CN202656076U - Polishing piece - Google Patents

Polishing piece Download PDF

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Publication number
CN202656076U
CN202656076U CN 201220352607 CN201220352607U CN202656076U CN 202656076 U CN202656076 U CN 202656076U CN 201220352607 CN201220352607 CN 201220352607 CN 201220352607 U CN201220352607 U CN 201220352607U CN 202656076 U CN202656076 U CN 202656076U
Authority
CN
China
Prior art keywords
silicon wafer
polished silicon
workspace
along
pinch zones
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 201220352607
Other languages
Chinese (zh)
Inventor
潘国强
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LIYANG JIYAN ABRASIVES CO Ltd
Original Assignee
LIYANG JIYAN ABRASIVES CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LIYANG JIYAN ABRASIVES CO Ltd filed Critical LIYANG JIYAN ABRASIVES CO Ltd
Priority to CN 201220352607 priority Critical patent/CN202656076U/en
Application granted granted Critical
Publication of CN202656076U publication Critical patent/CN202656076U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

The utility model provides a polishing piece with long service life, comprising a clamping area and a working area, wherein the clamping area is positioned at the central part of the polishing piece and extends along the radial direction of the polishing piece; the periphery of the clamping area is connected with the inner circle of the working area; and the working area extends outwards along the radial direction of the polishing piece, and simultaneously extends towards one side of the polishing piece along the axis of the polishing piece.

Description

Polished silicon wafer
Technical field
The utility model relates to polished silicon wafer, specifically, is a kind of grid polished silicon wafer, is used for the places such as steel surface rust cleaning, polishing, polishing, has high life, good toughness, good permeability characteristics.
Background technology
Traditional grid polished silicon wafer referring to Fig. 1,2, comprises pinch zones 1 and workspace 2; Pinch zones is positioned at the central part of polished silicon wafer, along the radially extension of polished silicon wafer, the center of pinch zones has connecting hole 11.The workspace extends radially outwardly along polished silicon wafer.Link to each other by a conical surface between the periphery of pinch zones and the inner ring of workspace.Traditional grid polished silicon wafer because of the workspace be one with the perpendicular plane of the axis of polished silicon wafer, in use, the whole end face 3 of its workspace all contacts with processed product, causes the consumption that is worn very soon of its working face, so that the service life during the product polishing operation is very short.
Summary of the invention
The purpose of this utility model provides a kind of polished silicon wafer of long service life.
This polished silicon wafer comprises pinch zones and workspace; Pinch zones is positioned at the central part of polished silicon wafer, along the radially extension of polished silicon wafer; The periphery of pinch zones links to each other with the inner ring of workspace; The workspace is along the extending radially outwardly of polished silicon wafer the time, and one side is extended along the polished silicon wafer axis to polished silicon wafer.
The beneficial effects of the utility model: because workspace of the present utility model is along the extending radially outwardly of polished silicon wafer the time, one side is extended along the polished silicon wafer axis to polished silicon wafer, that is to say, the workspace is a rake (rather than with the perpendicular plane of the axis of polished silicon wafer), so it in use, the whole end face that is not the workspace contacts with work piece, and just smaller portions of workspace contact with work piece, so long service life.
Above-mentioned polished silicon wafer, workspace and polished silicon wafer radially between angle be 10 °-80 °.In the constant situation of polishing condition, workspace and polished silicon wafer radially between angle when larger, the grinding force that the utility model is subject in use increases gradually, improve the service life of product gradually.
Above-mentioned polished silicon wafer, workspace are curved surfaces; Perhaps the workspace is a conical surface; Perhaps along polished silicon wafer radially from inside to outside, the workspace is to comprise at least two continuous conical surfaces, links to each other at the bottom of the cone of the vertex of a cone that is positioned at the inboard conical surface and the conical surface in the outside adjacent with it; Link to each other with the periphery of pinch zones at the bottom of the cone of the most inboard conical surface.
Description of drawings
Fig. 1 is the front view (profile) of traditional grid polished silicon wafer.
Fig. 2 is the upward view of Fig. 1.
Fig. 3 is the front view (profile) of the grid polished silicon wafer of embodiment 1.
Fig. 4 is the front view (profile) of the grid polished silicon wafer of embodiment 2.
Fig. 5 is the upward view of Fig. 4.
The specific embodiment
Embodiment 1:
Referring to grid polished silicon wafer shown in Figure 3, comprise pinch zones 1 and workspace 2.Pinch zones is positioned at the central part of polished silicon wafer, along the radially extension of polished silicon wafer, the center of pinch zones has connecting hole 11.The workspace is a level and smooth curved surface, and it is along the extending radially outwardly of polished silicon wafer the time, and one side is extended along the polished silicon wafer axis to polished silicon wafer.The periphery of pinch zones links to each other by the circular arc R transition with the inner ring of workspace.The outermost tangent line of workspace and polished silicon wafer radially between angle V be 80 °.During use, the end face of its workspace 2 (anchor ring) 3 contacts and polishes with work piece.
Embodiment 2:
Referring to the grid polished silicon wafer shown in Fig. 4,5, comprise pinch zones 1 and workspace 2.Pinch zones is positioned at the central part of polished silicon wafer, along the radially extension of polished silicon wafer, the center of pinch zones has connecting hole 11.The workspace mainly comprises two continuous conical surfaces 21,22, links to each other by circular arc R at the bottom of the cone of the vertex of a cone that is positioned at the inboard conical surface 21 and the conical surface 22 in the outside adjacent with it; Link to each other by circular arc R with the periphery of pinch zones at the bottom of the cone of the conical surface 21.The conical surface 22 and polished silicon wafer radially between angle V be 80 °.During use, the end face of its workspace 2 (anchor ring) 3 contacts and polishes with work piece.
Above-described embodiment 1 and 2 two grid polished silicon wafer of embodiment manufacturing process are: first the glass fiber mesh sheet is applied upper resin liquid uniformly, and then be stained with uniformly abrasive material, be placed on pressed sizing in the mould again, then baking hardening gets final product in shaper.In the constant situation of polishing condition, workspace and polished silicon wafer radially between angle V when larger, the grinding force that the utility model is subject in use increases gradually, improve the service life of product gradually.

Claims (5)

1. polished silicon wafer comprises pinch zones and workspace; Pinch zones is positioned at the central part of polished silicon wafer, along the radially extension of polished silicon wafer; The periphery of pinch zones links to each other with the inner ring of workspace; It is characterized in that, the workspace is along the extending radially outwardly of polished silicon wafer the time, and one side is extended along the polished silicon wafer axis to polished silicon wafer.
2. polished silicon wafer as claimed in claim 1 is characterized in that: workspace and polished silicon wafer radially between angle be 10 °-80 °.
3. polished silicon wafer as claimed in claim 2, it is characterized in that: the workspace is a curved surface.
4. polished silicon wafer as claimed in claim 2, it is characterized in that: the workspace is a conical surface.
5. polished silicon wafer as claimed in claim 2 is characterized in that: along polished silicon wafer radially from inside to outside, the workspace is to comprise at least two continuous conical surfaces, links to each other at the bottom of the cone of the vertex of a cone that is positioned at the inboard conical surface and the conical surface in the outside adjacent with it; Link to each other with the periphery of pinch zones at the bottom of the cone of the most inboard conical surface.
CN 201220352607 2012-07-20 2012-07-20 Polishing piece Expired - Fee Related CN202656076U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201220352607 CN202656076U (en) 2012-07-20 2012-07-20 Polishing piece

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201220352607 CN202656076U (en) 2012-07-20 2012-07-20 Polishing piece

Publications (1)

Publication Number Publication Date
CN202656076U true CN202656076U (en) 2013-01-09

Family

ID=47451009

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 201220352607 Expired - Fee Related CN202656076U (en) 2012-07-20 2012-07-20 Polishing piece

Country Status (1)

Country Link
CN (1) CN202656076U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108312081A (en) * 2018-04-13 2018-07-24 中国工程物理研究院激光聚变研究中心 Cyclic spring polishing tool
CN111975661A (en) * 2020-08-06 2020-11-24 临沂三超磨具有限公司 Abrasive cloth wheel and manufacturing method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108312081A (en) * 2018-04-13 2018-07-24 中国工程物理研究院激光聚变研究中心 Cyclic spring polishing tool
CN111975661A (en) * 2020-08-06 2020-11-24 临沂三超磨具有限公司 Abrasive cloth wheel and manufacturing method thereof

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20130109

Termination date: 20150720

EXPY Termination of patent right or utility model