CN202790604U - Double sealed gate valve device for vacuum furnace - Google Patents
Double sealed gate valve device for vacuum furnace Download PDFInfo
- Publication number
- CN202790604U CN202790604U CN 201220416850 CN201220416850U CN202790604U CN 202790604 U CN202790604 U CN 202790604U CN 201220416850 CN201220416850 CN 201220416850 CN 201220416850 U CN201220416850 U CN 201220416850U CN 202790604 U CN202790604 U CN 202790604U
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- valve
- guide rail
- vacuum furnace
- double sealed
- cylinder
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Abstract
The utility model belongs to the technical field of vacuum furnace, in and particularly relates to a double sealed gate valve device for a vacuum furnace. The double sealed gate valve device for the vacuum furnace comprises a valve body, a locating block, a cylinder, a guide rail, connecting rods, hinge pins, pressure levers and valve plates; the cylinder is provided with a guide rail; the numbers of the connecting rods, the hinge pins, the pressure levers and the valve plates are two respectively, and the connecting rods, the hinge pins, the pressure levers and the valve plates are symmetrically arranged on left and right sides of the guide rail respectively; the valve plates are connected with the pressure levers through the hinge pins and the connecting rods; guide wheels are arranged on the pressure levers and in the guide rail; the locating block is arranged on the valve body; and sealing rings are respectively arranged on the two valve plates. The double sealed gate valve device for the vacuum furnace is a relatively independent equipment module, and is connected with an adjacent vacuum chamber through bolts to realize modular design of the equipment. By adopting a double sealed structure, a set of valves achieves the function instead of the original two sets of valves, and the influences of corrosive air in the adjacent vacuum chamber is are avoided, and the service life of the valve is prolonged greatly.
Description
Technical field
The utility model belongs to the vacuum furnace technical field, particularly relates to a kind of double-face sealing sluice valve device for vacuum furnace.
Background technique
Push-pull valve particularly plays an important role in the work of continuous vacuum furnace at vacuum furnace.In the prior art, the valve that is used for isolating between the continuous vacuum furnace equipment vacuum chamber is the single face sealing, and valve is not realized modular design, valve body is to be welded on one of them vacuum chamber side, make the complex structure of vacuum chamber, make difficulty, inconvenient maintenance.Whole valve is exposed in the vacuum chamber, and the harmful atmosphere in the vacuum chamber is larger on the life-span impact of valve, has shortened the working life of valve.This valve can only be realized the single face sealing, is requiring under the condition of dual face seals, needs to use two cover single face sealed valves, has improved cost of production.
Summary of the invention
Technical problem to be solved is to overcome the defective that prior art exists, and provides a kind of simple in structure, and long service life is convenient to the double-face sealing sluice valve device that keeps in repair and produce.
The technical solution that the utility model adopts is a kind of double-face sealing sluice valve, comprises valve body, positioning block, cylinder, guide rail, connecting rod, bearing pin, depression bar and valve plate, and described cylinder is provided with guide rail; Described connecting rod, bearing pin, depression bar and valve plate respectively have two, and are symmetricly set on respectively the left and right sides of guide rail; Described valve plate is connected with depression bar with connecting rod by bearing pin; Described depression bar is provided with upper saw pulley, and upper saw pulley is arranged in the guide rail; Described valve body is provided with positioning block.
Be respectively equipped with seal ring on described two valve plates.
Compared with prior art, the beneficial effect that the utility model has is: the utility model itself is a relatively independent EM equipment module, simply is connected with bolt with adjacent vacuum chamber to get final product, and has realized the modular design of equipment.Owing to adopt the dual face seals structure, realize the function of original needs two cover valves with a cover valve, and be not subjected to the impact of aggressive atmosphere in the adjacent vacuum chamber, the life-span of valve is significantly increased.
Description of drawings
Fig. 1 is structure diagram of the present utility model.
Among the figure: 1, valve body, 2, positioning block, 3, cylinder, 4, guide rail, 5, connecting rod,
6, bearing pin, 7, depression bar, 8, valve plate, 9, upper saw pulley, 10, seal ring.
Embodiment
The utility model is described in further detail below in conjunction with accompanying drawing:
As shown in Figure 1, a kind of push-pull valve is a kind of double-face sealing sluice valve, comprises valve body 1, positioning block 2, cylinder 3, guide rail 4, connecting rod 5, bearing pin 6, depression bar 7 and valve plate 8, and described cylinder 3 is provided with guide rail 4; Described connecting rod 5, bearing pin 6, depression bar 7 and valve plate 8 respectively have two, and are symmetricly set on respectively the left and right sides of guide rail 4; Described valve plate 8 is connected with depression bar 7 with connecting rod 5 by bearing pin 6; Described depression bar 7 is provided with upper saw pulley 9, and upper saw pulley 9 is arranged in the guide rail 4; Described valve body 1 is provided with positioning block 2.
Be respectively equipped with seal ring 10 on described two valve plates 8.
Working procedure of the present utility model: valve plate 8 links together with depression bar 7 by bearing pin 6 and connecting rod 5, and connecting rod 5 can rotate around bearing pin 6, and depression bar 7 is connected with cylinder 3.Valve plate 8, bearing pin 6, connecting rod 5 and depression bar with regard to 7 can along with cylinder 3 together along guide rail traveling priority about in the of 4; During valve closing, cylinder 3 moves down, move down together with valve plate 8, bearing pin 6, connecting rod 5 and depression bar 7, until valve plate 8 with after positioning block 2 on the valve body 1 contacts, valve plate 8, bearing pin 6 no longer descend, and cylinder 3 and depression bar 7 continue to move down, bearing pin 6, connecting rod 5 just promote to the left and right both sides translation of valve plate 8, flanged surface near valve body 1, until valve plate 8 contacts with the flanged surface of valve body 1, because valve plate 8 is provided with seal ring 10, thus the sealing between realization valve plate 8 and the valve body 1, and push-pull valve finishes and cuts out.
During valve opening, cylinder 3 moves up, driving depression bar 7 moves up together, bearing pin 6, connecting rod 5 haul valve plate 8 away from the flanged surface of valve body, then valve plate 8, bearing pin 6, connecting rod 5 and depression bar 7 are along with cylinder 3 moves up together, rise to the upper limit position of cylinder 3 strokes until valve plate 8 after, cylinder 3 stops mobile, and push-pull valve is finished unlatching.
Claims (2)
1. double-face sealing sluice valve device that is used for vacuum furnace, it is characterized in that: comprise valve body (1), positioning block (2), cylinder (3), guide rail (4), connecting rod (5), bearing pin (6), depression bar (7) and valve plate (8), described cylinder (3) is provided with guide rail (4); Described connecting rod (5), bearing pin (6), depression bar (7) and valve plate (8) respectively have two, and are symmetricly set on respectively the left and right sides of guide rail (4); Described valve plate (8) is connected with depression bar (7) with connecting rod (5) by bearing pin (6); Described depression bar (7) is provided with upper saw pulley (9), and upper saw pulley (9) is arranged in the guide rail (4); Described valve body (1) is provided with positioning block (2).
2. a kind of double-face sealing sluice valve device for vacuum furnace according to claim 1 is characterized in that: be respectively equipped with seal ring (10) on described two valve plates (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220416850 CN202790604U (en) | 2012-08-22 | 2012-08-22 | Double sealed gate valve device for vacuum furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220416850 CN202790604U (en) | 2012-08-22 | 2012-08-22 | Double sealed gate valve device for vacuum furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202790604U true CN202790604U (en) | 2013-03-13 |
Family
ID=47817869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220416850 Expired - Fee Related CN202790604U (en) | 2012-08-22 | 2012-08-22 | Double sealed gate valve device for vacuum furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202790604U (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103322226A (en) * | 2013-07-05 | 2013-09-25 | 费海鸿 | Insert pneumatic vacuum transfer valve |
| CN106471297A (en) * | 2015-04-06 | 2017-03-01 | 福田株式会社 | Rectangle lock vacuum valve, its method of work and the semiconductor- fabricating device with it |
| CN106931178A (en) * | 2017-03-29 | 2017-07-07 | 金华市禾牧真空电子有限公司 | Push-pull valve and its preparation technology |
| CN111828665A (en) * | 2020-07-22 | 2020-10-27 | 中国空气动力研究与发展中心超高速空气动力研究所 | Frame suitable for multi-aperture double-face sealing vacuum gate valve |
| CN113309869A (en) * | 2021-04-26 | 2021-08-27 | 深圳市大成精密设备有限公司 | Vacuum plate valve |
| CN114001168A (en) * | 2021-11-08 | 2022-02-01 | 沈阳真空技术研究所有限公司 | Large-drift-diameter combined type plugboard valve group of continuous vacuum furnace |
| CN117028602A (en) * | 2023-10-08 | 2023-11-10 | 沈阳广泰真空科技股份有限公司 | Gate valve of vacuum furnace |
-
2012
- 2012-08-22 CN CN 201220416850 patent/CN202790604U/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103322226A (en) * | 2013-07-05 | 2013-09-25 | 费海鸿 | Insert pneumatic vacuum transfer valve |
| CN106471297A (en) * | 2015-04-06 | 2017-03-01 | 福田株式会社 | Rectangle lock vacuum valve, its method of work and the semiconductor- fabricating device with it |
| CN106931178A (en) * | 2017-03-29 | 2017-07-07 | 金华市禾牧真空电子有限公司 | Push-pull valve and its preparation technology |
| CN111828665A (en) * | 2020-07-22 | 2020-10-27 | 中国空气动力研究与发展中心超高速空气动力研究所 | Frame suitable for multi-aperture double-face sealing vacuum gate valve |
| CN113309869A (en) * | 2021-04-26 | 2021-08-27 | 深圳市大成精密设备有限公司 | Vacuum plate valve |
| CN113309869B (en) * | 2021-04-26 | 2022-04-08 | 深圳市大成精密设备股份有限公司 | Vacuum plate valve |
| CN114001168A (en) * | 2021-11-08 | 2022-02-01 | 沈阳真空技术研究所有限公司 | Large-drift-diameter combined type plugboard valve group of continuous vacuum furnace |
| CN114001168B (en) * | 2021-11-08 | 2022-09-02 | 沈阳真空技术研究所有限公司 | Large-drift-diameter combined type plugboard valve group for continuous vacuum furnace |
| CN117028602A (en) * | 2023-10-08 | 2023-11-10 | 沈阳广泰真空科技股份有限公司 | Gate valve of vacuum furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130313 Termination date: 20170822 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |