CN202748161U - 环境因素采集***以及半导体集成电路生产工艺测量设备 - Google Patents
环境因素采集***以及半导体集成电路生产工艺测量设备 Download PDFInfo
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105784175A (zh) * | 2016-04-26 | 2016-07-20 | 哈尔滨工程大学 | 一种基于wifi通信的高精度多点测温*** |
CN107977162A (zh) * | 2016-10-21 | 2018-05-01 | 财团法人工业技术研究院 | 记录器***及其数据记录方法 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105784175A (zh) * | 2016-04-26 | 2016-07-20 | 哈尔滨工程大学 | 一种基于wifi通信的高精度多点测温*** |
CN107977162A (zh) * | 2016-10-21 | 2018-05-01 | 财团法人工业技术研究院 | 记录器***及其数据记录方法 |
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Denomination of utility model: Environmental factor acquisition system and measuring apparatus for production process of semiconductor integrated circuit Effective date of registration: 20190121 Granted publication date: 20130220 Pledgee: Shanghai Xingcheng Investment Management Co., Ltd. Pledgor: Raintree Scientific Instruments (Shanghai) Corporation Registration number: 2019310000002 |
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Date of cancellation: 20191029 Granted publication date: 20130220 Pledgee: Shanghai Xingcheng Investment Management Co., Ltd. Pledgor: Ruili Scientific Instruments (Shanghai) Co., Ltd. Registration number: 2019310000002 |
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