CN202638248U - Tail gas treatment device - Google Patents
Tail gas treatment device Download PDFInfo
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- CN202638248U CN202638248U CN 201220200382 CN201220200382U CN202638248U CN 202638248 U CN202638248 U CN 202638248U CN 201220200382 CN201220200382 CN 201220200382 CN 201220200382 U CN201220200382 U CN 201220200382U CN 202638248 U CN202638248 U CN 202638248U
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- exhaust gas
- temperature heating
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Abstract
The utility model discloses a tail gas treatment device. The tail gas treatment device comprises a high temperature heating barrel, a dry-wet isolation device, a sewage water collecting box and a filter chamber. The high temperature heating barrel used for heating is provided an outlet and at least two gas inlets, positions of the gas inlets are all higher than the position of the outlet, and the gas inlet end of the dry-wet isolation device is connected with the outlet of the high temperature heating barrel and is provided with a side opening and a first sprayer, wherein shielding gas enters through the side opening, and neutralizing liquid enters through the first sprayer. The sewage water collecting box used for collecting sewage water is connected with the gas outlet end of the dry-wet isolation device, the filter chamber connected with the gas outlet end of the dry-wet isolation device is used for filtering smoke dust, and the filter chamber is provided with a gas outlet used for exhausting gas. The tail gas treatment device enables special gas tail gas generated during technological processes to be decomposed into new gas and solid particles, all the new gas and the solid particles are nonhazardous substances for human bodies, all the generated gas are components of the air, so that processed gas can be directly exhausted and can not pollute the air, and namely pollution to the environment is reduced.
Description
Technical field
The utility model relates to the vent gas treatment technical field, particularly a kind of exhaust gas processing device.
Background technology
Along with the day by day scarcity of the traditional energies such as oil and coal, the green energy resources such as solar energy, heat energy and wind energy are continually developed and are utilized, and have produced a series of novel industry thereupon, such as industries such as photovoltaic, optical fiber, LED and polysilicons.But in above-mentioned industry production process, can produce the tail gas of the special gas with harmfulness.The main component of this tail gas is PH
3(phosphine), B
2H
6(borine), CH
4(methane), NF
3Gases such as (Nitrogen trifluorides), wherein most of gas is inflammable or combustion-supporting toxic gas.
At present, such industry does not have practicable processing method to the special gas tail gas that produces in the production process, usually adopts the mode of directly discharging.Yet, the PH in the constituent of above-mentioned special gas tail gas
3, B
2H
6And NF
3Be toxic gas, larger to the harm of human body, also there is simultaneously inflammable or combustion-supporting performance, if its direct discharging meeting is caused great pollution to air, along with the continuous enhancing of people's environmental consciousness, this way obviously is worthless.
Therefore, how special gas is decomposed, discharging is the present technical issues that need to address of those skilled in the art to the pollution that air causes to avoid directly.
The utility model content
The purpose of this utility model provides a kind of exhaust gas processing device, special gas is decomposed, with the pollution of avoiding directly discharging that air is caused.
For solving the problems of the technologies described above, the utility model provides following technical scheme:
A kind of exhaust gas processing device comprises:
Be provided with outlet and at least two air inlets, be used for the high-temperature heating cylinder of heating, the position of described air inlet all is higher than the position of described outlet;
The dried wet spacer assembly that inlet end links to each other with the outlet of described high-temperature heating cylinder, described inlet end are provided with the side mouth that enters for protection gas and the first sprayer that enters for neutralizer;
Link to each other with the described exhaust end of doing wet spacer assembly, be used for collecting the dirty water collecting tank of sewage;
Link to each other with the described exhaust end of doing wet spacer assembly, be used for the filter chamber of filtering smoke, described filter chamber is provided with the exhaust outlet for emission gases.
Preferably, in the above-mentioned exhaust gas processing device, described high-temperature heating cylinder is double-deck high-temperature heating cylinder, and the centre is provided with thermal insulation layer.
Preferably, in the above-mentioned exhaust gas processing device, be provided with heating tube in the described high-temperature heating cylinder.
Preferably, in the above-mentioned exhaust gas processing device, comprise also being arranged on described high-temperature heating cylinder inside that be used for changing the deflector of described air inlet wind direction, described deflector is separately positioned on described air inlet below, and each described deflector is mutually close gradually downwards.
Preferably, in the above-mentioned exhaust gas processing device, the number of described side mouth is two, and symmetrical.
Preferably, in the above-mentioned exhaust gas processing device, the downward-sloping inside that extend into described dried wet spacer assembly of described the first sprayer, the number of described the first sprayer is two, and symmetrical.
Preferably, in the above-mentioned exhaust gas processing device, described dried wet spacer assembly is downward diminishing cone device.
Preferably, in the above-mentioned exhaust gas processing device, the described exhaust end of doing wet spacer assembly links to each other with described dirty water collecting tank by the bottom blow-down mouth of tube connector respectively, and the side exhaust outlet by described tube connector links to each other with described filter chamber; Described tube connector is provided with the second sprayer.
Preferably, in the above-mentioned exhaust gas processing device, be provided with the close pleat formula cartridge filter that spins glutinous polyester material for the long fibre of Chalk-dust filtering in the described filter chamber.
Preferably, in the above-mentioned exhaust gas processing device, also comprise the box body wall group that is arranged on the described exhaust gas processing device outside, described box body wall group comprises top box body wall and side box body wall, wherein, described top box body wall is provided with the air inlet pipe that links to each other with described air inlet and the blast pipe that links to each other with described exhaust outlet, is provided with guidance panel and/or access door on the described side box body wall.
Can find out that from above-mentioned technical scheme the utility model provides a kind of exhaust gas processing device, comprise the high-temperature heating cylinder for heating, dried wet spacer assembly, sewage collection equipment and filter chamber.Wherein, the high-temperature heating cylinder is provided with outlet and at least two air inlets, and the position of air inlet all is higher than the position of outlet; The inlet end of doing wet spacer assembly links to each other with the outlet of high-temperature heating cylinder, and inlet end is provided with the side mouth that enters for protection gas and the first sprayer that enters for neutralizer; Dirty water collecting tank links to each other with the exhaust end of doing wet spacer assembly; The filter chamber links to each other with the exhaust end of doing wet spacer assembly, and the filter chamber is provided with the exhaust outlet for emission gases.
During work, in order to prevent that tail gas from reacting, the special gas tail gas that reacts to each other is entered into the high-temperature heating cylinder by different air inlets, and decomposition reaction at high temperature occurs, the gas that generates and solid particle enter into from outlet and do wet spacer assembly, by the stirring of protection gas, with cooling and the absorption of neutralizer, make solid particle formation drop and under Action of Gravity Field, arrive dirty water collecting tank; And the gas that generates enters into the filter chamber at exhaust end, and in the filter chamber to residual filtrating smoke dust, the gas that obtains cleaning is finally discharged from exhaust outlet, said process is over to the processing of special gas tail gas and discharge process.By the above-mentioned course of work as can be known, the special gas tail gas that generates in the technical process is decomposed into new gas and solid particle, and be the material to the human body nonhazardous, the gas that generates is the constituent of air, therefore direct discharging can not pollute air to gas after treatment, namely effectively reduces the pollution to environment.
Description of drawings
The structural representation of the exhaust gas processing device that Fig. 1 provides for the utility model embodiment;
The structural representation of the high-temperature heating cylinder that Fig. 2 provides for the utility model embodiment;
The structural representation of doing wet spacer assembly that Fig. 3 provides for the utility model embodiment;
The structural representation of the filter chamber that Fig. 4 provides for the utility model embodiment.
Wherein,
1 is that air inlet pipe, 2 is that air inlet, 3 is that box body wall group, 4 is that deflector, 5 is that high-temperature heating cylinder, 6 is that heating tube, 7 is that side mouth, 8 is that the first sprayer, 9 is that the dried spacer assembly, 10 that wets is that the second sprayer, 11 is that dirty water collecting tank, 12 is that drive unit, 13 is that blast pipe, 14 is that cartridge filter, 15 is that filter chamber, 16 is that tube connector, 17 is that overflow pipe, 18 is that blow-off pipe, 19 is porous plate.
The specific embodiment
The utility model core provides a kind of exhaust gas processing device, special gas is decomposed, with the pollution of avoiding directly discharging that air is caused.
In order to make those skilled in the art person understand better the utility model scheme, the utility model is described in further detail below in conjunction with drawings and embodiments.
Please refer to Fig. 1-4, the utility model embodiment discloses a kind of exhaust gas processing device, comprises being provided with outlet and at least two air inlets 2, is used for the high-temperature heating cylinder 5 of heating, and the position of air inlet 2 all is higher than the position of outlet; The dried wet spacer assembly 9 that inlet end links to each other with the outlet of high-temperature heating cylinder 5, inlet end are provided with the side mouth 7 that enters for protection gas and the first sprayer 8 that enters for neutralizer; Link to each other with the exhaust end of doing wet spacer assembly 9, be used for collecting the dirty water collecting tank 11 of sewage; Link to each other with the exhaust end of doing wet spacer assembly 9, be used for the filter chamber 15 of filtering smoke, filter chamber 15 is provided with the exhaust outlet for emission gases.
During work, in order to prevent that tail gas from reacting, the special gas tail gas that reacts to each other is entered into high-temperature heating cylinder 5 by different air inlet 2, the technical staff can be divided into alkanes gas one class according to different tail gas situations, to be divided into the gas of alkanes reaction another kind ofly, or the gas that will mutually react is divided into different classes.Decomposition reaction at high temperature occurs in special gas, generates new gas and solid particle.The gas that generates in this device and solid particle enter into from outlet and do wet spacer assembly 9, by the stirring of protection gas, with cooling and the absorption of neutralizer, make solid particle formation drop and arrive dirty water collecting tank 11 under Action of Gravity Field; And the gas that generates enters into filter chamber 15 at exhaust end, and 15 interior to residual filtrating smoke dust in the filter chamber, and the gas that obtains cleaning is finally discharged from exhaust outlet, and said process is over to the processing of special gas tail gas and discharge process.
By the above-mentioned course of work as can be known, the special gas tail gas that generates in the technical process is decomposed elementary gas and solid particle, and be the material to the human body nonhazardous, the elementary gas that generates is the constituent of air, therefore direct discharging can not pollute air to gas after treatment, namely effectively reduces the pollution to environment.
In specific embodiment, maintain in the constant scope in order to guarantee high-temperature heating cylinder 5 interior temperature, prevent the inside and extraneous generation heat exchange of high-temperature heating cylinder 5, high-temperature heating cylinder 5 is set to double-deck high-temperature heating cylinder, and is provided with thermal insulation layer in the centre.Because the decomposition of the special gas tail gas in the high-temperature heating cylinder 5 need to be kept certain temperature, if high-temperature heating cylinder 5 heat insulation effects are poor, just need to be to high-temperature heating cylinder 5 continuous heatings, thus cause the waste of the energy.
The mode of heating to high-temperature heating cylinder 5 that provides among the utility model embodiment is at the high-temperature heating cylinder 5 interior heating tubes 6 that arrange, and according to different needs, heating tube 6 can be set to electric heating tube or far-infrared heating tube.Because the cost of electric heating tube is lower, preferably can use electric heater for heating, in the present embodiment with 6 vertical being arranged in the high-temperature heating cylinder 5 of three heating tubes.In the specific works process, the difference according to the composition of the special gas tail gas of processing is heated to different temperature with the temperature in the high-temperature heating cylinder 5.When being the gas such as phosphine, borine, methane and Nitrogen trifluoride for the composition of special gas tail gas, the temperature in the high-temperature heating cylinder 5 can be heated to about 800 degree, can guarantee that above-mentioned gas all is decomposed.
On technique scheme, in order to improve the thermal decomposition efficient of the special gas tail gas in the high-temperature heating cylinder 5, be provided with for the deflector 4 that changes air inlet 2 wind directions in the inside of high-temperature heating cylinder 5, above-mentioned deflector 4 is separately positioned on the below of air inlet 2, and each deflector 4 is close gradually downwards.Special gas tail gas enters into high-temperature heating cylinder 5 inside from air inlet, then bump with deflector 4 and the direction of motion of special gas tail gas is changed, because each deflector 4 is mutually close gradually downwards, namely the special gas tail gas that enters of various inlet mouth 2 forms the hurricane type air inlet.The hurricane type air inlet can make the reaction of special gas tail gas evenly, has improved thermal decomposition efficient.
Special gas tail gas after the decomposition comprises gas and the solid particle of new production, for the gas that guarantees to discharge cleans, the gas of new production need to be separated with solid particle.Therefore be provided with and do wet spacer assembly 9, and be provided with the side mouth 7 that enters for protection gas and the first sprayer 8 that enters for neutralizer at dried wet spacer assembly 9.According to the composition of different special gas tail gas, can select different protection gas and neutralizer.In this specific embodiment; protect gas to be set to nitrogen; neutralizer is set to water; for solid particle that the 5 interior decomposition of high-temperature heating cylinder form is afterwards fully contacted with neutralizer in doing wet spacer assembly 9, namely utilize the stirring of protection gas, make solid particle be neutralized to greatest extent liquid and absorb; cleannes with the gas that guarantees follow-up discharging; preferably among the embodiment, be provided with two side mouths 7, and symmetrical.
The first sprayer 8 that provides in the present embodiment has two purposes, and the first is carried out absorptive collection to the solid particle that decomposes rear generation, and another purpose is that the high-temperature gas and the solid particle that generate afterwards in the 5 interior decomposition of high-temperature heating cylinder are lowered the temperature.In order to make neutralizer even in the 9 interior fillings of separating dry space from moist space device, in the specific embodiment the first sprayer 8 is set to downward-slopingly extend into the inside of doing wet spacer assembly 9, and the number of this first sprayer 8 is two, be symmetrically distributed on the separating dry space from moist space device 9.Can make the neutralizer that sprays from the first sprayer 8 form uniform eddy current shape liquid film in separating dry space from moist space device 9 inside according to above-mentioned layout, effectively increased the contact area of neutralizer and solid particle, improve the vent gas treatment effect, better improved cooling-down effect simultaneously.
Mix near the neutralizer of periphery and the neutralizer of close mid portion for the ease of doing wet spacer assembly 9, in the specific embodiment, will do wet spacer assembly 9 and be set to downward diminishing cone device.
In order to guarantee finally directly to be discharged into the cleannes of airborne gas, need to carry out different collections with suspension liquid to the gas after processing through separating dry space from moist space device 9, therefore, the exhaust end of doing wet spacer assembly 9 is linked to each other with filter chamber 15 with dirty water collecting tank 11 respectively.In the specific embodiment, the bottom blow-down mouth of exhaust end by tube connector 16 linked to each other with dirty water collecting tank 11, link to each other with filter chamber 15 by the side exhaust outlet.During work, solid particle discharges downwards according to action of gravitation, arrive dirty water collecting tank 11, be provided with the overflow pipe 17 that prevents overflow on the sidewall of this dirty water collecting tank 11, on dirty water collecting tank 11, also be provided with the blow-off pipe 18 of discharging for the sewage that will collect simultaneously; The gas that is gathered in the upper end arrives in the filter chamber 15 by the side exhaust outlet.In order further to reduce the content of the solid particle in the gas, be provided with the second sprayer 10 at tube connector 16, be used for the collection to solid particle, be understandable that the composition according to different special gas tail gas, select different liquid, to reach the solid particle of generation and the neutralization of gas.Use hydraulic pump to provide power as drive unit 12 for the work of the first sprayer 8 and the second sprayer 10 in the present embodiment.
Be provided with the close pleat formula cartridge filter 14 that spins glutinous polyester material for the long fibre of Chalk-dust filtering in the disclosed filter chamber 15 of present embodiment.Even using neutralizer to collect to solid particle also is difficult to ultrafine dust is collected, because spinning the filtering accuracy of glutinous polyester material, long fibre can reach 0.2 μ m, and filter efficiency can reach 99.99%, therefore the 15 interior long fibres that arrange spin the cartridge filter 14 that sticks polyester material in the filter chamber in the specific embodiment, to finish the filtration to ultrafine dust.For the ease of safeguarding and change cartridge filter 14, in the present embodiment cartridge filter 14 is set to close pleat formula cartridge filter, and porous plate 19 is set above cartridge filter 14, so that cartridge filter 14 is safeguarded or changed, effectively reduce production cost.It will be appreciated by persons skilled in the art that the cartridge filter 14 that different filter mediums and different structure also can be set, and all in protection domain.
When reality is used, need to provide a working space to this exhaust gas processing device, Given this, the exhaust gas processing device that provides among the utility model embodiment also comprises the box body wall group 3 that is arranged on this exhaust gas processing device outside.Wherein, above-mentioned box body wall group 3 comprises and is provided with the air inlet pipe 1 that links to each other with air inlet 2 and the top box body wall of the blast pipe 13 that links to each other with exhaust outlet and is provided with guidance panel and access door side box body wall.In the actual production, a top box body wall and four side box body walls are set, and can distinguish setting operation panel or access door on four box body walls, preferably, at the side box body wall that is positioned at the front touching type operation interface is set, on other three side box body walls, access door is set all.For quick connection, to all be connected by connecing fast dish between air inlet pipe 1 and the air inlet 2 and between blast pipe 13 and the exhaust outlet, the outlet of high-temperature heating cylinder 5 can also be connected by quick terminal pad with the inlet end of doing wet spacer assembly 9, the two ends of tube connector 16 are all linked to each other with filter chamber 15 with the dried exhaust end that wets spacer assembly 9 by quick terminal pad.
Each embodiment adopts the mode of going forward one by one to describe in this specification, and what each embodiment stressed is and the difference of other embodiment that identical similar part is mutually referring to getting final product between each embodiment.
To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can realize or use the utility model.Multiple modification to these embodiment will be apparent concerning those skilled in the art, and General Principle as defined herein can in the situation that does not break away from spirit or scope of the present utility model, realize in other embodiments.Therefore, the utility model will can not be restricted to these embodiment shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.
Claims (10)
1. an exhaust gas processing device is characterized in that, comprising:
Be provided with outlet and at least two air inlets (2), be used for the high-temperature heating cylinder (5) of heating, the position of described air inlet (2) all is higher than the position of described outlet;
The dried wet spacer assembly (9) that inlet end links to each other with the outlet of described high-temperature heating cylinder (5), described inlet end are provided with the side mouth (7) that enters for protection gas and the first sprayer (8) that enters for neutralizer;
Link to each other with the described exhaust end of doing wet spacer assembly (9), be used for collecting the dirty water collecting tank (11) of sewage;
Link to each other with the described exhaust end of doing wet spacer assembly (9), be used for the filter chamber (15) of filtering smoke, described filter chamber (15) are provided with the exhaust outlet for emission gases.
2. exhaust gas processing device according to claim 1 is characterized in that, described high-temperature heating cylinder (5) is double-deck high-temperature heating cylinder, and the centre is provided with thermal insulation layer.
3. exhaust gas processing device according to claim 1 is characterized in that, is provided with heating tube (6) in the described high-temperature heating cylinder (5).
4. exhaust gas processing device according to claim 1, it is characterized in that, also comprise and be arranged on described high-temperature heating cylinder (5) inside, be used for changing the deflector (4) of described air inlet (2) wind direction, described deflector (4) is separately positioned on described air inlet (2) below, and each described deflector (4) is mutually close gradually downwards.
5. exhaust gas processing device according to claim 1 is characterized in that, the number of described side mouth (7) is two, and symmetrical.
6. exhaust gas processing device according to claim 1 is characterized in that, the downward-sloping inside that extend into described dried wet spacer assembly (9) of described the first sprayer (8), and the number of described the first sprayer (8) is two, and symmetrical.
7. exhaust gas processing device according to claim 1 is characterized in that, described dried wet spacer assembly (9) is downward diminishing cone device.
8. exhaust gas processing device according to claim 1, it is characterized in that, the described exhaust end of doing wet spacer assembly (9) links to each other with described dirty water collecting tank (11) by the bottom blow-down mouth of tube connector (16) respectively, and the side exhaust outlet by described tube connector (16) links to each other with described filter chamber (15); Described tube connector (16) is provided with the second sprayer (10).
9. each described exhaust gas processing device is characterized in that according to claim 1-8, is provided with the close pleat formula cartridge filter (14) that spins glutinous polyester material for the long fibre of Chalk-dust filtering in described filter chamber (15).
10. exhaust gas processing device according to claim 9, it is characterized in that, also comprise the box body wall group (3) that is arranged on the described exhaust gas processing device outside, described box body wall group (3) comprises top box body wall and side box body wall, wherein, described top box body wall is provided with the air inlet pipe (1) that links to each other with described air inlet (2) and the blast pipe (13) that links to each other with described exhaust outlet, is provided with guidance panel and/or access door on the described side box body wall.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220200382 CN202638248U (en) | 2012-05-04 | 2012-05-04 | Tail gas treatment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220200382 CN202638248U (en) | 2012-05-04 | 2012-05-04 | Tail gas treatment device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202638248U true CN202638248U (en) | 2013-01-02 |
Family
ID=47407430
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220200382 Expired - Fee Related CN202638248U (en) | 2012-05-04 | 2012-05-04 | Tail gas treatment device |
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| Country | Link |
|---|---|
| CN (1) | CN202638248U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104455722A (en) * | 2014-11-20 | 2015-03-25 | 成都市第三建筑工程公司 | Installing construction method for semiconductor manufacture procedure gas conveying pipelines |
| CN112316700A (en) * | 2020-11-25 | 2021-02-05 | 中国航天空气动力技术研究院 | Electric arc wind tunnel ablation tail gas treatment device |
-
2012
- 2012-05-04 CN CN 201220200382 patent/CN202638248U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104455722A (en) * | 2014-11-20 | 2015-03-25 | 成都市第三建筑工程公司 | Installing construction method for semiconductor manufacture procedure gas conveying pipelines |
| CN112316700A (en) * | 2020-11-25 | 2021-02-05 | 中国航天空气动力技术研究院 | Electric arc wind tunnel ablation tail gas treatment device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP02 | Change in the address of a patent holder |
Address after: No. 170 purple sea road, Minhang District, Shanghai Patentee after: Shanghai PNC Process Systems Co., Ltd. Address before: 200241 03A 1, Ting 1 building, 555 Dongchuan Road, Minhang District, Shanghai. Patentee before: Shanghai PNC Process Systems Co., Ltd. |
|
| CP02 | Change in the address of a patent holder | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130102 Termination date: 20200504 |
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| CF01 | Termination of patent right due to non-payment of annual fee |