame, the middle part of frame arranges a pair of dry conveyer belt of holding the horizontal movement of chip dual-side that is connected cleaning machine, the push pedal that is moved up and down by machine power control jacking chip is set on the frame of below between the dry conveyer belt, be provided with the first vacuum chamber of vacuum cup and infrared heating pipe directly over the push pedal, one side setting of the first vacuum chamber is flexibly connected by linkage and the first vacuum chamber, the second vacuum chamber with the hermetically-sealed construction that mates with the first vacuum chamber lower end, the side that corresponding the first vacuum chamber of the second vacuum chamber arranges hermetically-sealed construction offers the vacuum suction hole corresponding with chip.
Further improvement of the utility model is: the top of described the second vacuum chamber arranges the hermetically-sealed construction that cooperates with the first vacuum chamber, the leading screw that the side cross-under that the first vacuum chamber is adjacent with the second vacuum chamber is controlled by servomotor, the two ends of leading screw are fixedly connected with two master connecting-rods that are positioned at the first vacuum chamber outside, the outer end of two master connecting-rods is hinged on respectively the centre position of the second vacuum chamber bottom, the two ends of leading screw also arrange two feed belts that are positioned at the first vacuum chamber outside, the outer end of two feed belts respectively connects a slave connecting rod that is fixed in the centre position of the first vacuum chamber bottom, and the outer end of two slave connecting rods is hinged on a side of adjacent the first vacuum chamber in the second vacuum chamber bottom.
Further improvement of the utility model is: described chip on-line cleaning drying equipment comprises that also some rear ends arrange the fountain cleaning device of wind cutting mechanism, described fountain cleaning device comprises the spray cabinets of sealing, top in the spray cabinets arranges the spray conveyer belt of a pair of carries chips dual-side, bottom in the spray cabinets arranges the first spray liquid container of sealing, the first spray liquid container connects two by the spray pipeline of water pump and solenoid control, described two spray pipelines lay respectively at the above and below of the chip that carries of spray conveyer belt and the nozzle of corresponding chip are set, spray conveyer belt bottom arranges the transition container of the raffinate behind the collection spray of a upper end open, and transition container is connected to the first spray liquid container by the pipeline that is provided with screen pack.
Further improvement of the utility model is: also arrange in the spray cabinets of described fountain cleaning device with the first spray liquid container and be arranged in parallel the second spray liquid container that is used for switching spray liquid below transition container.
The utility model further improves and is: described wind cutting mechanism comprises that the wind of sealing cuts cabinet, wind is cut the wind that a pair of transportation chip is set in the cabinet and is cut conveyer belt, the top that wind is cut conveyer belt arranges the first air compartment that is connected with some wind wind cutting machines, the first air compartment is communicated with the second air compartment that is positioned at wind and cuts conveyer belt below by intake stack, on the described intake stack pressure-reducing valve is set, the corresponding wind wind cutting of the first air compartment machine place is provided with wind and cuts screen pack, and the wind that is positioned at that the position that the corresponding wind of described the first air compartment and the second air compartment is cut conveyer belt arranges is in correspondence with each other cut the angled tangential air outlet of the vertical plane of conveyer belt and chip.
Further improvement of the utility model is: described chip on-line cleaning drying equipment also comprises and is positioned at the positioning table that chip is positioned that cleans the line end, described positioning table comprises support, what the following setting of support was corresponding with chip size promotes the lifting table top move up and down by lifting cylinder, the upper surface setting of support is around the detent mechanism that promotes table top, described detent mechanism comprises two adjacent fixed dams that are vertically fixed on rack upper surface, also comprises the active blade by the motion of actuating cylinder driving promotion chip that two relative fixed dams arrange.
Further improvement of the utility model is: described chip on-line cleaning drying equipment comprises fountain cleaning device, the fountain cleaning device of splendid attire deionized water, the fountain cleaning device of splendid attire pure water, the fountain cleaning device of splendid attire high purity water, vacuum dryer, the positioning table of the splendid attire chemical solution that arranges in turn.
Because the technological progress of having adopted technique scheme, the utility model to obtain is:
The chip on-line cleaning drying equipment of the utility model design; simple in structure, the design ingenious; need not be by manpower; the automatic Picking chip carries out that fountain cleans and vacuumize, and described operation all carries out in the structure of close encapsulation, avoids secondary pollution; special substance for chip designs under vacuum environment; heating power oven dry, the protection chip also reaches high-quality drying effect, the realization of the very big degree of the utility model the automation of production operation and the modernization of managerial skills.
Behind the dry conveyer belt receiving chip of described vacuum dryer, withstand chip by push pedal and move upward, arrive the first vacuum chamber below, chip is adsorbed by vacuum cup.Control servomotor, the second vacuum chamber move to the first vacuum chamber below, and with the sealing of the first vacuum chamber, and the vacuum suction hole of the second vacuum chamber is facing to vacuum cup.Vacuum cup discharges chip to the second vacuum chamber, and the vacuum pump of control connection the second vacuum chamber vacuumizes, the vacuum suction hole absorption chip of the second vacuum chamber, and the vacuum pump of control connection the first vacuum chamber vacuumizes subsequently, the infrared heating pipe heating.After drying is finished, the vacuum pump of the second vacuum chamber and the first vacuum chamber all quits work, discharge vacuum, the vacuum cup pick-up chip of the first vacuum chamber, control subsequently servomotor the second vacuum chamber is resetted, the push pedal of the first vacuum chamber below moves upward, and vacuum cup discharges chip to push pedal, push pedal moves downward subsequently chip is passed to dry conveyer belt, has carried out follow-up positioning process.Described vacuum dryer is for the characteristics of chip material, and dry by heating power, described vacuum suction hole adsorbs chip, avoids deforming when the first vacuum chamber vacuumizes, and utilizes the infrared heating pipe heating convenient and swift, and not to chip injury and pollution.The utility model utilizes vacuum state, reduces atmospheric pressure, reduce water boiling point, it is dry that heating reaches, and does like this when having protected the point sample on the chip, the plated film material is not destroyed yet.
Described positioning table at first promotes chip on the horizontal plane of detent mechanism by promoting table top, then take two adjacent fixed dams as benchmark, operates two active blade positioning chips, makes things convenient for the operation of pick-up chip in the subsequent technique.
Described fountain cleaning device is enclosed construction, and is not contaminated when guaranteeing spray.The spray conveyer belt that arranges is held two sides of chip, by two spray pipelines up and down spray irrigation is carried out in the above and below of chip, and cleaning process is simple, by water pump and solenoid control cleaning pressure and the water yield, reaches the cleaning requirement of chip.It is reusable by the screen pack filtration that raffinate behind the spray flows into transition container, energy savings.The checkout gear that detects spray liquid situation in the first spray liquid container and the second spray liquid container is set, spray liquid in the first spray liquid container is the time spent again, switches to the second spray liquid container, changes the first spray liquid container, can realize continuous wash, non-stop run.The high-pressure blast of described wind cutting mechanism is cut screen pack through wind and is entered the first air compartment, part high-pressure blast blows out along the air outlet of the first air compartment, the air knife that forms is striking cover plate at a certain angle, another part high-pressure blast blows out through the air outlet of pressure-reducing valve from the second air compartment along intake stack, forming air knife carries out air-dry to the back side of chip, wind-force is evenly constant, removes the liquid and the part pollutant that remain in chip surface.And the blast of the first air compartment is set greater than the blast of the second air compartment, prevents that chip from being blown afloat.
Description of drawings
Fig. 1 is the structural representation of a kind of embodiment of the present utility model;
Fig. 2 is the structural representation of vacuum dryer of the present utility model;
Fig. 3 is the structural representation of the linkage of vacuum dryer of the present utility model;
Fig. 4 is the cutaway view of vacuum dryer of the present utility model;
Fig. 5 is the internal structure schematic diagram of spray cabinets of the present utility model;
Fig. 6 is the structural representation of wind cutting mechanism of the present utility model;
Fig. 7 is the right view of Fig. 6;
Fig. 8 is the structural representation of automatic feed mechanism of the present utility model;
Fig. 9 is the structural representation of positioning table of the present utility model.
Wherein, 1, frame, 2, dry conveyer belt, 3, the thrust cylinder, 4, push pedal, the 5, first vacuum chamber, 6, the second vacuum chamber, 7, vacuum cup, 8, infrared heating pipe, 9, the vacuum suction hole, 101, servomotor, 102, leading screw, 103, master connecting-rod, 104, feed belt, 105, slave connecting rod
21, the first spray liquid container, the 22, second spray liquid container, 23, transition container, 24, the spray conveyer belt, 25, screen pack, 26, electromagnetically operated valve, 27, water pump, 28, spray pipeline, 29, nozzle,
31, wind is cut cabinet, and 32, wind cuts conveyer belt, 33, wind wind cutting machine, the 34, first air compartment, the 35, second air compartment, 36, intake stack, 37, pressure-reducing valve, 38, wind cuts screen pack, 39, tangential air outlet,
41, bracing frame, 42, draw-in groove, 43, conveyer belt,
51, support, 52, promote table top, 53, lifting cylinder, 54, fixed dam, 55, active blade, 56, actuating cylinder,
A, automatic feed mechanism, B, vacuum dryer, C, wind cutting mechanism, D, spray cabinets, E, positioning table, F, chip.
Embodiment
Below in conjunction with embodiment the utility model is described in further details:
Chip on-line cleaning drying equipment comprises automatic feeding mechanism A, fountain cleaning device, vacuum dryer B, positioning table E.
Described automatic feed mechanism A is arranged on the front end of First on-line cleaning drying equipment, such as Fig. 1 and shown in Figure 8, automatic feed mechanism A is engaged on the front end of fountain cleaning device, supported by bracing frame 41 that spray conveyer belt in a pair of and the fountain cleaning device is integrated or the double-chain conveyer belt 43 of split, the draw-in groove 42 that the arranged outside of conveyer belt 43 is fixing, the size of draw-in groove 42 is corresponding with chip size, is used for the chip F that is placed on it is carried out Primary Location.
Described fountain cleaning device comprises spray cabinets D and wind cutting mechanism C two parts shown in Fig. 5～7.
Described spray cabinets D as shown in Figure 5, the top in the spray cabinets D arranges the side that 24, two spray conveyer belts 24 of a pair of spray conveyer belt are held respectively chip F, the tow sides of chip center's part do not contact with the spray conveyer belt.The below of two the spray conveyer belts 24 in middle part of spray cabinets D arranges the transition container 23 of a upper end open, and the first spray liquid container 21 and the second spray liquid container 22 of sealing is set below the transition container 23.Connect the pipeline with screen pack 25 below the transition container 23, this pipeline is divided into two branch roads, connects respectively the first spray liquid container 21 and the second spray liquid container 22.On described pipeline and two branch roads electromagnetically operated valve 26 is set all.Described the first spray liquid container 21 be connected spray liquid container 22 and also all connect a fluid pipeline, on each fluid pipeline electromagnetically operated valve 26 is set also, it is a main pipe rail that is provided with water pump 27 that the fluid pipeline gathers, main pipe rail branches into two spray pipelines 28 at spray conveyer belt 24 places, article two, spray pipeline 28 lays respectively at the above and below of the chip F that carries of spray conveyer belt 24, and on two spray pipelines 28 electromagnetically operated valve 26 is set also.Described the first spray liquid container and the second spray liquid container arrange the checkout gear that detects the spray liquid situation.During work, spray liquid in the first spray liquid container 21 is transported to spray pipeline 28 by electromagnetically operated valve 26 and water pump 27 controls, the tow sides of 29 pairs of chips of nozzle of spray pipeline wash, residual spray liquid after the flushing flows into transition container 23, and the raffinate in the transition container 23 is back in the first spray liquid container 21 after filtering through screen pack 25.Spray liquid in checkout gear detects the first spray liquid container 21 is the time spent again, and electromagnetically operated valve 26 control fluid pipelines switch to the second spray liquid container 22, change the first spray liquid container 21, can realize continuous wash, non-stop run.
Described wind cutting mechanism C as shown in Figure 6 and Figure 7, wind cutting mechanism C is used for the chip behind the spray is carried out cold air drying, removes surface spraying liquid.The wind that comprises sealing is cut cabinet 31, and wind is cut the cabinet 31 interior wind that the next chip of a pair of linking spray conveyer belt transportation is set and cut conveyer belt 32.It is the same with spray conveyer belt 24 structures that wind is cut conveyer belt 32.The top that wind is cut conveyer belt 32 arranges the first air compartment 34, the first air compartments 34 corresponding wind wind cutting machine places be connected with some wind wind cutting machines 33 and is provided with wind and cuts screen pack 38, and air-out is stable.Wind is cut conveyer belt 32 belows and the second air compartment 35, the first air compartments 34 are set are communicated with the second air compartment 35 by intake stack 36, on the described intake stack 36 pressure-reducing valve 37 is set, and guarantees that the interior blast of the first air compartment 34 is greater than the blast of the second air compartment 35.Described the first air compartment 34 and the second air compartment 35 corresponding wind are cut the position setting tangential air outlet 39 in correspondence with each other of conveyer belt 32, and as shown in Figure 7, described tangential air outlet 39 is positioned at the vertical plane that wind is cut conveyer belt, and become 60 degree angles with chip.
Described vacuum dryer B comprises frame 1 shown in Fig. 2～4, the middle part of frame 1 arranges a pair of dry conveyer belt 2 that is connected the fountain cleaning device, and dry conveyer belt 2 is taked double chain framework, holds respectively the horizontal movement of chip F dual-side.As shown in Figure 4, on the frame 1 of below a thrust cylinder 3 is set between the dry conveyer belt 2, the top of thrust cylinder 3 connects a push pedal 4, and the width of push pedal 4 is less than the spacing between the dry conveyer belt 2.Arrange directly over the push pedal 4 in vacuum cup 7, the first vacuum chambers 5 of the first vacuum chamber 5, the first vacuum chambers 5 interior settings by the correspondence absorption chip of vacuum pump control and also be provided with infrared heating pipe 8.As shown in Figure 2, a side setting of the first vacuum chamber 5 is flexibly connected the second vacuum chamber 6 by linkage.The second vacuum chamber 6 tops have the hermetically-sealed construction with the first vacuum chamber 5 lower ends coupling, and the upper surface of the second vacuum chamber 6 also offers the vacuum suction hole 9 corresponding with chip F.Described linkage as shown in Figure 3, the side cross-under adjacent with the second vacuum chamber 6 of the first vacuum chamber 5 is by the leading screw 102 of servomotor 101 controls, the two ends of leading screw 102 are fixedly connected with two master connecting-rods 103 that are positioned at the first vacuum chamber 5 outsides, the outer end of two master connecting-rods 103 is hinged on respectively the centre position of the second vacuum chamber 6 bottoms, the two ends of leading screw 102 also arrange two feed belts 104 that are positioned at the first vacuum chamber 5 outsides, the outer end of two feed belts 104 respectively connects the side that an outer end of slave connecting rod 105, two slave connecting rods 105 of being fixed in the centre position of the first vacuum chamber 5 bottoms is hinged on adjacent the first vacuum chamber 5 in the second vacuum chamber 6 bottoms.Open servomotor 101, leading screw 102 rotations, driving master connecting-rod 103 turns clockwise take leading screw 102 as axle, feed belt 104 also clockwise rotates simultaneously, drive slave connecting rod 105 to turn clockwise synchronously as axle with the junction of the first vacuum chamber 5, thereby drive the second vacuum chamber 6 clockwise arcs and rotate to the first vacuum chamber 5 belows, and be hermetically-sealed construction with the first vacuum chamber 5 fastenings.
Described positioning table E is arranged on the rear end of production line, as shown in Figure 7.Described positioning table E comprises support 51, and the lifting table top 52 that the following setting of support 51 is corresponding with chip size promotes table top 52 and accepts from the next chip F of a upper equipment transmission.The lower end of lifting table top 52 is fastened on the lifting cylinder 53 on the support 51, and lifting cylinder 53 promotes to promote table tops 52 and moves up and down, thereby the chip F on the transportation lifting table top 52 makes progress or moves downward.The upper surface setting of support 51 is around the detent mechanism that promotes table top 52.Described detent mechanism comprises the fixed dam 54 of two adjacent settings, and fixed dam 54 is vertically fixed on the upper surface of support.The opposite of two fixed dams 54 arranges active blade 55, and active blade is driven towards by the actuating cylinder 56 that is installed in active blade 55 back or deviates from fixed dam 54 and move.
In the utility model owing to be provided with uniform specification, the conveyer belt that overlaps, the quantity of fountain cleaning device can be done suitable adjustment, and according to cleaning requirement cleaning liquid is wherein made change, a kind of embodiment as shown in Figure 1 comprises the automatic feed mechanism, the fountain cleaning device of splendid attire chemicals, the fountain cleaning device of splendid attire deionized water, the fountain cleaning device of splendid attire pure water, the fountain cleaning device of splendid attire ultra-pure water, vacuum dryer, the positioning table that arrange in turn.But it is worthy of note, be not this a kind of embodiment of enumerating in this specification and in practical operation in the actual production, should cut the filters such as screen pack to described screen pack, the wind of comprising, all does regular detection and replacing together with cleaning liquid etc.
Claims (7)
1. chip on-line cleaning drying equipment, it is characterized in that: comprise the vacuum dryer that is arranged on the cleaning machine rear end, described vacuum dryer (B) comprises frame (1), the middle part of frame (1) arranges a pair of dry conveyer belt (2) of holding the horizontal movement of chip (F) dual-side that is connected cleaning machine, the upper setting by machine power of the frame (1) of below controlled the push pedal (4) that jacking chip (F) moves up and down between the dry conveyer belt (2), be provided with first vacuum chamber (5) of vacuum cup (7) and infrared heating pipe (8) directly over the push pedal (4), one side setting of the first vacuum chamber (5) is flexibly connected by linkage and the first vacuum chamber (5), have second vacuum chamber (6) of the hermetically-sealed construction that mates with the first vacuum chamber (5) lower end, the side that corresponding the first vacuum chamber of the second vacuum chamber (6) (5) arranges hermetically-sealed construction offers the vacuum suction hole (9) corresponding with chip (F).
2. chip on-line cleaning drying equipment according to claim 1, it is characterized in that: the top of described the second vacuum chamber (6) arranges the hermetically-sealed construction that cooperates with the first vacuum chamber (5), the leading screw (102) that the side cross-under that the first vacuum chamber (5) is adjacent with the second vacuum chamber (6) is controlled by servomotor (101), the two ends of leading screw (102) are fixedly connected with two master connecting-rods (103) that are positioned at the first vacuum chamber (5) outside, the outer end of two master connecting-rods (103) is hinged on respectively the centre position of the second vacuum chamber (6) bottom, the two ends of leading screw (102) also arrange two feed belts (104) that are positioned at the first vacuum chamber (5) outside, the outer end of two feed belts (104) respectively connects a slave connecting rod (105) that is fixed in the centre position of the first vacuum chamber (5) bottom, and the outer end of two slave connecting rods (105) is hinged on a side of the second vacuum chamber (6) adjacent the first vacuum chamber in bottom (5).
3. chip on-line cleaning drying equipment according to claim 1 and 2, it is characterized in that: described chip on-line cleaning drying equipment comprises that also some rear ends arrange the fountain cleaning device of wind cutting mechanism (C), described fountain cleaning device comprises the spray cabinets (D) of sealing, top in the spray cabinets (D) arranges the spray conveyer belt (24) of a pair of carries chips dual-side, bottom in the spray cabinets (D) arranges the first spray liquid container (21) of sealing, the first spray liquid container (21) connects two by the spray pipeline (28) of water pump (27) and electromagnetically operated valve (26) control, described two spray pipelines (28) lay respectively at the above and below of the chip (F) that carries of spray conveyer belt (24) and the nozzle (29) of corresponding chip (F) are set, spray conveyer belt (24) bottom arranges the transition container (23) of the raffinate behind the collection spray of a upper end open, and transition container (23) is connected to the first spray liquid container (21) by the pipeline that is provided with screen pack (25).
4. chip on-line cleaning drying equipment according to claim 3 is characterized in that: also arrange in the spray cabinets of described fountain cleaning device (D) with the first spray liquid container (21) and be arranged in parallel the second spray liquid container (22) that is used for switching spray liquid in transition container (23) below.
5. chip on-line cleaning drying equipment according to claim 3, it is characterized in that: described wind cutting mechanism (C) comprises that the wind of sealing cuts cabinet (31), wind is cut the wind that a pair of transportation chip (F) is set in the cabinet (31) and is cut conveyer belt (32), the top that wind is cut conveyer belt (32) arranges the first air compartment (34) that is connected with some wind wind cutting machines (33), the first air compartment (34) is communicated with the second air compartment (35) that is positioned at wind and cuts conveyer belt (32) below by intake stack (36), pressure-reducing valve (37) is set on the described intake stack (36), the first air compartment (34) corresponding wind wind cutting machine (33) is located to be provided with wind and is cut screen pack (38), and the wind that is positioned at that the position that described the first air compartment (34) and the corresponding wind of the second air compartment (35) are cut conveyer belt (32) arranges is in correspondence with each other cut the vertical plane of conveyer belt (32) and become angled tangential air outlet (39) with chip (F).
6. chip on-line cleaning drying equipment according to claim 1 and 2, it is characterized in that: described chip on-line cleaning drying equipment also comprises and is positioned at the positioning table (E) that chip is positioned that cleans the line end, described positioning table (E) comprises support (51), what the following setting of support (51) was corresponding with chip (F) size promotes the lifting table top (52) move up and down by lifting cylinder (53), the upper surface setting of support (51) is around the detent mechanism that promotes table top (52), described detent mechanism comprises two adjacent fixed dams (54) that are vertically fixed on support (51) upper surface, also comprises the active blade (55) by actuating cylinder (56) driving promotion chip (F) motion that two relative fixed dams (54) arrange.
7. chip on-line cleaning drying equipment according to claim 1 and 2 is characterized in that: described chip on-line cleaning drying equipment comprises fountain cleaning device, the fountain cleaning device of splendid attire deionized water, the fountain cleaning device of splendid attire pure water, the fountain cleaning device of splendid attire high purity water, vacuum dryer, the positioning table of the splendid attire chemical solution that arranges in turn.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220386068 CN202839553U (en) | 2012-07-26 | 2012-07-26 | On-line cleaning and drying equipment for chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220386068 CN202839553U (en) | 2012-07-26 | 2012-07-26 | On-line cleaning and drying equipment for chip |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202839553U true CN202839553U (en) | 2013-03-27 |
Family
ID=47951195
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220386068 Withdrawn - After Issue CN202839553U (en) | 2012-07-26 | 2012-07-26 | On-line cleaning and drying equipment for chip |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202839553U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102820242A (en) * | 2012-07-26 | 2012-12-12 | 江阴迪林生物电子技术有限公司 | Online chip cleaning and drying equipment |
| CN112366155A (en) * | 2020-11-10 | 2021-02-12 | 西安微电子技术研究所 | Vacuum vapor phase cleaning jig and method for thick film deep cavity hybrid integrated circuit |
-
2012
- 2012-07-26 CN CN 201220386068 patent/CN202839553U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102820242A (en) * | 2012-07-26 | 2012-12-12 | 江阴迪林生物电子技术有限公司 | Online chip cleaning and drying equipment |
| CN102820242B (en) * | 2012-07-26 | 2014-11-19 | 江阴迪林生物电子技术有限公司 | Online chip cleaning and drying equipment |
| CN112366155A (en) * | 2020-11-10 | 2021-02-12 | 西安微电子技术研究所 | Vacuum vapor phase cleaning jig and method for thick film deep cavity hybrid integrated circuit |
| CN112366155B (en) * | 2020-11-10 | 2023-06-09 | 西安微电子技术研究所 | Vacuum vapor phase cleaning jig and method for thick film deep cavity hybrid integrated circuit |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20130327 Effective date of abandoning: 20141119 |
|
| RGAV | Abandon patent right to avoid regrant |