CN202804411U - Chain type vacuum furnace - Google Patents
Chain type vacuum furnace Download PDFInfo
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- CN202804411U CN202804411U CN 201220524372 CN201220524372U CN202804411U CN 202804411 U CN202804411 U CN 202804411U CN 201220524372 CN201220524372 CN 201220524372 CN 201220524372 U CN201220524372 U CN 201220524372U CN 202804411 U CN202804411 U CN 202804411U
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Abstract
The utility model discloses a chain type vacuum furnace which comprises a material pre-loaded furnace chamber, a sintering and heating furnace chamber, a pre-cooling furnace chamber and a cooling furnace chamber which are sequentially distributed along the horizontal direction. Every two adjacent furnace chambers are connected with each other through a flange and a heat insulation door gate valve is arranged between every two furnace chambers. When the heat insulation door gate valve is opened, the two adjacent furnace chambers are communicated; when the heat insulation door gate valve is closed, the two adjacent furnace chambers are separated in a sealing mode. Each furnace chamber is provided with an independent vacuum-pumping system.
Description
Technical field
The utility model relates to a kind of chain type vacuum drying oven.
Background technology
High-temperature soldering in the glass sealed diode assembling process adopts traditional chain-conveyer furnace or vacuum drying oven at present, and chain-conveyer furnace welding chip (in glass tube) between two electrodes can't be fixed, electrically less stable; Though vacuum drying oven can satisfy electrical requirement, follow the traditional chain bar oven to compare and exist energy waste many, the defective that production capacity is low.
Summary of the invention
The utility model purpose is: in order to address the above problem, provide a kind of chain type vacuum drying oven.
The technical solution of the utility model is: a kind of chain type vacuum drying oven, comprise pre-charging furnace chamber, sintering heated oven chamber, precooling furnace chamber and cooling furnace chamber that along continuous straight runs is arranged in turn, all link together by flange between every adjacent two furnace chambers, be provided with the insulated door slide valve between every adjacent two furnace chambers, when described insulated door slide valve is opened, be communicated with between adjacent two furnace chambers; When described insulated door slide valve is closed, seals between adjacent two furnace chambers and separate; And each furnace chamber is provided with independently pumped vacuum systems, wherein:
Described pre-charging furnace chamber is provided with the charging fire door, and the furnace chamber inside of feeding in advance is provided with can be with the feed mechanism I in the extremely described sintering of the workpiece automatic transport in the furnace chamber of feeding the in advance heated oven chamber;
Described sintering heated oven chamber is provided with the heating system of workpiece being carried out the sintering heating;
Described precooling furnace chamber and cooling furnace chamber are provided with cooling system, and the inside of precooling furnace chamber is provided with the material fetching mechanism I that the workpiece in the described sintering heated oven chamber can be taken in this precooling furnace chamber; The cooling furnace chamber is provided with discharging door, and the cool furnace chamber interior is provided with and the workpiece in the precooling furnace chamber can be taken to the indoor material fetching mechanism II of this cool furnace.
Each furnace chamber is provided with independently vacuum detecting system.
Described feed mechanism I consists of by the feeding track of level run and for the reducing motor that drives this feeding track motion.
Described pre-charging furnace chamber outer setting has feeding rack, feeding rack is provided with the feed mechanism II that workpiece can be transported in the pre-charging furnace chamber, this feed mechanism II consists of by the feeding track of level run and for the reducing motor that drives this feeding track motion, and the feeding track on the feeding rack docks with feeding track in the described pre-charging furnace chamber.
Described material fetching mechanism I and material fetching mechanism II are by the feeding track of level run and the reducing motor formation that is used for driving this feeding orbital motion.
Described cool furnace outdoor is provided with discharge rack, discharge rack is provided with the material fetching mechanism III that the workpiece in the cooling feeding furnace chamber can be taken on this discharge rack, this material fetching mechanism III by the feeding track of level run and the reducing motor that is used for driving this feeding track motion consist of and the indoor feeding orbital docking of the feeding track of material fetching mechanism III and cool furnace.
Described heating system comprises the square heated chamber in the body of heater that is arranged on sintering heated oven chamber and the heating molybdenum band of dividing equally layout along described heated chamber inwall, described heated chamber is provided with the insulation screen outward, this thermal insulation separation heat shielding is bolted greater than the high temperature resistant stainless steel sheet of 0.5mm by multi-layered thickness and forms, and described heating molybdenum band is bolted on the internal protecting wall of sintering heated oven chamber by refractory ceramics and metal molybdenum.
Be provided with the thermal insulation separation thermosphere on the internal protecting wall of described precooling furnace chamber.
Described cooling system is made of high pressure positive blower, high-performance heat exchanger and deflector.
The utility model has the advantages that: chain type vacuum drying oven of the present utility model improves energy waste under the early stage that guarantees the high-temperature soldering product quality, promote simultaneously production capacity.
Description of drawings
Below in conjunction with drawings and Examples the utility model is further described:
Fig. 1 is the structural representation of the utility model chain type vacuum drying oven;
Fig. 2 is the top view of Fig. 1;
Wherein: 1 pre-charging furnace chamber, 2 sintering heated oven chamber, 3 precooling furnace chambers, 4 cooling furnace chambers, 5 flanges, 6 feeding racks, 7 discharge racks, 8 insulated door slide valves, 10 workpiece;
1-1 charging fire door, 1-2 feed mechanism I;
2-1 thermal insulation separation heat shielding, 2-2 heated chamber, 2-3 heating molybdenum band;
3-1 material fetching mechanism I, 3-2 thermal insulation separation thermosphere;
4-1 feeding fire door, 4-2 material fetching mechanism II;
6-1 feed mechanism II;
7-1 material fetching mechanism III.
The specific embodiment
As depicted in figs. 1 and 2, the chain type vacuum drying oven of present embodiment comprises pre-charging furnace chamber 1, sintering heated oven chamber 2, precooling furnace chamber 3 and cooling furnace chamber 4 that along continuous straight runs is arranged in turn, all links together at any time dismounting by flange 5 between every adjacent two furnace chambers.And be provided with insulated door slide valve 8 between every adjacent two furnace chambers, when described insulated door slide valve 8 is opened, be communicated with between adjacent two furnace chambers; When described insulated door slide valve 8 is closed, seals between adjacent two furnace chambers and separate.The unlatching of insulated door slide valve is finished by air cylinder driven.
And, each furnace chamber is provided with independently pumped vacuum systems and independently vacuum detecting system, wherein: pumped vacuum systems can independently vacuumize processing to each furnace chamber---vacuumize after displacing air in the furnace chamber with high purity inert gas (such as nitrogen), to realize the high vacuum low-oxygen environment in the furnace chamber, can make the gas pressure in the furnace chamber reach 0.67Pa; The vacuum detecting system is for detection of the vacuum of each furnace chamber, and when the furnace pressure of adjacent two furnace chambers kept in a basic balance, middle insulated door slide valve 8 could be opened.
The body of heater of above-mentioned each furnace chamber is the cylindrical horizontal structure, and the furnace wall of each furnace chamber all is designed to the Double water-cooled structure, and internal layer is stainless steel, the manufacturing of outer employing quality carbon steel.
Described pre-charging furnace chamber 1 is provided with charging fire door 1-1, and furnace chamber 1 inside of feeding in advance is provided with can be with the feed mechanism I 1-2 in the extremely described sintering of workpiece 10 automatic transport in the furnace chamber of feeding the in advance heated oven chamber 2.In this example, described feed mechanism I 1-2 consists of by the feeding track of level run and for the reducing motor that drives this feeding track motion.Pre-charging furnace chamber 1 both can keep opening under the vacuum state charging fire door in sintering heated oven chamber 2 and realize charging, also can realize independently vacuumizing, and under vacuum state workpiece 10 is sent into sintering heated oven chamber 2 and carries out sintering.
Described sintering heated oven chamber 2 is provided with the heating system of workpiece 10 being carried out the sintering heating.In the present embodiment, described heating system comprises the square heated chamber 2-2 in the body of heater that is arranged on sintering heated oven chamber 2 and the heating molybdenum band 2-3 that divides equally layout along described heated chamber 2-2 inwall, described heated chamber 2-2 is provided with insulation screen 2-1 outward, this thermal insulation separation heat shielding is bolted greater than the high temperature resistant stainless steel sheet of 0.5mm by multi-layered thickness and forms, described heating molybdenum band is bolted on the internal protecting wall of sintering heated oven chamber by refractory ceramics and metal molybdenum, can guarantee that long-term use is indeformable, the life-span is long, can guarantee the uniformity of heating simultaneously.
Three thermals treatment zone before, during and after above-mentioned heated chamber 2-2 is divided into are to reduce the temperature difference in the heated oven chamber; Add three controllable silicon heating transformers of thermal recovery, heat in the low-voltage and high-current mode, temperature control realizes closed loop control, can realize that the PID of temperature regulates automatically.
The inside of described precooling furnace chamber 3 is provided with the material fetching mechanism I 3-1 that the workpiece 10 in the described sintering heated oven chamber 2 can be taken in this precooling furnace chamber 3.And, be provided with thermal insulation separation thermosphere 3-2 on the internal protecting wall of precooling furnace chamber 3, this thermal insulation separation thermosphere 3-2 can guarantee just that from sintering heated oven chamber 2 high temperature workpiece 10 out slowly is down to a certain temperature value, Workpiece structure and the workpiece performance compromise of having avoided high temperature workpiece 10 to cause because of reduces heat.
Described precooling furnace chamber 3 and cooling furnace chamber 4 are equipped with cooling system, and described cooling system mainly is made of high pressure positive blower, high-performance heat exchanger and deflector, the gases used inert gas that is.When the workpiece 10 in the cooling furnace chamber 4 is cooled off, can start described high pressure positive blower to the indoor high pure nitrogen that is filled with certain pressure of cool furnace, this moment, high velocity air sprayed to workpiece 10 through deflector, cool off by efficient heat exchanger from workpiece thermal current out, thereby spray to the quick cooling that workpiece 10 is realized workpiece through high pressure positive blower again.Cooling furnace chamber 4 is provided with discharging door 4-1, and cooling furnace chamber 4 inside are provided with the material fetching mechanism II 4-2 that the workpiece 10 in the described precooling furnace chamber 3 can be taken in this cooling furnace chamber 4.Cooling furnace chamber 4 is used for the fast cooling of workpiece 10, so the thermal insulation separation heat shielding that shields is not set in it.
Described material fetching mechanism I 3-1 and material fetching mechanism II 4-2 are by the feeding track of level run and the reducing motor formation that is used for driving this feeding orbital motion.
Discharging door 4-1 on charging fire door 1-1 on the described pre-charging furnace chamber 1 and the cooling furnace chamber 4 is welded by double-layer circular end socket and round flange, logical cooling water in the fire door, the fire door middle part is provided with observation window, the fire door flange is provided with seal groove in order to sealing ring is installed, and is made into hinge type by steel plate between fire door and the body of heater and is connected.
Described pre-charging furnace chamber 1 outer setting has feeding rack 6, and feeding rack 6 is provided with the feed mechanism II 6-1 that workpiece 10 can be transported in the pre-charging furnace chamber 1.This feed mechanism II 6-1 consists of by the feeding track of level run and for the reducing motor that drives this feeding track motion, and described feeding track can dock with described pre-charging furnace chamber 1 interior feeding track.
Described cooling furnace chamber 4 outer setting have discharge rack 7, discharge rack 7 is provided with the material fetching mechanism III 7-1 that the workpiece 10 in the cooling feeding furnace chamber 4 can be taken on this discharge rack 7, this material fetching mechanism III 7-1 by the feeding track of level run and the reducing motor that is used for driving this feeding track motion consist of, and the feeding track of material fetching mechanism III 7-1 can with cooling furnace chamber 4 in the feeding orbital docking.
Shown in seeing figures.1.and.2, existing workflow with present embodiment chain type vacuum drying oven is summarized as follows:
1) make the insulated door slide valve 8 between each furnace chamber be in closure state, sealing separates between each furnace chamber thereby allow, and closes simultaneously the discharging door 4-1 of cooling furnace chamber 4.Open the pumped vacuum systems of sintering heated oven chamber 2, precooling furnace chamber 3 and cooling furnace chamber 4, heated oven chamber 2, precooling furnace chamber 3 and cooling furnace chamber 4 are carried out application of vacuum, make these three furnace chambers be in vacuum (low-oxygen environment: use the high pure nitrogen displaced air), open simultaneously the heating system of heating clamber 2 to assigned temperature.
2) workpiece 10 is placed on the feeding rack 6, controls the reducing motor of feed mechanism II 6-1 on the feeding rack 6, make feeding track drive workpiece 10 level runs, workpiece 10 enters in the pre-charging furnace chamber 1 along the feeding track in the pre-charging furnace chamber 1.
3) close the charging fire door 1-1 of pre-charging furnace chamber 1, open the pumped vacuum systems of pre-charging furnace chamber 1, pre-charging furnace chamber 1 is carried out the nitrogen replacement air-treatment, make pre-charging furnace chamber 1 be in vacuum (low-oxygen environment: use the high pure nitrogen displaced air).
4) be evacuated to furnace pressure with sintering heated oven chamber 2 when suitable (judging by the information that the vacuum detecting system provides) when the furnace pressure of pre-charging furnace chamber 1, open the insulated door slide valve 8 between pre-charging furnace chamber 1 and the sintering heated oven chamber 2, these two furnace chambers are connected.
5) control the reducing motor of pre-charging furnace chamber 1 interior feed mechanism I 1-2, feeding track is driven among the square heated chamber 2-2 of workpiece 10 level runs to the sintering heated oven chamber 2, close the insulated door slide valve 8 between pre-charging furnace chamber 1 and the sintering heated oven chamber 2, heating system is carried out the sintering heat treated to workpiece 10 by certain program again.
6) after the sintering heat treated of workpiece 10 is finished, the pressure of regulating precooling furnace chamber 3 makes it suitable in the furnace pressure of sintering heated oven chamber 2, opens the insulated door slide valve 8 between sintering heated oven chamber 2 and the precooling furnace chamber 3, and these two furnace chambers are connected.
7) the material fetching mechanism I 3-1 that controls in the precooling furnace chamber 3 fetches and delivers workpiece 10 on the feeding track of material fetching mechanism I 3-1, and the control reducing motor makes the feeding track ribbon start building part 10 level runs to precooling furnace chamber 3.Close again the insulated door slide valve 8 between sintering heated oven chamber 2 and the precooling furnace chamber 3, open the cooling system of precooling furnace chamber 3 after the set point of temperature when drop in temperature, workpiece 10 is carried out precooling treatment, make workpiece be down to a certain medium temperature.
8) pumped vacuum systems of control cooling furnace chamber 4 makes the furnace pressure of cooling furnace chamber 4 suitable with the furnace pressure of precooling furnace chamber 3, opens precooling furnace chamber 3 and cools off insulated door slide valve 8 between the furnace chamber 4, and these two furnace chambers are connected.
9) the material fetching mechanism II 4-2 in the cooling furnace chamber 4 fetches and delivers workpiece 10 on the feeding track of material fetching mechanism II 4-2, the control reducing motor makes the feeding track ribbon start building part 10 level runs to cooling off in the furnace chamber 4, close again the insulated door slide valve 8 between precooling furnace chamber 3 and the cooling furnace chamber 4, open the cooling system of cooling furnace chamber 4, make workpiece 10 be quickly cooled to safe temperature (temperature difference when making workpiece go out to cool off furnace chamber does not affect workpiece outward appearance and performance).
10) pumped vacuum systems of control cooling furnace chamber 4 makes the furnace pressure of this furnace chamber suitable with ambient pressure, opens the discharging door of cooling furnace chamber 4.Start the material fetching mechanism III 7-1 on the discharge rack 7, the workpiece 10 that cooling is good is taken on the discharge rack 7, carries out, and closes the feeding fire door again.
The chain type vacuum drying oven of present embodiment adopts the PLC programmable controller that each mechanical action is controlled, and can realize vacuumizing, inflation/deflation, slide valve keying, input and output material, the change of heating-up temperature follow procedure, precooling furnace chamber 3 reach the whole of action such as opening cooling system after the uniform temperature and automatically control.
Certainly, above-described embodiment only is explanation technical conceive of the present utility model and characteristics, and its purpose is to allow people can understand content of the present utility model and implements according to this, can not limit protection domain of the present utility model with this.All equivalent transformation or modifications of doing according to the Spirit Essence of the utility model main technical schemes all should be encompassed within the protection domain of the present utility model.
Claims (9)
1. chain type vacuum drying oven, it is characterized in that pre-charging furnace chamber (1), sintering heated oven chamber (2), precooling furnace chamber (3) and cooling furnace chamber (4) that this chain type vacuum drying oven comprises along continuous straight runs and arranges in turn, all link together by flange (5) between every adjacent two furnace chambers, be provided with insulated door slide valve (8) between every adjacent two furnace chambers, when described insulated door slide valve (8) is opened, be communicated with between adjacent two furnace chambers; When described insulated door slide valve (8) is closed, seals between adjacent two furnace chambers and separate; And each furnace chamber is provided with independently pumped vacuum systems, wherein:
Described pre-charging furnace chamber (1) is provided with charging fire door (1-1), and furnace chamber (1) inside of feeding in advance is provided with can be with workpiece (10) automatic transport in the furnace chamber of feeding in advance to the interior feed mechanism I (1-2) of described sintering heated oven chamber (2);
Described sintering heated oven chamber (2) is provided with the heating system of workpiece (10) being carried out the sintering heating;
Described precooling furnace chamber (3) and cooling furnace chamber (4) are provided with cooling system, and the inside of precooling furnace chamber (3) is provided with the material fetching mechanism I (3-1) that the workpiece (10) in the described sintering heated oven chamber (2) can be taken in this precooling furnace chamber (3); Cooling furnace chamber (4) is provided with discharging door (4-1), and cooling furnace chamber (4) inside is provided with the material fetching mechanism II (4-2) that the workpiece (10) in the precooling furnace chamber (3) can be taken in this cooling furnace chamber (4).
2. chain type vacuum drying oven according to claim 1, it is characterized in that: each furnace chamber is provided with independently vacuum detecting system.
3. chain type vacuum drying oven according to claim 1 is characterized in that: described feed mechanism I (1-2) by the feeding track of level run and the reducing motor that is used for driving this feeding track motion consist of.
4. chain type vacuum drying oven according to claim 3, it is characterized in that: described pre-charging furnace chamber (1) outer setting has feeding rack (6), feeding rack (6) is provided with the feed mechanism II (6-1) that workpiece (10) can be transported in the pre-charging furnace chamber (1), this feed mechanism II (6-1) consists of by the feeding track of level run and for the reducing motor that drives this feeding track motion, and the feeding track on the feeding rack (6) docks with the interior feeding track of described pre-charging furnace chamber (1).
5. chain type vacuum drying oven according to claim 1 is characterized in that: described material fetching mechanism I (3-1) and material fetching mechanism II (4-2) by the feeding track of level run and the reducing motor that is used for driving this feeding orbital motion consist of.
6. chain type vacuum drying oven according to claim 5, it is characterized in that: described cooling furnace chamber (4) outer setting has discharge rack (7), discharge rack (7) is provided with the material fetching mechanism III (7-1) that the workpiece (10) in the cooling feeding furnace chamber (4) can be taken on this discharge rack (7), this material fetching mechanism III (7-1) consists of by the feeding track of level run and for the reducing motor that drives this feeding track motion, and the feeding track of material fetching mechanism III (7-1) the feeding orbital docking interior with cooling off furnace chamber (4).
7. chain type vacuum drying oven according to claim 1, it is characterized in that: described heating system comprises the square heated chamber (2-2) in the body of heater that is arranged on sintering heated oven chamber (2) and the heating molybdenum band (2-3) of dividing equally layout along described heated chamber (2-2) inwall, the outer insulation screen (2-1) that is provided with of described heated chamber (2-2), this thermal insulation separation heat shielding is bolted greater than the high temperature resistant stainless steel sheet of 0.5mm by multi-layered thickness and forms, and described heating molybdenum band is bolted on the internal protecting wall of sintering heated oven chamber by refractory ceramics and metal molybdenum.
8. chain type vacuum drying oven according to claim 1 is characterized in that: be provided with thermal insulation separation thermosphere (3-2) on the internal protecting wall of described precooling furnace chamber (3).
9. chain type vacuum drying oven according to claim 1, it is characterized in that: described cooling system is made of high pressure positive blower, high-performance heat exchanger and deflector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220524372 CN202804411U (en) | 2012-10-15 | 2012-10-15 | Chain type vacuum furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220524372 CN202804411U (en) | 2012-10-15 | 2012-10-15 | Chain type vacuum furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202804411U true CN202804411U (en) | 2013-03-20 |
Family
ID=47863354
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220524372 Withdrawn - After Issue CN202804411U (en) | 2012-10-15 | 2012-10-15 | Chain type vacuum furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202804411U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102896391A (en) * | 2012-10-15 | 2013-01-30 | 苏州群鑫电子有限公司 | Chain type vacuum furnace |
| CN108955243A (en) * | 2018-05-29 | 2018-12-07 | 唐山奥特斯科技有限公司 | Vehicle bottom formula continuous tunnel furnace heating system and its heating process |
-
2012
- 2012-10-15 CN CN 201220524372 patent/CN202804411U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102896391A (en) * | 2012-10-15 | 2013-01-30 | 苏州群鑫电子有限公司 | Chain type vacuum furnace |
| CN108955243A (en) * | 2018-05-29 | 2018-12-07 | 唐山奥特斯科技有限公司 | Vehicle bottom formula continuous tunnel furnace heating system and its heating process |
| CN108955243B (en) * | 2018-05-29 | 2023-10-24 | 唐山奥特斯科技有限公司 | Vehicle bottom type tunnel furnace heating system and heating process thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SIYANG QUNXIN ELECTRONICS CO., LTD. Free format text: FORMER OWNER: SUZHOU QUNXIN ELECTRON CO., LTD. Effective date: 20150427 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 215129 SUZHOU, JIANGSU PROVINCE TO: 223700 SUQIAN, JIANGSU PROVINCE |
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| TR01 | Transfer of patent right |
Effective date of registration: 20150427 Address after: 223700, Suqian City, Jiangsu province Siyang County Road, Tai Yuen Road north side of your mouth Road West National Pioneer Park Patentee after: Suzhou Qunxin Electronics Co., Ltd. Address before: 215129 No. 568 Changjiang Road, Suzhou New District, Jiangsu, Suzhou, China Patentee before: Suzhou Qunxin Electronics Co., Ltd. |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20130320 Effective date of abandoning: 20151007 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |