CN202712140U - Novel anti-drop boat support - Google Patents
Novel anti-drop boat support Download PDFInfo
- Publication number
- CN202712140U CN202712140U CN 201220214283 CN201220214283U CN202712140U CN 202712140 U CN202712140 U CN 202712140U CN 201220214283 CN201220214283 CN 201220214283 CN 201220214283 U CN201220214283 U CN 201220214283U CN 202712140 U CN202712140 U CN 202712140U
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- CN
- China
- Prior art keywords
- boat
- holder
- face
- boat support
- novel anti
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model relates to a novel anti-drop boat support, which comprises a rectangular boat support bottom surface, wherein four connection columns are arranged above the rectangular boat support bottom surface; an arc-shaped boat support use surface is arranged on the connection columns; both ends of the arc-shaped boat support use surface are provided with blocking plates with openings. The novel anti-drop boat support is simple in structure and can be prevented from dropping out.
Description
Technical field
The utility model relates to a kind of placing device, is specifically related to a kind of boat holder.
Background technology
Now, in the production process of semiconductor chip (mainly being quartz chip), diffusing procedure need to use quartz boat or silicon carbide boat advances, the frock clamp of coming out of the stove, the storeroom of general quartz boat or silicon carbide boat is in quartz ampoule or carborundum tube or the control box, the material of used boat holder is stainless steel in the transmittance process of quartz boat or silicon carbide boat, like this can cause in quartz boat or silicon carbide boat transmittance process, causing the contamination of quartz boat or silicon carbide boat metal ion, thereby cause the contamination of system, the electrical quantity of product is made in impact, also has the problem that is difficult for taking.The use face of some quartz boat carriers on the market also is rectangular surfaces, so in use, can produce the phenomenon that drops, thereby affect product quality.
Summary of the invention
Goal of the invention: the purpose of this utility model is in order to overcome deficiency of the prior art, to provide a kind of simple in structure, the novel boat holder of Anti-fall.
Technical scheme: in order to solve the problems of the technologies described above, a kind of Novel anti-falling boat described in the utility model holder, it comprises rectangle boat backing face, be provided with four joint pins on described rectangle boat backing face top, be provided with the holder of arc boat at described joint pin and use face, use the face two ends to be provided with the baffle plate of opening in described arc boat holder.
It all is to adopt quartzy material that face and baffle plate are used in described rectangle boat backing face, joint pin, the holder of arc boat.
Beneficial effect: the utility model compared with prior art, its remarkable advantage is: the utility model boat holder structure is reasonable in design, practical, but Anti-fall, the material of using is quartz, be convenient to clean, can farthest reduce quartz boat or silicon carbide boat and transmit or depositing the contamination that causes in the process.
Description of drawings
Fig. 1 is structural representation of the present utility model.
Wherein:
1, rectangle boat backing face; 2, joint pin; 3, face is used in the holder of arc boat; 4, baffle plate.
Specific embodiment
Below in conjunction with drawings and Examples the utility model is further described.
As shown in Figure 1, a kind of Novel anti-falling boat described in the utility model holder, it comprises rectangle boat backing face 1, be provided with four joint pins 2 on described rectangle boat backing face 1 top, be provided with the holder of arc boat at described joint pin 2 and use face 3, use face 3 two ends to be provided with the baffle plate 4 of opening in described arc boat holder; It all is to adopt quartzy material that face 3 and baffle plate 4 are used in described rectangle boat backing face 1, joint pin 2, the holder of arc boat.The utility model reasonable in design, practical, but Anti-fall, the material of using is quartz, is convenient to clean, and can farthest reduce quartz boat or silicon carbide boat and transmit or depositing the contamination that causes in the process.The utility model does not relate to partly all, and the prior art that maybe can adopt same as the prior art is realized.
Claims (2)
1. Novel anti-falling boat holder, it is characterized in that: it comprises rectangle boat backing face (1), be provided with four joint pins (2) on described rectangle boat backing face (1) top, be provided with the holder of arc boat at described joint pin (2) and use face (3), use face (3) two ends to be provided with the baffle plate (4) of opening in described arc boat holder.
2. Novel anti-falling boat according to claim 1 holder is characterized in that: it all is to adopt quartzy material that face (3) and baffle plate (4) are used in described rectangle boat backing face (1), joint pin (2), the holder of arc boat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220214283 CN202712140U (en) | 2012-05-14 | 2012-05-14 | Novel anti-drop boat support |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220214283 CN202712140U (en) | 2012-05-14 | 2012-05-14 | Novel anti-drop boat support |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202712140U true CN202712140U (en) | 2013-01-30 |
Family
ID=47592417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220214283 Expired - Fee Related CN202712140U (en) | 2012-05-14 | 2012-05-14 | Novel anti-drop boat support |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202712140U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103426803A (en) * | 2012-05-14 | 2013-12-04 | 太仓子午电气有限公司 | Novel anti-falling boat support |
-
2012
- 2012-05-14 CN CN 201220214283 patent/CN202712140U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103426803A (en) * | 2012-05-14 | 2013-12-04 | 太仓子午电气有限公司 | Novel anti-falling boat support |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130130 Termination date: 20130514 |