CN202749350U - Silicon wafer loading and unloading basket device - Google Patents
Silicon wafer loading and unloading basket device Download PDFInfo
- Publication number
- CN202749350U CN202749350U CN 201220228347 CN201220228347U CN202749350U CN 202749350 U CN202749350 U CN 202749350U CN 201220228347 CN201220228347 CN 201220228347 CN 201220228347 U CN201220228347 U CN 201220228347U CN 202749350 U CN202749350 U CN 202749350U
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- basket
- carbon fiber
- fiber board
- motor
- vacuum cup
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Abstract
The utility model relates to a silicon wafer loading and unloading basket device. The device comprises a magazine up-down motor, a magazine, a first sensor, a gas blowing device, vacuum chucks, a carbon fiber plate, a rotary cylinder, an up-down cylinder, a rotary motor, a pulley, a belt, a second sensor, a basket up-down motor and a basket. The carbon fiber plate is mounted on the rotary cylinder, two groups of vacuum chucks are mounted on the fiber plate, the rotary cylinder and the carbon fiber plate are moved up and down by the up-down cylinder, and the rotary cylinder enables the carbon fiber plate to perform rotary motions. The first sensor and the gas blowing device are mounted on two sides of an upper portion of the magazine respectively, the lifting height of silicon wafers is detected by the first sensor, the laminated silicon wafers are separated by the blowing of the gas blowing device, the second sensor is mounted on one side of a direction in which the silicon wafers are transmitted by the belt into basket teeth of the basket, detects the insertion of the silicone wafers into the basket teeth of the basket, and sends a signal for the basket up-down motor to move up and down, and the basket up-down motor receives the signal and moves a distance of one basket tooth upwards.
Description
Technical field
The present invention relates to automation control area, unload basket equipment in particular to a kind of Gui Pian Installed.
Background technology
After the silicon chip inserting machine that uses at present adopted vacuum cup to draw silicon chip, the method by straight line cylinder or motor-driven moved silicon chip, moved into place postpone and discharged vacuum and put down silicon chip, and belt drives chip transmission and inserts the basket tool.Its shortcoming is: 1, transmission range is far away, and the speed of loading and unloading silicon chip is slack-off, and operating efficiency can be very low; 2, such machine cost is high, and volume is large.3, plug-in sheet machine only has the inserted sheet function, not from the function of basket tool unloading piece.
The utility model content
In order to address the above problem, the invention provides a kind of Gui Pian Installed and unload basket equipment, it comprises: magazine is motor up and down, magazine, first sensor, blowning installation, vacuum cup, carbon fiber board, rotary cylinder, upper and lower air cylinders, rotation motor, pulley, belt, the second transducer, the gaily decorated basket is motor up and down, the gaily decorated basket, wherein:
The stationary part of rotary cylinder is connected with upper and lower air cylinders connects, carbon fiber board is fixedly mounted on the rotor portion of rotary cylinder, at carbon fiber board two groups of vacuum cups are installed, one group of side-lower that is installed in carbon fiber board, another group is installed in the opposite side below of carbon fiber board, every group comprises 2 or more vacuum cup, this vacuum cup is used for drawing silicon chip, this upper and lower air cylinders is used for making rotary cylinder, carbon fiber board and vacuum cup rise together and descend, and this rotary cylinder is used for making carbon fiber board and vacuum cup together rotary moving and round Rotate 180 °; Magazine is positioned at the below of one group of vacuum cup, but it is installed in magazine up and down on the motor with unloading manner, first sensor and blowning installation are installed respectively in both sides on magazine top, this first sensor is for detection of the lifting height of silicon chip and send when reaching predetermined altitude and make the up and down signal that stops of motor of magazine, this blowning installation is used for blowing when motor stops about magazine and makes stacked silicon chip separately, rotation motor, pulley and belt are positioned in the below of another group vacuum cup, but the gaily decorated basket and the gaily decorated basket up and down the motor side and the gaily decorated basket that are positioned in the belt direction of transfer are installed in the up and down top of motor of the gaily decorated basket with unloading manner, the second installation of sensors belt transmit silicon chip enter the gaily decorated basket basket tooth direction a side and apart from gaily decorated basket 20-50mm place, make the up and down signal that moves up of motor of the gaily decorated basket for detection of sending when having silicon chip to be inserted on the basket tooth of the gaily decorated basket, this gaily decorated basket up and down motor is received the distance of a basket tooth of the backward upper movement of this signal that moves up tooth pitch.
The vacuum cup that wherein is positioned at the magazine top is drawn silicon chip, is positioned at simultaneously the vacuum cup unloading silicon chip of belt top to belt.
The length of wherein said carbon fiber board is 400-600mm, and width is 100-160mm, and thickness is 1-10mm.
The number of wherein said every group of vacuum cup is 4.
The vacuum cup group of wherein installing at described carbon fiber board is more than 2 groups.
The present invention has adopted rotary cylinder to drive the scheme of vacuum cup rotation, has reduced the motion of electric actuator, shortens run duration, and draws silicon chip and put down silicon chip and carry out simultaneously, and operating efficiency is doubled.
In addition, the present invention adopts carbon fibre material as the fixed head that is used for installing vacuum cup, it has, and intensity is high, quality light, the toughness high, also have the advantages such as flatness is good, indeformable, this has guaranteed that vacuum cup is straight, draw the silicon chip good stability, inertia is little during rotary moving simultaneously, rotary speed fast, high efficiency.
Gui Pian Installed of the present invention unload basket equipment solved at present numerous solar cell manufacturer man still adopt manual silicon chip is packed into the basket tool and from the basket tool, take out silicon chip, efficient is low, fragment rate is high, wastes serious technical problem; But also reduced in the manual operation process pollution problem to silicon chip.
Description of drawings
Fig. 1 has schematically shown the structure chart that Gui Pian Installed of the present invention unloads basket equipment.
Fig. 2 has schematically shown the structure chart of a distressed structure of silicon chip loading and unloading basket equipment of the present invention.
Embodiment
Fig. 1 has schematically shown the structure that Gui Pian Installed of the present invention unloads basket equipment.In Fig. 1,1 is up and down motor of magazine, and 2 is magazine, 3 is first sensor, and 4 is blowning installation, and 5 is silicon chip, 6 is vacuum cup, and 7 is carbon fiber board, and 8 is rotary cylinder, 9 is upper and lower air cylinders, and 10 is rotation motor, and 11 is pulley, 12 is belt, 13 is the second transducer, and 14 is up and down motor of the gaily decorated basket, and 15 is the gaily decorated basket.
Gui Pian Installed of the present invention unloads basket equipment and comprises: magazine is motor 1 up and down, magazine 2, first sensor 3, blowning installation 4, vacuum cup 6, carbon fiber board 7, rotary cylinder 8, upper and lower air cylinders 9, rotation motor 10, pulley 11, belt 12, the second transducers 13, the gaily decorated basket is motor 14 and the gaily decorated basket 15 up and down; Wherein:
With bolt the stationary part of rotary cylinder 8 is connected with upper and lower air cylinders vertically and connects, carbon fiber board 7 is fixedly mounted on the rotor portion of rotary cylinder 8 with bolt, at carbon fiber board 7 two groups of vacuum cups 6 are installed, as shown in the figure, one group of side-lower that is installed in carbon fiber board 7, another group is installed in the opposite side below of carbon fiber board 7, and every group has four vacuum cups, and certain every group also can have two or six or more vacuum cup.Vacuum cup 6 is used for drawing silicon chip 5.Upper and lower air cylinders 9 is used for making rotary cylinder 8, carbon fiber board 7 and vacuum cup 6 rise together and descend.The effect of rotary cylinder 8 is can be so that carbon fiber board 7 and vacuum cup 6 rotary moving together.The length of the carbon fiber board that the present invention uses is 400-600mm, and width is 100-160mm, and thickness is 1-10mm.Preferably, the length of carbon fiber board is 460mm, and width is 110mm, and thickness is 1.3mm; Preferred, the length of carbon fiber board is 500mm, and width is 115mm, and thickness is 2mm; Preferred, the length of carbon fiber board is 550mm, and width is 140mm, and thickness is 5mm.Magazine is positioned at the below of one group of vacuum cup, but it is installed in magazine up and down on the motor with unloading manner, and this magazine is used for placing stacked silicon chip, and this magazine up and down motor is used for making the silicon chip in the magazine to rise.A first sensor 3 and a blowning installation 4 are installed respectively in the both sides on magazine 2 tops.This first sensor 3 is for detection of the lifting height of silicon chip 5 and send when reaching predetermined altitude and make the up and down signal that stops of motor 1 of magazine.Blowning installation 4 is used for blowing when motor 1 stops about magazine and makes stacked silicon chip separately.Rotation motor, pulley and belt are positioned in the below of another group vacuum cup, but the gaily decorated basket and the gaily decorated basket up and down the motor side and the gaily decorated basket that are positioned in the belt direction of transfer are installed in the up and down top of motor of the gaily decorated basket with unloading manner, this rotation motor rotarily drives belt and rolls at pulley, and belt is carrying silicon chip to be sent into it on basket tooth of the gaily decorated basket.This second transducer 13 be installed in belt 12 transmit silicon chips enter the gaily decorated basket 15 basket tooth direction a side and apart from gaily decorated basket 20-50mm place, make the signal that motor 14 moves up about the gaily decorated basket for detection of sending when having silicon chip to be inserted on the basket tooth of the gaily decorated basket 15.Motor is received the distance of a basket tooth of the backward upper movement of this signal that moves up tooth pitch about the gaily decorated basket.Other annexation adopts technology well known in the art to realize.
Although do not illustrate in the accompanying drawing, known, upper and lower air cylinders is mounted on the fixed frame.Therefore, when upper and lower air cylinders 9 was installed in the top of fixed frame, as shown in Figure 1, the order of connection of upper and lower air cylinders 9, rotary cylinder 8 and carbon fiber board 7 is: rotary cylinder 8 was on upper and lower air cylinders 9, and carbon fiber board 7 is on rotary cylinder 8; Otherwise when upper and lower air cylinders 9 was installed in the bottom of fixed frame, as shown in Figure 2, the order of connection of upper and lower air cylinders 9, rotary cylinder 8 and carbon fiber board 7 is: rotary cylinder 8 was under upper and lower air cylinders 9, and carbon fiber board 7 is under rotary cylinder 8.
The course of work that Gui Pian Installed of the present invention unloads basket equipment is as follows: the magazine 2 that silicon chip 5 will be housed in advance is contained in the up and down top of motor 1 of magazine, and this magazine up and down motor 1 work rises the silicon chip 5 in the magazine 2.This first sensor 3 sends and makes the up and down signal that stops of motor 1 of magazine when silicon chip 5 rises to the predetermined altitude that can be detected by first sensor 3, magazine stops after motor 1 is received this signal up and down, this moment, blowning installation 4 air blowings made stacked silicon chip separately, uppermost silicon chip is drawn by vacuum cup 6, and this moment, upper and lower air cylinders 9 was in the next.In case vacuum cup 6 has been drawn silicon chip 5, this upper and lower air cylinders 9 begins to rise to predetermined altitude, then rotary cylinder 8 drives together Rotate 180 ° of carbon fiber boards 7 and vacuum cup 6, absorption has vacuum cup 6 rotary movings of silicon chip to the top of belt 12, this moment, upper and lower air cylinders 9 dropped to predetermined altitude, vacuum cup 6 discharges vacuum silicon chip 5 is unloaded on the belt 12, and rotation motor 10 rotarily drives belt 12 and rolls at pulley 11, and belt 12 is carrying silicon chip 5 to be sent into it on basket tooth of the gaily decorated basket 15.Just send when the second transducer 13 detects on the basket tooth that a silicon chip is inserted into the gaily decorated basket 15 and make the up and down signal that moves up of motor 14 of the gaily decorated basket, the gaily decorated basket up and down motor 14 is received the distance of a basket tooth of the backward upper movement of this signal tooth pitch.These actions that circulate are transferred in the gaily decorated basket 15 silicon chip in the magazine 2 one by one.
In said process, rotary cylinder comes and goes Rotate 180 °, and one group of vacuum cup respectively is housed on the relative both sides of hard-wired carbon fiber board 7 on the rotary cylinder, and for ease of describing, the side with carbon fiber board is decided to be the A side and relative opposite side is decided to be the B side here.When the vacuum cup of A side was drawn a silicon chip 5 from magazine 2, the vacuum cup of B side just unloaded silicon chip to belt 12.Rotary cylinder turns clockwise 180 °, and the vacuum cup rotary moving of A side is to belt top and discharge this silicon chip 5 to belt, and the vacuum cup rotary moving of B side is to magazine 2 tops and draw the new silicon chip of a slice simultaneously.Rotary cylinder another mistake hour hands Rotate 180 °, the silicon chip that the vacuum cup unloading of B side has just been drawn is to belt, and the vacuum cup of A side is drawn the new silicon chip of a slice again simultaneously.So the transfer of all silicon chips is finished in circulation.Like this, the vacuum cup 6 of carbon fiber board 7 one sides is drawn silicon chip, and the vacuum cup 6 of opposite side unloads silicon chips simultaneously, and its operating efficiency doubles.
Owing to adopting carbon fibre material as the fixed head that is used for installing vacuum cup, it has, and intensity is high, quality light, the toughness high, and this has guaranteed that vacuum cup is straight, and inertia is low when guaranteeing rotary moving simultaneously.
Although the present invention discloses at carbon fiber board two groups of vacuum cups are installed, those skilled in the art knows, four groups, six groups or multi-group vacuum sucker more also can be installed thereon, increases work efficiency largelyr.
Those skilled in the art knows, Gui Pian Installed of the present invention unloads basket equipment and can oppositely use, and namely by belt with the chip transmission in the gaily decorated basket out, drives by rotary cylinder that vacuum cup is inhaled sheet, film releasing is laminated to silicon wafer layer in the magazine again.
Claims (9)
1. a silicon sheet Installed unloads basket equipment, and it comprises: magazine is motor up and down, magazine, first sensor, blowning installation, vacuum cup, carbon fiber board, rotary cylinder, upper and lower air cylinders, rotation motor, pulley, belt, the second transducer, the gaily decorated basket is motor up and down, and the gaily decorated basket is characterized in that:
The stationary part of rotary cylinder is connected with upper and lower air cylinders connects, carbon fiber board is fixedly mounted on the rotor portion of rotary cylinder, at carbon fiber board two groups of vacuum cups are installed, one group of side-lower that is installed in carbon fiber board, another group is installed in the opposite side below of carbon fiber board, every group comprises 2 or more vacuum cup, this vacuum cup is used for drawing silicon chip, this upper and lower air cylinders is used for making rotary cylinder, carbon fiber board and vacuum cup rise together and descend, and this rotary cylinder is used for making carbon fiber board and vacuum cup together rotary moving and round Rotate 180 °; Magazine is positioned at the below of one group of vacuum cup, but it is installed in magazine up and down on the motor with unloading manner, first sensor and blowning installation are installed respectively in both sides on magazine top, this first sensor is for detection of the lifting height of silicon chip and send when reaching predetermined altitude and make the up and down signal that stops of motor of magazine, this blowning installation is used for blowing when motor stops about magazine and makes stacked silicon chip separately, rotation motor, pulley and belt are positioned in the below of another group vacuum cup, but the gaily decorated basket and the gaily decorated basket up and down the motor side and the gaily decorated basket that are positioned in the belt direction of transfer are installed in the up and down top of motor of the gaily decorated basket with unloading manner, the second installation of sensors belt transmit silicon chip enter the gaily decorated basket basket tooth direction a side and apart from gaily decorated basket 20-50mm place, make the up and down signal that moves up of motor of the gaily decorated basket for detection of sending when having silicon chip to be inserted on the basket tooth of the gaily decorated basket, this gaily decorated basket up and down motor is received the distance of a basket tooth of the backward upper movement of this signal that moves up tooth pitch.
2. Gui Pian Installed according to claim 1 unloads basket equipment, it is characterized in that, the vacuum cup that is positioned at the magazine top is drawn silicon chip, is positioned at simultaneously the vacuum cup unloading silicon chip of belt top to belt.
3. Gui Pian Installed according to claim 1 unloads basket equipment, it is characterized in that, the number of described every group of vacuum cup is 4.
4. Gui Pian Installed according to claim 1 unloads basket equipment, it is characterized in that, the vacuum cup group of installing at described carbon fiber board is more than 2 groups.
5. Gui Pian Installed according to claim 1 unloads basket equipment, it is characterized in that, the length of described carbon fiber board is 400-600mm, and width is 100-160mm, and thickness is 1-10mm.
6. Gui Pian Installed according to claim 5 unloads basket equipment, it is characterized in that, the length of described carbon fiber board is 460mm, and width is 110mm, and thickness is 1.3mm.
7. Gui Pian Installed according to claim 5 unloads basket equipment, it is characterized in that, the length of described carbon fiber board is 500mm, and width is 115mm, and thickness is 2mm.
8. Gui Pian Installed according to claim 5 unloads basket equipment, it is characterized in that, the length of described carbon fiber board is 550mm, and width is 140mm, and thickness is 5mm.
9. Gui Pian Installed according to claim 1 unloads basket equipment, it is characterized in that, installation site according to upper and lower air cylinders, the order of connection of upper and lower air cylinders, rotary cylinder and carbon fiber board is: rotary cylinder on the upper and lower air cylinders and carbon fiber board on rotary cylinder, perhaps rotary cylinder under the upper and lower air cylinders and carbon fiber board under rotary cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220228347 CN202749350U (en) | 2012-05-18 | 2012-05-18 | Silicon wafer loading and unloading basket device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220228347 CN202749350U (en) | 2012-05-18 | 2012-05-18 | Silicon wafer loading and unloading basket device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202749350U true CN202749350U (en) | 2013-02-20 |
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ID=47708710
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220228347 Expired - Fee Related CN202749350U (en) | 2012-05-18 | 2012-05-18 | Silicon wafer loading and unloading basket device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202749350U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102760676A (en) * | 2012-05-18 | 2012-10-31 | 南京华伯仪器科技有限公司 | Loading and unloading basket device for silicon wafers |
| CN104342638A (en) * | 2013-08-03 | 2015-02-11 | 沙嫣 | Semiautomatic substrate inserting machine for plasma vapor deposition |
-
2012
- 2012-05-18 CN CN 201220228347 patent/CN202749350U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102760676A (en) * | 2012-05-18 | 2012-10-31 | 南京华伯仪器科技有限公司 | Loading and unloading basket device for silicon wafers |
| CN102760676B (en) * | 2012-05-18 | 2015-01-21 | 南京华伯仪器科技有限公司 | Loading and unloading basket device for silicon wafers |
| CN104342638A (en) * | 2013-08-03 | 2015-02-11 | 沙嫣 | Semiautomatic substrate inserting machine for plasma vapor deposition |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130220 Termination date: 20160518 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |