CN202727122U - High-precision automatic type drilling machine based on ceramic wafer - Google Patents

High-precision automatic type drilling machine based on ceramic wafer Download PDF

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Publication number
CN202727122U
CN202727122U CN 201220373433 CN201220373433U CN202727122U CN 202727122 U CN202727122 U CN 202727122U CN 201220373433 CN201220373433 CN 201220373433 CN 201220373433 U CN201220373433 U CN 201220373433U CN 202727122 U CN202727122 U CN 202727122U
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China
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ceramic substrate
drilling machine
drilling
automatic type
precision automatic
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CN 201220373433
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Chinese (zh)
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周晓华
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CHENGDU MEINEW TECHNOLOGIES DEVELOPMENT Co Ltd
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CHENGDU MEINEW TECHNOLOGIES DEVELOPMENT Co Ltd
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Abstract

The utility model discloses a high-precision automatic type drilling machine based on a ceramic wafer. The high-precision automatic type drilling machine based on the ceramic wafer mainly solves the problems that low precision exists in positioning of the ceramic wafer and drilling of holes when an existing drilling machine processes the ceramic wafer. The drilling machine comprises a machine body, a drilling driving device, a pneumatic feeding sucker device, a feeding lifting gear and a conveyor belt, wherein the drilling driving device, the pneumatic feeding sucker device and the feeding lifting gear are respectively installed on the machine body, the conveyor belt is connected with a two-dimensional platform regulation device, and the drilling driving device is further connected with an optical imaging device. The high-precision automatic type drilling machine is rigorous in concept, ingenious in design and high in practical applicability. By adjusting and positioning the position of the ceramic wafer, collecting and processing images, and timely controlling and changing rotate speeds of cutting feed and cutting discharge when a drilling head drills and a high-speed electric machine, and high precision positioning and high precision process of drilling of the ceramic wafer are enabled to be achieved. Automatic operation is achieved in whole course without the need of manual intervention, and machining precision is high and deviation is small. Therefore, the high-precision automatic type drilling machine based on the ceramic wafer is high in practical value and in popularizing value.

Description

High Precision Automatic type drilling machine based on ceramic substrate
Technical field
The utility model relates to a kind of drilling machine, specifically, relates to a kind of High Precision Automatic type drilling machine based on ceramic substrate.
Background technology
Drilling operation to ceramic substrate is a procedure that must carry out in the production of ceramic substrate finished product.Want to make the precision of ceramic base film perforation high, make it meet predefined requirement fully, crucial adding man-hour to the location of ceramic substrate and Drilling operation operation, in Drilling operation operation in the past, usually adopt the mode of hand drill that ceramic substrate is processed, namely first according to the designing requirement location of ruling in the corresponding position of ceramic substrate, and then be put on the drilling machine, the control drill bit carries out Drilling operation in the position of line, this kind Drilling operation mode is more original, in the Drilling operation process, owing to relate to the factor of manual operation, so that the error of objective reality is inevitable, the position in the hole that comes outbreak out is compared with the position of designing requirement, error is larger, precision is quite low, cause many finished products to become waste product and be dropped, comparatively waste, this just needs the staff to have suitable rich experience could reduce error as much as possible, avoids waste, yet this is labor intensive and material resources not only, and operating efficiency is not high, more time-consuming, can't take full advantage of resource, in today of scientific and technological high speed development, the product that utilizes this kind mode to process obviously can not meet user's demand.
Therefore, how to make drilling machine when the processing ceramic substrate, its location and Drilling operation to substrate all can remain in the quite high accuracy rating, thereby further improve the machining accuracy of boring, so that the ceramic substrate of producing at last meets theoretical designing requirement, and satisfy the demand of user's " day by day fastidious " fully, just become the content of present numerous technical specialist's primary studies.
The utility model content
The purpose of this utility model is to provide a kind of High Precision Automatic type drilling machine based on ceramic substrate, mainly solves existing drilling machine when the processing ceramic substrate, and all there are the not high problem of precision in the location of substrate and boring.
To achieve these goals, the technical solution adopted in the utility model is as follows:
High Precision Automatic type drilling machine based on ceramic substrate, comprise the body that drilling driving device is installed, and be installed in drill bit on this drilling driving device, also be separately installed with Pneumatic charging Acetabula device, material loading lifting device on the described body and be connected with the conveyer belt of two-dimensional stage adjusting device, described drilling driving device also is connected with an optical imaging device.
If drilling machine in use breaks down when thereby unnecessary accident occurs, for fear of casualties, need to when breaking down, drilling machine carry out instant alarming, so that reminding user and drilling machine out of service also are provided with the induction alarm device on the described body.
Specifically, described optical imaging device comprises the supporting seat that is fixedly linked with drilling driving device and is installed on this supporting seat and the CCD camera of light source module is installed at the camera lens place.
Further, described drilling driving device comprises the pedestal that is installed on the body, be connected with this pedestal and the column of Z reference axis motion module is installed, and link to each other with Z reference axis motion module and control the high-speed electric expreess locomotive that is provided with the ring that tests the speed that it moves along Z-direction by this Z reference axis motion module; Described drill bit is installed on this ring that tests the speed, and described column then is fixedly linked with supporting seat.
In order to guarantee stability and the rigidity of drilling machine when working, optimize the performance of drilling machine aspect high-precision borehole processing, described pedestal and column are made by granite.
Specifically, described Pneumatic charging Acetabula device comprises hold-down support and the first stepping servo hybrid electric motor that is separately fixed on the body, link to each other with the rotating shaft of the first stepping servo hybrid electric motor and control its swing and establish the swing arm of suctorial material loading sucker by this first stepping servo hybrid electric motor by the first Timing Belt, and the first cylinder that is connected with this material loading sucker swing arm.
Again further, described material loading lifting device comprises the second stepping servo hybrid electric motor and the combination synchronizing wheel that is separately fixed on the body, and one end link to each other with this combination synchronizing wheel and the other end and is provided with the screw mandrel that the material loading objective table of baffle plate is connected, and the combination synchronizing wheel links to each other with the rotating shaft of the second stepping servo hybrid electric motor by the second Timing Belt and controls its rotation by this second stepping servo hybrid electric motor.
Further, described two-dimensional stage adjusting device comprises the one-dimensional platform frame that is connected with conveyer belt, be arranged on this one-dimensional platform frame inwall bottom and be fixed with the one-dimensional platform frame installing plate of XY reference axis motion module, and be installed on the XY reference axis motion module and control the loading stationary monitoring device that it moves along X-direction and Y direction respectively by this XY reference axis motion module.
Specifically, described loading stationary monitoring device comprises the processing objective table that is installed on the XY reference axis motion module and is provided with substrate slot, be separately positioned on grating ruler reading head on this processing objective table, fix to clamp piece and movable clamping piece, and the second cylinder that is connected with this movable clamping piece.
Compared with prior art, the utlity model has following beneficial effect:
(1) the utility model design is rigorous, design ingenious, compared to existing technology, more pay attention to detail, and practicality is high, the utility model is with after the PC controller is communicated with, by the PC controller respectively to drilling driving device, the Pneumatic charging Acetabula device, material loading lifting device and two-dimensional stage adjusting device are controlled, comprise point position control, speed control, the coordination linkage of multiaxis and direction control, just can realize ceramic substrate is carried out whole process accurately location and precision drilling processing by these controls, simultaneously can also carry out Real Time Monitoring to whole process, in time make adjustment and control for the various situations that occur, guarantee normal use of the present utility model, the utility model whole process is automation mechanized operation, do not need manual intervention, convenient and swift, saved to a great extent the man power and material, and take full advantage of resource, compared to prior art, the utility model is being realized qualitative leap aspect the precision control of Drilling operation, and aspect the Drilling operation of ceramic substrate, the precision of its boring can reach 0.1, the position of boring is compared with theoretical value, its error is no more than 20um, does not substantially have undesirable waste products, therefore, compared with prior art, the utlity model has significant progress.
(2) the utility model is provided with the induction alarm device, if drilling machine in use breaks down when thereby unnecessary accident occurs, induction and warning according to the induction alarm device, the utility model just can stop by the PC controller operation of drilling machine, reminding user simultaneously, thus the generation of accident avoided well.
(3) pedestal in the utility model and column are made by granite, and density is high, weight is large, can guarantee well stability and the rigidity of the utility model when work, provide further guarantee to the location of ceramic substrate and the precision of Drilling operation.
(4) the utility model adopts the position coordinates of grating ruler reading head monitoring ceramic substrate, and move by XY reference axis motion module controlled working objective table, just can adjust the position that is placed on the ceramic substrate in the processing objective table substrate slot, make itself and the theoretical position that requires accomplish to the full extent to coincide; In addition, the utility model adopts the CCD camera of 3,000,000 pixels that material object is carried out IMAQ, can realize the high-resolution to substrate, low distortion, the high-quality imaging, and pass through the PC controller to Image Segmentation Using, data fitting, the works for the treatment of such as CAD coupling, draw the center of circle accurate coordinates of ceramic substrate locating hole, obtain simultaneously position of form center, it is the initial point of machining coordinate, according to origin and fabrication design requirement, carry out machining path planning, just can obtain high-precision point coordinates to be processed, processing stage position adjustment and high-precision point coordinates to be processed have also been made place mat in extraordinary early stage for follow-up precision drilling processing.
(5) quantity of the drilling driving device in the utility model and two-dimensional stage adjusting device all can be set according to actual needs, thereby realize a plurality of ceramic substrates are positioned and Drilling operation simultaneously, in the situation of guaranteeing high accuracy processing, greatly shorten work flow, and improved the efficient of processing.
(6) the utility model just can be in boring procedure be controlled in real time and is changed the feed of drill bit, the rotating speed that goes out cutter and high-speed electric expreess locomotive by PC controller and Z reference axis motion module, thereby further improves machining accuracy.
(7) the utility model not only can be used for ceramic field, also can be used for the Drilling operation in other field, and coverage is wide, has quite widely application prospect, therefore, the utlity model has very high promotional value.
Description of drawings
Fig. 1 is overall structure schematic diagram of the present utility model.
Fig. 2 is the structural representation of drilling driving device.
Fig. 3 is the structural representation of optical imaging device.
Fig. 4 is the structural representation of Pneumatic charging Acetabula device.
Fig. 5 is the structural representation of material loading lifting device.
Fig. 6 is the internal structure schematic diagram of two-dimensional stage adjusting device.
Fig. 7 is workflow schematic block diagram of the present utility model.
Fig. 8 is the schematic block diagram of b numbering ceramic substrate when carrying out IMAQ under the CCD camera.
Fig. 9 is the ceramic substrate of a, two numberings of the b synchronous schematic block diagram during Drilling operation under two drilling driving devices.
Figure 10 is the ceramic substrate of a, b, three numberings of the c synchronous schematic block diagram during Drilling operation under three drilling driving devices.
In the above-mentioned accompanying drawing, the corresponding name of Reference numeral is called:
1-body, 2-pedestal, 3-column, 4-Z reference axis motion module, 5-conveyer belt, 6-high-speed electric expreess locomotive, 7-chuck, 8-drill bit, 9-supporting seat, 10-CCD camera, 11-light source module, 12-hold-down support, the 13-the first stepping servo hybrid electric motor, the 14-the first Timing Belt, the swing arm of 15-material loading sucker, 16-sucker, the 17-the first cylinder, the 18-the second stepping servo hybrid electric motor, the 19-the second Timing Belt, 20-combination synchronizing wheel, 21-screw mandrel, 22-baffle plate, 23-material loading objective table, 24-one-dimensional platform frame, 25-one-dimensional platform frame installing plate, 26-XY reference axis motion module, 27-processing objective table, 28-substrate slot, 29-grating ruler reading head, 30-fix to clamp piece, 31-movable clamping piece, the 32-the second cylinder, 33-induction alarm device, 34-breaking of rod photoelectric support, 35-Z axis stepping servo hybrid electric motor, 36-Z axis screw mandrel, 37-module dust cover, 38-X-axis stepping servo hybrid electric motor, 39-X-axis screw mandrel, 40-Y-axis stepping servo hybrid electric motor, 41-Y-axis screw mandrel, 42-PC controller.
The specific embodiment
The utility model is described in further detail below in conjunction with drawings and Examples, and embodiment of the present utility model includes but not limited to the following example.
Embodiment
Shown in Fig. 1~6, the utility model links to each other with PC controller 42, the whole course of work is by PC controller 42 controlling runs, and the utility model is made of body 1, drilling driving device, Pneumatic charging Acetabula device, material loading lifting device, two-dimensional stage adjusting device, optical imaging device, conveyer belt 5, drill bit 8 and induction alarm device 33.Drilling driving device, Pneumatic charging Acetabula device, material loading lifting device, conveyer belt 5, induction alarm device 33 are installed on the body 1, and optical imaging device and drilling driving device are fixedly linked, and the two-dimensional stage adjusting device then is connected on the conveyer belt 5.Material loading lifting device is used for placing the ceramic substrate that needs processing, the Pneumatic charging Acetabula device is used for this ceramic substrate is picked up and be placed into the two-dimensional stage adjusting device, cooperation by material loading lifting device and Pneumatic charging Acetabula device, can realize the automatic charging of ceramic substrate, do not need manually-operated, convenient and time-saving, and flow process is succinct, and the two-dimensional stage adjusting device is carried out image taking being sent to first under the drive of conveyer belt 5 under the optical imaging device, record the size characteristic of ceramic substrate to be processed, and this image transmission is for further processing in PC controller 42, handling rear conveyer belt 5 is sent under the drilling driving device ceramic substrate is carried out Drilling operation with being about to the two-dimensional stage adjusting device, 33 of induction alarm devices be used for drilling machine when work owing to mechanical disorder is carried out instant alarming, so that reminding user and drilling machine out of service, thereby improved usage safety performance of the present utility model.Drilling driving device in the utility model can arrange a plurality of according to actual needs, and as preferably, in this enforcement, this drilling driving device is made as three.
Specifically, described drilling driving device comprises the pedestal 2 that is installed on the body 1, be connected with this pedestal 2 and the column 3 of Z reference axis motion module 4 is installed, and link to each other with Z reference axis motion module 4 and be fixed on Z reference axis motion module 4 belows and by its high-speed electric expreess locomotive 6 that is provided with the ring that tests the speed that moves along Z-direction of these Z reference axis motion module 4 controls by chuck 7,8 on drill bit is installed on this ring that tests the speed, and this drill bit 8 can be changed flexibly according to the needs of reality boring size.On described column 3, also be provided with breaking of rod photoelectric support 34, the position that this breaking of rod photoelectric support 34 is installed is corresponding with the position at the ring place of testing the speed of high-speed electric expreess locomotive 6, and be provided with photoelectric sensor in the breaking of rod photoelectric support 34, for use in detecting drill bit 8 broken needle situation in use.Z reference axis motion module 4 in the utility model is same as the prior art, all mainly be made of Z axis stepping servo hybrid electric motor 35 and Z axis screw mandrel 36, Z axis stepping servo hybrid electric motor 35 control Z axis screw mandrels 36 drive respectively high-speed electric expreess locomotive 6 and drill bit 8 is mobile in Z-direction (being the above-below direction in the present embodiment).And in order to prevent that thereby ceramic substrate its Ceramic Dust that splashes when holing from falling into the use that Z reference axis motion module 4 affects equipment, so cover has module dust cover 37 in this Z reference axis motion module 4, as shown in Figure 2.In the utility model, in stability and the rigidity in when work, optimize the performance of drilling machine aspect high-precision borehole processing in order to guarantee drilling machine, the pedestal 2 here and column 3 are made by granite.Described optical imaging device then comprises supporting seat 9 and is installed on this supporting seat 9 and the CCD camera 10 of light source module 11 is installed at the camera lens place that column 3 is fixedly linked with supporting seat 9, as shown in Figure 3.
Described Pneumatic charging Acetabula device comprises hold-down support 12 and the first stepping servo hybrid electric motor 13 that is separately fixed on the body 1, link to each other with the rotating shaft of the first stepping servo hybrid electric motor 13 and by 13 its swings of control of this first stepping servo hybrid electric motor and be provided with the material loading sucker swing arm 15 of sucker 16 by the first Timing Belt 14, and the first cylinder 17 that is connected with this material loading sucker swing arm 15, the 17 control material loading sucker swing arms 15 of the first cylinder move up and down, as shown in Figure 4.Described material loading lifting device then comprises the second stepping servo hybrid electric motor 18 and the combination synchronizing wheel 20 that is separately fixed on the body 1, and one end link to each other with this combination synchronizing wheel 20 and the other end and is provided with the screw mandrel 21 that the material loading objective table 23 of baffle plate 22 is connected, and combination synchronizing wheel 20 links to each other with the rotating shaft of the second stepping servo hybrid electric motor 18 by the second Timing Belt 19 and control its rotations by this second stepping servo hybrid electric motor 18, combination synchronizing wheel 20 moves up and down by rotating drive screw mandrel 21, thereby realize being placed on the lifting of the ceramic substrate on the material loading objective table 23, and then make things convenient for material loading and sucker 16 that this ceramic substrate is picked up.
Described two-dimensional stage adjusting device comprises the one-dimensional platform frame 24 that is connected with conveyer belt 5, be arranged on this one-dimensional platform frame 24 inwalls bottom and be fixed with the one-dimensional platform frame installing plate 25 of XY reference axis motion module 26, and be installed in the loading stationary monitoring device on the XY reference axis motion module 26; This loading stationary monitoring device comprises the processing objective table 27 that is installed on the XY reference axis motion module 26 and is provided with substrate slot 28, be separately positioned on grating ruler reading head 29 on this processing objective table 27, fix to clamp piece 30 and movable clamping piece 31, and the second cylinder 32 that is connected with this movable clamping piece 31.Fix to clamp piece 30 and movable clamping piece 31 all be used to the ceramic substrate that is fixedly clamped, and the movement by the second cylinder 32 control movable clamping pieces 31, just can well ceramic substrate be fixedly clamped or unclamp, not only make things convenient for 10 pairs of these ceramic substrates of CCD camera to carry out photographing process and follow-up Drilling operation, also can adapt to the processing of the ceramic substrate of different size simultaneously.Whether grating ruler reading head 29 is used for monitoring the position coordinates of processing objective table 27 consistent with processing request, position coordinates result according to grating ruler reading head 29 monitorings moves along X-direction and Y direction respectively by XY reference axis motion module 26 control loading stationary monitoring devices, thereby the position to ceramic substrate is adjusted, improve positioning accuracy, to meet processing request.XY reference axis motion module 26 in the utility model is also same as the prior art, all mainly consisted of by X-axis stepping servo hybrid electric motor 38, X-axis screw mandrel 39, Y-axis stepping servo hybrid electric motor 40 and Y-axis screw mandrel 41, X-axis stepping servo hybrid electric motor 38 control X-axis screw mandrels 39 drive processing objective table 27 and move toward X-direction, and Y-axis stepping servo hybrid electric motor 40 control Y-axis screw mandrels 41 drive processing objective table 27 and move toward Y direction.Simultaneously in order to prevent Ceramic Dust to the interference of XY reference axis motion module 26, also overlapping at this XY reference axis motion module 26 has module dust cover 37, and the internal structure of two-dimensional stage adjusting device as shown in Figure 6.The quantity of XY reference axis motion module 26 and loading stationary monitoring device also can be set according to actual needs, and as preferably, in this enforcement, XY reference axis motion module 26 and loading stationary monitoring device all are made as three.
The below is described in detail the course of work of the present utility model.
During use, the utility model is communicated with PC controller 42.Power-on then will be carried out following flow process, as shown in Figure 7:
Material loading: (1) second stepping servo hybrid electric motor 18 rotates by the second Timing Belt 19 control combination synchronizing wheels 20, and the combination synchronizing wheel 20 of this rotation also drives simultaneously screw mandrel 21 and moves up and down and control 23 declines of material loading objective table; (2) utilize conveyer belt or similar conveying device that ceramic substrate is delivered in the material loading objective table 23, at this moment, again provide power by the second stepping servo hybrid electric motor 18 and utilize screw mandrel 21 control material loading objective tables 23 to rise, in the rise process, because material loading objective table 23 is provided with baffle plate 22, can not drop so can guarantee ceramic substrate; (3) first stepping servo hybrid electric motors 13 are rocked to the ceramic substrate position by the 14 control material loading sucker swing arms 15 of the first Timing Belt, utilize sucker 16 that this ceramic substrate is picked up and again swing by material loading sucker swing arm 15 this ceramic substrate is moved to the top that processes objective table 27, descend by the 17 control material loading sucker swing arms 15 of the first cylinder, thereby this ceramic substrate is put in the substrate slot 28 of processing objective table 27, mode of operation according to this step (3) is respectively a with numbering successively, b, three ceramic substrates of c are put in the substrate slot 28 of three processing objective tables 27.
Object processing stand coordinate setting: after (1) ceramic substrate is put into substrate slot 28, utilize the second cylinder 32 control movable clamping pieces 31 to move and touch this ceramic substrate, by movable clamping piece 31 and fix to clamp piece 30 ceramic substrate is fixedly clamped; (2) real time position of 29 pairs of ceramic substrates of grating ruler reading head is monitored and monitoring information is fed back in the PC controller 42 and processes, result out after, XY reference axis motion module 26 is controlled this ceramic substrate according to result and is moved and arrive assigned address in X-direction and Y direction respectively; (3) start conveyer belt 5, the processing objective table 27 that this conveyer belt 5 at first will be loaded with the ceramic substrate that is numbered a is sent under the CCD camera 10, the CCD camera begins three marginal points of this ceramic substrate are carried out IMAQ, in order to strengthen the quality of IMAQ, open light source module 11, light filling is carried out in shooting; (4) CCD camera 10 take complete after, with image transmission to PC controller 42,42 pairs of these Image Segmentation Usings that collect of PC controller, data fitting, the works for the treatment of such as CAD coupling, and according to rim detection and the match of locating hole, obtain the center of circle accurate coordinates of ceramic substrate locating hole, diagonal intersection point to four central points, perpendicular bisector intersection point etc. carries out statistical disposition, obtain position of form center, it is the initial point of machining coordinate, simultaneously according to origin and fabrication design requirement, carry out machining path planning, thereby just obtained high-precision point coordinates to be processed.
The object Drilling operation: (1) is for ease of describing, we are numbered respectively A, B, C with three drilling driving devices in the present embodiment, after obtaining a numbering ceramic substrate point coordinates to be processed, conveyer belt 5 is sent to this ceramic substrate on the position of A numbering drilling driving device appointment at random; (2) 4 startups of Z reference axis motion module and drive high-speed electric expreess locomotive 6 move (being that above-below direction moves) along Z axis, high-speed electric expreess locomotive 6 self also rotates simultaneously, like this, drill bit 8 is just under the control of Z reference axis motion module 4 and high-speed electric expreess locomotive 6, move up and down and rotate simultaneously, thereby a numbering ceramic substrate is holed; (3) a numbering ceramic substrate is after the boring of A numbering drilling driving device is complete, conveyer belt 5 continues its transmission, when being sent to half position of A numbering drilling driving device and B numbering drilling equipment spacing distance, conveyer belt 5 stops transmission, this moment, b numbering ceramic substrate just in time was sent to the coordinate setting of CCD camera 10 belows repetition object processing stand, as shown in Figure 8; (4) b numbering ceramic substrate location complete after, conveyer belt 5 continues to transmit, when a numbering ceramic substrate arrives the position of B numbering drilling driving device appointment, b numbering ceramic substrate also just in time arrives the position of A numbering drilling driving device appointment, at this moment, just as described in the step (2), A numbering drilling driving device carries out Drilling operation to b numbering ceramic substrate, B numbering drilling driving device also carries out Drilling operation to a numbering ceramic substrate simultaneously, as shown in Figure 9; (5) a numbering ceramic substrate is complete in the boring of B numbering drilling driving device, b numbering ceramic substrate is also after the boring of A numbering drilling driving device is complete simultaneously, conveyer belt 5 continues the two transmission, same, be sent to half position that B numbering drilling driving device and C number the drilling equipment spacing distance a being numbered ceramic substrate, and when b numbering ceramic substrate also is in half position of A numbering drilling driving device and B numbering drilling equipment spacing distance, conveyer belt 5 stops transmission, and this moment, c numbering ceramic substrate just in time was sent to the coordinate setting of CCD camera 10 belows repetition object processing stand; (6) c numbering ceramic substrate location complete after, conveyer belt 5 continues to transmit, arrive the position of C numbering drilling driving device appointment when a numbering ceramic substrate, b numbering ceramic substrate just in time arrives the position of B numbering drilling driving device appointment, c numbering ceramic substrate also just in time arrives A numbering drilling driving device, at this moment, just as described in the step (2), A numbering drilling driving device carries out Drilling operation to c numbering ceramic substrate, B numbering drilling driving device carries out Drilling operation to b numbering ceramic substrate simultaneously, C numbering drilling driving device also carries out Drilling operation to a numbering ceramic substrate, as shown in figure 10; (7) after the completion of processing, transmit successively again, until C numbering drilling driving device carries out Drilling operation to c numbering ceramic substrate.
Recheck: after three ceramic substrate completion of processing, conveyer belt 5 is returned to respectively the CCD camera with the three to carry out image taking collecting work again for 10 times and is transported in the PC controller 42 processing, so that whether the ceramic substrate of check processing is qualified.
By above-mentioned four flow processs, the utility model has just been finished the work of whole location drilling processing, and according to actual needs, can increase respectively the quantity of drilling driving device and two-dimensional stage adjusting device, thereby locate and Drilling operation when realizing a plurality of ceramic substrate.In addition, through check, find to utilize the utility model that ceramic substrate is carried out Drilling operation, the precision of its boring can reach 0.1, and the position of boring is compared with theoretical value, and its error is no more than 20um, does not substantially have undesirable waste products.
The utility model is based on cleverly design, advanced innovative idea, and accurate location and the precision drilling processing of ceramic substrate have been guaranteed in the control of whole-course automation, greatly satisfied user's demand, compared to traditional hand drill or general automatic drilling machine, no matter the utility model is aspect working (machining) efficiency, machining accuracy, the utilization of resources, cost control and unexpected control, has all improved a more than class.And it is worth mentioning that, the utility model not only can be used in ceramic field, equally also can be used in other field, for different processing requests, more bit change 8 just can be realized the workpiece of different field different materials is carried out Drilling operation, aspect Drilling operation, the utlity model has far-reaching influence and great meaning, therefore, the utlity model has substantial characteristics and significant progressive.
According to above-described embodiment, just can realize well the utility model.

Claims (9)

1. based on the High Precision Automatic type drilling machine of ceramic substrate, comprise the body (1) that drilling driving device is installed, and be installed in drill bit (8) on this drilling driving device, it is characterized in that: also be separately installed with Pneumatic charging Acetabula device, material loading lifting device on the described body (1) and be connected with the conveyer belt (5) of two-dimensional stage adjusting device, described drilling driving device also is connected with an optical imaging device.
2. the High Precision Automatic type drilling machine based on ceramic substrate according to claim 1 is characterized in that: also be provided with induction alarm device (33) on the described body (1).
3. the High Precision Automatic type drilling machine based on ceramic substrate according to claim 1 and 2 is characterized in that: described optical imaging device comprises the supporting seat (9) that is fixedly linked with drilling driving device and is installed in this supporting seat (9) upper and the CCD camera (10) of light source module (11) is installed at the camera lens place.
4. the High Precision Automatic type drilling machine based on ceramic substrate according to claim 3, it is characterized in that: described drilling driving device comprises the pedestal (2) that is installed on the body (1), be connected with this pedestal (2) and the column (3) of Z reference axis motion module (4) is installed, and link to each other with Z reference axis motion module (4) and control the high-speed electric expreess locomotive (6) that is provided with the ring that tests the speed that it moves along Z-direction by this Z reference axis motion module (4); Described drill bit (8) is installed on this ring that tests the speed, and described column (3) then is fixedly linked with supporting seat (9).
5. the High Precision Automatic type drilling machine based on ceramic substrate according to claim 4, it is characterized in that: described pedestal (2) and column (3) are made by granite.
6. the High Precision Automatic type drilling machine based on ceramic substrate according to claim 5, it is characterized in that: described Pneumatic charging Acetabula device comprises hold-down support (12) and the first stepping servo hybrid electric motor (13) that is separately fixed on the body (1), link to each other with the rotating shaft of the first stepping servo hybrid electric motor (13) and control its swing and be provided with the material loading sucker swing arm (15) of sucker (16) by this first stepping servo hybrid electric motor (13) by the first Timing Belt (14), and the first cylinder (17) that is connected with this material loading sucker swing arm (15).
7. the High Precision Automatic type drilling machine based on ceramic substrate according to claim 6, it is characterized in that: described material loading lifting device comprises the second stepping servo hybrid electric motor (18) and the combination synchronizing wheel (20) that is separately fixed on the body (1), and one end link to each other with this combination synchronizing wheel (20) and the other end and is provided with the screw mandrel (21) that the material loading objective table (23) of baffle plate (22) is connected, and combination synchronizing wheel (20) links to each other with the rotating shaft of the second stepping servo hybrid electric motor (18) by the second Timing Belt (19) and controls its rotation by this second stepping servo hybrid electric motor (18).
8. the High Precision Automatic type drilling machine based on ceramic substrate according to claim 7, it is characterized in that: described two-dimensional stage adjusting device comprises the one-dimensional platform frame (24) that is connected with conveyer belt (5), be arranged on this one-dimensional platform frame (24) inwall bottom and be fixed with the one-dimensional platform frame installing plate (25) of XY reference axis motion module (26), and it is upper and control the loading stationary monitoring device that it moves along X-direction and Y direction respectively by this XY reference axis motion module (26) to be installed in XY reference axis motion module (26).
9. the High Precision Automatic type drilling machine based on ceramic substrate according to claim 8, it is characterized in that: described loading stationary monitoring device comprises the processing objective table (27) that is installed in XY reference axis motion module (26) upward and is provided with substrate slot (28), be separately positioned on grating ruler reading head (29) on this processing objective table (27), fix to clamp piece (30) and movable clamping piece (31), and the second cylinder (32) that is connected with this movable clamping piece (31).
CN 201220373433 2012-07-31 2012-07-31 High-precision automatic type drilling machine based on ceramic wafer Withdrawn - After Issue CN202727122U (en)

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Application Number Priority Date Filing Date Title
CN 201220373433 CN202727122U (en) 2012-07-31 2012-07-31 High-precision automatic type drilling machine based on ceramic wafer

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102756429A (en) * 2012-07-31 2012-10-31 成都川美新技术开发有限公司 Ceramic-substrate-based high-precision automatic drilling machine
CN105538518A (en) * 2016-02-19 2016-05-04 李谋遵 Intelligent stone cutting robot and cutting method thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102756429A (en) * 2012-07-31 2012-10-31 成都川美新技术开发有限公司 Ceramic-substrate-based high-precision automatic drilling machine
CN102756429B (en) * 2012-07-31 2015-04-08 成都川美新技术开发有限公司 Ceramic-substrate-based high-precision automatic drilling machine
CN105538518A (en) * 2016-02-19 2016-05-04 李谋遵 Intelligent stone cutting robot and cutting method thereof
CN105538518B (en) * 2016-02-19 2017-05-03 李谋遵 Cutting method applying intelligent stone cutting robot

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