CN202729846U - Microbe removal device and substrate washing equipment - Google Patents
Microbe removal device and substrate washing equipment Download PDFInfo
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- CN202729846U CN202729846U CN 201220276843 CN201220276843U CN202729846U CN 202729846 U CN202729846 U CN 202729846U CN 201220276843 CN201220276843 CN 201220276843 CN 201220276843 U CN201220276843 U CN 201220276843U CN 202729846 U CN202729846 U CN 202729846U
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- water
- removal
- lamp tube
- water pipe
- microorganisms
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Abstract
The utility model relates to the technical field of display and discloses a microbe removal device and substrate cleaning equipment. The microbe removal device comprises a water inlet, a water outlet and a sterilization lamp tube, wherein the water inlet is connected with the water outlet through a water pipe; and the sterilization lamp tube can emit light rays to the water pipe. Regardless of recycling of water for washing a glass substrate, the microbe removal device can sterilize the water for washing the substrate, and the sterilized water for washing the substrate contains a small number of microbes or even does not contain the microbes, so a washing effect of the substrate can be effectively improved. The substrate washing equipment can effectively improve the washing effect of the substrate by using the microbe removal device.
Description
Technical field
The utility model relates to technique of display, particularly a kind of removal of microorganisms device and substrate cleaning apparatus.
Background technology
In the manufacturing of display panel (such as liquid crystal panel, oled panel etc.), need to clean substrates such as glass substrates.In cleaning process, in order to reduce the waste of water resources, the water that is used for cleaning base plate in substrate cleaning apparatus can be recycled.Content of microorganisms in this water that causes recycling increases gradually.
At present, the electron production industry is mainly taked following three kinds of methods for the problem of microbial growth: the first, do not use recirculated water, directly with the disposable cleaning of pure water, the pure water usage quantity of this method is large, too waste, simultaneously also require factory that high water treatment capacity is arranged, increased product cost; The second, cleaned at regular intervals is used for cleaning the cleaning system of glass substrate, but the pipeline of cleaning system is complicated, and needs long shutdown operation, therefore cleans very inconvenience, and impact is produced, and wastes time and energy; The 3rd, regularly in the water that glass substrate is cleaned, add the chemical reagent with certain oxygenizement, with the removal microorganism, but this method degerming is incomplete, and the degerming validity period is short, has again microbial growth after for some time.
The utility model content
In view of this, main purpose of the present utility model is to provide a kind of removal of microorganisms device and substrate cleaning apparatus, is used for reducing the microorganism that substrate cleaning apparatus is used for the water of cleaning base plate, improves the cleaning performance of substrate.
For achieving the above object, the technical solution of the utility model is achieved in that
The utility model provides a kind of removal of microorganisms device on the one hand, and this device comprises water-in and water outlet, and is linked to each other by water pipe between water-in and the water outlet; Described device comprises that also the light that sends can shine the sterilizing lamp tube of water pipe.This device can be arranged in the substrate cleaning apparatus, for the microorganism in the water that reduces substrate cleaning apparatus.
Wherein, the material of described water pipe is quartzy, and the quantity of water pipe is one or more.
Wherein, when the quantity of water pipe is one, water pipe be shaped as the circuitous shape that comprises S or U-shaped.
Wherein, described sterilizing lamp tube is quartz burner, and the quantity of described sterilizing lamp tube is one or more.
Wherein, the installation site of described sterilizing lamp tube is: be close to or near the position of water pipe.
Wherein, the mounting means of described sterilizing lamp tube is: a sterilizing lamp tube is arranged in the middle of a plurality of water pipes, or a plurality of sterilizing lamp tube is looped around around the water pipe.
Wherein, this device also is provided with shell, and material is metal.
Further, the inwall of described shell is reflective shiny surface.
Further, described shell comprises a plurality of Split type structures, and each Split type structure relies on web member to be combined as integral body.
Wherein, described device also comprises controller, is used for the watt level of sterilizing lamp tube and the time of switch are controlled.
The utility model embodiment provides a kind of substrate cleaning apparatus on the other hand, and it comprises the above-mentioned arbitrary described removal of microorganisms device of power.
As seen, no matter whether the water of cleaning base plate is recycle, removal of microorganisms device of the present utility model can carry out sterilising treatment to the water of the substrates such as cleaning glass substrate in the substrate cleaning apparatus, the water of cleaning base plate does not even contain microorganism because containing few microorganism through sterilising treatment, therefore can effectively improve the cleaning performance of glass substrate.
Description of drawings
Fig. 1 is the removal of microorganisms structure drawing of device of the utility model embodiment;
Fig. 2 is the principle of work synoptic diagram of removal of microorganisms device in cleaning system of the utility model embodiment;
Description of reference numerals:
1, water-in; 2, water outlet; 3, water pipe; 4, sterilizing lamp tube; 5, shell; 6, controller; 7, support; 8, glass substrate; 9, water pipe; 11, collecting chamber; 12, case; 13, high-pressure pump; 14, normal pressure pump; 15, strainer; 16, washing nozzle; 17, transmission rolling shaft; 19, removal of microorganisms device.
Embodiment
Ultraviolet ray (UV) is considered to have the ability of good sterilization and disinfection in industrial application, therefore UV can be applied in the cleaning system (being substrate cleaning apparatus) that cleans the substrates such as glass substrate to remove microorganism; The O that dissolves in can also oxidizing water of UV simultaneously
2, make it to be ionized into O
3, and contain O
3Ozone water can remove the accompanying organism of glass baseplate surface, improved the cleanliness factor of glass substrate.
Based on above principle, can enter setting as shown in Figure 1.Referring to Fig. 1, Fig. 1 is the removal of microorganisms structure drawing of device of the utility model embodiment.Removal of microorganisms device 19 shown in Figure 1 comprises water-in 1 and water outlet 2, and linked to each other by water pipe 3 between water-in 1 and the water outlet 2, the water that cleans glass substrate enters removal of microorganisms device 19 from water-in 1, and the water pipe 3 of flowing through is rear from water outlet 2 outflows and for cleaning glass substrate.Between water-in 1 and the water outlet 2 sterilizing lamp tube 4 is installed, as near (as: be close to or close) of: water pipe 3 sterilizing lamp tube 4 being installed.Between water-in 1 and water outlet 2, the shell 5 that surrounds water pipe 3, sterilizing lamp tube 4 can also be installed.Can also mounting bracket 7 (as: support 7 is installed on the shell 5) on the removal of microorganisms device 19, with the installation of convenient microbe removal device 19.
Need to prove that the material of water pipe 3 can be quartz etc., the quantity of water pipe 3 can be for one or more.When the quantity of water pipe 3 was one, the shape of water pipe 3 can be designed as the circuitous shape of shape such as S, U etc., and is as far as possible large to increase the length of water pipe 3, to make the flow through water yield of water pipe 3 as far as possible, so that the sterilizing lamp light that sterilizing lamp tube 4 sends can shine water as much as possible.When the quantity of water pipe 3 when being a plurality of, can when obtaining higher sterilizing efficiency, provide higher flow velocity.
The light that sterilizing lamp tube 4 sends can be ultraviolet ray wait can killing microorganisms light, namely sterilizing lamp tube 4 is fluorescent tubes that quartz burner etc. can killing microorganisms.The quantity of sterilizing lamp tube 4 can be for one or more, and the quantity of sterilizing lamp tube 4 is more, and sterilising effect is better.The installation site of sterilizing lamp tube 4 can arbitrarily arrange, as long as the sterilizing lamp light that sterilizing lamp tube 4 sends can shine the water in the water pipe 3 of flowing through, be arranged in the middle of a plurality of water pipes 3 such as: sterilizing lamp tube 4, a plurality of sterilizing lamp tubes 4 are looped around around the water pipe 3 etc.
The material of shell 5 can be opaque metal etc., also can be transparent glass etc.
When the material of shell 5 was metal, inwall that can shell 5 was set to reflective shiny surface, in order to maximally utilise the sterilization light that sterilizing lamp tube 4 sends.And shell 5 can comprise a plurality of Split type structures, and each Split type structure can rely on the web members such as bolt, hinge to be combined as integral body, to make things convenient for dismounting and the installation of water pipe 3, sterilizing lamp tube 4.
In order to improve sterilising effect, can also carry out illumination control by 6 pairs of sterilizing lamp tubes of application controller 4, as: regulate the watt level of sterilizing lamp tube 4 and the time of switch so that when having better sterilising effect saves energy and prolong work-ing life of sterilizing lamp tube 4.
In actual applications, can also calculate the bore of sterilizing lamp tube 4 and the ratio of length according to the Best Times of sterilization and the velocimeter of water, suitable sterilizing lamp tube 4 is set accordingly.
By above technical description as seen, whether the water that no matter cleans glass substrate is recycle, the water that is used for cleaning glass substrate that the water-in 1 of the removal of microorganisms device 19 from Fig. 1 flows to, can be carried out sterilising treatment by sterilizing lamp tube 4 when flowing through water pipe 3, the water of finishing sterilising treatment then can and be used for cleaning glass substrate by water outlet 2 outflows.Therefore, the water that cleans glass substrate does not even contain microorganism because containing few microorganism through sterilising treatment, therefore can effectively improve the cleaning performance of glass substrate.
Present embodiment also provides a kind of substrate cleaning apparatus, and it has used any above-mentioned removal of microorganisms device.
When specifically using removal of microorganisms device 19 shown in Figure 1, removal of microorganisms device 19 can be arranged on any position for the cleaning system (being substrate cleaning apparatus) that cleans glass substrate, as: removal of microorganisms device 19 is arranged on as shown in Figure 2 position.Among Fig. 2, washing nozzle 16 in the cleaning system can (glass substrate 8 can be driven by transmission rolling shaft 17 to glass substrate 8 with DIW (deionized water) spray, also available brush etc. cleans glass substrate 8) on, the water that flows down from glass substrate 8 can be collected chamber 11 and collect and converge to the case 12 through water pipe 9.Water in the case 12 then can pass through water pipe 9, washing nozzle 16 (water may also can flow through during to washing nozzle 16 from case 12 to the common devices such as high-pressure pump 13, normal pressure pump 14, strainer 15) and be sprayed on the glass substrate 8, the water that flows down from glass substrate 8 can be collected chamber 11 and collect and again converge to the case 12 through water pipe 9, has so just formed the water cycle that is used for the cleaning glass substrate.
As seen from Figure 2, removal of microorganisms device 19 is arranged on the water pipe 9 between strainer 15 and the washing nozzle 16, and the water of the water pipe 9 that can guarantee like this to flow through is by removal of microorganisms device 19 effective sterilizings.As seen, in the situation with same sterilising effect, removal of microorganisms device 19 can also be arranged on as shown in FIG. A, B, any positions such as C, D, soon removal of microorganisms device 19 is arranged on the water pipe 9 for the cleaning system that cleans glass substrate 8.
In actual applications, can also with directly placing case 12 after the sealing of sterilizing lamp tube 4 usefulness transparent glasses, also can play certain sterilization functions.
In sum as seen, whether the water that no matter cleans glass substrate is recycle, removal of microorganisms device of the present utility model can carry out sterilising treatment to the water that cleans glass substrate, the water that cleans glass substrate does not even contain microorganism because containing few microorganism through sterilising treatment, therefore can effectively improve the cleaning performance of glass substrate.
The above is preferred embodiment of the present utility model only, is not be used to limiting protection domain of the present utility model.
Claims (11)
1. a removal of microorganisms device is characterized in that, this device comprises water-in and water outlet, and is linked to each other by water pipe between water-in and the water outlet; Described device comprises that also the light that sends can shine the sterilizing lamp tube of water pipe.
2. removal of microorganisms device according to claim 1 is characterized in that, the material of described water pipe is quartzy, and the quantity of water pipe is one or more.
3. removal of microorganisms device according to claim 2 is characterized in that, when the quantity of water pipe is one, water pipe be shaped as the circuitous shape that comprises S or U-shaped.
4. removal of microorganisms device according to claim 1 is characterized in that, described sterilizing lamp tube is quartz burner, and the quantity of described sterilizing lamp tube is one or more.
5. removal of microorganisms device according to claim 1 is characterized in that, the installation site of described sterilizing lamp tube is: be close to or near the position of water pipe.
6. removal of microorganisms device according to claim 5 is characterized in that, the mounting means of described sterilizing lamp tube is: a sterilizing lamp tube is arranged in the middle of a plurality of water pipes, or a plurality of sterilizing lamp tube is looped around around the water pipe.
7. removal of microorganisms device according to claim 1 is characterized in that, this device also is provided with shell, and material is metal.
8. removal of microorganisms device according to claim 7 is characterized in that, the inwall of described shell is reflective shiny surface.
9. removal of microorganisms device according to claim 7 is characterized in that, described shell comprises a plurality of Split type structures, and each Split type structure relies on web member to be combined as integral body.
10. according to claim 1 to 9 each described removal of microorganisms devices, it is characterized in that described device also comprises controller, be used for the watt level of sterilizing lamp tube and the time of switch are controlled.
11. a substrate cleaning apparatus is characterized in that, comprises each described removal of microorganisms device of claim 1 to 10.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220276843 CN202729846U (en) | 2012-06-12 | 2012-06-12 | Microbe removal device and substrate washing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220276843 CN202729846U (en) | 2012-06-12 | 2012-06-12 | Microbe removal device and substrate washing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202729846U true CN202729846U (en) | 2013-02-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220276843 Expired - Lifetime CN202729846U (en) | 2012-06-12 | 2012-06-12 | Microbe removal device and substrate washing equipment |
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| Country | Link |
|---|---|
| CN (1) | CN202729846U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104456455A (en) * | 2014-11-28 | 2015-03-25 | 合肥鑫晟光电科技有限公司 | Lamp device, substrate cleaning device and working method of substrate cleaning device |
| CN109107971A (en) * | 2014-09-30 | 2019-01-01 | Hoya株式会社 | The manufacturing method of glass substrate for disc |
| WO2019095383A1 (en) * | 2017-11-20 | 2019-05-23 | 深圳市柔宇科技有限公司 | Substrate cleaning device and method for cleaning substrate |
-
2012
- 2012-06-12 CN CN 201220276843 patent/CN202729846U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109107971A (en) * | 2014-09-30 | 2019-01-01 | Hoya株式会社 | The manufacturing method of glass substrate for disc |
| CN104456455A (en) * | 2014-11-28 | 2015-03-25 | 合肥鑫晟光电科技有限公司 | Lamp device, substrate cleaning device and working method of substrate cleaning device |
| CN104456455B (en) * | 2014-11-28 | 2018-05-29 | 合肥鑫晟光电科技有限公司 | A kind of lamp device, board cleaning equipment and its method of work |
| WO2019095383A1 (en) * | 2017-11-20 | 2019-05-23 | 深圳市柔宇科技有限公司 | Substrate cleaning device and method for cleaning substrate |
| CN110709355A (en) * | 2017-11-20 | 2020-01-17 | 深圳市柔宇科技有限公司 | Substrate cleaning apparatus and method of cleaning substrate |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY Effective date: 20150625 Owner name: JINGDONGFANG SCIENCE AND TECHNOLOGY GROUP CO., LTD Free format text: FORMER OWNER: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY CO., LTD. Effective date: 20150625 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20150625 Address after: 100015 Jiuxianqiao Road, Beijing, No. 10, No. Patentee after: BOE Technology Group Co., Ltd. Patentee after: Beijing BOE Photoelectricity Science & Technology Co., Ltd. Address before: 100176 Beijing city in Western Daxing District economic and Technological Development Zone, Road No. 8 Patentee before: Beijing BOE Photoelectricity Science & Technology Co., Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130213 |