CN202705565U - 气体浓度控制装置 - Google Patents
气体浓度控制装置 Download PDFInfo
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- CN202705565U CN202705565U CN 201220320628 CN201220320628U CN202705565U CN 202705565 U CN202705565 U CN 202705565U CN 201220320628 CN201220320628 CN 201220320628 CN 201220320628 U CN201220320628 U CN 201220320628U CN 202705565 U CN202705565 U CN 202705565U
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CN 201220320628 CN202705565U (zh) | 2012-07-03 | 2012-07-03 | 气体浓度控制装置 |
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CN 201220320628 CN202705565U (zh) | 2012-07-03 | 2012-07-03 | 气体浓度控制装置 |
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CN202705565U true CN202705565U (zh) | 2013-01-30 |
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CN 201220320628 Expired - Lifetime CN202705565U (zh) | 2012-07-03 | 2012-07-03 | 气体浓度控制装置 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102766903A (zh) * | 2012-07-03 | 2012-11-07 | 北京七星华创电子股份有限公司 | 气体浓度控制装置、***和方法 |
CN111101111A (zh) * | 2019-12-09 | 2020-05-05 | 金瑞泓微电子(衢州)有限公司 | 一种可稳定硅源浓度的自动控制***及其控制方法 |
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2012
- 2012-07-03 CN CN 201220320628 patent/CN202705565U/zh not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102766903A (zh) * | 2012-07-03 | 2012-11-07 | 北京七星华创电子股份有限公司 | 气体浓度控制装置、***和方法 |
CN111101111A (zh) * | 2019-12-09 | 2020-05-05 | 金瑞泓微电子(衢州)有限公司 | 一种可稳定硅源浓度的自动控制***及其控制方法 |
CN111101111B (zh) * | 2019-12-09 | 2022-05-27 | 金瑞泓微电子(衢州)有限公司 | 一种可稳定硅源浓度的自动控制***及其控制方法 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder |
Address after: 100015 Jiuxianqiao Chaoyang District, East Beijing Road, building M2, floor 1, No. 2 Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100015 Jiuxianqiao Chaoyang District, East Beijing Road, building M2, floor 1, No. 2 Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
|
CP01 | Change in the name or title of a patent holder | ||
TR01 | Transfer of patent right |
Effective date of registration: 20180323 Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 100015 Jiuxianqiao Chaoyang District, East Beijing Road, building M2, floor 1, No. 2 Patentee before: North China Science and technology group Limited by Share Ltd. |
|
TR01 | Transfer of patent right | ||
CX01 | Expiry of patent term |
Granted publication date: 20130130 |
|
CX01 | Expiry of patent term |