CN202682853U - Chemical liquid debubbling device - Google Patents
Chemical liquid debubbling device Download PDFInfo
- Publication number
- CN202682853U CN202682853U CN 201220238762 CN201220238762U CN202682853U CN 202682853 U CN202682853 U CN 202682853U CN 201220238762 CN201220238762 CN 201220238762 CN 201220238762 U CN201220238762 U CN 201220238762U CN 202682853 U CN202682853 U CN 202682853U
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- chemical liquids
- level sensor
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Abstract
The utility model relates to a chemical liquid debubbling device, relating to a liquid debubbling device. The chemical liquid debubbling device comprises a liquid barrel, a debubbling container, a liquid feeding inlet, an air outlet, a liquid outlet, and a liquid discharging outlet, wherein the liquid feeding inlet, the air outlet and the liquid outlet are arranged at the top end of the debubbling container, the liquid discharging outlet is arranged at the bottom end of the debubbling container, the liquid barrel is hermetically connected with the liquid feeding inlet by a liquid feeding pipe, the chemical liquid debubbling device is characterized in that a pneumatic pump and a pneumatic diaphragm liquid feeding valve which are driven by compressed air are sequentially arranged on the liquid feeding pipe, an air outlet pipe is arranged on the air outlet, the liquid outlet is hermetically connected with a wet-process processing machine by a liquid outlet pipe, and a liquid discharging pipe is arranged on the liquid discharging outlet. The chemical liquid debubbling device has the beneficial effects of solving the bubble problem of chemical liquid in the pipe, and being simple to control, convenient and reliable, and convenient to overhaul.
Description
Technical field
The utility model relates to a kind of chemical liquids bulb apparatus that degass, be specifically related to a kind of satisfy the industries such as semiconductor, solar energy and LED/LCD carry the chemical liquids that requires and the improve chemical liquids online flow monitoring precision bulb apparatus that degass without the bubble chemical liquids.
Background technology
In the existing industrial manufacture process, particularly interpolation mainly is to pass through air driven pump to the industries such as semiconductor, solar energy and LED/LCD to chemical liquids, the related valve pipe fitting directly adds in the cell body that needs the liquid wet processing machine, but owing to do not remove bubble in liquid, affected the precision of online flowmeter, thereby so that actual liquid volume added produces deviation, the change in concentration of chemicals is so that related process can not be guaranteed.
The utility model content
The technical problem that the utility model solves be to provide a kind of satisfy the industries such as semiconductor, solar energy and LED/LCD carry the chemical liquids that requires and the improve chemical liquids online flow monitoring precision bulb apparatus that degass without the bubble chemical liquids.
The technical problem that the utility model solves realizes by the following technical solutions:
A kind of chemical liquids bulb apparatus that degass, comprise the liquid bucket, the bubble container that degass, be located at described bubble inlet, exhaust outlet, the liquid outlet of container head and the leakage fluid dram of being located at its bottom of degassing, described liquid bucket is tightly connected by input duct and described inlet, it is characterized in that: on described input duct, also be provided with successively air driven pump and pneumatic diaphragm liquid feed valve by compressed air-driven, be provided with a discharge duct at described exhaust outlet, described liquid outlet is connected with wet-treating secret envelope by the fluid pipeline, is provided with a Drainage pipe at described leakage fluid dram.
Also be provided with a high liquid level sensor on the described bubble container outer surface top of degassing; Also be provided with a low liquid level sensor in the described bubble container outer surface bottom of degassing; On described fluid pipeline, also be provided with a pneumatic diaphragm liquid valve; On described discharge duct, also be provided with a pneumatic diaphragm air bleeding valve; On described Drainage pipe, also be provided with a tapping valve; Described air driven pump is a corrosion-resistant air driven pump, and described high liquid level sensor is a corrosion-resistant high liquid level sensor; Described low liquid level sensor is a corrosion-resistant low liquid level sensor.
The beneficial effect that the utlity model has is: solved by the utility model that chemical liquids contains alveolate problem in the pipeline, and control simple, convenient and reliable, maintenance is convenient.
Description of drawings
Fig. 1 is the utility model: the degas overall structure schematic diagram of bulb apparatus of a kind of chemical liquids.
The specific embodiment
For technological means, creation characteristic that the utility model is realized, reach purpose and effect is easy to understand, below in conjunction with concrete diagram, further set forth the utility model.
Embodiment: with reference to Fig. 1, a kind of chemical liquids bulb apparatus that degass, comprise liquid bucket 1, the bubble container 4 that degass, be located at degas inlet 41, exhaust outlet 42, the liquid outlet 43 on bubble container 4 tops and the leakage fluid dram 44 of being located at its bottom, liquid bucket 1 is tightly connected by input duct 31 and inlet 41, on input duct 31, be provided with successively air driven pump 2 and pneumatic diaphragm liquid feed valve 3 by compressed air-driven, be provided with discharge duct 51 at exhaust outlet 42, liquid outlet 43 is connected with wet-treating secret envelope by fluid pipeline 61, is provided with Drainage pipe 71 at leakage fluid dram 44.
Bubble container 4 outer surface tops are provided with a high liquid level sensor 8 degassing; Bubble container 4 outer surfaces bottom is provided with a low liquid level sensor 9 degassing; On fluid pipeline 61, also be provided with a pneumatic diaphragm liquid valve 6; On discharge duct 51, also be provided with a pneumatic diaphragm air bleeding valve 5; On Drainage pipe 71, also be provided with a tapping valve 7; Air driven pump 2 is a corrosion-resistant air driven pump, and high liquid level sensor 8 is a corrosion-resistant high liquid level sensor, and low liquid level sensor 9 is a corrosion-resistant low liquid level sensor.
In the liquid bucket 1 chemical liquids is housed, by air driven pump 2 chemical liquids is released in liquid bucket 1, be input in the bubble container 4 that degass through the liquid feed valve 3 of opening, air bleeding valve 5 is opened exhaust simultaneously, and liquid valve 6 and tapping valve 7 keep closing.The chemical liquids that is input to this moment in the bubble container 4 that degass may contain a large amount of gases, and particularly 1 this segment pipe contains more gas from liquid feed valve 3 to the liquid bucket after liquid bucket 1 new the replacing.After chemical liquids entered the bubble container 4 that degass, because the effect of buoyancy, bubble can float to airtight bubble container 4 tops of degassing automatically, enters discharge duct 51 by the air bleeding valve 5 of opening, and below chemical liquids stays, realized gas-liquid separation.Air driven pump 2 continuous firings, after bubble container 4 interior liquid levels reach the position of high liquid level sensor 8 until degas, air bleeding valve 5 is closed, and liquid valve 6 is opened according to the need liquid signal of cell body in the wet processing machine, chemical liquids can be inputed in the cell body of wet processing machine like this.Along with chemical liquids constantly is transferred, also can gather a large amount of gases in the airtight bubble container 4 that degass, so that the bubble container 4 interior liquid levels that degas are down to low liquid level sensor 9 positions, this moment, air bleeding valve 5 was opened exhaust, liquid valve 6 is closed.Chemical liquids is accumulated in the bubble container 4 interior meetings of degassing, and when liquid level increases to the position of high liquid level sensor 8, this moment, air bleeding valve 5 was closed, and liquid valve 6 is opened, and continues chemical liquids is delivered in the cell body of wet processing machine.When liquid level is down to low liquid level sensor 9 position again in the bubble container that degass, again open air bleeding valve 5 and close liquid valve 6, move in circles with this, until wet processing machine inside groove body fluid body bulk reaches technological requirement, board can be given air driven pump 2 stop signals, and air driven pump 2 is stopping infusion.And the waste liquid of staying in the bubble container 4 that degass can be discharged in the Drainage pipe 71 by tapping valve 7.By above control, realized bubble-free chemical liquids conveying.
More than show and described basic principle of the present utility model and principal character and advantage of the present utility model.The technical staff of the industry should understand; the utility model is not restricted to the described embodiments; that describes in above-described embodiment and the specification just illustrates principle of the present utility model; under the prerequisite that does not break away from the utility model spirit and scope; the utility model also has various changes and modifications, and these changes and improvements all fall in claimed the utility model scope.The claimed scope of the utility model is defined by appending claims and equivalent thereof.
Claims (7)
1. chemical liquids bulb apparatus that degass, comprise the liquid bucket, the bubble container that degass, be located at described bubble inlet, exhaust outlet, the liquid outlet of container head and the leakage fluid dram of being located at its bottom of degassing, described liquid bucket is tightly connected by input duct and described inlet, it is characterized in that: on described input duct, also be provided with successively air driven pump and pneumatic diaphragm liquid feed valve by compressed air-driven, be provided with a discharge duct at described exhaust outlet, described liquid outlet is connected with wet-treating secret envelope by the fluid pipeline, is provided with a Drainage pipe at described leakage fluid dram.
2. the chemical liquids according to claim 1 bulb apparatus that degass is characterized in that: also be provided with a high liquid level sensor on the described bubble container outer surface top of degassing;
Also be provided with a low liquid level sensor in the described bubble container outer surface bottom of degassing.
3. the chemical liquids according to claim 1 bulb apparatus that degass is characterized in that: also be provided with a pneumatic diaphragm air bleeding valve on described discharge duct.
4. the chemical liquids according to claim 1 bulb apparatus that degass is characterized in that: also be provided with a pneumatic diaphragm liquid valve on described fluid pipeline.
5. the chemical liquids according to claim 1 bulb apparatus that degass is characterized in that: also be provided with a tapping valve on described Drainage pipe.
6. the chemical liquids according to claim 1 bulb apparatus that degass, it is characterized in that: described air driven pump is a corrosion-resistant air driven pump.
7. the chemical liquids according to claim 1 and 2 bulb apparatus that degass, it is characterized in that: described high liquid level sensor is a corrosion-resistant high liquid level sensor; Described low liquid level sensor is a corrosion-resistant low liquid level sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220238762 CN202682853U (en) | 2012-05-24 | 2012-05-24 | Chemical liquid debubbling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220238762 CN202682853U (en) | 2012-05-24 | 2012-05-24 | Chemical liquid debubbling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202682853U true CN202682853U (en) | 2013-01-23 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220238762 Expired - Fee Related CN202682853U (en) | 2012-05-24 | 2012-05-24 | Chemical liquid debubbling device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202682853U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103245765A (en) * | 2013-04-24 | 2013-08-14 | 北京南风科创应用技术有限公司 | Ocean parameter measuring system |
| CN105126718A (en) * | 2015-07-23 | 2015-12-09 | 广州达意隆包装机械股份有限公司 | Blending device and blending method of H2O2 |
-
2012
- 2012-05-24 CN CN 201220238762 patent/CN202682853U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103245765A (en) * | 2013-04-24 | 2013-08-14 | 北京南风科创应用技术有限公司 | Ocean parameter measuring system |
| CN105126718A (en) * | 2015-07-23 | 2015-12-09 | 广州达意隆包装机械股份有限公司 | Blending device and blending method of H2O2 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130123 Termination date: 20170524 |