CN202794494U - Device for four-point probe resistivity tester verification - Google Patents
Device for four-point probe resistivity tester verification Download PDFInfo
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- CN202794494U CN202794494U CN 201220500218 CN201220500218U CN202794494U CN 202794494 U CN202794494 U CN 202794494U CN 201220500218 CN201220500218 CN 201220500218 CN 201220500218 U CN201220500218 U CN 201220500218U CN 202794494 U CN202794494 U CN 202794494U
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Abstract
The utility model discloses a device for four-point probe resistivity tester verification. The device comprises a four-point probe resistivity tester. Current output ports of a standard DC constant current source unit of the four-point probe resistivity tester are connected with a first terminal and a third terminal of a standard resistor Rn through wires. Voltage input ports of a voltage measuring, processing and display unit of the four-point probe resistivity tester are connected with a second terminal and a fourth terminal of the standard resistor Rn through wires. The device can perform metrological verification and correction on four-point probe resistivity and sheet resistance indication errors under a condition without a resistivity standard sample wafer, and four aspects of problems of low accuracy of a standard resistivity sample wafer used in an integrated verification method, high operation requirement of using the standard resistivity sample wafer, environment temperature correction, and that the standard resistivity sample wafer is easy to damage when being used, etc. are solved.
Description
Technical field
The utility model relates to instrument and equipment Calibration Technology field, relates in particular to a kind of calibrating installation of four point probe resistivity measuring instrument.
Background technology
The calibrating of present domestic four point probe resistivity tester, two kinds of methods that all adopt rules JJG508-2004 to stipulate, the first is whole checking method, the second is the sub-unit checking method.
(1) whole checking method
The resistivity of resistivity tester, sheet resistance indicating value fundamental error are examined and determine with the resistivity standard sample of photo.Realize the calibrating of the calibrating point in the tester measurement range, need at least 12 monodrome nominal values of single crystal silicon resistivity standard sample of photo (JJG508-2004 rules regulation) or the 19 monodrome nominal values (JJG48-2004 single crystal silicon resistivity standard sample of photo vertification regulation regulation) that are equipped with.In the calibrating operating process, every sheet resistivity prototype test needs to carry out under the measuring current of different regulations.Regulate the measuring current of tester, respectively survey 10 times under the positive counter current, every positive and negative measurement once needs print is rotated 20 °～30 °.The method has following several characteristics:
(1) operation is extremely loaded down with trivial details, and is high to the operant level requirement of calibration personnel, require to measure often, otherwise the discrete type of data is larger;
(2) every sheet resistivity print need be examined and determine/calibrate through the measurement technology mechanism that possesses higher level and trace to the source, general measurement technology mechanism does not possess the calibrating/rated capacity of single crystal silicon resistivity standard sample of photo, and the uncertainty of tracing to the source of single crystal silicon resistivity standard sample of photo is not too high, is generally 1%～2.5%;
(3) the method need according to test to data and the relevant calibrating/calibration data of tracing to the source of resistivity print, the formula of stipulating by rules
Calculate, some correction factors wherein also need be tabled look-up, and calculate loaded down with trivial details.
(2) sub-unit calibrating/calibration method
Electric part to resistance meter is calibrated with simulative method.JJG508-2004 rules regulation, select 7 measuring resistances such as 0.01 Ω, 0.1 Ω, 1 Ω, 10 Ω, 100 Ω, 1000 Ω, 10000 Ω, undertaken by the method for the 5.3.4.4 bar of rules and the requirement of 5.1.2.3 bar, measurement result is inconsistent in electric part displayed value and the practice, there is 4.532 times relation, can not directly judges calibrating/calibration result nothing that whether meets the requirements.
The first calibration method does not have the single crystal silicon resistivity standard sample of photo if limited some metering mechanisms, just can not carry out the metering of resistivity tester; The second calibration method, because what adopt is the decimal monodrome resistor of fixing, the calibrating point is few, its nominal value and not have directly corresponding relation with the measured value of resistivity, the while can not be satisfied the calibrating requirement of other measurement ranges of client.
Summary of the invention
The technical problems to be solved in the utility model: a kind of device of examining and determine the four point probe resistivity tester is provided, to solve in the situation that does not have the resistivity standard sample of photo, four point probe resistivity and the sheet resistance error of indication are carried out the measurement verification calibration, it is not high to solve the accuracy of the employed measuring resistance rate of whole checking method print, the use operation requirements is high, the problem of four aspects such as fragile in the use, environment temperature correction.
Technical solutions of the utility model:
A kind of device of examining and determine the four point probe resistivity tester, it comprises the four point probe resistivity tester, the standard direct current constant current source unit electric current delivery outlet of four point probe resistivity tester is received 1 and 3 terminals of measuring resistance Rn by wire, and the voltage input end of the voltage measurement of four point probe resistivity tester, processing and display unit is received 2 and 4 terminals of measuring resistance Rn by wire.
Measuring resistance Rn is the standard resistance box of variable adjustment.
The beneficial effects of the utility model:
The utility model adopts the adjustable standard resistance box of resistance to substitute the single crystal silicon resistivity standard sample of photo, realize the magnitude tracing of four point probe resistivity tester, standard resistance box is easy to obtain, its use is lower than the use operation requirements of resistivity standard sample of photo, avoided simultaneously flimsy situation generation in the use of resistivity standard sample of photo, it is simple to operate, safe and reliable, the result is accurate, the adjustable standard resistance box of resistance can substitute the single crystal silicon resistivity standard sample of photo of different size by regulating different resistances, solved in the situation that does not have the resistivity standard sample of photo, four point probe resistivity and the sheet resistance error of indication are carried out the measurement verification calibration, it is not high to have solved the accuracy of the employed measuring resistance rate of whole checking method print, the use operation requirements is high, and is fragile in the use, the problem of four aspects such as environment temperature correction.
Description of drawings:
Fig. 1 is the utility model device connection diagram.
Embodiment:
A kind of device of examining and determine the four point probe resistivity tester, it comprises the four point probe resistivity tester, the standard direct current constant current source unit electric current delivery outlet I+ of four point probe resistivity tester and I-receive 1 and 3 terminals of measuring resistance Rn with the low resistance wire, the voltage input end U+ of the voltage measurement of four point probe resistivity tester, processing and display unit and U-receive 2 and 4 terminals of measuring resistance Rn with the low resistance wire, measuring resistance Rn is the standard resistance box of variable adjustment, and present embodiment adopts 7 dishes (or 6 dishes) decimal system adjustable precision standard resistance box.
The theoretical calculation formula of four point probe resistivity is:
The four point probe tester when tested film is roomy during greater than probe spacing, just can calculate sheet resistance, that is: in real work
R The mark=
/
=
/
=
=4.532226
(2)
Wherein
Be equivalent four-terminal resistance
RComputing formula, the resistivity tester internal condition
R The markWith equivalent resistance
Ratio 4.532(exact value be 4.53226) automatically calculate the sheet resistance size.
By the constant electric current supply measuring resistance Rn of standard direct current constant current source unit output, the size of steady current is selected control by standard direct current constant current source unit, and this selection has also determined the range of tester.Voltage drop on the Rn is measured, is processed and show through voltage measurement, processing and display unit, calculates according to above-mentioned measured resistivity, sheet resistance theoretical formula (1), (2), and its theoretical reading that shows should be 4.532 times Rn value.
Claims (2)
1. device of examining and determine the four point probe resistivity tester, it comprises the four point probe resistivity tester, it is characterized in that: the standard direct current constant current source unit electric current delivery outlet of four point probe resistivity tester is received 1 and 3 terminals of measuring resistance Rn by wire, and the voltage input end of the voltage measurement of four point probe resistivity tester, processing and display unit is received 2 and 4 terminals of measuring resistance Rn by wire.
2. a kind of device of examining and determine the four point probe resistivity tester according to claim 1, it is characterized in that: measuring resistance Rn is the standard resistance box of variable adjustment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220500218 CN202794494U (en) | 2012-09-28 | 2012-09-28 | Device for four-point probe resistivity tester verification |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220500218 CN202794494U (en) | 2012-09-28 | 2012-09-28 | Device for four-point probe resistivity tester verification |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202794494U true CN202794494U (en) | 2013-03-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220500218 Expired - Fee Related CN202794494U (en) | 2012-09-28 | 2012-09-28 | Device for four-point probe resistivity tester verification |
Country Status (1)
| Country | Link |
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| CN (1) | CN202794494U (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103472308A (en) * | 2013-09-23 | 2013-12-25 | 广州市昆德科技有限公司 | Square resistance tester allowing nondestructive measurement to be performed on thin-layered materials and testing method thereof |
| CN104275485A (en) * | 2013-10-16 | 2015-01-14 | 济南大学 | Method for rapidly optimizing sintering schedule of powder metallurgical material |
| CN104793168A (en) * | 2015-04-28 | 2015-07-22 | 安徽华茂纺织股份有限公司 | Checking method of fiber specific resistance meter |
| CN106443549A (en) * | 2016-12-08 | 2017-02-22 | 上海市计量测试技术研究院 | Analog alternating current resistance device for calibrating battery internal resistance tester |
| CN108508391A (en) * | 2018-06-04 | 2018-09-07 | 福建省计量科学研究院（福建省眼镜质量检验站） | A kind of four probe resistance rate tester calibration modules |
| WO2018170775A1 (en) * | 2017-03-22 | 2018-09-27 | 联芯科技有限公司 | Electrical quantity meter, current-sampling calibration circuit and method of calibration |
| CN110243874A (en) * | 2019-07-02 | 2019-09-17 | 上海应用技术大学 | A kind of method of solid electrolyte resistivity under measurement high temperature |
| CN111044961A (en) * | 2018-10-15 | 2020-04-21 | 吴茂祥 | Test machine self-checking system and test method |
-
2012
- 2012-09-28 CN CN 201220500218 patent/CN202794494U/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103472308A (en) * | 2013-09-23 | 2013-12-25 | 广州市昆德科技有限公司 | Square resistance tester allowing nondestructive measurement to be performed on thin-layered materials and testing method thereof |
| CN104275485A (en) * | 2013-10-16 | 2015-01-14 | 济南大学 | Method for rapidly optimizing sintering schedule of powder metallurgical material |
| CN104793168A (en) * | 2015-04-28 | 2015-07-22 | 安徽华茂纺织股份有限公司 | Checking method of fiber specific resistance meter |
| CN106443549A (en) * | 2016-12-08 | 2017-02-22 | 上海市计量测试技术研究院 | Analog alternating current resistance device for calibrating battery internal resistance tester |
| CN106443549B (en) * | 2016-12-08 | 2019-09-06 | 上海市计量测试技术研究院 | A kind of analog AC resistance device for calibration battery internal resistance test device |
| WO2018170775A1 (en) * | 2017-03-22 | 2018-09-27 | 联芯科技有限公司 | Electrical quantity meter, current-sampling calibration circuit and method of calibration |
| CN108966670A (en) * | 2017-03-22 | 2018-12-07 | 联芯科技有限公司 | Voltameter and its current acquisition calibration circuit and calibration method |
| CN108508391A (en) * | 2018-06-04 | 2018-09-07 | 福建省计量科学研究院（福建省眼镜质量检验站） | A kind of four probe resistance rate tester calibration modules |
| CN111044961A (en) * | 2018-10-15 | 2020-04-21 | 吴茂祥 | Test machine self-checking system and test method |
| CN110243874A (en) * | 2019-07-02 | 2019-09-17 | 上海应用技术大学 | A kind of method of solid electrolyte resistivity under measurement high temperature |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130313 Termination date: 20200928 |